Process monitoring

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CPC
H01L21/67253

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67253Process monitoring

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for monitoring edge bevel removal area in semi...
- Patent number 12,169,179
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chao-Tung Wu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor device and oxygen removal method thereof
- Patent number 12,165,883
- Issue date Dec 10, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Min Zuo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adjustable wafer chuck
- Patent number 12,165,898
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Hsi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning apparatus and method
- Patent number 12,165,887
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jieh-Chau Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method, method of manufacturing semiconductor, and subst...
- Patent number 12,165,894
- Issue date Dec 10, 2024
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dispenser for micro LED suspension and method of transferring micro...
- Patent number 12,165,890
- Issue date Dec 10, 2024
- Samsung Electronics Co., Ltd.
- Joonyong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control device, system and control method
- Patent number 12,165,892
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing monitoring
- Patent number 12,165,934
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Zuoming Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
XPS metrology for process control in selective deposition
- Patent number 12,158,437
- Issue date Dec 3, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Charles Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Estimation device, vacuum valve, and vacuum pump
- Patent number 12,158,155
- Issue date Dec 3, 2024
- Shimadzu Corporation
- Junichiro Kozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling chemical concentration in electrolyte
- Patent number 12,157,952
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Chang Huang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Pollutant detection devices and monitoring system having the same
- Patent number 12,153,016
- Issue date Nov 26, 2024
- Samsung Electronics Co., Ltd.
- Dusik Bae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thickness measurement of substrate using color metrology
- Patent number 12,148,148
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Dominic J. Benvegnu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Heating platform, thermal treatment and manufacturing method
- Patent number 12,142,497
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment device
- Patent number 12,138,671
- Issue date Nov 12, 2024
- Shibaura Mechatronics Corporation
- Minami Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Small gas flow monitoring of dry etcher by OES signal
- Patent number 12,142,494
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Po-Lung Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process abnormality identification using measurement violation anal...
- Patent number 12,141,230
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Selim Nahas
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,142,496
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing condition selection method, substrate processing method,...
- Patent number 12,142,502
- Issue date Nov 12, 2024
- SCREEN Holdings Co., Ltd.
- Takashi Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Makeup air handling unit in semiconductor fabrication building and...
- Patent number 12,140,342
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chih-Ming Tsao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sonar sensor in processing chamber
- Patent number 12,136,556
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated substrate measurement system to improve manufacturing pr...
- Patent number 12,136,557
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Upendra V. Ummethala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing process with atomic level inspection
- Patent number 12,131,957
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- I-Che Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Temperature distribution evaluation method, temperature distributio...
- Patent number 12,131,960
- Issue date Oct 29, 2024
- Kwansei Gakuin Educational Foundation
- Tadaaki Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process apparatus including gas supplier and method of operating th...
- Patent number 12,128,395
- Issue date Oct 29, 2024
- Samsung Electronics Co., Ltd.
- Dongsik Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing semiconductor wafers
- Patent number 12,131,924
- Issue date Oct 29, 2024
- Yangtze Memory Technologies Co., Ltd.
- Liquan Cai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,131,964
- Issue date Oct 29, 2024
- HITACHI HIGH-TECH CORPORATION
- Kousuke Fukuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Output signal processing circuit for eddy current sensor and output...
- Patent number 12,123,714
- Issue date Oct 22, 2024
- Ebara Corporation
- Hiroto Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Unit for supplying substrate treating liquid and apparatus for trea...
- Patent number 12,119,241
- Issue date Oct 15, 2024
- Semes Co., Ltd.
- Dong Hwa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing substrate and method of determining whethe...
- Patent number 12,112,960
- Issue date Oct 8, 2024
- Semes Co., Ltd.
- Ohyeol Kwon
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
LOW OPEN AREA AND COUPON ENDPOINT DETECTION
- Publication number 20240420975
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Varoujan Chakarian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY ON A...
- Publication number 20240420973
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A...
- Publication number 20240420974
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20240410078
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD
- Publication number 20240404849
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240404850
- Publication date Dec 5, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hao Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE TR...
- Publication number 20240395589
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS FOR REAL TIME ETCH PROCESS COMPENSATION CONTROL
- Publication number 20240395637
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chansyun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER DEVICE AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME
- Publication number 20240395574
- Publication date Nov 28, 2024
- SAMSUNG DISPLAY CO., LTD.
- DEOKJAE KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECIPE CREATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...
- Publication number 20240385602
- Publication date Nov 21, 2024
- Kokusai Electric Corporation
- Takatoshi SEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD
- Publication number 20240387203
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING AND DETECTING APPARATUS
- Publication number 20240387211
- Publication date Nov 21, 2024
- PlayNitride Display Co., Ltd.
- Yen-Mu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAKEUP AIR HANDLING UNIT IN SEMICONDUCTOR FABRICATION BUILDING AND...
- Publication number 20240384881
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIH-MING TSAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM, APPARATUS, AND METHOD FOR IMPROVING PHOTORESIST COATING OPE...
- Publication number 20240387172
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Ming CHEN
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
APPARATUS AND METHODS FOR DETERMINING FLUID DYNAMICS OF LIQUID FILM...
- Publication number 20240387212
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Pin CHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...
- Publication number 20240385582
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Kiminari SAKAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BY-SITE-COMENSATED ETCH BACK FOR LOCAL PLANARIZATION/TOPOGRAPHY ADJ...
- Publication number 20240387185
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming Chyi Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRFLOW DETECTION DEVICE AND METHODS OF USE
- Publication number 20240379391
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Acoustic Measurement of Fabrication Equipment Clearance
- Publication number 20240377364
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jun-Hao Deng
- B08 - CLEANING
Information Patent Application
SMALL GAS FLOW MONITORING OF DRY ETCHER BY OES SIGNAL
- Publication number 20240379387
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Lung HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHODS FOR CONTROLLING AN AMOUNT OF PRIMER IN A PRIMER...
- Publication number 20240379467
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Pei-Yi SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING PROCESS WITH ATOMIC LEVEL INSPECTION
- Publication number 20240371707
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- I-Che Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IN-LINE WAFER EDGE SEALING MONITORING SYSTEM AND METHODS OF OPERATION
- Publication number 20240371666
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hau-Yi HSIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PACKAGING DESIGN FOR A FLOW SENSOR AND METHODS OF MANUFACTURING THE...
- Publication number 20240369389
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Srikanth Krishnamurthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240371661
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- B08 - CLEANING
Information Patent Application
SONAR SENSOR IN PROCESSING CHAMBER
- Publication number 20240371668
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CLEANING SYSTEM
- Publication number 20240371667
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Shu TSENG
- B08 - CLEANING
Information Patent Application
INFORMATION PROCESSING DEVICE, INFERENCE DEVICE, AND MACHINE LEARNI...
- Publication number 20240363449
- Publication date Oct 31, 2024
- EBARA CORPORATION
- CHING WEI HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF LIQUID DELIVERY IN AUTO-REFILL SYSTEMS
- Publication number 20240360561
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Zohreh Razavi Hesabi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR IN-SITU MARANGONI CLEANING
- Publication number 20240363373
- Publication date Oct 31, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Wei-Chun HSU
- H01 - BASIC ELECTRIC ELEMENTS

Process monitoring

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for monitoring edge bevel removal area in semi...

Semiconductor device and oxygen removal method thereof

Adjustable wafer chuck

Wafer cleaning apparatus and method

Processing method, method of manufacturing semiconductor, and subst...

Dispenser for micro LED suspension and method of transferring micro...

Control device, system and control method

Substrate processing monitoring

XPS metrology for process control in selective deposition

Estimation device, vacuum valve, and vacuum pump

Method of controlling chemical concentration in electrolyte

Pollutant detection devices and monitoring system having the same

Thickness measurement of substrate using color metrology

Heating platform, thermal treatment and manufacturing method

Substrate treatment device

Small gas flow monitoring of dry etcher by OES signal

Process abnormality identification using measurement violation anal...

Substrate processing apparatus and substrate processing method

Processing condition selection method, substrate processing method,...

Makeup air handling unit in semiconductor fabrication building and...

Sonar sensor in processing chamber

Integrated substrate measurement system to improve manufacturing pr...

Manufacturing process with atomic level inspection

Temperature distribution evaluation method, temperature distributio...

Process apparatus including gas supplier and method of operating th...

Method for processing semiconductor wafers

Plasma processing apparatus and plasma processing method

Output signal processing circuit for eddy current sensor and output...

Unit for supplying substrate treating liquid and apparatus for trea...

Apparatus for processing substrate and method of determining whethe...

Patents Applicationslast 30 patents

LOW OPEN AREA AND COUPON ENDPOINT DETECTION

SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY ON A...

SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A...

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE TR...

METHODS FOR REAL TIME ETCH PROCESS COMPENSATION CONTROL

LASER DEVICE AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME

RECIPE CREATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...

HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD

PROCESSING AND DETECTING APPARATUS

MAKEUP AIR HANDLING UNIT IN SEMICONDUCTOR FABRICATION BUILDING AND...

SYSTEM, APPARATUS, AND METHOD FOR IMPROVING PHOTORESIST COATING OPE...

APPARATUS AND METHODS FOR DETERMINING FLUID DYNAMICS OF LIQUID FILM...

CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...

BY-SITE-COMENSATED ETCH BACK FOR LOCAL PLANARIZATION/TOPOGRAPHY ADJ...

AIRFLOW DETECTION DEVICE AND METHODS OF USE

Acoustic Measurement of Fabrication Equipment Clearance

SMALL GAS FLOW MONITORING OF DRY ETCHER BY OES SIGNAL

SYSTEM AND METHODS FOR CONTROLLING AN AMOUNT OF PRIMER IN A PRIMER...

MANUFACTURING PROCESS WITH ATOMIC LEVEL INSPECTION

IN-LINE WAFER EDGE SEALING MONITORING SYSTEM AND METHODS OF OPERATION

PACKAGING DESIGN FOR A FLOW SENSOR AND METHODS OF MANUFACTURING THE...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SONAR SENSOR IN PROCESSING CHAMBER

WAFER CLEANING SYSTEM

INFORMATION PROCESSING DEVICE, INFERENCE DEVICE, AND MACHINE LEARNI...

CONTROL OF LIQUID DELIVERY IN AUTO-REFILL SYSTEMS

SYSTEMS AND METHODS FOR IN-SITU MARANGONI CLEANING