| Number | Date | Country | Kind |
|---|---|---|---|
| 3931837 | Sep 1989 | DEX |
| Number | Name | Date | Kind |
|---|---|---|---|
| 1060157 | Brazier | Apr 1913 | |
| 1230991 | Briggs | Jun 1917 | |
| 4474164 | Lauga | Oct 1984 |
| Number | Date | Country |
|---|---|---|
| 240463 | May 1910 | DE2 |
| 553031 | Jun 1932 | DE2 |
| Entry |
|---|
| G. Werner et al., "Trennen von Silizium"-IDR Jan. 1989, pp. 10-18. |