Apparatuses and methods for providing thin shields in a multiple sensor array

Information

  • Patent Grant
  • 9786301
  • Patent Number
    9,786,301
  • Date Filed
    Tuesday, December 2, 2014
    10 years ago
  • Date Issued
    Tuesday, October 10, 2017
    7 years ago
Abstract
Apparatuses and methods for providing thin shields in a multiple sensor array are provided. One such apparatus is a magnetic read transducer including a first read sensor, a second read sensor, and a shield assembly positioned between the first read sensor and the second read sensor at an air bearing surface (ABS) of the magnetic read transducer, the shield assembly including a first shield layer assembly having a first footprint with a first area, and a second shield layer assembly having a second footprint with a second area, where the second area is greater than the first area.
Description
BACKGROUND

Two dimensional magnetic recording (TDMR) technology employs multiple sensor arrays which can enable high density recording (e.g., multi-terabit density recording). This TDMR technology may bring the magnetic recording industry to new heights. However, it can be challenging to design sensor assemblies with multiple sensors positioned together. This is the case whether the sensor assemblies are vertically arranged or longitudinally arranged. More specifically, vertically arranged sensor arrays (such as those depicted in FIG. 3 and FIG. 7) are an inevitable choice for fabricating multi-sensor arrays for TDMR applications.


In practice, it is desirable to make the sensor arrays with very small vertical separation to reduce the skew sensitivity. This is due to the fact that vertically aligned sensor arrays could have misalignments between adjacent sensor locations and the actual tracks of interest at some skew angle and radius conditions. As it turns out, such misalignments are proportional to the vertical separation between two sensors. As a result, it is highly desirable to reduce the vertical separation between adjacent sensors.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is a top schematic view of a disk drive including a slider with a multiple sensor array having thin shields in accordance with one embodiment of the invention.



FIG. 2 is a side schematic view of the slider of FIG. 1 with the multiple sensor array having thin shields in accordance with one embodiment of the invention.



FIG. 3 is a bottom or air bearing surface (ABS) schematic view of a dual sensor array separated by thin middle shields, including a first middle shield assembly and a second middle shield assembly, in accordance with one embodiment of the invention.



FIG. 4 is a top schematic view of the dual sensor array of FIG. 3 illustrating the shapes of the first middle shield assembly and the second middle shield assembly in accordance with one embodiment of the invention.



FIG. 5 is a side schematic view of the layer structure of the first middle shield assembly of FIG. 3 in accordance with one embodiment of the invention.



FIG. 6 is a side schematic view of the layer structure of the second middle shield assembly of FIG. 3 in accordance with one embodiment of the invention.



FIG. 7 is a bottom or air bearing surface (ABS) schematic view of a triple sensor array where the sensors are each separated by thin middle shields, including first, second, third and fourth middle shield assemblies, in accordance with one embodiment of the invention.



FIG. 8 is a flowchart of a process for forming a dual sensor array separated by thin middle shields, including a first middle shield assembly and a second middle shield assembly, in accordance with one embodiment of the invention.



FIG. 9 is a bottom or air bearing surface (ABS) schematic view of a dual sensor array separated by thin middle shields, including a first middle shield assembly and a second middle shield assembly, where one of the sensors is stabilized using a hybrid soft and hard bias assembly in accordance with one embodiment of the invention.



FIG. 10 is a bottom or air bearing surface (ABS) schematic view illustrating the magnetic effects associated with a sensor stabilized using a hybrid soft and hard bias scheme in accordance with one embodiment of the invention.



FIG. 11 is a schematic perspective view of a sensor assembly including a sensor stabilized using a hybrid soft and hard bias scheme and the magnetic effects associated therewith in accordance with one embodiment of the invention.



FIG. 12 is a schematic perspective view of a sensor assembly including a sensor stabilized using a hybrid soft and hard bias scheme and the magnetic effects associated therewith in accordance with one embodiment of the invention.





DETAILED DESCRIPTION

Referring now to the drawings, embodiments of sensor arrays (e.g., magnetic read transducers) and methods for forming such sensor arrays are illustrated. The magnetic read transducers can include a first read sensor, a second read sensor, and a shield assembly positioned between the first read sensor and the second read sensor at an air bearing surface (ABS) of the magnetic read transducer. The shield assembly can include a first shield layer assembly having a first footprint with a first area, and a second shield layer assembly having a second footprint with a second area, where the second area is greater than the first area. In such case, the thickness of the first and second shield layer assemblies can be substantially reduced as compared to shields in conventional sensor arrays. In several embodiments, the proposed thin shield structures, and in particular their unique shape anisotropy, can effectively reduce the shield to shield spacing and/or absorb the on-track noise while also stabilizing the magnetization of soft-bias layers.


In several embodiments, the first and second shield layer assemblies can be made of laminated soft ferromagnetic layers. In some embodiments, the number of layers for the first shield layer assembly and second shield layer assembly is not the same. In some embodiments, one of the sensors in the sensor array can be stabilized using a hybrid soft and hard bias scheme where a bias layer positioned along the same layer as the sensor can have both soft and hard bias elements contained therein. The hybrid soft and hard bias scheme can offset a loss in pinning strength associated the reduction in thickness of various layers (e.g., an anti-ferromagnetic coupling, AFC, layer) in the shield assembly.



FIG. 1 is a top schematic view of a disk drive 100 including a slider 108 with a multiple sensor array having thin shields in accordance with one embodiment of the invention. Disk drive 100 may include one or more of the disks/media 102 to store data. Disks/media 102 reside on a spindle assembly 104 that is mounted to drive housing 106. Data may be stored along tracks 107 in the magnetic recording layer of disk 102. The reading and writing of data is accomplished with the slider/head 108 that can have both read and write elements. The write element (see 108a in FIG. 2) is used to alter the properties of the magnetic recording layer of disk 102 and thereby write information thereto. The reader element (see 108b in FIG. 2) is used to read information stored on the magnetic recording layer of disk 102. In several embodiments, the reader element can be a sensor array such as a two dimensional magnetic recording (TDMR) sensor array.


In operation, a spindle motor (not shown) rotates the spindle assembly 104, and thereby rotates disk 102 to position head 108 at a particular location along a desired disk track 107. The position of head 108 relative to disk 102 may be controlled by position control circuitry 110.



FIG. 2 is a side schematic view of the slider 108 of FIG. 1 with the multiple sensor array 108b having thin shields in accordance with one embodiment of the invention. The slider 108 includes both the writer 108a and sensor array 108b disposed along an air bearing surface (ABS) 108c of the slider. The ABS 108c is the bottom surface of the slider 108 and closest to the media 102. As will be discussed in further detail below, the sensor array 108b includes thin middle shields including a first middle shield assembly and a second middle shield assembly that can have different surface areas. This novel shape anisotropy can ensures additional stability of the magnetization orientations of the middle shields thus effectively controlling the magnetization dynamics of the soft bias without using a strong anti-ferromagnetic scheme. As a result, a balance between stability and shield performance is achievable, and the total thickness of middle shield stack structures can be reduced to an ultra thin level.



FIG. 3 is a bottom or air bearing surface (ABS) schematic view of a dual sensor array 200 separated by thin middle shields including a first middle shield assembly 202 and a second middle shield assembly 204 in accordance with one embodiment of the invention. The dual sensor array 200 further includes a first read sensor 206 and a second read sensor 208 spaced apart laterally (for adjacent track reading) and vertically due to the first and second middle shield assemblies (202, 204). The first read sensor 206 is positioned within a first soft bias layer 210.


Similarly, the second read sensor 208 is positioned within a second soft bias layer 212. A first hypothetical track 206a that could be read by the first read sensor 206 is shown as extending from the bottom to the top of the dual sensor array 200. Similarly, a second hypothetical track 208a that could be read by the second read sensor 208 is shown as extending from the bottom to the top of the dual sensor array 200. The dual sensor array 200 further includes a first main shield 214 positioned at the bottom of the array 200 and a second main shield 216 positioned at the top of the array 200.


The first middle shield assembly 202 and the second middle shield assembly 204 can each be thought of as a stacked shield assembly. The dual sensor array 200 can be described as a stacked structure including, starting at the bottom, the first main shield layer 214 substantially parallel to the shield assembly (e.g., 202, 204), the first soft bias layer 210 on the first main shield layer 214, the second soft bias layer 212 substantially parallel to the stacked shield assembly (e.g., 202, 204), and the second main shield layer 216 on the second soft bias layer 212. In such case, the first read sensor 206 is positioned between a right side portion of the first soft bias layer 210 and a left side portion of the first soft bias layer 210 at the ABS. Similarly, the second read sensor 208 is positioned between a right side portion of the second soft bias layer 212 and a left side portion of the second soft bias layer 212 at the ABS. As shown in FIG. 3, the stacked structure would further include first middle shield assembly 202 on the first soft bias layer 210, a thin insulating layer 218 on the first middle shield assembly 202, the second middle shield assembly 204 on the insulating layer 218, and the second soft bias layer 212 on the second middle shield assembly 204.


In one embodiment, the first and second soft bias layers (210, 212) can be made of NiFe (e.g., permalloy), CoFe and/or other suitable material(s) known in the art. The first and second soft bias layers (210, 212) can provide soft biasing (.e.g., longitudinal biasing) for the respective sensors (206, 208). In one embodiment, the first and second main shield layers (214, 216) can also be made of NiFe (e.g., permalloy), CoFe and/or other suitable material(s) known in the art. In one embodiment, the insulating layer 218 can be made of Al2O3 (e.g., aluminum oxide), MgO, Si3N4 (e.g., silicon nitride) and/or other suitable material(s) known in the art.


In several embodiments, the thickness of the first middle shield assembly 202 (e.g., D1) and thickness of the second middle shield assembly 204 (e.g., D2) are substantially reduced as compared to prior middle shield designs. For example, in one embodiment, the thickness D1 of the first middle shield assembly 202 is about 35 nanometers (nm). In another embodiment, the thickness D1 is between about 15 nm and about 45 nm. In another embodiment, the thickness D1 is greater than 30 nm with a tolerance of about 4 nm. In several embodiments, thickness D1 is less than 40 nanometers.


In one embodiment, the thickness D2 of the second middle shield assembly 204 is about 25 nanometers (nm). In another embodiment, the thickness D2 is between about 15 nm and about 35 nm. In another embodiment, the thickness D2 is greater than 30 nm with a tolerance of about 2.5 nm. In several embodiments, thickness D2 is less than 40 nanometers.


In one embodiment, the distance D3 between the first soft bias layer 210 and the second soft bias layer 212 is about 70 nm. In another embodiment, D3 is less than 100 nm. In several embodiments, D3 is between about 60 nm and about 160 nm.


As can be seen in FIG. 3, the first read sensor 206 is spaced apart (e.g., laterally) from the second read sensor 208 along a direction substantially parallel to the shield assembly (e.g., middle shields 202, 204) to enable two dimensional magnetic recording. In several embodiments, the first middle shield assembly 202 and the second middle shield assembly 204 can be thought of as anti-ferromagnetic (AFM) middle shield assemblies.



FIG. 4 is a top schematic view of the dual sensor array 200 of FIG. 3 illustrating the shapes of the first middle shield assembly 202 and the second middle shield assembly 204 in accordance with one embodiment of the invention. Leads (220a, 220b) for coupling to the dual sensor array 200 are also shown in this view. As can be seen in FIG. 4, the first middle shield assembly 202 has a first preselected footprint 202z (e.g., shape) with a first area, and the second middle shield assembly 204 has a second preselected footprint 204z (e.g., shape) with a second area. After the dual sensor array 200 is formed by removal of material from the first middle shield assembly 202 to about the air bearing surface or ABS (e.g., by lapping in a direction extending from the bottom to the top of FIG. 4), the second area 204z is greater than the first area 202z. In addition, it can be observed that the first footprint 202z is different from the second footprint 204z, and thus the first footprint 202z is not symmetric to the second footprint 204z. It can further be observed that each of the sensors (206, 208) are effectively between a majority of the first area (corresponding to first footprint 202z) and a majority of the second area (corresponding to second footprint 204z) in a cross track direction. Stated another way, it can be observed that a majority of the first area 202z is positioned to a first side (e.g., right side as shown in FIG. 4) of the first read sensor 206 in a cross track direction and a majority of the second area 204z is positioned to a second side (e.g., left side as shown in FIG. 4), opposite to the first side, of the first read sensor 206.


As shown in FIG. 4, the first sensor 206 has a first edge 250 at the ABS and a second edge 252 at a second surface substantially parallel to the ABS, where the first shield layer assembly footprint 202z has an edge 202z-1 substantially parallel to and closest to the second edge 252 of the first read sensor. That is closest as compared to the other edges of the first shield layer assembly footprint 202z. The second shield layer assembly footprint 204z also has an edge 204z-1 substantially parallel to and closest to the second edge 252 of the first read sensor 206 (closest as compared to the other edges of the second shield layer assembly footprint 204z). As such, the edge 202z-1 of the first shield layer assembly 202z is positioned between the edge 2024z-1 of the second shield layer assembly 204z and the second edge 252 of the first read sensor. While FIG. 4 depicts a particular embodiment of preselected shapes for the first middle shield assembly 202 and the second middle shield assembly 204, other suitable shapes may be used for the middle shield assemblies.



FIG. 5 is a side schematic view of the layer structure of the first middle shield assembly 202 of FIG. 3 in accordance with one embodiment of the invention. The first middle shield assembly 202 has a stacked structure including a first soft ferromagnetic layer 202a at the bottom of the stacked structure, a first anti-ferromagnetic exchange coupling enhancer layer 202b on the first soft ferromagnetic layer 202a, a first anti-ferromagnetic exchange coupling layer 202c on the first anti-ferromagnetic exchange coupling enhancer layer 202b, a second anti-ferromagnetic exchange coupling enhancer layer 202d on the first anti-ferromagnetic exchange coupling layer 202c, a second soft ferromagnetic layer 202e on the second anti-ferromagnetic exchange coupling enhancer layer 202d, a third anti-ferromagnetic exchange coupling enhancer layer 202f on the second soft ferromagnetic layer 202e, an anti-ferromagnetic pinning layer 202g on the third anti-ferromagnetic exchange coupling enhancer layer 202f, and a capping layer 202h on the anti-ferromagnetic pinning layer 202g.


In one embodiment, the first anti-ferromagnetic exchange coupling enhancer layer 202b, the first anti-ferromagnetic exchange coupling layer 202c, and the second anti-ferromagnetic exchange coupling enhancer layer 202d can collectively be referred to as an anti-ferromagnetic exchange coupling layer assembly (202b, 202c, 202d).


In one embodiment, the first soft ferromagnetic layer 202a can be made of NiFe (e.g., permalloy) and/or other suitable material(s) known in the art. In one embodiment, the first anti-ferromagnetic exchange coupling enhancer layer 202b can be made of CoFe and/or other suitable material(s) known in the art. In one embodiment, the first anti-ferromagnetic exchange coupling layer 202c can be made of Ru, Cr, and/or other suitable material(s) known in the art. In one embodiment, the second anti-ferromagnetic exchange coupling enhancer layer 202d can be made of CoFe and/or other suitable material(s) known in the art. In one embodiment, the second soft ferromagnetic layer 202e can be made of NiFe (e.g., permalloy) and/or other suitable material(s) known in the art. In one embodiment, the third anti-ferromagnetic exchange coupling enhancer layer 202f can be made of CoFe and/or other suitable material(s) known in the art. In one embodiment, the anti-ferromagnetic pinning layer 202g can be made of IrMn and/or other suitable material(s) known in the art. In one embodiment, the capping layer 202h can be made of Ta, Ru, combinations thereof, and/or other suitable material(s) known in the art.


In operation, the soft ferromagnetic layers (202a, 202e, 204a, 204c) can be used to block magnetic fields (e.g., shielding). The anti-ferromagnetic exchange coupling layers (202c, 204b) can be used to generate antiferromagnetic coupling. The anti-ferromagnetic exchange coupling enhancer layers (202b, 202d, 202f, 204a, 204c) can be used to enhance or optimize the coupling strength of the anti-ferromagnetic exchange coupling layers (202c, 204b) or enhance the effectiveness of the anti-ferromagnetic pinning layer 202g in pinning the magnetization of one or more of the adjacent soft ferromagnetic layers. In several embodiments, the optimization involves competing interests including minimizing the overall thickness of the sensor while maintaining a preselected base coupling strength. In such case, the thickness of each layer in the sensor can be adjusted for minimal thickness while maintaining a minimal acceptable degree of functionality (e.g., coupling strength for the respective layers).


In one embodiment, the first soft ferromagnetic layer 202a can have a thickness of about 10 nm to about 15 nm. In one embodiment, the first anti-ferromagnetic exchange coupling enhancer layer 202b can have a thickness of about 1 Angstrom to about 5 Angstroms. In one embodiment, the first anti-ferromagnetic exchange coupling layer 202c can have a thickness of about 7.5 Angstroms. In one embodiment, the second anti-ferromagnetic exchange coupling enhancer layer 202d can have a thickness of about 1 Angstrom to about 5 Angstroms. In one embodiment, the second soft ferromagnetic layer 202e can have a thickness of about 8 nm to about 10 nm. In one embodiment, the third anti-ferromagnetic exchange coupling enhancer layer 202f can have a thickness of about 1 Angstrom to about 8 Angstroms. In one embodiment, the anti-ferromagnetic pinning layer 202g can have a thickness of about 5 nm to about 7 nm. In one embodiment, the capping layer 202h can have a thickness of about 4 nm to about 8 nm. In several embodiments, these layers of the first middle shield assembly 202 can have other suitable thicknesses.



FIG. 6 is a side schematic view of the layer structure of the second middle shield assembly 204 of FIG. 3 in accordance with one embodiment of the invention. The second middle shield assembly 204 has a stacked structure including a first soft ferromagnetic layer 204a at the bottom, an anti-ferromagnetic exchange coupling layer 204b on the first soft ferromagnetic layer 204a, and a second soft ferromagnetic layer 204c on the anti-ferromagnetic exchange coupling layer 204b. The function of these layers is described above.


In one embodiment, the first soft ferromagnetic layer 204a can be made of NiFe (e.g., permalloy) and/or other suitable material(s) known in the art. In one embodiment, the anti-ferromagnetic exchange coupling layer 204b can be made of Ru, Cr, and/or other suitable material(s) known in the art. In one embodiment, the first soft ferromagnetic layer 204c can be made of NiFe (e.g., permalloy) and/or other suitable material(s) known in the art.


In one embodiment, the first soft ferromagnetic layer 204a can have a thickness of about 8 nm to about 12 nm. In one embodiment, the anti-ferromagnetic exchange coupling layer 204b can have a thickness of about 1 nm to about 5 nm. In one embodiment, the second soft ferromagnetic layer 204c can have a thickness of about 8 nm to about 12 nm. In several embodiments, these layers of the second middle shield assembly 204 can have other suitable thicknesses.


Referring now to FIGS. 5 and 6, the first shield layer assembly 202 has a first preselected number of layers (e.g., 8 layers) including a plurality of laminated soft ferromagnetic layers. The second shield layer assembly 204 has a second preselected number of layers (e.g., 3 layers) including a plurality of laminated soft ferromagnetic layers. In several embodiments, the first preselected number of layers does not equal to the second preselected number of layers. In one such embodiment, the first preselected number of layers is greater than the second preselected number of layers.



FIG. 7 is a bottom or air bearing surface (ABS) schematic view of a triple sensor array 300 where the sensors (306, 308, 324) are each separated by thin middle shields, including first (302), second (304), third (320) and fourth (322) middle shield assemblies, in accordance with one embodiment of the invention. Similar to the sensor array of FIG. 4, the triple sensor array 300 includes a first sensor 306 positioned within a first soft bias layer 310. The first middle shield assembly 302 is on the first soft bias layer 310, and the second middle shield assembly 304 is on the first middle shield assembly 302. A thin insulating layer 318 is positioned between the first middle shield assembly 302 and the second middle shield assembly 304. The second sensor 308 is positioned within a second soft bias layer 312. The third middle shield assembly 320 is on the second soft bias layer 312, and the fourth middle shield assembly 322 is on the third middle shield assembly 320. A thin insulating layer 328 is positioned between the third middle shield assembly 320 and the fourth middle shield assembly 322. The third sensor 324 is positioned within a third soft bias layer 326 which is on the fourth middle shield assembly 322. The triple sensor array 300 further includes a first main shield 314 beneath the first soft bias layer 310 and a second main shield 316 on the third soft bias layer 326.


In a number of embodiments, the triple sensor array can function in a similar manner as the sensor array of FIG. 3 but with the additional functionality provided by the third sensor 324. In several embodiments, the third shield layer assembly 320 has a third footprint with a third area, and the fourth shield layer 322 assembly has a fourth footprint with a fourth area, where the fourth area is greater than the third area.



FIG. 8 is a flowchart of a process 350 for forming a dual sensor array separated by thin middle shields, including a first middle shield assembly and a second middle shield assembly, in accordance with one embodiment of the invention. In particular embodiments, the process 350 can be used to fabricate the sensor array 200 of FIG. 3. In block 352, the process provides a first read sensor at an air bearing surface (ABS) of the magnetic read transducer. In block 354, the process provides a shield assembly on the first read sensor. As shown in sub-block 354a of block 354, the process provides a first shield layer assembly on the first read sensor, where the first shield layer assembly has a first footprint with a first area. As shown in sub-block 354b of block 354, the process provides a second shield layer assembly on the first shield layer assembly, where the second shield layer assembly has a second footprint with a second area, where the second area is greater than the first area. In block 356, the process provides a second read sensor on the shield assembly.


In one embodiment, the process can perform the sequence of actions in a different order. In another embodiment, the process can skip one or more of the actions. In other embodiments, one or more of the actions are performed simultaneously. In some embodiments, additional actions can be performed.


For example, in some embodiments, the process includes additional actions to form the sensor arrays of FIG. 3 or FIG. 7, including, in some cases, the middle shield assemblies of FIGS. 5 and 6. In other embodiments, the process includes additional actions to form additional read sensors with additional shield layer assemblies.



FIG. 9 is a bottom or air bearing surface (ABS) schematic view of a dual sensor array 400 separated by thin middle shields, including a first middle shield assembly 402 and a second middle shield assembly 404, where one of the sensors is stabilized using a hybrid soft and hard bias assembly in accordance with one embodiment of the invention. More specifically, the dual sensor array 400 includes a first sensor 406 and a second sensor 408, where the first sensor 406 is stabilized using a hybrid soft and hard bias assembly including soft bias layer (410a, 410b) with a side hard bias layer (412a, 412b). The first read sensor 406 is positioned between a right side portion of the soft bias layer 410b and a left side portion of the soft bias layer 410a at the ABS. The soft bias layer (410a, 410b) is positioned between a right side portion of the hard bias layer 412b and a left side portion of the hard bias layer 412a at the ABS. The left side portion of the soft bias layer 410a and the right side portion of the soft bias layer 410b can have a length, between the sensor 406 and the hard bias layer (412a, 412b) at the ABS, of about 100 nm to about 300 nm. In other embodiments, other suitable lengths can be used. The hard bias layer (412a, 412b) can have a thickness greater than that of the soft bias layer (410a, 410b) at the ABS.


As can be seen in FIG. 9, a moderately coupled AFC stack structure is utilized where the hard bias layer is used to provide additional stability for the magnetization orientations of the first middle shield assembly 402, thus effectively controlling the magnetization dynamics of the soft bias without using a strong anti-ferromagnetic scheme. As a result, not only can the delicate balance between sensor's stability and shielding performance be achieved, but also the total thickness of the proposed AFC middle shield stack structures (e.g., 402 and 404) can be reduced drastically. This hybrid bias scheme also greatly improves the stability of the sensor array under external field disturbances due to the high coercivity (Hc) of hard bias layer.


In particular, the thin middle shield assemblies of FIG. 9 may cause a strength reduction of the AFC pinning and coupling which would likely affect the soft bias stability performance. To compensate for the stability impact associated with the loss or the reduction of the AFC pinning strength, the hybrid hard bias and soft bias scheme depicted in FIG. 9 can be adopted.


The introduction of an extra longitudinal field on the soft bias in the middle shield (e.g., first middle shield assembly 402) can improve or enhance the overall soft bias stability so as to compensate for the stability impact caused by the loss or the reduction of the AFC pinning strength. This unique hard bias stability is mainly achieved through the pinning at the end of the soft bias layer and the coupling between the first middle shield layer 402 and the hard ferromagnetic bias layer (412a, 412b).



FIG. 10 is a bottom or air bearing surface (ABS) schematic view illustrating the magnetic effects associated with a sensor stabilized using a hybrid soft and hard bias scheme in accordance with one embodiment of the invention. It should be pointed out that the coercivity (Hc) of hard bias layer can be high (e.g., greater than 2000 Oe), which should improve the stability of the sensor array drastically under application of external fields as it becomes very robust under external perturbations.



FIG. 11 is a schematic perspective view of a sensor assembly 500 including a sensor 506 stabilized using a hybrid soft and hard bias scheme and the magnetic effects associated therewith in accordance with one embodiment of the invention. The sensor assembly 500 includes soft bias layer portions (510a, 510b) to the left and right of the sensor 506, respectively, and hard bias layer portions (512a, 512b) to the left and right of the soft bias layer portions (510a, 510b), respectively. The left side portion of the soft bias layer 510a and possibly the right side portion of the soft bias layer 510b can have a length, between the sensor 506 and the hard bias layer (512a, 512b), of greater than 100 nm. In other embodiments, other suitable lengths can be used.


In many embodiments, the sensors are still biased by a hybrid scheme and especially in the vicinity of the free layer, and the sensor is biased by two soft magnets. The biasing field there is uniformly applied onto the free layer across the stripe height direction due to their shape anisotropy. On the other hand, the two soft bias layers (510a, 510b) are pinned at their ends by two high coercivity hard bias layers (512a, 512b) to enhance the overall stability. The localized non-uniform field from the hard bias layer generally will not reach to the sensor area if the soft bias layer is longer than 100 nm (as illustrated). The shape anisotropy of the soft layers and the AFM layer coupling together ensure the uniform field going into the sensors.



FIG. 12 is a schematic perspective view of a sensor assembly 600 including a sensor 606 stabilized using a hybrid soft and hard bias scheme and the magnetic effects associated therewith in accordance with one embodiment of the invention. The sensor assembly 600 includes soft bias layer portions (610a, 610b) to the left and right of the sensor 606, respectively, and hard bias layer portions (612a, 612b) to the left and right of the soft bias layer portions (610a, 610b), respectively. The left side portion of the soft bias layer 610a and possibly the right side portion of the soft bias layer 610b can have a length, between the sensor 606 and the hard bias layer (612a, 612b), of less than 60 nm. In other embodiments, other suitable lengths can be used.


For future ultra-high track density magnetic recording products, the magnetic thickness (MrT), which can be defined as the product of the remnant magnetic moment density (Mr) and the layer thickness (T), of the soft bias layer may become insufficient. In such case, one can reduce the length of the soft bias layer (e.g., make it less than 60 nm) and let the fields from both of hard bias layers and soft bias layer directly apply up to the free layer.


It can be very beneficial if hard biasing is used for providing a moderate pinning field for enhancing the soft bias along the longitudinal direction. This hard biasing can pin both the soft bias layer and the AFM middle shield layers together. Aspects of this design basically can address soft bias instability problems in conventional tunnel magneto-resistance (TMR) reader designs as well.


The terms “above,” “below,” and “between” as used herein refer to a relative position of one layer with respect to other layers. As such, one layer deposited or disposed above or below another layer may be directly in contact with the other layer or may have one or more intervening layers. Moreover, one layer deposited or disposed between layers may be directly in contact with the layers or may have one or more intervening layers.


A number of layered structures are discussed herein. In several embodiments, the deposition of such layers can be performed using a variety of deposition sub-processes, including, but not limited to physical vapor deposition (PVD), sputter deposition and ion beam deposition, and chemical vapor deposition (CVD) including plasma enhanced chemical vapor deposition (PECVD), low pressure chemical vapor deposition (LPCVD) and atomic layer chemical vapor deposition (ALCVD). In other embodiments, other suitable deposition techniques known in the art may also be used.


While the above description contains many specific embodiments of the invention, these should not be construed as limitations on the scope of the invention, but rather as examples of specific embodiments thereof. Accordingly, the scope of the invention should be determined not by the embodiments illustrated, but by the appended claims and their equivalents.


The various features and processes described above may be used independently of one another, or may be combined in various ways. All possible combinations and sub-combinations are intended to fall within the scope of this disclosure. In addition, certain method, event, state or process blocks may be omitted in some implementations. The methods and processes described herein are also not limited to any particular sequence, and the blocks or states relating thereto can be performed in other sequences that are appropriate. For example, described tasks or events may be performed in an order other than that specifically disclosed, or multiple may be combined in a single block or state. The example tasks or events may be performed in serial, in parallel, or in some other suitable manner. Tasks or events may be added to or removed from the disclosed example embodiments. The example systems and components described herein may be configured differently than described. For example, elements may be added to, removed from, or rearranged compared to the disclosed example embodiments.

Claims
  • 1. A magnetic read transducer comprising: a first read sensor;a second read sensor; anda shield assembly positioned between the first read sensor and the second read sensor at an air bearing surface (ABS) of the magnetic read transducer in a down track direction, the shield assembly comprising: a first shield layer assembly having a first footprint with a first area; anda second shield layer assembly having a second footprint with a second area,wherein the second area is greater than the first area, andwherein a majority of the first area and a majority of the second area are positioned on opposite sides of the first read sensor in a cross track direction.
  • 2. The magnetic read transducer of claim 1: wherein first shield layer assembly comprises a first preselected number of layers comprising a plurality of laminated soft ferromagnetic layers; andwherein second shield layer assembly comprises a second preselected number of layers comprising a plurality of laminated soft ferromagnetic layers.
  • 3. The magnetic read transducer of claim 1: wherein first shield layer assembly comprises a first preselected number of layers;wherein second shield layer assembly comprises a second preselected number of layers; andwherein the first preselected number of layers does not equal the second preselected number of layers.
  • 4. The magnetic read transducer of claim 3, wherein the first preselected number of layers is greater than the second preselected number of layers.
  • 5. The magnetic read transducer of claim 4, further comprising: an insulating layer between the first shield layer assembly and the second shield layer assembly,wherein the first shield layer assembly comprises: a first soft ferromagnetic layer;an anti-ferromagnetic exchange coupling layer assembly on the first soft ferromagnetic layer;a second soft ferromagnetic layer on the anti-ferromagnetic exchange coupling layer assembly;an anti-ferromagnetic pinning layer on the second soft ferromagnetic layer; anda capping layer on the anti-ferromagnetic pinning layer; andwherein the second shield layer assembly comprises: a third soft ferromagnetic layer;a second anti-ferromagnetic exchange coupling layer on the third soft ferromagnetic layer; anda fourth soft ferromagnetic layer on the second anti-ferromagnetic exchange coupling layer.
  • 6. The magnetic read transducer of claim 5: wherein the anti-ferromagnetic exchange coupling layer assembly of the first shield layer assembly comprises: a first anti-ferromagnetic exchange coupling enhancer layer;a first anti-ferromagnetic exchange coupling layer on the first anti-ferromagnetic exchange coupling enhancer layer; anda second anti-ferromagnetic exchange coupling enhancer layer on the first anti-ferromagnetic exchange coupling layer,wherein the first shield layer assembly further comprises a third anti-ferromagnetic exchange coupling enhancer layer positioned between the second soft ferromagnetic layer and the anti-ferromagnetic pinning layer.
  • 7. The magnetic read transducer of claim 1: wherein the first shield layer assembly has a thickness of less than 40 nanometers; andwherein the second shield layer assembly has a thickness of less than 40 nanometers.
  • 8. The magnetic read transducer of claim 1: wherein the first read sensor is spaced apart from the second read sensor along a direction substantially parallel to the shield assembly to enable two dimensional magnetic recording.
  • 9. The magnetic read transducer of claim 8, further comprising: a third read sensor;a second shield assembly positioned between the second read sensor and the third read sensor, the second shield assembly comprising: a third shield layer assembly having a third footprint with a third area; anda fourth shield layer assembly having a fourth footprint with a fourth area,wherein the fourth area is greater than the third area.
  • 10. The magnetic read transducer of claim 1: wherein the first read sensor comprises a first edge at the ABS and a second edge at a second surface substantially parallel to the ABS;wherein the first shield layer assembly comprises an edge substantially parallel to and closest to the second edge of the first read sensor;wherein the second shield layer assembly comprises an edge substantially parallel to and closest to the second edge of the first read sensor; andwherein the edge of the first shield layer assembly is positioned between the edge of the second shield layer assembly and the second edge of the first read sensor.
  • 11. The magnetic read transducer of claim 1, further comprising: a first main shield layer substantially parallel to the shield assembly;a first soft bias layer on the first main shield layer;a second soft bias layer substantially parallel to the shield assembly; anda second main shield layer on the second soft bias layer,wherein the first read sensor is positioned between a right side portion of the first soft bias layer and a left side portion of the first soft bias layer at the ABS; andwherein the second read sensor is positioned between a right side portion of the second soft bias layer and a left side portion of the second soft bias layer at the ABS.
  • 12. The magnetic read transducer of claim 1, wherein the first footprint is not symmetric to the second footprint.
  • 13. A magnetic read transducer comprising: a first read sensor;a second read sensor;a shield assembly positioned between the first read sensor and the second read sensor at an air bearing surface (ABS) of the magnetic read transducer, the shield assembly comprising: a first shield layer assembly having a first footprint with a first area; anda second shield layer assembly having a second footprint with a second area,wherein the second area is greater than the first area;a soft bias layer substantially parallel to the shield assembly; anda hard bias layer substantially parallel to the shield assembly,wherein the first read sensor is positioned between a right side portion of the soft bias layer and a left side portion of the soft bias layer at the ABS; andwherein the soft bias layer is positioned between a right side portion of the hard bias layer and a left side portion of the hard bias layer at the ABS.
  • 14. A method of fabricating a magnetic read transducer, the method comprising: providing a first read sensor at an air bearing surface (ABS) of the magnetic read transducer;providing a shield assembly on the first read sensor, wherein the providing the shield assembly on the first read sensor comprises: providing a first shield layer assembly on the first read sensor, the first shield layer assembly having a first footprint with a first area; andproviding a second shield layer assembly on the first shield layer assembly, the second shield layer assembly having a second footprint with a second area, wherein the second area is greater than the first area; andproviding a second read sensor on the shield assembly,wherein a majority of the first area and a majority of the second area are positioned on opposite sides of the first read sensor in a cross track direction.
  • 15. The method of claim 14: wherein first shield layer assembly comprises a first preselected number of layers comprising a plurality of laminated soft ferromagnetic layers; andwherein second shield layer assembly comprises a second preselected number of layers comprising a plurality of laminated soft ferromagnetic layers.
  • 16. The method of claim 14: wherein first shield layer assembly comprises a first preselected number of layers;wherein second shield layer assembly comprises a second preselected number of layers; andwherein the first preselected number of layers does not equal the second preselected number of layers.
  • 17. The method of claim 16, wherein the first preselected number of layers is greater than the second preselected number of layers.
  • 18. The method of claim 17, further comprising: providing an insulating layer between the first shield layer assembly and the second shield layer assembly,wherein the first shield layer assembly comprises: a first soft ferromagnetic layer;an anti-ferromagnetic exchange coupling layer assembly on the first soft ferromagnetic layer;a second soft ferromagnetic layer on the anti-ferromagnetic exchange coupling layer assembly;an anti-ferromagnetic pinning layer on the second soft ferromagnetic layer; anda capping layer on the anti-ferromagnetic pinning layer; andwherein the second shield layer assembly comprises: a third soft ferromagnetic layer;a second anti-ferromagnetic exchange coupling layer on the third soft ferromagnetic layer; anda fourth soft ferromagnetic layer on the second anti-ferromagnetic exchange coupling layer.
  • 19. The method of claim 18: wherein the anti-ferromagnetic exchange coupling layer assembly of the first shield layer assembly comprises: a first anti-ferromagnetic exchange coupling enhancer layer;a first anti-ferromagnetic exchange coupling layer on the first anti-ferromagnetic exchange coupling enhancer layer; anda second anti-ferromagnetic exchange coupling enhancer layer on the first anti-ferromagnetic exchange coupling layer,wherein the first shield layer assembly further comprises a third anti-ferromagnetic exchange coupling enhancer layer positioned between the second soft ferromagnetic layer and the anti-ferromagnetic pinning layer.
  • 20. The method of claim 14: wherein the first shield layer assembly has a thickness of less than 40 nanometers; andwherein the second shield layer assembly has a thickness of less than 40 nanometers.
  • 21. The method of claim 14: wherein the first read sensor is spaced apart from the second read sensor along a direction substantially parallel to the shield assembly to enable two dimensional magnetic recording.
  • 22. The method of claim 21, further comprising: providing a third read sensor;providing a second shield assembly positioned between the second read sensor and the third read sensor, the second shield assembly comprising: a third shield layer assembly having a third footprint with a third area; anda fourth shield layer assembly having a fourth footprint with a fourth area,wherein the fourth area is greater than the third area.
  • 23. The method of claim 14: wherein the first read sensor comprises a first edge at the ABS and a second edge at a second surface substantially parallel to the ABS;wherein the first shield layer assembly comprises an edge substantially parallel to and closest to the second edge of the first read sensor;wherein the second shield layer assembly comprises an edge substantially parallel to and closest to the second edge of the first read sensor; andwherein the edge of the first shield layer assembly is positioned between the edge of the second shield layer assembly and the second edge of the first read sensor.
  • 24. The method of claim 14, further comprising: providing a first main shield layer substantially parallel to the shield assembly;providing a first soft bias layer on the first main shield layer;providing a second soft bias layer substantially parallel to the shield assembly; andproviding a second main shield layer on the second soft bias layer,wherein the first read sensor is positioned between a right side portion of the first soft bias layer and a left side portion of the first soft bias layer at the ABS; andwherein the second read sensor is positioned between a right side portion of the second soft bias layer and a left side portion of the second soft bias layer at the ABS.
  • 25. The method of claim 14, wherein the first footprint is not symmetric to the second footprint.
  • 26. A method of fabricating a magnetic read transducer, the method comprising: providing a first read sensor at an air bearing surface (ABS) of the magnetic read transducer;providing a shield assembly on the first read sensor, wherein the providing the shield assembly on the first read sensor comprises: providing a first shield layer assembly on the first read sensor, the first shield layer assembly having a first footprint with a first area; andproviding a second shield layer assembly on the first shield layer assembly, the second shield layer assembly having a second footprint with a second area, wherein the second area is greater than the first area;providing a second read sensor on the shield assembly;providing a soft bias layer substantially parallel to the shield assembly; andproviding a hard bias layer substantially parallel to the shield assembly,wherein the first read sensor is positioned between a right side portion of the soft bias layer and a left side portion of the soft bias layer at the ABS; andwherein the soft bias layer is positioned between a right side portion of the hard bias layer and a left side portion of the hard bias layer at the ABS.
  • 27. A magnetic read transducer comprising: a first read sensor;a second read sensor;a shield assembly positioned between the first read sensor and the second read sensor at an air bearing surface (ABS) of the magnetic read transducer in a down track direction, the shield assembly comprising: a first shield layer assembly having a first footprint with a first area; anda second shield layer assembly having a second footprint with a second area,wherein the second area is greater than the first area, andwherein the first read sensor is positioned between a majority of the first area and a majority of the second area in a cross track direction.
  • 28. A method of fabricating a magnetic read transducer, the method comprising: providing a first read sensor at an air bearing surface (ABS) of the magnetic read transducer;providing a shield assembly on the first read sensor, wherein the providing the shield assembly on the first read sensor comprises: providing a first shield layer assembly on the first read sensor, the first shield layer assembly having a first footprint with a first area; andproviding a second shield layer assembly on the first shield layer assembly, the second shield layer assembly having a second footprint with a second area, wherein the second area is greater than the first area; andproviding a second read sensor on the shield assembly,wherein the first read sensor is positioned between a majority of the first area and a majority of the second area in a cross track direction.
US Referenced Citations (663)
Number Name Date Kind
4012781 Lin Mar 1977 A
5229901 Mallary Jul 1993 A
5270892 Naberhuis Dec 1993 A
5309305 Nepela et al. May 1994 A
5388014 Brug et al. Feb 1995 A
5684658 Shi et al. Nov 1997 A
5696654 Gill et al. Dec 1997 A
5721008 Huang et al. Feb 1998 A
5796535 Tuttle et al. Aug 1998 A
5831888 Glover Nov 1998 A
5838521 Ravipati Nov 1998 A
5963400 Cates et al. Oct 1999 A
6016290 Chen et al. Jan 2000 A
6018441 Wu et al. Jan 2000 A
6025978 Hoshi et al. Feb 2000 A
6025988 Yan Feb 2000 A
6032353 Hiner et al. Mar 2000 A
6033532 Minami Mar 2000 A
6034851 Zarouri et al. Mar 2000 A
6043959 Crue et al. Mar 2000 A
6046885 Aimonetti et al. Apr 2000 A
6049650 Jerman et al. Apr 2000 A
6055138 Shi Apr 2000 A
6058094 Davis et al. May 2000 A
6071007 Schaenzer et al. Jun 2000 A
6073338 Liu et al. Jun 2000 A
6078479 Nepela et al. Jun 2000 A
6081499 Berger et al. Jun 2000 A
6094803 Carlson et al. Aug 2000 A
6099362 Viches et al. Aug 2000 A
6103073 Thayamballi Aug 2000 A
6104562 Ottesen et al. Aug 2000 A
6108166 Lederman Aug 2000 A
6118629 Huai et al. Sep 2000 A
6118638 Knapp et al. Sep 2000 A
6125018 Takagishi et al. Sep 2000 A
6130779 Carlson et al. Oct 2000 A
6134089 Barr et al. Oct 2000 A
6136166 Shen et al. Oct 2000 A
6137661 Shi et al. Oct 2000 A
6137662 Huai et al. Oct 2000 A
6154335 Smith et al. Nov 2000 A
6157510 Schreck et al. Dec 2000 A
6160684 Heist et al. Dec 2000 A
6163426 Nepela et al. Dec 2000 A
6166891 Lederman et al. Dec 2000 A
6173486 Hsiao et al. Jan 2001 B1
6175476 Huai et al. Jan 2001 B1
6178066 Barr Jan 2001 B1
6178070 Hong et al. Jan 2001 B1
6178150 Davis Jan 2001 B1
6181485 He Jan 2001 B1
6181525 Carlson Jan 2001 B1
6185051 Chen et al. Feb 2001 B1
6185077 Tong et al. Feb 2001 B1
6185081 Simion et al. Feb 2001 B1
6188549 Wiitala Feb 2001 B1
6190764 Shi et al. Feb 2001 B1
6191925 Watson Feb 2001 B1
6193584 Rudy et al. Feb 2001 B1
6195229 Shen et al. Feb 2001 B1
6198608 Hong et al. Mar 2001 B1
6198609 Barr et al. Mar 2001 B1
6201673 Rottmayer et al. Mar 2001 B1
6204998 Katz Mar 2001 B1
6204999 Crue et al. Mar 2001 B1
6212153 Chen et al. Apr 2001 B1
6215625 Carlson Apr 2001 B1
6216242 Schaenzer Apr 2001 B1
6219205 Yuan et al. Apr 2001 B1
6221218 Shi et al. Apr 2001 B1
6222707 Huai et al. Apr 2001 B1
6229782 Wang et al. May 2001 B1
6230959 Heist et al. May 2001 B1
6233116 Chen et al. May 2001 B1
6233125 Knapp et al. May 2001 B1
6237215 Hunsaker et al. May 2001 B1
6252743 Bozorgi Jun 2001 B1
6255721 Roberts Jul 2001 B1
6258468 Mahvan et al. Jul 2001 B1
6266216 Hikami et al. Jul 2001 B1
6271604 Frank, Jr. et al. Aug 2001 B1
6271998 Coehoorn et al. Aug 2001 B1
6275354 Huai et al. Aug 2001 B1
6277505 Shi et al. Aug 2001 B1
6282056 Feng et al. Aug 2001 B1
6296955 Hossain et al. Oct 2001 B1
6297955 Frank, Jr. et al. Oct 2001 B1
6304414 Crue, Jr. et al. Oct 2001 B1
6307715 Berding et al. Oct 2001 B1
6310746 Hawwa et al. Oct 2001 B1
6310750 Hawwa et al. Oct 2001 B1
6311551 Boutaghou Nov 2001 B1
6317290 Wang et al. Nov 2001 B1
6317297 Tong et al. Nov 2001 B1
6322911 Fukagawa et al. Nov 2001 B1
6330136 Wang et al. Dec 2001 B1
6330137 Knapp et al. Dec 2001 B1
6333830 Rose et al. Dec 2001 B2
6340533 Ueno et al. Jan 2002 B1
6349014 Crue, Jr. et al. Feb 2002 B1
6351355 Min et al. Feb 2002 B1
6353318 Sin et al. Mar 2002 B1
6353511 Shi et al. Mar 2002 B1
6356412 Levi et al. Mar 2002 B1
6359779 Frank, Jr. et al. Mar 2002 B1
6362528 Anand Mar 2002 B2
6369983 Hong Apr 2002 B1
6376964 Young et al. Apr 2002 B1
6377535 Chen et al. Apr 2002 B1
6381095 Sin et al. Apr 2002 B1
6381105 Huai et al. Apr 2002 B1
6389499 Frank, Jr. et al. May 2002 B1
6392850 Tong et al. May 2002 B1
6396660 Jensen et al. May 2002 B1
6399179 Hanrahan et al. Jun 2002 B1
6400526 Crue, Jr. et al. Jun 2002 B2
6404600 Hawwa et al. Jun 2002 B1
6404601 Rottmayer et al. Jun 2002 B1
6404706 Stovall et al. Jun 2002 B1
6410170 Chen et al. Jun 2002 B1
6411522 Frank, Jr. et al. Jun 2002 B1
6417998 Crue, Jr. et al. Jul 2002 B1
6417999 Knapp et al. Jul 2002 B1
6418000 Gibbons et al. Jul 2002 B1
6418048 Sin et al. Jul 2002 B1
6421211 Hawwa et al. Jul 2002 B1
6421212 Gibbons et al. Jul 2002 B1
6424505 Lam et al. Jul 2002 B1
6424507 Lederman et al. Jul 2002 B1
6430009 Komaki et al. Aug 2002 B1
6430806 Chen et al. Aug 2002 B1
6433965 Gopinathan et al. Aug 2002 B1
6433968 Shi et al. Aug 2002 B1
6433970 Knapp et al. Aug 2002 B1
6437945 Hawwa et al. Aug 2002 B1
6445536 Rudy et al. Sep 2002 B1
6445542 Levi et al. Sep 2002 B1
6445553 Barr et al. Sep 2002 B2
6445554 Dong et al. Sep 2002 B1
6447935 Zhang et al. Sep 2002 B1
6448765 Chen et al. Sep 2002 B1
6449131 Guo et al. Sep 2002 B2
6451514 Iitsuka Sep 2002 B1
6452742 Crue et al. Sep 2002 B1
6452765 Mahvan et al. Sep 2002 B1
6456465 Louis et al. Sep 2002 B1
6459552 Liu et al. Oct 2002 B1
6462920 Karimi Oct 2002 B1
6466401 Hong et al. Oct 2002 B1
6466402 Crue, Jr. et al. Oct 2002 B1
6466404 Crue, Jr. et al. Oct 2002 B1
6468436 Shi et al. Oct 2002 B1
6469877 Knapp et al. Oct 2002 B1
6477019 Matono et al. Nov 2002 B2
6479096 Shi et al. Nov 2002 B1
6483662 Thomas et al. Nov 2002 B1
6487040 Hsiao et al. Nov 2002 B1
6487056 Gibbons et al. Nov 2002 B1
6490125 Barr Dec 2002 B1
6496330 Crue, Jr. et al. Dec 2002 B1
6496333 Han et al. Dec 2002 B1
6496334 Pang et al. Dec 2002 B1
6504676 Hiner et al. Jan 2003 B1
6512657 Heist et al. Jan 2003 B2
6512659 Hawwa et al. Jan 2003 B1
6512661 Louis Jan 2003 B1
6512690 Qi et al. Jan 2003 B1
6515573 Dong et al. Feb 2003 B1
6515791 Hawwa et al. Feb 2003 B1
6532823 Knapp et al. Mar 2003 B1
6535363 Hosomi et al. Mar 2003 B1
6552874 Chen et al. Apr 2003 B1
6552928 Qi et al. Apr 2003 B1
6577470 Rumpler Jun 2003 B1
6583961 Levi et al. Jun 2003 B2
6583968 Scura et al. Jun 2003 B1
6597548 Yamanaka et al. Jul 2003 B1
6611398 Rumpler et al. Aug 2003 B1
6618223 Chen et al. Sep 2003 B1
6629357 Akoh Oct 2003 B1
6633464 Lai et al. Oct 2003 B2
6636394 Fukagawa et al. Oct 2003 B1
6639291 Sin et al. Oct 2003 B1
6650503 Chen et al. Nov 2003 B1
6650506 Risse Nov 2003 B1
6654195 Frank, Jr. et al. Nov 2003 B1
6657816 Barr et al. Dec 2003 B1
6661621 Iitsuka Dec 2003 B1
6661625 Sin et al. Dec 2003 B1
6674610 Thomas et al. Jan 2004 B1
6674618 Engel et al. Jan 2004 B2
6680863 Shi et al. Jan 2004 B1
6683763 Hiner et al. Jan 2004 B1
6687098 Huai Feb 2004 B1
6687178 Qi et al. Feb 2004 B1
6687977 Knapp et al. Feb 2004 B2
6691226 Frank, Jr. et al. Feb 2004 B1
6697294 Qi et al. Feb 2004 B1
6700738 Sin et al. Mar 2004 B1
6700759 Knapp et al. Mar 2004 B1
6704158 Hawwa et al. Mar 2004 B2
6707083 Hiner et al. Mar 2004 B1
6713801 Sin et al. Mar 2004 B1
6721138 Chen et al. Apr 2004 B1
6721149 Shi et al. Apr 2004 B1
6721203 Qi et al. Apr 2004 B1
6724569 Chen et al. Apr 2004 B1
6724572 Stoev et al. Apr 2004 B1
6729015 Matono et al. May 2004 B2
6735850 Gibbons et al. May 2004 B1
6737281 Dang et al. May 2004 B1
6744608 Sin et al. Jun 2004 B1
6747301 Hiner et al. Jun 2004 B1
6751055 Alfoqaha et al. Jun 2004 B1
6754049 Seagle et al. Jun 2004 B1
6756071 Shi et al. Jun 2004 B1
6757140 Hawwa Jun 2004 B1
6760196 Niu et al. Jul 2004 B1
6762910 Knapp et al. Jul 2004 B1
6765756 Hong et al. Jul 2004 B1
6775902 Huai et al. Aug 2004 B1
6778358 Jiang et al. Aug 2004 B1
6781927 Heanuc et al. Aug 2004 B1
6785955 Chen et al. Sep 2004 B1
6791793 Chen et al. Sep 2004 B1
6791807 Hikami et al. Sep 2004 B1
6798616 Seagle et al. Sep 2004 B1
6798625 Ueno et al. Sep 2004 B1
6801408 Chen et al. Oct 2004 B1
6801411 Lederman et al. Oct 2004 B1
6803615 Sin et al. Oct 2004 B1
6806035 Atireklapvarodom et al. Oct 2004 B1
6807030 Hawwa et al. Oct 2004 B1
6807332 Hawwa Oct 2004 B1
6809899 Chen et al. Oct 2004 B1
6816345 Knapp et al. Nov 2004 B1
6828897 Nepela Dec 2004 B1
6829160 Qi et al. Dec 2004 B1
6829819 Crue, Jr. et al. Dec 2004 B1
6833979 Knapp et al. Dec 2004 B1
6834010 Qi et al. Dec 2004 B1
6842312 Alstrin et al. Jan 2005 B1
6859343 Alfoqaha et al. Feb 2005 B1
6859997 Tong et al. Mar 2005 B1
6861756 Saito et al. Mar 2005 B2
6861937 Feng et al. Mar 2005 B1
6870712 Chen et al. Mar 2005 B2
6873494 Chen et al. Mar 2005 B2
6873547 Shi et al. Mar 2005 B1
6879464 Sun et al. Apr 2005 B2
6888184 Shi et al. May 2005 B1
6888253 Rogers et al. May 2005 B1
6888704 Diao et al. May 2005 B1
6891702 Tang May 2005 B1
6894871 Alfoqaha et al. May 2005 B2
6894877 Crue, Jr. et al. May 2005 B1
6906894 Chen et al. Jun 2005 B2
6909578 Missell et al. Jun 2005 B1
6912106 Chen et al. Jun 2005 B1
6929957 Min et al. Aug 2005 B2
6934113 Chen Aug 2005 B1
6934129 Zhang et al. Aug 2005 B1
6940688 Jiang et al. Sep 2005 B2
6942824 Li Sep 2005 B1
6943993 Chang et al. Sep 2005 B2
6944938 Crue, Jr. et al. Sep 2005 B1
6944939 Guo et al. Sep 2005 B2
6947258 Li Sep 2005 B1
6950266 McCaslin et al. Sep 2005 B1
6954332 Hong et al. Oct 2005 B1
6958885 Chen et al. Oct 2005 B1
6961221 Niu et al. Nov 2005 B1
6969989 Mei Nov 2005 B1
6975486 Chen et al. Dec 2005 B2
6987643 Seagle Jan 2006 B1
6989962 Dong et al. Jan 2006 B1
6989972 Stoev et al. Jan 2006 B1
7006327 Krounbi et al. Feb 2006 B2
7007372 Chen et al. Mar 2006 B1
7012832 Sin et al. Mar 2006 B1
7023658 Knapp et al. Apr 2006 B1
7026063 Ueno et al. Apr 2006 B2
7027268 Zhu et al. Apr 2006 B1
7027274 Sin et al. Apr 2006 B1
7035046 Young et al. Apr 2006 B1
7041985 Wang et al. May 2006 B1
7046490 Ueno et al. May 2006 B1
7054113 Seagle et al. May 2006 B1
7057857 Niu et al. Jun 2006 B1
7059868 Yan Jun 2006 B1
7092195 Liu et al. Aug 2006 B1
7106549 Asakura Sep 2006 B2
7110289 Sin et al. Sep 2006 B1
7111382 Knapp et al. Sep 2006 B1
7113366 Wang et al. Sep 2006 B1
7114241 Kubota et al. Oct 2006 B2
7116517 He et al. Oct 2006 B1
7124654 Davies et al. Oct 2006 B1
7126788 Liu et al. Oct 2006 B1
7126790 Liu et al. Oct 2006 B1
7130165 Macken et al. Oct 2006 B2
7131346 Buttar et al. Nov 2006 B1
7133253 Seagle et al. Nov 2006 B1
7134185 Knapp et al. Nov 2006 B1
7154715 Yamanaka et al. Dec 2006 B2
7170725 Zhou et al. Jan 2007 B1
7177117 Jiang et al. Feb 2007 B1
7193807 Liikanen et al. Mar 2007 B1
7193815 Stoev et al. Mar 2007 B1
7196880 Anderson et al. Mar 2007 B1
7199974 Alfoqaha Apr 2007 B1
7199975 Pan Apr 2007 B1
7211339 Seagle et al. May 2007 B1
7212384 Stoev et al. May 2007 B1
7229706 Hasegawa et al. Jun 2007 B2
7238292 He et al. Jul 2007 B1
7239478 Sin et al. Jul 2007 B1
7248431 Liu et al. Jul 2007 B1
7248433 Stoev et al. Jul 2007 B1
7248449 Seagle Jul 2007 B1
7259927 Harris Aug 2007 B2
7271970 Tsuchiya Sep 2007 B2
7280325 Pan Oct 2007 B1
7283327 Liu et al. Oct 2007 B1
7284316 Huai et al. Oct 2007 B1
7286329 Chen et al. Oct 2007 B1
7289303 Sin et al. Oct 2007 B1
7292409 Stoev et al. Nov 2007 B1
7296339 Yang et al. Nov 2007 B1
7301734 Guo et al. Nov 2007 B2
7307814 Seagle et al. Dec 2007 B1
7307818 Park et al. Dec 2007 B1
7310204 Stoev et al. Dec 2007 B1
7315072 Watanabe Jan 2008 B2
7318947 Park et al. Jan 2008 B1
7333295 Medina et al. Feb 2008 B1
7337530 Stoev et al. Mar 2008 B1
7342752 Zhang et al. Mar 2008 B1
7349170 Rudman et al. Mar 2008 B1
7349179 He et al. Mar 2008 B1
7354664 Jiang et al. Apr 2008 B1
7363697 Dunn et al. Apr 2008 B1
7371152 Newman May 2008 B1
7372168 Wu et al. May 2008 B2
7372665 Stoev et al. May 2008 B1
7375926 Stoev et al. May 2008 B1
7379269 Krounbi et al. May 2008 B1
7386933 Krounbi et al. Jun 2008 B1
7389577 Shang et al. Jun 2008 B1
7390584 Daughton et al. Jun 2008 B2
7405907 Raastad Jul 2008 B2
7408730 Yamagishi Aug 2008 B2
7417832 Erickson et al. Aug 2008 B1
7419891 Chen et al. Sep 2008 B1
7428124 Song et al. Sep 2008 B1
7430098 Song et al. Sep 2008 B1
7436620 Kang et al. Oct 2008 B1
7436632 Li et al. Oct 2008 B2
7436638 Pan Oct 2008 B1
7440220 Kang et al. Oct 2008 B1
7443632 Stoev et al. Oct 2008 B1
7444740 Chung et al. Nov 2008 B1
7493688 Wang et al. Feb 2009 B1
7508627 Zhang et al. Mar 2009 B1
7522377 Jiang et al. Apr 2009 B1
7522379 Krounbi et al. Apr 2009 B1
7522382 Pan Apr 2009 B1
7542246 Song et al. Jun 2009 B1
7551393 Biskeborn Jun 2009 B2
7551406 Thomas et al. Jun 2009 B1
7552523 He et al. Jun 2009 B1
7554767 Hu et al. Jun 2009 B1
7583466 Kermiche et al. Sep 2009 B2
7595967 Moon et al. Sep 2009 B1
7639457 Chen et al. Dec 2009 B1
7660080 Liu et al. Feb 2010 B1
7672080 Tang et al. Mar 2010 B1
7672086 Jiang Mar 2010 B1
7684160 Erickson et al. Mar 2010 B1
7688546 Bai et al. Mar 2010 B1
7691434 Zhang et al. Apr 2010 B1
7695761 Shen et al. Apr 2010 B1
7719795 Hu et al. May 2010 B2
7726009 Liu et al. Jun 2010 B1
7729086 Song et al. Jun 2010 B1
7729087 Stoev et al. Jun 2010 B1
7736823 Wang et al. Jun 2010 B1
7785666 Sun et al. Aug 2010 B1
7796356 Fowler et al. Sep 2010 B1
7800858 Bajikar et al. Sep 2010 B1
7819979 Chen et al. Oct 2010 B1
7829264 Wang et al. Nov 2010 B1
7846643 Sun et al. Dec 2010 B1
7855854 Hu et al. Dec 2010 B2
7868362 Randazzo et al. Jan 2011 B2
7869160 Pan et al. Jan 2011 B1
7872824 Macchioni et al. Jan 2011 B1
7872833 Hu et al. Jan 2011 B2
7910267 Zeng et al. Mar 2011 B1
7911735 Sin et al. Mar 2011 B1
7911737 Jiang et al. Mar 2011 B1
7916426 Hu et al. Mar 2011 B2
7918013 Dunn et al. Apr 2011 B1
7961438 Mizuno et al. Jun 2011 B2
7968219 Jiang et al. Jun 2011 B1
7974048 Shimazawa et al. Jul 2011 B2
7982989 Shi et al. Jul 2011 B1
8008912 Shang Aug 2011 B1
8012804 Wang et al. Sep 2011 B1
8015692 Zhang et al. Sep 2011 B1
8018677 Chung et al. Sep 2011 B1
8018678 Zhang et al. Sep 2011 B1
8024748 Moravec et al. Sep 2011 B1
8072705 Wang et al. Dec 2011 B1
8074345 Anguelouch et al. Dec 2011 B1
8077418 Hu et al. Dec 2011 B1
8077434 Shen et al. Dec 2011 B1
8077435 Liu et al. Dec 2011 B1
8077557 Hu et al. Dec 2011 B1
8079135 Shen et al. Dec 2011 B1
8081403 Chen et al. Dec 2011 B1
8091210 Sasaki et al. Jan 2012 B1
8097846 Anguelouch et al. Jan 2012 B1
8104166 Zhang et al. Jan 2012 B1
8116043 Leng et al. Feb 2012 B2
8116171 Lee Feb 2012 B1
8125856 Li et al. Feb 2012 B1
8134794 Wang Mar 2012 B1
8136224 Sun et al. Mar 2012 B1
8136225 Zhang et al. Mar 2012 B1
8136805 Lee Mar 2012 B1
8139301 Li et al. Mar 2012 B1
8141235 Zhang Mar 2012 B1
8146236 Luo et al. Apr 2012 B1
8149536 Yang et al. Apr 2012 B1
8151441 Rudy et al. Apr 2012 B1
8163185 Sun et al. Apr 2012 B1
8164760 Willis Apr 2012 B2
8164855 Gibbons et al. Apr 2012 B1
8164864 Kaiser et al. Apr 2012 B2
8165709 Rudy Apr 2012 B1
8166631 Tran et al. May 2012 B1
8166632 Zhang et al. May 2012 B1
8169473 Yu et al. May 2012 B1
8171618 Wang et al. May 2012 B1
8179636 Bai et al. May 2012 B1
8191237 Luo et al. Jun 2012 B1
8194365 Leng et al. Jun 2012 B1
8194366 Li et al. Jun 2012 B1
8196285 Zhang et al. Jun 2012 B1
8200054 Li et al. Jun 2012 B1
8203800 Li et al. Jun 2012 B2
8208228 Maat et al. Jun 2012 B2
8208350 Hu et al. Jun 2012 B1
8220140 Wang et al. Jul 2012 B1
8222599 Chien Jul 2012 B1
8225488 Zhang et al. Jul 2012 B1
8227023 Liu et al. Jul 2012 B1
8228633 Tran et al. Jul 2012 B1
8231796 Li et al. Jul 2012 B1
8233248 Li et al. Jul 2012 B1
8248896 Yuan et al. Aug 2012 B1
8254060 Shi et al. Aug 2012 B1
8257597 Guan et al. Sep 2012 B1
8259410 Bai et al. Sep 2012 B1
8259539 Hu et al. Sep 2012 B1
8262918 Li et al. Sep 2012 B1
8262919 Luo et al. Sep 2012 B1
8264797 Emley Sep 2012 B2
8264798 Guan et al. Sep 2012 B1
8270126 Roy et al. Sep 2012 B1
8276258 Tran et al. Oct 2012 B1
8277669 Chen et al. Oct 2012 B1
8279719 Hu et al. Oct 2012 B1
8284517 Sun et al. Oct 2012 B1
8288204 Wang et al. Oct 2012 B1
8289821 Huber Oct 2012 B1
8291743 Shi et al. Oct 2012 B1
8307539 Rudy et al. Nov 2012 B1
8307540 Tran et al. Nov 2012 B1
8308921 Hiner et al. Nov 2012 B1
8310785 Zhang et al. Nov 2012 B1
8310901 Batra et al. Nov 2012 B1
8315019 Mao et al. Nov 2012 B1
8316527 Hong et al. Nov 2012 B2
8320076 Shen et al. Nov 2012 B1
8320077 Tang et al. Nov 2012 B1
8320219 Wolf et al. Nov 2012 B1
8320220 Yuan et al. Nov 2012 B1
8320722 Yuan et al. Nov 2012 B1
8322022 Yi et al. Dec 2012 B1
8322023 Zeng et al. Dec 2012 B1
8325569 Shi et al. Dec 2012 B1
8333008 Sin et al. Dec 2012 B1
8334093 Zhang et al. Dec 2012 B2
8336194 Yuan et al. Dec 2012 B2
8339738 Tran et al. Dec 2012 B1
8341826 Jiang et al. Jan 2013 B1
8343319 Li et al. Jan 2013 B1
8343364 Gao et al. Jan 2013 B1
8349195 Si et al. Jan 2013 B1
8351307 Wolf et al. Jan 2013 B1
8357244 Zhao et al. Jan 2013 B1
8373945 Luo et al. Feb 2013 B1
8375564 Luo et al. Feb 2013 B1
8375565 Hu et al. Feb 2013 B2
8381391 Park et al. Feb 2013 B2
8384220 Saito et al. Feb 2013 B2
8385157 Champion et al. Feb 2013 B1
8385158 Hu et al. Feb 2013 B1
8394280 Wan et al. Mar 2013 B1
8400731 Li et al. Mar 2013 B1
8404128 Zhang et al. Mar 2013 B1
8404129 Luo et al. Mar 2013 B1
8405930 Li et al. Mar 2013 B1
8409453 Jiang et al. Apr 2013 B1
8413317 Wan et al. Apr 2013 B1
8416540 Li et al. Apr 2013 B1
8419953 Su et al. Apr 2013 B1
8419954 Chen et al. Apr 2013 B1
8422176 Leng et al. Apr 2013 B1
8422342 Lee Apr 2013 B1
8422841 Shi et al. Apr 2013 B1
8424192 Yang et al. Apr 2013 B1
8441756 Sun et al. May 2013 B1
8443510 Shi et al. May 2013 B1
8444866 Guan et al. May 2013 B1
8449948 Medina et al. May 2013 B2
8451556 Wang et al. May 2013 B1
8451563 Zhang et al. May 2013 B1
8454846 Zhou et al. Jun 2013 B1
8455119 Jiang et al. Jun 2013 B1
8456961 Wang et al. Jun 2013 B1
8456963 Hu et al. Jun 2013 B1
8456964 Yuan et al. Jun 2013 B1
8456966 Shi et al. Jun 2013 B1
8456967 Mallary Jun 2013 B1
8458892 Si et al. Jun 2013 B2
8462592 Wolf et al. Jun 2013 B1
8468682 Zhang Jun 2013 B1
8472288 Wolf et al. Jun 2013 B1
8480911 Osugi et al. Jul 2013 B1
8486285 Zhou et al. Jul 2013 B2
8486286 Gao et al. Jul 2013 B1
8488272 Tran et al. Jul 2013 B1
8491801 Tanner et al. Jul 2013 B1
8491802 Gao et al. Jul 2013 B1
8493693 Zheng et al. Jul 2013 B1
8493695 Kaiser et al. Jul 2013 B1
8495813 Hu et al. Jul 2013 B1
8498084 Leng et al. Jul 2013 B1
8506828 Osugi et al. Aug 2013 B1
8514517 Batra et al. Aug 2013 B1
8518279 Wang et al. Aug 2013 B1
8518832 Yang et al. Aug 2013 B1
8520336 Liu et al. Aug 2013 B1
8520337 Liu et al. Aug 2013 B1
8524068 Medina et al. Sep 2013 B2
8526275 Yuan et al. Sep 2013 B1
8531801 Xiao et al. Sep 2013 B1
8532450 Wang et al. Sep 2013 B1
8533937 Wang et al. Sep 2013 B1
8537494 Pan et al. Sep 2013 B1
8537495 Luo et al. Sep 2013 B1
8537502 Park et al. Sep 2013 B1
8542456 Yamane et al. Sep 2013 B2
8545999 Leng et al. Oct 2013 B1
8547659 Bai et al. Oct 2013 B1
8547667 Roy et al. Oct 2013 B1
8547730 Shen et al. Oct 2013 B1
8555486 Medina et al. Oct 2013 B1
8559141 Pakala et al. Oct 2013 B1
8563146 Zhang et al. Oct 2013 B1
8565049 Tanner et al. Oct 2013 B1
8576517 Tran et al. Nov 2013 B1
8578594 Jiang et al. Nov 2013 B2
8582238 Liu et al. Nov 2013 B1
8582241 Yu et al. Nov 2013 B1
8582253 Zheng et al. Nov 2013 B1
8588039 Shi et al. Nov 2013 B1
8593914 Wang et al. Nov 2013 B2
8597528 Roy et al. Dec 2013 B1
8599520 Liu et al. Dec 2013 B1
8599657 Lee Dec 2013 B1
8603593 Roy et al. Dec 2013 B1
8607438 Gao et al. Dec 2013 B1
8607439 Wang et al. Dec 2013 B1
8611035 Bajikar et al. Dec 2013 B1
8611054 Shang et al. Dec 2013 B1
8611055 Pakala et al. Dec 2013 B1
8614864 Hong et al. Dec 2013 B1
8619512 Yuan et al. Dec 2013 B1
8625233 Ji et al. Jan 2014 B1
8625941 Shi et al. Jan 2014 B1
8628672 Si et al. Jan 2014 B1
8630068 Mauri et al. Jan 2014 B1
8634280 Wang et al. Jan 2014 B1
8638529 Leng et al. Jan 2014 B1
8643980 Fowler et al. Feb 2014 B1
8649123 Zhang et al. Feb 2014 B1
8665561 Knutson et al. Mar 2014 B1
8670211 Sun et al. Mar 2014 B1
8670213 Zeng et al. Mar 2014 B1
8670214 Knutson et al. Mar 2014 B1
8670294 Shi et al. Mar 2014 B1
8670295 Hu et al. Mar 2014 B1
8675318 Ho et al. Mar 2014 B1
8675455 Krichevsky et al. Mar 2014 B1
8681594 Shi et al. Mar 2014 B1
8689430 Chen et al. Apr 2014 B1
8693141 Elliott et al. Apr 2014 B1
8703397 Zeng et al. Apr 2014 B1
8705205 Li et al. Apr 2014 B1
8711518 Zeng et al. Apr 2014 B1
8711528 Xiao et al. Apr 2014 B1
8717709 Shi et al. May 2014 B1
8720044 Tran et al. May 2014 B1
8721902 Wang et al. May 2014 B1
8724259 Liu et al. May 2014 B1
8749790 Tanner et al. Jun 2014 B1
8749920 Knutson et al. Jun 2014 B1
8753903 Tanner et al. Jun 2014 B1
8760807 Zhang et al. Jun 2014 B1
8760818 Diao et al. Jun 2014 B1
8760819 Liu et al. Jun 2014 B1
8760822 Li et al. Jun 2014 B1
8760823 Chen et al. Jun 2014 B1
8763235 Wang et al. Jul 2014 B1
8780498 Jiang et al. Jul 2014 B1
8780505 Xiao Jul 2014 B1
8786983 Liu et al. Jul 2014 B1
8790524 Luo et al. Jul 2014 B1
8790527 Luo et al. Jul 2014 B1
8792208 Liu et al. Jul 2014 B1
8792312 Wang et al. Jul 2014 B1
8793866 Zhang et al. Aug 2014 B1
8797680 Luo et al. Aug 2014 B1
8797684 Tran et al. Aug 2014 B1
8797686 Bai et al. Aug 2014 B1
8797692 Guo et al. Aug 2014 B1
8813324 Emley et al. Aug 2014 B2
8824106 Garfunkel et al. Sep 2014 B1
8873204 Gao et al. Oct 2014 B1
8908333 Rudy et al. Dec 2014 B1
8970988 Li et al. Mar 2015 B1
9042058 Li et al. May 2015 B1
9042059 Katine May 2015 B1
20100290157 Zhang et al. Nov 2010 A1
20110086240 Xiang et al. Apr 2011 A1
20120111826 Chen et al. May 2012 A1
20120216378 Emley et al. Aug 2012 A1
20120237878 Zeng et al. Sep 2012 A1
20120298621 Gao Nov 2012 A1
20130216702 Kaiser et al. Aug 2013 A1
20130216863 Li et al. Aug 2013 A1
20130257421 Shang et al. Oct 2013 A1
20140154529 Yang et al. Jun 2014 A1
20140175050 Zhang et al. Jun 2014 A1
20160005425 McKinlay Jan 2016 A1
20160055868 Gao et al. Feb 2016 A1
20170092305 Deen et al. Mar 2017 A1
20170098459 Mastain Apr 2017 A1
Non-Patent Literature Citations (1)
Entry
Shaoping Li, et al., U.S. Appl. No. 13/928,799, filed Jun. 27, 2013, 27 pages.