Number | Name | Date | Kind |
---|---|---|---|
4988284 | LiU et al. | Jan 1991 | |
5532496 | Gaston | Jul 1996 | |
5657235 | Liebmann et al. | Aug 1997 | |
5665968 | Meisburger et al. | Sep 1997 | |
5717204 | Meisburger et al. | Feb 1998 | |
5736281 | Watson | Apr 1998 | |
5740068 | Liebmann et al. | Apr 1998 |
Entry |
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Wolf et al., "Silicon Processing for the VLSI Era", vol. 1: Process Technology, Lattice Press, Sunset Beach, CA, 1986, p. 500. |