The broken lines shown in the drawings represent portions of the arm for wafer transportation for manufacturing semiconductor that form no part of the claimed design.
The broken lines shown in the drawings represent portions of the arm for wafer transportation for manufacturing semiconductor that form no part of the claimed design.
Number | Date | Country | Kind |
---|---|---|---|
2011-024075 | Oct 2011 | JP | national |
Number | Name | Date | Kind |
---|---|---|---|
6167322 | Holbrooks | Dec 2000 | A |
6190114 | Ogawa et al. | Feb 2001 | B1 |
6216883 | Kobayashi et al. | Apr 2001 | B1 |
6293749 | Raaijmakers et al. | Sep 2001 | B1 |
6409453 | Brodine et al. | Jun 2002 | B1 |
6991419 | Kim | Jan 2006 | B2 |
7186297 | Asano | Mar 2007 | B2 |
D559805 | Hosaka | Jan 2008 | S |
7334826 | Woodruff et al. | Feb 2008 | B2 |
D589474 | Ogasawara et al. | Mar 2009 | S |
D589912 | Ogasawara et al. | Apr 2009 | S |
7578649 | Caveney et al. | Aug 2009 | B2 |
7611182 | Kim et al. | Nov 2009 | B2 |
7654596 | Mantz | Feb 2010 | B2 |
D614152 | Lee et al. | Apr 2010 | S |
D673923 | Kajiwara | Jan 2013 | S |
D674365 | Kajiwara | Jan 2013 | S |
D674366 | Kajiwara | Jan 2013 | S |
D674761 | Iida et al. | Jan 2013 | S |
20010051088 | Park et al. | Dec 2001 | A1 |
20040070914 | Ferreres | Apr 2004 | A1 |
20070031222 | Hosaka et al. | Feb 2007 | A1 |