TOKYO ELECTRON LIMITED

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas cluster processing device and gas cluster processing method
- Patent number 12,172,198
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Kazuya Dobashi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,176,224
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Kazuhiro Aiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
State determination device, state determination method, and compute...
- Patent number 12,176,227
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Junnosuke Maki
- G05 - CONTROLLING REGULATING
Information Patent Grant
RF voltage and current (V-I) sensors and measurement methods
- Patent number 12,176,183
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Barton Lane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D nano sheet method using 2D material integrated with conductive o...
- Patent number 12,176,249
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- H. Jim Fulford
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and processing method
- Patent number 12,173,405
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Hiroki Iriuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method and plasma processing apparatus
- Patent number 12,176,187
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Chishio Koshimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inter-tier power delivery network (PDN) for dense gate-on-gate 3D l...
- Patent number 12,176,293
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Lars Liebmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cyclic low temperature film growth processes
- Patent number 12,176,204
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Jianping Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device, and film-forming device
- Patent number 12,173,401
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Zeyuan Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid amount measuring method and computer-readable recording medium
- Patent number 12,174,549
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- B08 - CLEANING
Information Patent Grant
Transfer device, processing system, and transfer method
- Patent number 12,170,216
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Shinya Okano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-dimensional device with vertical core and bundled wiring
- Patent number 12,170,326
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Mark I. Gardner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and abnormality detection method
- Patent number 12,170,217
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Hiroaki Chihaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation method and film formation device
- Patent number 12,168,825
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Michitaka Aita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature estimation apparatus, plasma processing system, tempera...
- Patent number 12,170,193
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Yuki Kataoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method and plasma processing apparatus
- Patent number 12,170,198
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Hiroyuki Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,170,209
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Takashi Yabuta
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Gas supply system, plasma processing apparatus, and gas supply method
- Patent number 12,170,187
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Atsushi Sawachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical diagnostics of semiconductor process using hyperspectral im...
- Patent number 12,165,937
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Yan Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate support and substrate processing apparatus
- Patent number 12,165,854
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Nobutaka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method and deposition apparatus
- Patent number 12,163,220
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Yu Komai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control method and plasma processing apparatus
- Patent number 12,165,842
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Chishio Koshimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and method of controlling vacuum proces...
- Patent number 12,165,908
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,163,215
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Koji Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing substrate with sensor
- Patent number 12,167,542
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,165,846
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Eiki Kamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method, substrate processing apparatus, and me...
- Patent number 12,165,848
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Kenichi Oyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode for plasma processing apparatus and plasma processing app...
- Patent number 12,165,850
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Takaki Kobune
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical amplification methods and techniques for developable botto...
- Patent number 12,165,870
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Steven Scheer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240429027
- Publication date Dec 26, 2024
- TOKYO ELECTRON LIMITED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALUMINA CERAMIC MEMBER, METHOD FOR MANUFACTURING ALUMINA CERAMIC ME...
- Publication number 20240429031
- Publication date Dec 26, 2024
- TOKYO ELECTRON LIMITED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20240429033
- Publication date Dec 26, 2024
- TOKYO ELECTRON LIMITED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM, ELECTROSTATIC CARRIER, AND PROCESSING METHOD
- Publication number 20240429073
- Publication date Dec 26, 2024
- TOKYO ELECTRON LIMITED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE, CONTROL METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20240427317
- Publication date Dec 26, 2024
- TOKYO ELECTRON LIMITED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Teaching Transfer Robot and Substrate Processing System
- Publication number 20240424666
- Publication date Dec 26, 2024
- TOKYO ELECTRON LIMITED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240429068
- Publication date Dec 26, 2024
- Tokyo Electron Limited
- B08 - CLEANING
Information Patent Application
METHOD OF DEPOSITION IN HIGH ASPECT RATIO (HAR) FEATURES
- Publication number 20240420965
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Shihsheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID CIRCULATION SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND LIQU...
- Publication number 20240420970
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Takao OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240420923
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Manabu ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS
- Publication number 20240420359
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Toshihiro KITAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FORMATION OF SUB-LITHOGRAPHIC MANDREL PATTERNS USING REVERSIBLE OVE...
- Publication number 20240419074
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Michael Murphy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHODS FOR BEAM PROCESSING OF SUBSTRATES
- Publication number 20240419080
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Mirko Vukovic
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING METHOD AND PROCESSING SYSTEM
- Publication number 20240416450
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Kazuya HISANO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
HYBRID MODELING FOR FILM METROLOGY
- Publication number 20240419885
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Yan CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING A FLUID HEIGHT AND/OR A FLUID V...
- Publication number 20240421009
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY ON A...
- Publication number 20240420973
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SENSOR FOR FILM THICKNESS MEASUREMENT
- Publication number 20240418501
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A...
- Publication number 20240420974
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...
- Publication number 20240410050
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Naoki WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS TREATMENT METHOD AND GAS TREATMENT DEVICE
- Publication number 20240412978
- Publication date Dec 12, 2024
- Tokyo Electron Limited
- Kimihiko DEMICHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20240413022
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Keisuke SAKAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240412976
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Susumu HAYAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE ADJUSTING SYSTEM, TEMPERATURE ADJUSTING METHOD, SUBSTRA...
- Publication number 20240412955
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Masahiko YOKOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
- Publication number 20240412970
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Kiyotaka IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Remote Plasma Device and Plasma Processing Apparatus
- Publication number 20240412949
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
- Publication number 20240413146
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Tetsu OHTOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SINGLE WAFER PROCESSING SYSTEM FOR PROCESSING OF SEMICON...
- Publication number 20240399422
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Shan Hu
- B08 - CLEANING
Information Patent Application
TEMPERATURE CALIBRATION SYSTEM, INSPECTION APPARATUS, AND TEMPERATU...
- Publication number 20240402021
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Tomohiro OTA
- G01 - MEASURING TESTING
Information Patent Application
NON-PLANAR TRANSISTOR STRUCTURES AND METHODS OF MANUFACTURING THEREOF
- Publication number 20240405022
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Eric Chih-Fang LIU
- H01 - BASIC ELECTRIC ELEMENTS

Trademarklast 30 trademarks

Information Trademark
79412496 - HERB
- Serial number 79412496
- Filing date Nov 8, 2024
- TOKYO ELECTRON LIMITED
- 7 - Machines and machine tools
Information Trademark
79407112 - XPIN360
- Serial number 79407112
- Filing date Aug 23, 2024
- TOKYO ELECTRON LIMITED
- 7 - Machines and machine tools
Information Trademark
79395091 - EVAROS
- Serial number 79395091
- Registration number 7574994
- Filing date Mar 14, 2024
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79392983 - EXINSIGHT
- Serial number 79392983
- Registration number 7592799
- Filing date Feb 7, 2024
- Tokyo Electron Limited
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
79392290 - UCVD
- Serial number 79392290
- Registration number 7574975
- Filing date Jan 29, 2024
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79386332 - ONE TEL, DIFFERENT TOGETHER
- Serial number 79386332
- Registration number 7602518
- Filing date Nov 22, 2023
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79386798 - ZEREKA
- Serial number 79386798
- Registration number 7574899
- Filing date Nov 9, 2023
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
98218371 - EP333
- Serial number 98218371
- Filing date Oct 11, 2023
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79376812 - DR.WAFER
- Serial number 79376812
- Registration number 7561513
- Filing date Jun 16, 2023
- Tokyo Electron Limited
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
79372872 - TEL
- Serial number 79372872
- Registration number 7525678
- Filing date Mar 13, 2023
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79367157 - TEL
- Serial number 79367157
- Registration number 7490640
- Filing date Jan 10, 2023
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79363243 - ANALYTICORE
- Serial number 79363243
- Registration number 7215594
- Filing date Dec 27, 2022
- Tokyo Electron Limited
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
79359707 - KAGURAS
- Serial number 79359707
- Registration number 7147603
- Filing date Nov 4, 2022
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79354851 - ZEXSTA
- Serial number 79354851
- Registration number 7147589
- Filing date Sep 20, 2022
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79349711 - EXTREMER
- Serial number 79349711
- Registration number 7147576
- Filing date Jul 20, 2022
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79344441 - ESPERT
- Serial number 79344441
- Registration number 6920432
- Filing date May 9, 2022
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79344045 - VARCAS
- Serial number 79344045
- Registration number 6920431
- Filing date Apr 12, 2022
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79342273 - ANALYTICORE
- Serial number 79342273
- Registration number 6970479
- Filing date Mar 16, 2022
- Tokyo Electron Limited
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
79337953 - LETIOS
- Serial number 79337953
- Registration number 6920414
- Filing date Nov 9, 2021
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79325803 - TECHNOLOGY ENABLING LIFE
- Serial number 79325803
- Registration number 6817014
- Filing date Sep 24, 2021
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79315459 - LITHIUS PRO DICE
- Serial number 79315459
- Registration number 6841425
- Filing date May 24, 2021
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79306973 - REACTOR SET TOOL-I
- Serial number 79306973
- Registration number 6655756
- Filing date Jan 13, 2021
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
90459337 - E-COMPASS
- Serial number 90459337
- Registration number 6642952
- Filing date Jan 11, 2021
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79305091 - EXINSIGHT
- Serial number 79305091
- Registration number 6481254
- Filing date Dec 2, 2020
- Tokyo Electron Limited
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
79315018 - ACTIA
- Serial number 79315018
- Registration number 6549817
- Filing date Sep 17, 2020
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79298606 - UDEMAE
- Serial number 79298606
- Registration number 6564708
- Filing date Sep 17, 2020
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79291807 - VIGUS
- Serial number 79291807
- Registration number 6450917
- Filing date Jul 21, 2020
- Tokyo Electron Limited
- 7 - Machines and machine tools
Information Trademark
79281074 - INFIZEX
- Serial number 79281074
- Registration number 6115614
- Filing date Jan 17, 2020
- TOKYO ELECTRON LIMITED
- 7 - Machines and machine tools
Information Trademark
88729194 - HYPERGEM
- Serial number 88729194
- Registration number 6209097
- Filing date Dec 16, 2019
- Tokyo Electron Limited
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
79278350 - OPTCURE
- Serial number 79278350
- Registration number 6093287
- Filing date Dec 9, 2019
- Tokyo Electron Limited
- 7 - Machines and machine tools

TOKYO ELECTRON LIMITED

Organization

Patents Grantslast 30 patents

Gas cluster processing device and gas cluster processing method

Substrate processing apparatus and substrate processing method

State determination device, state determination method, and compute...

RF voltage and current (V-I) sensors and measurement methods

3D nano sheet method using 2D material integrated with conductive o...

Processing apparatus and processing method

Cleaning method and plasma processing apparatus

Inter-tier power delivery network (PDN) for dense gate-on-gate 3D l...

Cyclic low temperature film growth processes

Method for manufacturing semiconductor device, and film-forming device

Liquid amount measuring method and computer-readable recording medium

Transfer device, processing system, and transfer method

Three-dimensional device with vertical core and bundled wiring

Substrate processing apparatus and abnormality detection method

Film formation method and film formation device

Temperature estimation apparatus, plasma processing system, tempera...

Deposition method and plasma processing apparatus

Substrate processing apparatus and substrate processing method

Gas supply system, plasma processing apparatus, and gas supply method

Optical diagnostics of semiconductor process using hyperspectral im...

Substrate support and substrate processing apparatus

Deposition method and deposition apparatus

Control method and plasma processing apparatus

Vacuum processing apparatus and method of controlling vacuum proces...

Film forming apparatus and film forming method

Method for manufacturing substrate with sensor

Plasma processing apparatus and plasma processing method

Substrate processing method, substrate processing apparatus, and me...

Electrode for plasma processing apparatus and plasma processing app...

Chemical amplification methods and techniques for developable botto...

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

ALUMINA CERAMIC MEMBER, METHOD FOR MANUFACTURING ALUMINA CERAMIC ME...

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PROCESSING SYSTEM, ELECTROSTATIC CARRIER, AND PROCESSING METHOD

CONTROL DEVICE, CONTROL METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM

Method for Teaching Transfer Robot and Substrate Processing System

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD OF DEPOSITION IN HIGH ASPECT RATIO (HAR) FEATURES

LIQUID CIRCULATION SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND LIQU...

PLASMA PROCESSING APPARATUS

PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS

FORMATION OF SUB-LITHOGRAPHIC MANDREL PATTERNS USING REVERSIBLE OVE...

APPARATUS AND METHODS FOR BEAM PROCESSING OF SUBSTRATES

PROCESSING METHOD AND PROCESSING SYSTEM

HYBRID MODELING FOR FILM METROLOGY

SYSTEMS AND METHODS FOR DETERMINING A FLUID HEIGHT AND/OR A FLUID V...

SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY ON A...

OPTICAL SENSOR FOR FILM THICKNESS MEASUREMENT

SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A...

STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...

GAS TREATMENT METHOD AND GAS TREATMENT DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

TEMPERATURE ADJUSTING SYSTEM, TEMPERATURE ADJUSTING METHOD, SUBSTRA...

MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE

Remote Plasma Device and Plasma Processing Apparatus

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

METHOD AND SINGLE WAFER PROCESSING SYSTEM FOR PROCESSING OF SEMICON...

TEMPERATURE CALIBRATION SYSTEM, INSPECTION APPARATUS, AND TEMPERATU...

NON-PLANAR TRANSISTOR STRUCTURES AND METHODS OF MANUFACTURING THEREOF

Trademarklast 30 trademarks

79412496 - HERB

79407112 - XPIN360

79395091 - EVAROS

79392983 - EXINSIGHT

79392290 - UCVD

79386332 - ONE TEL, DIFFERENT TOGETHER

79386798 - ZEREKA

98218371 - EP333

79376812 - DR.WAFER

79372872 - TEL

79367157 - TEL

79363243 - ANALYTICORE

79359707 - KAGURAS

79354851 - ZEXSTA

79349711 - EXTREMER