Claims
- 1. A process for the preparation of a photoresist which process comprises the steps of
- (i) preparing a layer which comprises a composition comprising a photoinitiator system and an oligomer, which is linear or branched, which oligomer
- (a) comprises on average at least one in-chain residue of the general formula ##STR12## and; (b) has one or more pendant and/or terminal acyloxymethyl groups, wherein the acyloxy group is derived from a polymerizable olefinically unsaturated carboxylic acid;
- wherein Ar.sup.1 is an aromatic group or a substituted aromatic group;
- R.sup.1 is hydrogen or a hydrocarbyl group;
- X is a group which activates Ar.sup.1 to electrophilic attack; and
- Y.sup.1 is an organic residue bearing a carboxyl substituent;
- (ii) exposing the layer imagewise to suitable electromagnetic radiation; and
- (iii) treating the layer with a dilute solution of base to remove the unexposed regions of the layer.
- 2. The process according to claim 1 wherein said oligomer comprises one or more residues of the general formula ##STR13## wherein Ar.sup.2, which is the same as or different from Ar.sup.1, is an aromatic group or a substituted aromatic group; and
- R.sup.2, which is the same as or different from R.sup.1, is hydrogen or a hydrocarbyl group.
- 3. The process according to claim 1 wherein Ar.sup.1 is mononuclear.
- 4. The process according to claim 2 wherein Ar.sup.2 has the structure phenylene-y.sup.2 -phenylene and Y.sup.2 is a direct link between two phenylene groups, or a divalent residue which includes one or more in-chain atoms, each of which atoms is carbon or a hereto atom and has one or more atoms appendant thereto.
- 5. The process according to claim 4 wherein Y.sup.2 is oxygen.
- 6. The process according to claim 2 wherein the molar ratio of the residue ##STR14## to the residue ##STR15## is between 3:1 and 1:3.
- 7. The process according to claim 1 wherein X is oxygen.
- 8. The process according to claim 1 wherein in Y.sup.1 is ##STR16##
- 9. The process according to claim 1 wherein the polymerizable olefinically unsaturated carboxylic acid is acrylic acid or methacrylic acid.
- 10. The process according to claim 1 comprising an addition polymerizable olefinically unsaturated monomer which is copolymerizable with the oligomer defined therein.
- 11. The process according to claim 1 wherein the photo-initiator system is (a) Michler's ketone and benzophenone; (b) camphorquinone and N,N-dimethylaminoethylmethacrylate; (c) fluorenone and N,N-dimethylaminoethyl methacrylate; (d) coumarin; (e) hexaarylbisimidazole and leuco dye; (f) cyclohexadienone-leuco dye; (g) dimethoxyphenylacetophenone; or (h) diethoxyacetophenone.
- 12. The process according to claim 11 wherein the weight ratio of Michler's ketone and benzophenone is about 1:4.
- 13. The process according to claim 11 wherein the weight ratio of camphorquinone or fluorenone and N,N-dimethylaminoethyl methacrylate is about 1:1.
- 14. The process according to claim 1 wherein the photo-initiator system is a substituted benzil.
- 15. The process according to claim 1 further comprising the step of exposing the layer to UV radiation after exposing the layer imagewise to suitable electromagnetic radiation and prior to treating the layer with a dilute solution of base.
- 16. The process according to claim 15 wherein the base is an alkali metal hydroxide or a base reacting alkali metal salt of a weak acid.
- 17. The process according to claim 1 wherein the layer is prepared on a support film.
Priority Claims (2)
Number |
Date |
Country |
Kind |
8412264 |
May 1984 |
GBX |
|
8502040 |
Jan 1985 |
GBX |
|
Parent Case Info
This is a division of application Ser. No. 733,920, filed May 14, 1985, now U.S. Pat. No. 4,743,663.
US Referenced Citations (5)
Foreign Referenced Citations (3)
Number |
Date |
Country |
0059649 |
Sep 1982 |
EPX |
0112650 |
Jul 1984 |
EPX |
1408265 |
Oct 1975 |
GBX |
Divisions (1)
|
Number |
Date |
Country |
Parent |
733920 |
May 1985 |
|