Number | Name | Date | Kind |
---|---|---|---|
4158035 | Haase et al. | Jun 1979 | |
4162896 | Hosli | Jul 1979 | |
4276048 | Leaback | Jun 1981 | |
4461328 | Kenney | Jul 1984 | |
4478094 | Salomaa et al. | Oct 1984 | |
4599315 | Terasaki et al. | Jul 1986 | |
4619899 | Nikitin et al. | Oct 1986 | |
4664097 | McGrath et al. | May 1987 | |
4695547 | Hilliard et al. | Sep 1987 |
Entry |
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"Fabrication of Microstructures Using the Liga Process", by W. Ehrfeld, et al., Proceedings of the IEEE Micro-Robots and Teleoperators Workshop, Hyannis, Mass., 1987, IEEE Catalog No. 87TH0204-8. |