Number | Name | Date | Kind |
---|---|---|---|
4054531 | Takahashi et al. | Oct 1977 | |
4219866 | Maher | Aug 1980 | |
4223369 | Burn | Sep 1980 | |
4812426 | Takagi et al. | Mar 1989 |
Entry |
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"Electrical Properties of Al.sub.2 O.sub.3 -Ta.sub.2 O.sub.5 Composite Dielectric Thin Films Prepared by RF Reactive Sputtering", by K. Nomura, Journal of the Electrochemical Society, Solid-State Science And Technolgy, vol. 134, No. 4, Apr. 1987, pp. 922-925. |
"Some Properties of RF Sputtered Al.sub.2 O.sub.3 -Ta.sub.2 O.sub.5 Composite Thin Films", by K. Nomura, J. Electrochem. Soc., vol. 138, No. 12, Dec. 1991, pp. 3701-3705. |