Number | Name | Date | Kind |
---|---|---|---|
3411908 | Crawford et al. | Nov 1968 | |
3531314 | Kerr et al. | Sep 1970 | |
3582339 | Martens et al. | Jun 1971 | |
3607345 | Thomas et al. | Sep 1971 | |
3630742 | Crawford et al. | Dec 1971 | |
3837886 | Tatsuta et al. | Sep 1974 | |
3860427 | Matsuo et al. | Jan 1975 | |
3874877 | Omichi et al. | Apr 1975 | |
3888753 | Kiikka et al. | Jun 1975 | |
4055685 | Bayer et al. | Oct 1977 | |
4087574 | Yamaguchi et al. | May 1978 | |
4229523 | Ohta et al. | Oct 1980 | |
4241169 | Work, III et al. | Dec 1980 | |
4363872 | Ealding | Dec 1982 | |
4394442 | Miller | Jul 1983 | |
4429032 | Matthe et al. | Jan 1984 | |
4451497 | Dolezalek et al. | May 1984 | |
4518681 | Johnson et al. | May 1985 | |
4701403 | Miller | Oct 1987 | |
4993267 | Allard et al. | Feb 1991 | |
5004669 | Yamada et al. | Apr 1991 | |
5244780 | Strobel et al. | Sep 1993 | |
5295039 | Nakjima et al. | Mar 1994 | |
5425980 | Grace et al. | Jun 1995 | |
5558843 | Glocker et al. | Sep 1996 | |
5582921 | Grace et al. | Dec 1996 |
Number | Date | Country |
---|---|---|
04168281 | Jun 1992 | JPX |
9428568 | Dec 1994 | WOX |
Entry |
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S. Kanazawa, M. Kogoma, T. Moriwaki and S. Okazaki, "Stable Glow Plasma At Atmospheric Pressure", J. Phys. D: Appl. Phys 21 (1988) 838-840. |
T. Yokoyama, M. Kogoma, S. Kanazawa, T. Moriwaki and S. Okazaki, "Glow Plasma Treatment at Atmospheric Pressure For Surface Modification and Film Deposition", J. Phys. 23 (1990). |
S. Kanazawa, M. Kogoma, S. Okazaki and T. Moriwaki, "the Improvement of the Atmospheric-Pressure Glow Plasma Method and the Deposition of Organic Films", Nuclear Instruments and Methods in Physics Research B37/38, (1989), 842-845. |
T. Yokoyama, M. Kogoma, T. Moriwaki and S. Okazaki, "The Mechanism of the Stabilization of Glow Plasma at Atmospheric Pressure", J. D: Appl. Phys, 23 (1990) 1125-1128. |
A. Nagata S. Takehiro, H. Sumi, M. Kogoma, Okazaki and Y. Horilike, "Downstream Etching and Depostion Employing Atmospheric Pressure Discharge", Proc. Jpn Symp. Plasma Chem 2 (1989) 109-112. |