Number | Name | Date | Kind |
---|---|---|---|
4457114 | Hennenfent et al. | Jul 1984 | |
4517041 | Hennenfent et al. | May 1985 | |
4536992 | Hennenfent et al. | Aug 1985 | |
4912883 | Chang | Apr 1990 | |
4914868 | Church | Apr 1990 |
Entry |
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IBM Technical Disclosure Bulletin; "Polishing Apparatus"; Grandison; vol. 13, No. 4 (Sep., 1970). |