| Number | Name | Date | Kind |
|---|---|---|---|
| 4457114 | Hennenfent et al. | Jul 1984 | |
| 4517041 | Hennenfent et al. | May 1985 | |
| 4536992 | Hennenfent et al. | Aug 1985 | |
| 4912883 | Chang | Apr 1990 | |
| 4914868 | Church | Apr 1990 |
| Entry |
|---|
| IBM Technical Disclosure Bulletin; "Polishing Apparatus"; Grandison; vol. 13, No. 4 (Sep., 1970). |