Claims
- 1. The method of reducing image artifact in an electron bombarded active pixel array device comprising the steps of
converting an optical image to a photoelectron flux distribution, accelerating said flux distribution toward an active pixel sensor array to interact therewith, interposing an array of collimators to constrain said photoelectron flux through a single collimator to parallel trajectories for normal incidence on at least one corresponding pixel.
- 2. The method in accordance with claim 1 in which said at least one corresponding pixel comprises a sub-array of pixels.
- 3. The method in accordance with claim 1 in which said array of collimators comprises a selected shape and each said collimator of said collimator array comprises a cross section transverse to said directed electron flux, said cross section comprising a shape geometrically similar to said selected shape and passing a photoelectron flux through said collimators and to said array of pixels.
- 4. The method of sensing an image projected on the rear surface of a back illuminated semiconductor pixel array, comprising
forming a P-doped layer of selected thickness on said rear surface to achieve a desired conductivity therein, whereby a conduction band potential barrier is created, preparing a flux distribution of electrons corresponding to said image, accelerating said electrons to a selected energy, intercepting said electrons on said P-doped layer of semiconductor, generating entirely within said P-doped layer a plurality of electron-hole pairs for each said selected energy electron, collecting said generated electrons at pixels correspondingly proximate each said generated electron-hole pair, whereby said pixel array contains information comprising said image.
- 5. The method of claim 4 wherein said step of forming comprises varying the conductivity of said P-doped layer within the thickness of said P-doped layer.
RELATED APPLICATIONS
[0001] This application is a continuation-in-part of U.S. Ser. No. 10/355,8388, filed Jan. 31, 2003.
Continuation in Parts (1)
|
Number |
Date |
Country |
Parent |
10355838 |
Jan 2003 |
US |
Child |
10795041 |
Mar 2004 |
US |