Baffle for substrate processing system

Information

  • Patent Grant
  • D1073758
  • Patent Number
    D1,073,758
  • Date Filed
    Thursday, October 13, 2022
    2 years ago
  • Date Issued
    Tuesday, May 6, 2025
    16 days ago
  • Inventors
    • Sathish; Karthik Adappa
    • Barnett; Cody (Beaverton, OR, US)
    • Basargi; Mitali Mrigendra
    • Kumar; Ravi (Beaverton, OR, US)
  • Original Assignees
  • Examiners
    • Vansant; Calvin E
    • Chen; Cheng
Abstract
Description


FIG. 1 is a top view of a baffle for a substrate processing system;



FIG. 2 is a bottom view of the baffle shown in FIG. 1;



FIG. 3 is a front view of the baffle shown in FIG. 1;



FIG. 4 is a back view of the baffle shown in FIG. 1;



FIG. 5 is a right-side view of the baffle shown in FIG. 1;



FIG. 6 is a left-side view of the baffle shown in FIG. 1;



FIG. 7 is a top perspective view of the baffle shown in FIG. 1; and,



FIG. 8 is a bottom perspective view of the baffle shown in FIG. 1.


Claims
  • The ornamental design for a baffle for a substrate processing system as shown and described.
US Referenced Citations (33)
Number Name Date Kind
D249541 Cattano, Sr. Sep 1978 S
D353910 Hayman Dec 1994 S
D491963 Doba Jun 2004 S
D582949 Yamashita Dec 2008 S
D638951 Bedingham May 2011 S
D658693 Suzuki May 2012 S
D694790 Matsumoto Dec 2013 S
D694791 Matsumoto Dec 2013 S
D697038 Matsumoto Jan 2014 S
D831086 Sakka Oct 2018 S
D891382 Koppa Jul 2020 S
D931240 Lee Sep 2021 S
D947914 Rao Apr 2022 S
D960216 Rao Aug 2022 S
D973609 Babu Dec 2022 S
D979524 Perry Feb 2023 S
D980813 Shin Mar 2023 S
D980814 Shin Mar 2023 S
D981970 Inada Mar 2023 S
D984895 Behnke May 2023 S
D985998 Sandoval May 2023 S
D990441 Lee Jun 2023 S
D1005974 Shin Nov 2023 S
D1037778 Agarwal Aug 2024 S
D1038049 Chowdhury Aug 2024 S
20070010007 Aysta Jan 2007 A1
20150041061 Shoji et al. Feb 2015 A1
20150187545 Lee Jul 2015 A1
20170040206 Schmotzer et al. Feb 2017 A1
20210249239 Apurva et al. Aug 2021 A1
20220051912 Yeh et al. Feb 2022 A1
20220122820 Konta Apr 2022 A1
20220122878 Wu et al. Apr 2022 A1
Foreign Referenced Citations (5)
Number Date Country
105789014 Jul 2016 CN
1644760 Nov 2019 JP
1652299 Feb 2020 JP
20190051291 May 2019 KR
D212326 Jun 2021 TW
Non-Patent Literature Citations (8)
Entry
Wsemi, (date retrieved Aug. 27, 2024), Upper GDP Chamber Liner 2300, Wsemi.com, URL: (https://wsemi.com/lam-research/715-801021-012), (Year: 2024).
Subaru, (date retrieved Aug. 26, 2024), Baffle Plate, Subaru.oempartsonline.com, URL: (https://subaru.oempartsonline.com/oem-parts/subaru-baffle-plate-28337ag010), (Year: 2024).
Cae, (date retrieved Aug. 27, 2024), Used Lam Research 2300 Versys Kiyo, Caeonline.com, URL: (https://caeonline.com/buy/etchers-ashers/lam-research-2300-versys-kiyo/9137280), (Year: 2024).
Tungaloy Corporation, (date published Sep. 20, 2022), Industry Solution—Heat Exchangers, Youtube.com, URL: (https://www.youtube.com/watch?v=swvn1cE-f1A&t=3s), (Year: 2020).
International Search Report and Written Opinion for international application No. PCT/US2023/034730 dated Feb. 1, 2024.
International Search Report and Written Opinion for international application No. PCT/US2024/011172 dated May 22, 2024.
Taiwanese Office Action for corresponding Taiwanese Application No. 112303579 dated Feb. 29, 2024.
Taiwanese Office Action for corresponding Taiwanese Application No. 112303579 dated Jan. 17, 2024.