Number | Name | Date | Kind |
---|---|---|---|
3438668 | Olsson et al. | Apr 1969 | |
3466079 | Mammel | Sep 1969 | |
3517958 | Boucher et al. | Jun 1970 | |
3523706 | Logue | Aug 1970 | |
3539216 | Forcier | Nov 1970 |
Entry |
---|
"Wafer Pickup Head", Leoff et al., IBM Technical Disclosure Bulletin, vol. 14, No. 8, Jan. 1972, pp. 2311-2312. |