Bistable micro-switch and method for manufacturing the same

Information

  • Patent Grant
  • 6384707
  • Patent Number
    6,384,707
  • Date Filed
    Thursday, February 15, 2001
    23 years ago
  • Date Issued
    Tuesday, May 7, 2002
    22 years ago
Abstract
The present invention provides a bistable switch using a shape memory alloy, and a method for manufacturing the same. More specifically, the bistable switch includes a substrate having at least one power source; a flexible sheet having a first distal end attached to the substrate; a bridge contact formed at a second and opposite distal end of the flexible sheet; and at least one heat activated element connected to a first surface of the flexible sheet and between the second distal end and the power source. During operation, current from the power source passing through the heat activated element to indirectly bend the flexible sheet and short the signal contacts on the substrate with a sustainable force.
Description




BACKGROUND OF THE INVENTION




1. Field of the Invention




2. Description of the Related Art




The first electro-mechanical and solid state micro-switches were developed in the late 1940's. Since that time, the electronics industry has pushed the manufacturing and functional limits for producing such switches. In particular, current electro-mechanical micro-switches exhibit technical inadequacies in size, cost, function, durability, and connection techniques for high frequency applications. In turn, solid state switches exhibit a characteristically high off-state to on-state impedance ratio, and for many applications, undesirably high values of on-state “contact” resistance in off-state coupling capacitance. Consequently, the electronics industry is currently looking into new and innovative ways to manufacture switches that can be smaller, more reliable, durable, functional, and cost efficient.




In a variety of present day and predicted circuit applications, a need exists for low cost, micro-miniature switching devices that can be fabricated on conventional hybrid circuit substrates or boards and have bistable capabilities. In addition, the manufacturing process for these devices should be compatible with conventional solid state techniques such as thin-film deposition and patterning procedures used to form the conductive paths, contact pads and passive circuit elements included in such circuits.




A shape memory alloy (“SMA”) is a known material capable of undergoing plastic deformation from a “deformed” shape to a “memory” shape when heated. If the SMA material is then allowed to cool, it will return partially to its deformed shape and can be fully returned to the deformed shape. In other words, the SMA material undergoes a reversible transformation from an austenitic state to a martensitic state with a change in temperature.




Research and development companies have only touched the surface of how this controllable shape deformation material can be used in switching structures. For example, conventional electro-mechanical switches have used SMA wires as a rotary actuator and bent SMA sheets as a valve. The wire is twisted or torsioned about its longitudinal axis and the ends of the wire are then constrained against movement. The sheet actuators are mechanically coupled to one or more movable elements such that the temperature-induced deformation of the actuators exerts a force or generates a motion of the mechanical elements.




The problems with these and similar SMA switch configurations and manufacturing techniques are similar to those described above for conventional electro-mechanical switches. In particular, constraints of size, reliability, durability, functionality, and cost limit the usefulness of prior art SMA switches.




In closing, conventional switches and relays, with or without the use of shape memory alloys, are normally large, bulky, or too fragile to be used for industrial purposes or mass production. Therefore, it would be advantageous to develop a switch or relay that can benefit from the characteristics of a shape memory alloy and eliminate the problems listed above of current switching technologies that may or may not use a shape memory alloy.




The present invention is directed to overcoming, or at least reducing the effects of, one or more of the problems set forth above.




SUMMARY OF THE INVENTION




In one embodiment, the present invention provides a bistable switch. The switch includes the following elements: a substrate having at least one power source; a flexible sheet having a first distal end attached to the substrate; a bridge contact formed at a second and opposite distal end of the flexible sheet; and at least one heat activated element connected to a first surface of the flexible sheet and between the second distal end and the power source, wherein current from the power source passing through the heat activated element indirectly bends the flexible sheet and shorts the signal contacts on the substrate with a sustainable force.




Another embodiment of the present invention provides a process for manufacturing a bistable switch for a substrate having signal line contacts and a power source. In particular, the process comprises providing a flexible sheet; connecting at least one heat activated element between a first distal end of the flexible sheet and the power source; forming a conductive bridge contact at the first distal end of the flexible sheet; and mounting a second and opposite distal end of the flexible sheet to the substrate, wherein current from the power source passing through the heat activated element indirectly bends the flexible sheet and shorts the signal contacts on the substrate.




The inventive structure provides a relatively simple and inexpensive way to produce bistable switches with performance levels not attainable with current solid state approaches using the standard semiconductor base unit, the transistor. This new and innovative micro-machine way of fabricating micro-switches will enable the users to build systems that can carry very high voltage, current, and frequency signals. This becomes possible since the micro-switch is conceptually equivalent to a micro-relay. In fact, this micro-switch is a mechanical micro-structure that moves to connect or disconnect conductive contacts. In addition, this design and method is compatible with standard silicon processing, allowing mass production at a reasonable cost.











BRIEF DESCRIPTION OF THE DRAWINGS




Other aspects and advantages of the invention will become apparent upon reading the following detailed description and upon reference to the drawings, in which:





FIG. 1

illustrates a perspective view of a bistable switch in accordance with one embodiment of the present invention;





FIG. 2

illustrates a general schematic layout of the inventive bistable switch of

FIG. 1

;




FIGS.


3


A and


3


B-


5


A and


5


B illustrate a process for manufacturing the bistable switch of

FIG. 1

;





FIGS. 6A and 6B

illustrate an alternative process step for manufacturing the bistable switch of

FIG. 1

to include a crimped arm portion;





FIGS. 7A and 7B

shows the bistable switch of

FIG. 6A

mounted and activated to illustrate a first and a second switch position;





FIG. 8

illustrates an alternative embodiment of the bistable switch of

FIG. 1

to include multiple bridge contacts; and





FIGS. 9A and 9B

illustrate still another embodiment of the inventive bistable switch.











While the invention is amenable to various modifications in alternative forms, specific embodiments thereof have been shown by way of example in the drawings and are herein described in detail. It should be understood, however, the description herein of specific embodiments is not intended to limit the invention to the particular forms disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.




DETAILED DESCRIPTION OF THE INVENTION




The present invention employs the unique properties of a shape memory alloy (“SMA”) with recent advances in micro-machining to develop an efficient, effective and highly reliable micro-switch. The use of an SMA in micro-switches increases the performance of switches or relays by several orders of magnitude. In particular, this is accomplished because both stress and strain of the shape memory effect can be very large, providing substantial work output per unit volume. Therefore, micro-mechanical switches using SMA as the actuation mechanism can exert stresses of hundreds of megapascals; tolerate strains of more than three percent; work at common TTL voltages that are much lower than electrostatic or PZO requirements; be directly powered with electrical leads on a chip; and survive millions of cycles without fatigue.




Shape memory alloys undergo a temperature related phase change beginning at temperatures above T


A


, which can be characterized by the ability of the alloy to recover any initial shape upon heating of the alloy above a temperature T


A


and below T


H


, regardless of mechanical deformation imposed on the alloy at temperature below T


A


. In operation, when the SMA material is at a temperature T


L


, below temperature T


A


, the SMA possesses a particular crystal structure whereby the material is ductile and may be deformed into an arbitrary shape with relative ease. Upon heating the SMA to a temperature T


H


, above temperature T


A


, the crystal structure changes in order to restore the SMA back to an initial, undeformed shape, to resume the originally imparted shape, thereby representing the onset of a restoring stress. Consequently, the transition temperature range of a shape memory alloy, over which the phase transformation occurs, is defined as being between T


H


and T


A


. The SMA is optimally deformed between 2 and 8% at temperatures below T


A


which deformation can be fully recovered upon heating of the SMA to between T


A


and T


H


. One preferred deformation is 4%.




These memory materials have been produced in bulk form primarily in the shape of wires, rods, and plates. The most conventional and readily available shape memory alloy is Nitinol, an alloy of nickel and titanium. However, other SMAs include copper-zinc-aluminum, or copper-aluminum-nickel. With a temperature change of as little as 18° C., Nitinol can go through its phase transformation and exert a very large force when exerted against a resistance to changing its shape. As discussed earlier, conventional switches and relays that use shape memory alloys generally operate on the principle of deforming the shape memory alloy while it is below phase transformation temperature range. Heating the deformed alloy above its transformation temperature range recovers all or part of the deformation, and the motion of the alloy moves the necessary mechanical elements.




Turning now to the drawings,

FIG. 1

illustrates a thermally-actuated bistable micro-mechanical switch


10


in accordance with one embodiment of the present invention. Actuating arm


12


of switch


10


is micro-machined and secured to an upper substrate surface


14


. Substrate


14


could include an insulated silicon or gallium-arsonide substrate, a printed circuit board, a flat plate of a ceramic material such as high density alumina (Al


2


O


3


) or beryllia (BeO), or a glassy material such as fused silica. However, persons of ordinary skill in the relevant arts should appreciate that the present inventive switch is not so limited, and therefore can be mounted to nearly any stable structure to provide the desired cantilever style bistable switch.




Upper surface


14


provides control contacts


16




a


,


16




b


and ground contact


18


to securely interconnect the respective control and ground contacts of arm


12


. In addition, upper substrate surface


14


provides signal contacts


20




a


and


20




b


to be bridged or shorted by conductive bridge contact


22


of arm


12


. Signal contacts


20




a


and


20




b


may carry or support any electrical signal, including, for example, conventional analog or digital data, or voice signals.




Top and bottom conductive path elements


24




a


and


24




b


couple to arm


12


by a conventional technique, and the two SMA elements


26




a


and


26




b


mount between the contact and ground vias on the top and bottom center beam of arm


12


. In one embodiment, SMA elements


26




a


and


26




b


are made from a wire of a titanium nickel alloy having a diameter of between about 25 and 125 microns.




During operation the above inventive switch provides the basic circuit structure as illustrated in FIG.


2


. In particular, when relay


30




a


is closed and relay


30




b


is open, current passing through the top conductive horseshoe-type path, composed of elements


16




a


,


24




a


,


26




a


, and


18


, will move arm


12


upward. In contrast, when relay


30




a


is open and relay


30




b


is closed, current passing through the bottom conductive horseshoe-type path, composed of elements


16




b


,


24




b


,


26




b


, and


18


, will move arm


12


downward. The force present during the thermal cooling stage is much less than the force present while an SMA element is being heated. In other words, conductive means, to be described in detail below, transfers the necessary power from either control contact


16




a


or


16




b


through conductive path element


24




a


or


24




b


and SMA element


26




a


or


26




b


, respectively, to ground contact element


18


. For the below embodiments, SMA elements


26




a


and


26




b


will preferably have a diameter of between about 25 and 125 microns and can be supplied with 40 to 160 milliamps during operation.




Referring now to

FIGS. 3A-3B

through


6


A-


6


B, the manufacturing process for fabricating the bistable switch according to the present invention will follow. In particular,

FIGS. 3A

,


4


A,


5


A and


6


A illustrate the bottom surface of switch


10


, and

FIGS. 3B

,


4


B,


5


B and


6


B illustrate the respective side views of the same Figures.





FIGS. 3A and 3B

illustrate a stabilizing material


50


coated with a patterned photoresist layer


52


. In this particular embodiment, stabilizing material


50


is a beryllium copper alloy that is manufactured in rolled sheets having a thickness between about 12 to 50 microns and a width of between about 300 to 1,200 microns. However, other materials may be used that provide the desired elastic or flexible properties and thickness. For example, materials selected from the group including polyresin, plastic, wood composites, silicon, silicon resin, and various alloy materials such as a stainless steel alloy may be used.




In a preferred micro-machining process, a conventional photolithographic technique is used to define the desired pattern onto the surface of stabilizing material


50


(pattern represented by dotted lines). In particular, patterned photoresist


52


defines a three beam structure having a tail portion


54


and a head portion


56


, contact vias


58




a


and


58




c


, and two gaps


60




a


and


60




b


to define beams


62




a


,


62




b


, and


62




c


. A conventional etching technique removes stabilizing material


50


unprotected by pattern photoresist


52


to form the desired three beam structure


12


as illustrated in FIG.


4


A.




Persons of ordinary skill in the relevant art will appreciate that the desired pattern can be formed by other conventional methods. For example, if the desired switch size is large enough to avoid micro-machining techniques, stabilizing material


50


could be patterned by a conventional punch or molding process.




Next, as illustrated in

FIGS. 4A and 4B

, a nonconductive insulation layer


64


coats the top and bottom surface of structure


12


. This electrical insulator is preferably a paralene layer. In alternative embodiments, insulation material


64


could be selected from the group including silicon dioxide, polyimide, wet oxide, and silicon nitride layer. These alternatives will provide a similar structure having similar operational characteristics. Persons of ordinary skill in the art will appreciate that insulation layer


64


may be eliminated if stabilizing material


50


is a nonconductive material.




On each side of coated structure


12


, a conductive material, such as gold, is deposited and patterned to create a portion of the desired horseshoe-type path. More specifically, the top surface of coated structure


12


(see

FIG. 1

) provides an L-shaped conductive path


24




a


coupled between control via


58




a


and top contact pad. In addition, the same conductive material forms ground via


58




c


. On the opposite or bottom side of structure


12


, as illustrated in

FIG. 4A

, coated structure


12


provides another L-shaped conductive path


24




b


coupled between control contact


68




b


and bottom contact pad


58




b


. In addition, the same material forms control contact


68




a


, ground contact


70


and bridge contact


22


. Persons of ordinary skill in the relevant arts should appreciated that the conductive material for conductive paths


24




a


and


24




b


, control contacts


68




a


and


68




b


, ground contact


70


, ground and control vias


58




a


and


58




c


, top and bottom contact pads


58




b


, and bridge contact


22


may be selected from the group of gold, copper, palladium-gold alloy, nickel, silver, aluminum, and many other conductive materials available in the art.




With reference to

FIGS. 5A and 5B

, an actuator element


26




a


and


26




b


securely couples to the top and bottom surfaces of arm


12


between each contact pad and ground via


58




c


. If desired, an adhesive material (not shown) can be used to couple actuator elements


26




a


and


26




b


to respective top and bottom arm surfaces. The adhesive material could be selected from the group including cement, epoxy, lock on chip tap, solder, embedding, polyimide, and mechanical attachment such as a clip or clamp. This connection positions each actuator element


26




a


and


26




b


over a central portion of the top and bottom surface of middle beam


62


B to complete the conductive horseshoe-type path. Actuator elements


26




a


and


26




b


are preferably a nickel-titanium SMA provided in a sheet, ribbon, or wire form. For the above embodiments, SMA elements


26




a


and


26




b


will preferably have a diameter of between about 25 and 125 microns.




As disclosed earlier, SMA elements


26


A and


26


B extend or contract after current passing through the material reaches a preestablished phase transformation temperature. With this particular embodiment, the phase transformation process will typically occur by one of two methods. A first phase transformation technique reduces the bulk volume of the actuation material, and as a result, the length of the shape memory alloy will reduce, contracting stabilizing material


12


. In a second phase transformation technique, SMA is stretched by a percentage not exceeding 8% before and/or after it is installed to stabilizing structure


12


. Upon phase transformation, the length of SMA will reduce, going back to its original length before contracting the stabilizing material


12


layer even more, up to 8%. Depending on the requirements on the displacement of head portion


12




a


, contact force, number cycles, and manufacturing processes, the shape memory alloy may or may not be stretched.




The last steps of the desired process includes crimping and mounting the above structure. Without the crimping step, the above structure can be mounted to a desired substrate to form a reliable micro-machined bistable switch having a cantilever structure as illustrated in FIG.


1


. In turn, the switch cannot continuously short the signal contacts unless power is active to generate the necessary current and transformation within the desired SMA element. Consequently, this final coining or crimping step will allow the active device to maintain a contact position, even after the power is deactivated. This coining or crimping, therefore, provides a snap action function to the arm that maintains the arm in a given position, except when one of the SMA elements flips the arm to the opposite position.




Referring to

FIG. 6A and 6B

, the desired coined or crimped elements


80


A and


80


B are illustrated. This snap action structure may be formed using a conventional punch and dye method. More specifically, a central portion of left and right beams


62


A and


62


C are crimped to form a wave-type deformation or ungulation. To persons skilled in the relevant arts, this crimped area


80


A and


80


B will create a sustainable force when actuator element


26




a


or


26




b


transforms to move arm tip


12




a


up or down. In turn, crimped areas


80


A and


80


B will allow bridge contact


22


to maintain contact with or separation from signal contacts


20




a


and


20




b


even after the source coupled to switch


10


is deactivated. In other words, by forming crimps


80


A and


80


B, once arm


12


is positioned up or down, current must pass through the appropriate SMA element to bend arm


12


to the other position, down or up respectively. Otherwise, switch


10


will always be positioned up or down unless it is physically moved by the user.




With or without a crimp element formed on first and third beams


62


A and


62


C, the resultant structure must be secured to substrate


14


, as illustrated in

FIGS. 7A and 7B

or FIG.


1


. In particular, cantilever switch


10


couples to substrate surface


14


by a conventional bonding method. In particular, solder or pressure slots of a printed circuit board are used to attach and secure power and ground contacts


16




a


,


16




b


, and


18


to substrate surface


14


of switch


10


. Consequently, when actuating element


26




b


is heated by the bottom horseshoe-type conductive path, the resultant structure will bend downwards to couple bridge contact


22


with signal contacts


20




a


and


20




b


. In turn, when actuating material


26


A is heated by the top horseshoe-type conductive path, the connection between bridge contact


22


and signal contacts


20




a


and


20




b


will be broken.




Another embodiment of the present invention would include the placement of an additional bridging contact


22


′ on the top surface of tip


12




a


for shorting complementary signal contacts


20




a


′,


20




b


′ on a multiple layer substrate. With this example as illustrated in

FIG. 8

, if the top SMA element


26




a


is heated by an electrical current passing through the top horseshoe-type conductive path, the structure will move up to couple top bridging contact


22


′ with top signal contacts


20




a′


and


20




b


′. On the other hand, if actuator element


26


B is heated by an electrical current passing through bottom horseshoe-type conductive path


24




b


and


26




b


, the structure will move down to couple bridging contact


22


with signal contacts


20




a


and


20




b


. With this particular embodiment, arm


12


is not crimped. Consequently, bridge contacts


22


or


22


′ will only be able to continually short signal contacts


20




a


,


20




b


or


20




a


′,


20




b


′ while the respective SMA


26




a


or


26




b


is heated to move tip


12




a


up or down. However, those skilled in the art will recognize that crimping could be used to maintain the arm


12


in contact with one or the other of contacts


20




a


and


20




b


or


20




a


′ and


20




b′.







FIGS. 9A and 9B

illustrate another embodiment of the above inventive switch. In this embodiment, sheet


50


is patterned and etched or punched to form the desired arm


12


as described above with reference to

FIG. 3B

, and bridge contact


22


is formed (as described above) on arm tip


12




a


. Next, a central portion of actuator element


60


is looped over or attached to arm


12


at a location adjacent to tip


12




a


and electrically separated from bridge contact


22


. Lastly, tail portion


54


of arm


12


is attached to substrate surface


14


and ends


62




a


and


62




b


of actuator element


60


are extended in a horizontally opposed direction adjacent the length of arm


12


to connect with a power source


64


adjacent substrate surface


14


. In other words, the conductive L-shaped path and contacts formerly located on arm


12


to provide the necessary circuit to activate SMA element (see

FIG. 1

) has been moved to a location off of switch arm


12


, to provide power source


64


.




Referring now to

FIG. 9B

, during operation, a current supplied to SMA


60


by source


62


contracts SMA


60


to move arm


12


down and short signal contacts


20




a


and


20




b


with bridge contact


22


. As described in the above disclosure, with power source


62


deactivated, SMA


60


will return to a position that will separate bridge contact


22


from signal contact


20




a


and


20




b


. The skilled artisan will appreciate that another SMA (not shown) may be attached in a similar way to arm


12


, but on an opposite side to SMA


60


, and supplied current by a similar power source. In turn arm


12


can be crimped to form a device that will function as described above with reference to

FIGS. 7A and 7B

, and arm


12


can be patterned with or without multiple parallel beams. With this particular embodiment, a single coining or a complete surface crimp may be used if there are no beams on arm


12


and an additional SMA element is attached to or wrapped around the other side of arm


12


.




With respect to the above embodiments, it will be appreciated by persons of ordinary skill in the relevant arts that arm


12


can be patterned to form a structure having as many beams as necessary to hold any desired SMA element(s). In turn arm


12


could be patterned to form only a rectangular structure having no beams. On a similar note, the thickness and number of SMA elements


26




a


and


26




b


can increase or decrease to accommodate the desired arm structure and force necessary to move the same when heated. Additionally, the number of crimps formed on flexible arm


12


will depend on the shape and functional characteristics of the resultant switch.




In summary, this invention provide a relatively simple and inexpensive way to produce micro-switches and relays. This new and innovative micro-machine way of fabricating micro-switch and relays will enable a user to build systems that can carry very high voltage, current, and frequency signals. Additionally, this inventive process can conceptually be designed to be compatible with standard silicon processing and allow mass production of the device at very reasonable cost. Consequently, the inventive structure provides a miniature bistable snap action electro-mechanical switch that can be activated by a shape memory alloy which possess a unique capability for increase speed actuation and forces relative to any prior art switching mechanism. In addition, because of the advances in micro-machining, this structure can be produced to have a length similar to between about 500-3,000 microns, a width between about 200-1,200 and between about 25-35 microns thick, which is smaller than any competing bistable switches on the market today. A skilled artisan will appreciate that these dimensions may change to obtain the desired size and functional characteristics for the inventive switch.




Other variations in design still coming within the inventive concept claimed herein will be apparent to those skilled in the art. For example, the illustrative embodiments described herein employ SMA elements


26




a


and


26




b


as part of the conductive path for heating the SMA elements to accomplish the same end. For example, the SMA elements could be coupled to a separate electrically conductive element, or they could be coupled to an entirely different sort of heating element (e.g., non-electrical).




Illustrative embodiments of the invention are described above. In the interest of clarity, not all features of an actual implementation are described in the specification. It will be of course appreciated that in the development of any such actual embodiment, numerous implementation-specific decisions must be made to achieve a developer's specific goals, such as compliance with system-related and business-related constraints, which will vary from one implementation to another. Moreover, it will appreciated that, although such a development effort might be complex and time-consuming, it would nonetheless be a routine undertaking for those of ordinary skills in the art having the benefit of this disclosure.



Claims
  • 1. A bistable switch, comprising:a substrate; a flexible sheet having a first end attached to said substrate, said flexible sheet having first and second conformations, said first and second conformations comprising stably fixed positions of said flexible sheet; a first heat activated element on a first surface of said flexible sheet, wherein electrical current passing through said first heat activated element provides a first applied force to transform said flexible sheet from said first conformation to said second conformation, whereby said second conformation of said flexible sheet is substantially maintained after electrical current has ceased to pass through said first heat activated element; and a second heat activated element connected to said flexible sheet, wherein current passing through said second heat activated element provides a second applied force to transform said flexible sheet from said second conformation to said first conformation.
  • 2. The bistable switch of claim 1, wherein said second heat actuated element is positioned on a second surface of said flexible sheet.
  • 3. The bistable switch of claim 1, further including a crimp located between said first end and a second end of said flexible sheet.
  • 4. The bistable switch of claim 3, wherein said crimp maintains said first conformation until current is passed through said first heat activated element.
  • 5. A bistable switch, comprising:a substrate; a flexible sheet having a first end attached to said substrate, said flexible sheet having first and second conformations, said first and second conformations comprising stably fixed positions of said flexible sheet; and a first heat activated element on a first surface of said flexible sheet, wherein electrical current between about 40 and 160 milliamps passing through said first heat activated element provides a first applied force to transform said flexible sheet from said first conformation to said second conformation, whereby said second conformation of said flexible sheet is substantially maintained after electrical current has ceased to pass through said first heat activated element.
  • 6. A bistable switch, comprising:a substrate; a flexible sheet between about 12 and 50 microns thick and having a first end attached to said substrate, said flexible sheet having first and second conformations, said first and second conformations comprising stably fixed positions of said flexible sheet; and a first heat activated element on a first surface of said flexible sheet, wherein electrical current passing through said first heat activated element provides a first applied force to transform said flexible sheet from said first conformation to said second conformation, whereby said second conformation of said flexible sheet is substantially maintained after electrical current has ceased to pass through said first heat activated element.
  • 7. A bistable switch, comprising:a substrate; a flexible sheet having a first end attached to said substrate, said flexible sheet having first and second conformations; and a first heat activated element on a first surface of said flexible sheet, wherein an electrical current between about 40 and 160 milliamps passing through said first heat activated element provides a first applied force to transform said flexible sheet from said first conformation to said second conformation.
  • 8. A bistable switch, comprising:a substrate; a flexible sheet between about 12 to 50 microns thick and having a first end attached to said substrate, said flexible sheet having first and second conformations; and a first heat activated element on a first surface of said flexible sheet, wherein electrical current passing through said first heat activated element provides a first applied force to transform and flexible shet from said first conformation to said second conformation.
  • 9. A bistable switch, comprising:a substrate; a flexible sheet having a first end attached to said substrate, said flexible sheet having first and second conformations; a first heat activated element on a first surface of said flexible sheet, wherein electrical current passing through said first heat activated element provides a first applied force to transform said flexible sheet from said first conformation to said second conformation; and a second heat activated element connected to said flexible sheet, wherein current passing through said second heat activated element provides a second applied force to transform said flexible sheet from said second conformation to said first conformation.
  • 10. The bistable switch of claim 9, wherein said second heat activated element is positioned on a second surface of said flexible sheet.
  • 11. The bistable switch of claim 9, further including a crimp located between said first end and a second end of said flexible sheet.
  • 12. The bistable switch of claim 11, wherein said crimp maintains said first conformation until current is passed through said first heat activated element.
Parent Case Info

This invention is a continuation of U.S. patent application Ser. No. 09/277,330 for Bistable Micro-Switch and Method of Manufacturing the Same, filed Mar. 26, 1999, which relates in general to micro-switches and, more particularly, to a micro-machined bistable switch using a shape memory alloy.

US Referenced Citations (13)
Number Name Date Kind
3753792 Tyler Aug 1973 A
4411711 Albrecht et al. Oct 1983 A
4423401 Mueller Dec 1983 A
4551974 Yaeger et al. Nov 1985 A
4585209 Aine et al. Apr 1986 A
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Continuations (1)
Number Date Country
Parent 09/277330 Mar 1999 US
Child 09/785979 US