Number | Name | Date | Kind |
---|---|---|---|
5053850 | Baker et al. | Oct 1991 | |
5220199 | Owada et al. | Jun 1993 | |
5426266 | Brown et al. | Jun 1995 | |
5739587 | Sato | Apr 1998 | |
5751065 | Chittipeddi et al. | May 1998 |
Number | Date | Country |
---|---|---|
8-111544 | Apr 1996 | JPX |
Entry |
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U.S. application No. 09/072,369 Chittipeddi et al., filed May 4, 1998. |
Campbell, The Science of Engineering of Microelectronic Fabrication, Oxford University Press, pp. 444-446 (1996). |
Wolf, Silicon Processing for the VLSI Era, Lattice Press, vol. 2: Process Integration, pp. 400-419 (1990). |
Wolf, Silicon Processing for the VLSI Era, Lattice Press, vol. 3: The Submicron Mosfet, pp. 232-246 (1995). |