This application claims benefit of priority to Korean Patent Application No. 10-2021-0182870 filed on Dec. 20, 2021, which is incorporated herein by reference in its entirety.
The present invention relates to a calibration method of optical coherence tomography device, and more particularly, to a calibration method of optical coherence tomography device using a non-transmissive planar target.
An optical coherence tomography (OCT) device is a device that transmits measurement light to an inspection object, detects reflected light reflected from each tomographic layer on the surface and inside of the inspection object, and obtains surface and inside tomographic images of the inspection object. By using the optical coherence tomography (OCT), it is possible to obtain tomographic images of the surface and the inside of the object to be inspected with a resolution of about the wavelength of the measurement light irradiated to the object. Optical coherence tomography(OCT) is a non-invasive imaging technique and is widely used in various biomedical research and medical imaging fields, for example, medical fields such as ophthalmology, dermatology, oncology, dentistry and the like.
As shown in
The optical coherence tomography (OCT) device is a three-dimensional imaging device in which the information in a depth direction of the sample is obtained. Accordingly, as the standard sample used for calibration of the optical coherence tomography (OCT) device, the sample having the three-dimensional structure (steric conformation) or the sample having the three-dimensional structure through which the measurement light is transmitted is generally used. However, the sample having three-dimensional structure or the sample having three-dimensional structure through which measurement light is transmitted has disadvantages in that the calibration process is difficult, as well as sample-manufacturing is difficult, and sample-manufacturing cost is high.
(Patent Document 1) Korean Patent publication No.10-2015-0056713
It is an object of the present invention to provide the calibration method of optical coherence tomography device capable of more easily correcting image distortion caused by parts themselves and assembly deviations of the parts of the optical coherence tomography device.
It is another object of the present invention to provide the calibration method of optical coherence tomography device using a target that is easy to manufacture and calibrate.
In order to achieve the objects above, the present invention provides a calibration method of an optical coherence tomography device which comprises a light source (10) that generates a measurement light (L) irradiated to the surface of a calibration target (T); a beam splitter (12) that splits the measurement light (L) into a reference light (R) and a sample measurement light (L1); a reference mirror(20) that reflects the reference light (R) and generates a reflected reference light (R1); a scan unit (30) that reflects the sample measuring light (L1) and directs the sample measuring light (L1) to the calibration target (T); and a photodetector(40) that detects an interference light (I) formed by superimposing a reflected signal light (S) formed by reflecting the sample measurement light (L1) from the calibration target (T) and the reflected reference light (R1), and obtains the surface and inside image of the calibration target (T), comprising the steps of: obtaining three-dimensional image of the surface and the inside of the calibration target (T) by scanning the calibration target (T) using the optical coherence tomography device, and extracting a surface shape image of the calibration target (T) from the obtained the three-dimensional image; and calibrating the surface shape image of the calibration target (T) obtained by the optical coherence tomography device, according to the actual surface shape of the calibration target (T).
According to the calibration method of optical coherence tomography device in accordance with the present invention, the image distortion caused by the parts themselves and assembly deviations of the optical coherence tomography (OCT) device can be corrected more simply using the target that is easy to manufacture and calibrate.
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. In the accompanying drawings, elements performing the same or similar functions as in the prior art are assigned the same reference numerals.
The light source (10) generates a measurement light (L) irradiated to the surface of the calibration target (T). The measurement light (L) used for optical coherence tomography is generally broadband low-coherence light having a short coherence distance, for example, near-infrared light having a wavelength of 750 nm to 1500 nm. The beam splitter (12) splits the measurement light (L) into a reference light (R) and a sample measurement light (L1). The reference light (R) is irradiated to the reference mirror (20), and the sample measurement light (L1) is irradiated to the sample (s). The beam splitter (23) may split the measurement light (L) into, for example, the reference light (R) and the sample measurement light (L1) having an intensity of 50:50. The beam splitter (12) is also referred to as an optical coupler because it also serves to superimpose a reflected reference light (R1) and a reflected signal light (S), which will be described later. The scan unit (30) reflects the sample measurement light (L1), and induces the sample measurement light (L1) to the calibration target (T) through the objective lens (32). The scan unit (30) may use a micro electromechanical system mirror (MEMS mirror) capable of sequentially scanning the photographing locations of the target (T) by adjusting the reflection angle of the sample measurement light (L1). For example, the MEMS mirror rotates about two axes (e.g., x-axis and y-axis that are orthogonal to each other), and sequentially scans a plane (x-y plane) in which the target (T) is located. The sample measurement light (L1) is irradiated into the target (T) in a direction (z-axis direction, orthogonal to the x-axis and y-axis) perpendicular to the plane, and a three-dimensional tomography image of the target (T) can be obtained.
When the sample measurement light (L1) is irradiated to the target (T), the sample measurement light (L1) is reflected and scattered on the surface and inside of the target (T), and the reflected signal light (S) is generated. Meanwhile, the reference light (R) is reflected by the reference mirror (20) to generate the reflected reference light (R1). The generated reflected signal light (S) is induced to the scan unit (30) through the objective lens (32), and the scan unit (30) induces the reflected signal light (S) to the beam splitter (12). The reflected signal light (S) and the reflected reference light (R1) are superimposed in the beam splitter (12) to generate an interference light (I). The photodetector (40) detects the interference light (I) to obtain surface and inside image signals of the target (T). The optical coherence tomography device used in the present invention may be include optical elements such as collimators (22, 34, 42), lenses (24, 32, 44), and grating (46), if necessary, in order to focus, reflect, transmit or detect various lights such as the sample measurement light (L1), the reference light (R), and the interference light (I).
Next, according to the actual surface shape of the calibration target (T), the surface shape image of the calibration target (T) obtained by the optical coherence tomography device is calibrated. As described above, the optical coherence tomography device comprises various optical elements such as lenses such as collimators (22, 34, 42), lenses (24, 32, 44), and grating (46), and image elements. Depending on the characteristics of the optical elements and the image elements, a predetermined distortion occurs in the image obtained by the optical coherence tomography device. Meanwhile, the surface shape image of the calibration target (T), specifically, the location of the pattern formed on the surface of the calibration target (T) is known in advance. Using this, the distortion of the surface shape image of the calibration target (T) obtained by the optical coherence tomography device can be corrected, that is, it can be calibrated.
Although the present invention has been described above with reference to the accompanying drawings, the present invention is not limited to what is shown in the drawings described above. Reference numerals are labeled in the following claims to aid understanding, but the scope of the following claims is not limited to the reference numerals and what is shown in the drawings, and should be construed to encompass all modifications, equivalent constructions and functions of the exemplary embodiments.
Number | Date | Country | Kind |
---|---|---|---|
10-2021-0182870 | Dec 2021 | KR | national |