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3633988 | Farrar | Jan 1972 | |
3680945 | Sheridon | Aug 1972 | |
4165930 | Matsumoto et al. | Aug 1979 | |
4255032 | Matsumoto et al. | Mar 1981 | |
4265522 | Matsumoto et al. | May 1981 | |
4294529 | Sato et al. | Oct 1981 | |
4374612 | Matsumura et al. | Feb 1983 | |
4576458 | Cho et al. | Mar 1986 | |
4902082 | Okabayashi eta l. | Feb 1990 | |
5053803 | Suda et al. | Oct 1991 | |
5475512 | Nakazawa et al. | Dec 1995 |
Entry |
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Randall K. Bartman, Paul K. C. Wang, Linda M. Miller, Thomas W. Kenny, William J. Kaiser, Fred Y. Hadaegh and Michael L. Agronin of Caltech; Micromachined, Electrostatically Deformable Relfectors, Bea-control reflectors could be integratedwith electronic control circuits. NASA'S Jet Propulsion Laboratory, Pasadena, California; Oct. 1995, pp. 10, 11a & 12a. |