Number | Name | Date | Kind |
---|---|---|---|
4885614 | Furukawa et al. | Dec 1989 | |
5177025 | Turner et al. | Jan 1993 | |
5198689 | Fujioka | Mar 1993 |
Entry |
---|
Tang, Z. R. et al., "SiGe Heterojunction Bipolar Transistors with Thin .alpha.-Si Emitters", IEEE Electron Device Letters, vol. 14, No. 9, Sep. 1993, pp. 438-440. |
A. Demkov et al., "Theoretical Investigation of Random Si-C Alloys," The American Physical Society, Physical Review B, vol. 48, No. 4, Jul. 15, 1993, pp. 2207-2214. |
J. A. Borders et al., "Formation of SiC in Silicon by Ion Implantation," Applied Physics Letters, vol. 18, No. 11, 1 Jun. 1971, pp. 509-511. |