Claims
- 1. A method of preparing carbon fluoride solid compositions, comprising entraining hexafluorobenzene in an inert gas to form a gaseous mixture, energizing said gaseous mixture by passing said mixture over a hot tungsten filament at a temperature of about 1500.degree.-2500.degree. C. to form fragments and condensing said fragments onto a substrate at a temperature from about 200.degree.-500.degree. C. to form a coating comprising carbon fluoride solid compositions having a ratio of fluorine to carbon less than about 1.0 and a contact angle in excess of 120.degree. with water, said coating having diamondlike structure with carbon atoms positioned in a tetrahedral network that is interrupted with bonds to fluorine.
- 2. A method as in claim 1, wherein the substrate is maintained at said temperature below that of said fragments.
- 3. A method as in claim 1, wherein the carbon fluoride solid composition is deposited at a rate of about 10 .mu.m/hour to a total thickness in the range of 0.01 .mu.m to about 10,000 .mu.m.
- 4. A method as in claim 1, wherein the substrate is quartz, alumina, ceramic glasses, silicon dioxide, molybdenum, tungsten, stainless steel, polyimide, potassium bromide, or sodium chloride.
- 5. A process as in claim 1, comprising the additional step of removing from said substrate the carbon fluoride solid composition formed thereon.
- 6. A method as in claim 1, wherein said gaseous mixture flows through a reactor and said tungsten filament is positioned in said reactor.
- 7. A method as in claim 1, wherein said gaseous mixture flows through a reactor at about 50 SCCM.
- 8. A method as in claim 1, wherein a vacuum exhaust is provided for the flow of said gaseous mixture there through.
Parent Case Info
This is a continuation of copending application Ser. No. 07/751,884 filed on Aug. 29, 1991 now abandon.
US Referenced Citations (15)
Foreign Referenced Citations (3)
Number |
Date |
Country |
0304220 |
Feb 1989 |
EPX |
0353934 |
Feb 1990 |
EPX |
0361206 |
Apr 1990 |
EPX |
Non-Patent Literature Citations (2)
Entry |
Inagaki et al "Plasma Polymerization of Perfluoro-2-Butyl Tetrahydrofuran/Methane and Perfluorobenzene/Tetrafluoromethane Mixtures and Gas Permeation Properties of Plasma Polymers", Joun. of Appl. Polymer Science, vol. 38, pp. 1869-1877 Nov. 1989. |
Chemical Abstracts, vol. 101 No. 10, abstract no. 75278j 1984 no month. |
Continuations (1)
|
Number |
Date |
Country |
Parent |
751884 |
Aug 1991 |
|