Deposition of compounds, mixtures or solid solutions

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CPC
C23C16/30

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/30Deposition of compounds, mixtures or solid solutions

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Vapor deposition precursor compounds and process of use
- Patent number 12,209,105
- Issue date Jan 28, 2025
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming compound structure with 2-dimensional structure
- Patent number 12,188,120
- Issue date Jan 7, 2025
- Seoul National University R&DB Foundation
- Jungwon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon oxynitride based encapsulation layer for magnetic tunnel ju...
- Patent number 12,185,641
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Vignesh Sundar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Momentum-matching and band-alignment van der waals (vdW) infrared p...
- Patent number 12,176,451
- Issue date Dec 24, 2024
- Shanghai Institute of Technical Physics of the Chinese Academy of Sciences
- Weida Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a conformal metal or metalloid silicon nitri...
- Patent number 12,163,224
- Issue date Dec 10, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer deposition of silicon-containing films
- Patent number 12,157,945
- Issue date Dec 3, 2024
- Lam Research Corporation
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 12,138,654
- Issue date Nov 12, 2024
- ASM IP Holding B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum alloy member for forming fluoride film thereon and aluminu...
- Patent number 12,134,805
- Issue date Nov 5, 2024
- Showa Denko K.K.
- Isao Murase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for applying a functional compound on sulfur particles
- Patent number 12,132,191
- Issue date Oct 29, 2024
- Vito N.V.
- Danny Havermans
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Methods for depositing blocking layers on metal surfaces
- Patent number 12,131,900
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Powder-atomic-layer-deposition device with knocker
- Patent number 12,123,092
- Issue date Oct 22, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coated tool and cutting tool
- Patent number 12,121,976
- Issue date Oct 22, 2024
- Kyocera Corporation
- Kou Ri
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Transition metal chalcogenide thin-layer material, preparation meth...
- Patent number 12,116,665
- Issue date Oct 15, 2024
- TSINGHUA-BERKELEY SHENZHEN INSTITUTE IN PREPARATION
- Huiming Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature growth of transition metal chalcogenides
- Patent number 12,110,584
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Chandan Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems for depositing coatings on surfaces and associated methods
- Patent number 12,104,241
- Issue date Oct 1, 2024
- Continental Reifen Deutschland GmbH
- Andrew Grant
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods of making nanopowders, nanoceramic materials and nanocerami...
- Patent number 12,098,107
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Guodong Zhan
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Wave-absorbing material powder with oxidation resistance and salt f...
- Patent number 12,091,750
- Issue date Sep 17, 2024
- BattFlex (Wuhan) Technology Co., Ltd.
- Ming Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, recording medium, substrate process...
- Patent number 12,084,760
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing large EMI shielded GaAs and GaP infrared windows
- Patent number 12,084,791
- Issue date Sep 10, 2024
- BAE Systems Information and Electronic Systems Integration Inc.
- Peter G. Schunemann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High density plasma enhanced process chamber
- Patent number 12,080,516
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of growing two-dimensional transition metal chalcogenide fil...
- Patent number 12,077,853
- Issue date Sep 3, 2024
- Samsung Electronics Co., Ltd.
- Hyangsook Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming mesas on an electrostatic chuck
- Patent number 12,074,052
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Air data probe corrosion protection
- Patent number 12,071,684
- Issue date Aug 27, 2024
- Rosemount Aerospace Inc.
- Steven Poteet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing a substrate
- Patent number 12,074,009
- Issue date Aug 27, 2024
- Tokyo Electron Limited
- Yuki Iijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitride crystal, optical device, semiconductor device, and method f...
- Patent number 12,074,203
- Issue date Aug 27, 2024
- Kabushiki Kaisha Toshiba
- Toshiki Hikosaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface-coated cutting tool
- Patent number 12,064,817
- Issue date Aug 20, 2024
- Mitsubishi Materials Corporation
- Eiji Nakamura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Cleaning method, method of manufacturing semiconductor device, and...
- Patent number 12,065,736
- Issue date Aug 20, 2024
- Kokusai Electric Corporation
- Naoya Miyashita
- B08 - CLEANING
Information Patent Grant
Method for growth of atomic layer ribbons and nanoribbons of transi...
- Patent number 12,060,642
- Issue date Aug 13, 2024
- Honda Motor Co., Ltd.
- Avetik R. Harutyunyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming barrier layer in semiconductor structure
- Patent number 12,062,573
- Issue date Aug 13, 2024
- Yangtze Memory Technologies Co., Ltd.
- Peng Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SILICON-CONTAINING GROUP 4 PRECURSORS AND DEPOSITION OF METAL-CONTA...
- Publication number 20250034181
- Publication date Jan 30, 2025
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Su-Hyun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE MODIFIED SUBSTRATES AND RELATED METHODS
- Publication number 20250034700
- Publication date Jan 30, 2025
- Entegris, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20250037991
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Takashi CHIBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE DEPOSITION OF ORGANIC FILMS
- Publication number 20250025911
- Publication date Jan 23, 2025
- ASM IP HOLDING B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE SYNTHESIS METHOD OF TWO DIMENSIONAL MATERIAL
- Publication number 20250027193
- Publication date Jan 23, 2025
- UIF (UNIVERSITY INDUSTRY FOUNDATION), YONSEI UNIVERSITY
- Jong-Hyun AHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Amorphous Silicon Oxide, Amorphous Silicon Oxynitride, and Amorphou...
- Publication number 20250018093
- Publication date Jan 16, 2025
- THE TEXAS A&M UNIVERSITY SYSTEM
- Venu Varanasi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR DEPOSITING A LAYER CONTAINING A GROUP FIVE EL...
- Publication number 20250019823
- Publication date Jan 16, 2025
- AIXTRON SE
- Ilio MICCOLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250003071
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Takeo HANASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND ASSEMBLIES FOR DEPOSITING MATERIAL IN A GAP
- Publication number 20250006489
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Ranjit Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRATHIN SILICON OXYNITRIDE INTERFACE MATERIAL, TUNNEL OXIDE PASSI...
- Publication number 20250006850
- Publication date Jan 2, 2025
- Teranergy Technology Co., Ltd.
- Jichun YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITION IN HIGH ASPECT RATIO (HAR) FEATURES
- Publication number 20240420965
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Shihsheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEED SUBSTRATE FOR EPITAXIAL GROWTH AND METHOD FOR PRODUCING SAME,...
- Publication number 20240417882
- Publication date Dec 19, 2024
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiro KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS
- Publication number 20240417848
- Publication date Dec 19, 2024
- CONTINENTAL REIFEN DEUTSCHLAND GMBH
- Andrew Grant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING MESAS ON AN ELECTROSTATIC CHUCK
- Publication number 20240420986
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Wendell Glenn BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS
- Publication number 20240417847
- Publication date Dec 19, 2024
- CONTINENTAL REIFEN DEUTSCHLAND GMBH
- Andrew Grant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...
- Publication number 20240417138
- Publication date Dec 19, 2024
- SiO2 Medical Products, Inc.
- John T. Felts
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
PRODUCTION METHOD FOR SEMICONDUCTOR SUBSTRATES
- Publication number 20240411228
- Publication date Dec 12, 2024
- JSR Corporation
- Ken MARUYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A COATING ON AN OBJECT AND CORRESPONDINGLY PRO...
- Publication number 20240410051
- Publication date Dec 12, 2024
- BOEHLERIT GmbH & Co. KG
- Margarethe TRAXLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EROSION RESISTANT METAL FLUORIDE COATINGS DEPOSITED BY ATOMIC LAYER...
- Publication number 20240401197
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF MAKING NANOPOWDERS, NANOCERAMIC MATERIALS AND NANOCERAMI...
- Publication number 20240400461
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Guodong Zhan
- C01 - INORGANIC CHEMISTRY
Information Patent Application
FILM-FORMING APPARATUS AND MANUFACTURING METHOD
- Publication number 20240401195
- Publication date Dec 5, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Homoleptic Bismuth Precursors For Depositing Bismuth Oxide Containi...
- Publication number 20240392433
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- Sergei V. Ivanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM FORMATION METHOD
- Publication number 20240376601
- Publication date Nov 14, 2024
- Jusung Engineering Co., Ltd.
- Jeong HEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM OXYNITRIDE COATINGS WITH ENHANCED CRYSTALLINITY
- Publication number 20240367237
- Publication date Nov 7, 2024
- Kennametal Inc.
- Zhenyu LIU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TREATMENT SOLUTION AND TREATMENT METHOD
- Publication number 20240352578
- Publication date Oct 24, 2024
- Kabushiki Kaisha Toshiba
- Kenya UCHIDA
- A62 - LIFE-SAVING FIRE-FIGHTING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20240344194
- Publication date Oct 17, 2024
- Kokusai Electric Corporation
- Atsuhiko ASHITANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW-K ALD GAP-FILL METHODS AND MATERIAL
- Publication number 20240347337
- Publication date Oct 17, 2024
- LAM RESEARCH CORPORATION
- Joseph R. Abel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR...
- Publication number 20240327980
- Publication date Oct 3, 2024
- Suzhou Everbright Photonics Co., Ltd.
- Yang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR MANUFACTURING SILICON-CONTAINING MATERIALS IN A CASCADE...
- Publication number 20240318308
- Publication date Sep 26, 2024
- Wacker Chemie AG
- Jan Tillmann
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD AND ARRANGEMENT FOR FORMING A TRANSITION METAL DICHALCOGENID...
- Publication number 20240301550
- Publication date Sep 12, 2024
- Agency for Science, Technology and Research
- Swee Liang Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Deposition of compounds, mixtures or solid solutions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vapor deposition precursor compounds and process of use

Method of forming compound structure with 2-dimensional structure

Silicon oxynitride based encapsulation layer for magnetic tunnel ju...

Momentum-matching and band-alignment van der waals (vdW) infrared p...

Methods for depositing a conformal metal or metalloid silicon nitri...

Thermal atomic layer deposition of silicon-containing films

Vapor phase deposition of organic films

Aluminum alloy member for forming fluoride film thereon and aluminu...

Method for applying a functional compound on sulfur particles

Methods for depositing blocking layers on metal surfaces

Integrated epitaxy and preclean system

Powder-atomic-layer-deposition device with knocker

Coated tool and cutting tool

Transition metal chalcogenide thin-layer material, preparation meth...

Low temperature growth of transition metal chalcogenides

Systems for depositing coatings on surfaces and associated methods

Methods of making nanopowders, nanoceramic materials and nanocerami...

Wave-absorbing material powder with oxidation resistance and salt f...

Method of processing substrate, recording medium, substrate process...

Method of producing large EMI shielded GaAs and GaP infrared windows

High density plasma enhanced process chamber

Method of growing two-dimensional transition metal chalcogenide fil...

Forming mesas on an electrostatic chuck

Air data probe corrosion protection

Apparatus for processing a substrate

Nitride crystal, optical device, semiconductor device, and method f...

Surface-coated cutting tool

Cleaning method, method of manufacturing semiconductor device, and...

Method for growth of atomic layer ribbons and nanoribbons of transi...

Method for forming barrier layer in semiconductor structure

Patents Applicationslast 30 patents

SILICON-CONTAINING GROUP 4 PRECURSORS AND DEPOSITION OF METAL-CONTA...

SURFACE MODIFIED SUBSTRATES AND RELATED METHODS

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

VAPOR PHASE DEPOSITION OF ORGANIC FILMS

LOW TEMPERATURE SYNTHESIS METHOD OF TWO DIMENSIONAL MATERIAL

Amorphous Silicon Oxide, Amorphous Silicon Oxynitride, and Amorphou...

METHOD AND DEVICE FOR DEPOSITING A LAYER CONTAINING A GROUP FIVE EL...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHODS AND ASSEMBLIES FOR DEPOSITING MATERIAL IN A GAP

ULTRATHIN SILICON OXYNITRIDE INTERFACE MATERIAL, TUNNEL OXIDE PASSI...

METHOD OF DEPOSITION IN HIGH ASPECT RATIO (HAR) FEATURES

SEED SUBSTRATE FOR EPITAXIAL GROWTH AND METHOD FOR PRODUCING SAME,...

SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS

FORMING MESAS ON AN ELECTROSTATIC CHUCK

SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS

PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...

PRODUCTION METHOD FOR SEMICONDUCTOR SUBSTRATES

METHOD FOR PRODUCING A COATING ON AN OBJECT AND CORRESPONDINGLY PRO...

EROSION RESISTANT METAL FLUORIDE COATINGS DEPOSITED BY ATOMIC LAYER...

METHODS OF MAKING NANOPOWDERS, NANOCERAMIC MATERIALS AND NANOCERAMI...

FILM-FORMING APPARATUS AND MANUFACTURING METHOD

Homoleptic Bismuth Precursors For Depositing Bismuth Oxide Containi...

THIN FILM FORMATION METHOD

ALUMINUM OXYNITRIDE COATINGS WITH ENHANCED CRYSTALLINITY

TREATMENT SOLUTION AND TREATMENT METHOD

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

LOW-K ALD GAP-FILL METHODS AND MATERIAL

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR...

PROCESS FOR MANUFACTURING SILICON-CONTAINING MATERIALS IN A CASCADE...

METHOD AND ARRANGEMENT FOR FORMING A TRANSITION METAL DICHALCOGENID...