Number | Date | Country | Kind |
---|---|---|---|
101 04 177 | Jan 2001 | DE |
Number | Name | Date | Kind |
---|---|---|---|
4953960 | Williamson | Sep 1990 | A |
5052763 | Singh et al. | Oct 1991 | A |
5289312 | Hashimoto et al. | Feb 1994 | A |
5402267 | Fuerter et al. | Mar 1995 | A |
5668672 | Oomura | Sep 1997 | A |
5694241 | Ishiyama et al. | Dec 1997 | A |
5715084 | Takahashi et al. | Feb 1998 | A |
5742436 | Fuerter | Apr 1998 | A |
5771125 | Ishiyama | Jun 1998 | A |
5808805 | Takahashi | Sep 1998 | A |
5880891 | Fuerter | Mar 1999 | A |
5999333 | Takahashi | Dec 1999 | A |
6081382 | Omura | Jun 2000 | A |
6101047 | Chung et al. | Aug 2000 | A |
6108140 | Hashimoto et al. | Aug 2000 | A |
6118596 | Hashimoto et al. | Sep 2000 | A |
6208473 | Omura | Mar 2001 | B1 |
6512641 | Omura | Jan 2003 | B2 |
Number | Date | Country |
---|---|---|
42 03 464 | Aug 1992 | DE |
44 17 489 | Nov 1995 | DE |
196 16 922 | Oct 1997 | DE |
198 22 510 | Nov 1999 | DE |
Entry |
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Willi Ulrich et al., “Trends in Optical Design of Projection Lenses for UV—and EUV—Lithography”, Proceedings of SPIE, vol. 4146 (Aug. 2000), pp. 13-24. |