Patent Application
20230098287
In thin film technologies, surfaces are generally modified to present a specific chemical functionality or to modify substrate behavior to enable a deposition technology. The latter case is particularly important in technologies where ultra-thin conformal layers are required. For example, atomic layer deposition (ALD) technology is becoming increasingly important in cadmium selenide and cadmium telluride thin film compositions for photovoltaic applications, in mercury-cadmium telluride (HgCdTe) deposition for sensor applications, and in germanium-antimony-tellurium (GST) deposition in phase change memory and capacitor applications. A general problem that has been observed in these thin film deposition schemes is slow growth per cycle in the initial stages of ALD, sometimes referred to as incubation or induction in the ALD process. Often, this slow growth is associated with the reactivity of a substrate which is not of the same composition as the film to be deposited. There remains a need in the art for substrates which can efficiently initiate deposition processes.
A chalcogenosilacyclopentane having formula (I) or (II) is described, wherein Ra, Rb, Rc, Rd, Re, Rf, R, and R′ are each independently selected from the group consisting of hydrogen, an alkyl group having one to about 8 carbon atoms, an alkoxy group having one to about 8 carbon atoms, an aromatic group, and an ether group.
The invention relates to a series of new heterocyclic silanes, known as chalcogenosilacyclopentanes. The term “chalcogen” refers to elements in Group 16 of the Periodic Table, and chalcogens encompassed by the invention include selenium (Se) and tellurium (Te). Thus, the invention more specifically relates to selenosilacyclopentanes and tellurosilacyclopentanes. These compounds undergo desirable ring-opening reactions with hydroxyl and other protic functionalities. Further, surface modification by these materials leads to substrates that are amenable to thin film deposition technologies such as ALD (atomic layer deposition) and CVD (chemical vapor deposition).
The selenosilacyclopentanes and tellurosilacyclopentanes according to the invention are 5-membered ring structures containing a silicon-selenium bond or a silicon-tellurium bond, as shown in the following compounds having formulas (I) and (II).
The simplest members of the chalcogenosilacyclopentanes according to the invention have no substitution on the ring or on the silicon, i.e., all of the Ra to Rf, R, and R′ substituents are hydrogen atoms, as shown in the compounds having formula (III) and (IV) below:
More generally, the substituents on the ring carbons Ra to Rf and the substituents on the silicon atom R and R′ may each independently be hydrogen or an organic group selected from alkyl and alkoxy groups having one to about eight, more preferably four or less, carbon atoms, aromatic groups, and ether groups. More preferably, the substituents are hydrogen, alkyl, or alkoxy groups, more preferably hydrogen, methyl, methoxy, or ethoxy groups. For examples, chalcogenosilacyclopentanes in which the silicon atom and one of the ring carbons are substituted with methyl groups, 2,2,4-trimethyl-1-selena-2-silacyclopentane and 2,2,4-trimethyl-1-tellura-2-silacyclopentane are shown below in formulas (V) and (VI).
Examples of other possible compounds according to the invention include, but are not limited to, compounds having the following structures:
The chalcogenosilacyclopentanes according to the invention may be prepared by reaction of 3-chloroisobutyldimethylchlorosilane with a lithium chalcogenide, as shown in Scheme I:
The inventive compounds may alternatively be prepared by reaction of 3-chloroisobutyltrialkoxysilane with a lithium chalcogenide, as shown in Scheme II:
Analogous reactions may be performed to produce alternative compounds according to the invention which do not contain a methyl substituent at the 4 position of the silacyclopentane ring. Such reactions would be well understood in the art. The alkoxy-substituted compounds may be reduced using lithium aluminum hydride or diisobutyl aluminum hydride to produce the inventive compounds having hydrogen substituents on the silicon.
The inventive materials undergo ring-opening reactions with protic substrates such as those containing hydroxyl, thiol, and amine groups, yielding the elements of C—Se—H (selenol) or C—Te—H (tellurol) in a distal position with respect to the substrate. The general and specific (for Te) ring-opening reactions are shown in Schemes III and IV.
As described by Harmgarth et al (Zeaschrift für Anorganische and Allgemeine Chemie, 2017, 1150-1166) for GST films, a variety of precursors may be utilized to cleanly grow films once a tellurium atom is available as part of an initiating layer for deposition. Accordingly, substrates prepared from the inventive materials should be effective for growing clean films.
Another interesting comparison between chalcogenosilacyclopentanes and silacyclopentanes is in the relative shift of the Si—Me peaks in the 1H NMR spectrum. The sulfur species Si—S has the shift most typically associated with Si—CH moieties. However, an increase in the size and a decrease in the electronegativity of the heteroatom results in a noticeable upfield shift of the methyl peaks. The change in shift indicates a stronger partial positive charge on the Si atom and thus an increase in the Lewis acidity of the Si, making the Si-heteroatom bond more susceptible to heterolytic cleavage and thus more reactive to nucleophiles and protic substrates. Further, a comparison of the general bond dissociation energies of Si-heteroatom bonds indicates that Si—Se and Si—Te exhibit similar energies, while Si—N is weaker and Si—S is considerably stronger. While these values only represent homolytic cleavage, they are a good indication of bond strength, the thermodynamic driver for ring-opening reaction with hydroxyl and other groups, being favorable.
The invention will now be described in connection with the following, non-limiting examples.
To freshly cut Li metal (13.8g, 1.9 mol) in 500 mL THF was added a solution of a catalytic amount of diphenylacetylene (8.8 g, 0.05 mol) in an additional 300 mL of THF. The addition was slightly exothermic and resulted in a reddish-brown solution. After the exotherm ceased (about 90 min.), selenium (75 g, 0.9 mol) was added via a powder addition funnel in small amounts, resulting in a large exotherm. The resulting mixture was heated at reflux for 8 hours to ensure maximum Li consumption. A solution of 175.88g (0.9 mol) 3-chloroisobutyldimethylchlorosilane (commercially available from Gelest) and 1.35 g (0.01 mol) of BF3·Et2O was prepared and added dropwise to the Li2Se, resulting in an exotherm. The reaction was refluxed for 8 hours. All volatiles were removed from the reaction at high vacuum and the resulting mixture was fractionally distilled (Vigreux column) in a fresh setup to give 2,2,4-trimethyl-1-selena-2-silacyclopentane (b.p.: 63-4° C./10 mm; density 1.195 g/mL). The title compound was isolated as a yellow-orange liquid in 28.7% yield. GC-MS and NMR are consistent with the structure. 1H NMR (CDCl3, 400 MHz): δ0.45 (s, 3H), 0.51 (s, 3H), 0.65 (dd, 1H, J=11.6, 14.0 Hz), 1.13 (d, 3H, J=6.4 Hz), 1.22 (ddd, 1H, J=1.6, 4.8, 14.0 Hz), 2.18 (m, 1H), 2.52 (t, 1H, J=10 Hz), 2.89 (ddd, 1H, J=2.0, 4.8, 10.0 Hz).
To freshly cut Li metal (10.9 g, 1.6 mol) in 200 mL THF was added a solution of a catalytic amount of diphenylacetylene (7.3 g, 0.04 mol) in an additional 200 mL of THF. The addition was slightly exothermic and resulted in a reddish-brown solution. After the exotherm ceased (about 90 min), Te powder (100 g, 0.8 mol) was added via a powder addition funnel in small amounts, resulting in a large exotherm. The resulting mixture was heated at reflux for 8 hours to ensure maximum Li consumption. A solution of 145.1 g (0.8 mol) chloroisobutyldimethylchlorosilane (commercially available from Gelest) and 1.1 g (0.01 mol) of BF3·Et2O was prepared and added dropwise to the Li2Te, resulting in an exotherm. The reaction was refluxed for 8 hours. All volatiles were removed from the reaction at high vacuum and the resulting mixture was fractionally distilled (Vigreux column) in a fresh setup to give 2,2,4-trimethyl-1-tellura-2-silacyclopentane (b.p. 61-3° C./4). The title compound was isolated as a colorless liquid in 30.3% yield. Upon exposure to light it began to take on an orange hue. GCMS and NMR verified the structure. 1H NMR (CDCl3, 400 MHz): δ0.61 (s, 3H), 0.67 (s, 3H), 0.72 (dd, 1H, J=10.8, 14.0 Hz), 1.14 (d, 3H, J=6.4 Hz), 1.34 (ddd. 1H, J=1.6, 3.6, 13.6 Hz), 2.12 (m, 1H), 2.62 (t, 1H, J=10 Hz), 2.91 (ddd, 1H, J=1.6, 4.4, 10.4 Hz).
It will be appreciated by those skilled in the art that changes could be made to the embodiment described above without departing from the broad inventive concepts thereof Also, based on this disclosure, a person of ordinary skill in the art would further recognize that the relative proportions of the components illustrated above could be varied without departing from the spirit and scope of the invention. It is understood, therefor, that this invention is not limited to that particular embodiment disclosed, but it is intended to cover modifications within the spirit and scope of the present invention as defined by the appended claims.
This application is a continuation of co-pending U.S. patent application Ser. No. 16/826,589, filed Mar. 23, 2020, which claims priority to U.S. provisional patent application number 62/827,970, filed Apr. 2, 2019, the disclosures of which are herein incorporated by reference in their entirety.
| Number | Date | Country | |
|---|---|---|---|
| 62827970 | Apr 2019 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 16826589 | Mar 2020 | US |
| Child | 17985990 | US |
