characterized by the use of precursors specially adapted for ALD

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CPC
C23C16/45553

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45553characterized by the use of precursors specially adapted for ALD

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 12,368,024
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- Abdullah Zafar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Group 4 metal element-containing compound, precursor composition in...
- Patent number 12,365,700
- Issue date Jul 22, 2025
- Hansol Chemical Co., Ltd.
- Hyun-Kee Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transition metal deposition processes and deposition assembly
- Patent number 12,365,984
- Issue date Jul 22, 2025
- ASM IP Holding B.V.
- Janne-Petteri Niemelä
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors and processes for deposition of Si-containing films usin...
- Patent number 12,368,042
- Issue date Jul 22, 2025
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Naoto Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming dielectric layers through deposition and anneal...
- Patent number 12,368,044
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wan-Yi Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Synthesis and use of precursors for ALD of molybdenum or tungsten c...
- Patent number 12,365,981
- Issue date Jul 22, 2025
- ASM IP Holding B.V.
- Tiina McKee
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method and system for forming a silicon oxycarbide layer and struct...
- Patent number 12,359,312
- Issue date Jul 15, 2025
- ASM IP Holding B.V.
- Takashi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rare earth precursor, method of preparing the same, and method of f...
- Patent number 12,359,317
- Issue date Jul 15, 2025
- Hansol Chemical Co., Ltd.
- Mi-Ra Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Group VI metal deposition process
- Patent number 12,359,309
- Issue date Jul 15, 2025
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for forming a layer comprising aluminum, titani...
- Patent number 12,362,171
- Issue date Jul 15, 2025
- ASM IP Holding B.V.
- Lifu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of oxides and nitrides
- Patent number 12,359,315
- Issue date Jul 15, 2025
- ASM IP Holding B.V.
- Henri Jussila
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gap fill methods using catalyzed deposition
- Patent number 12,351,909
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- Byunghoon Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hafnium aluminum oxide coatings deposited by atomic layer deposition
- Patent number 12,351,910
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming chalcogenide-based thin film using atomic layer d...
- Patent number 12,356,873
- Issue date Jul 8, 2025
- Seoul National University R&DBFoundation
- Cheol Seong Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for delivery of vanadium compounds
- Patent number 12,351,902
- Issue date Jul 8, 2025
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of films using molybdenum precursors
- Patent number 12,351,914
- Issue date Jul 8, 2025
- Lam Research Corporation
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultrathin atomic layer deposition film accuracy thickness control
- Patent number 12,354,871
- Issue date Jul 8, 2025
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition of films comprising molybdenum
- Patent number 12,354,877
- Issue date Jul 8, 2025
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon-based thin films from N-alkyl substituted perhydridocyclotr...
- Patent number 12,344,934
- Issue date Jul 1, 2025
- Gelest, Inc.
- Barry C. Arkles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for topography-selective depositions
- Patent number 12,347,675
- Issue date Jul 1, 2025
- ASM IP Holding B.V.
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scandium precursor for SC2O3 or SC2S3 atomic layer deposition
- Patent number 12,344,627
- Issue date Jul 1, 2025
- Intel Corporation
- Patricio E. Romero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing copper-containing layer
- Patent number 12,344,931
- Issue date Jul 1, 2025
- Adeka Corporation
- Akihiro Nishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming plasma coating
- Patent number 12,347,652
- Issue date Jul 1, 2025
- Applied Materials, Inc.
- Lance A. Scudder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon precursor compounds and method for forming silicon-containi...
- Patent number 12,347,672
- Issue date Jul 1, 2025
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-reflective optical coatings and methods of forming the same
- Patent number 12,339,421
- Issue date Jun 24, 2025
- Corning Incorporated
- Ming-Huang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molybdenum deposition
- Patent number 12,334,351
- Issue date Jun 17, 2025
- Lam Research Corporation
- Jeong-Seok Na
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molybdenum fill
- Patent number 12,327,762
- Issue date Jun 10, 2025
- Lam Research Corporation
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film deposition process
- Patent number 12,322,591
- Issue date Jun 3, 2025
- ASM IP Holding B.V.
- Naoki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ruthenium precursor composition, preparation method therefor, and f...
- Patent number 12,319,705
- Issue date Jun 3, 2025
- UP Chemical Co., Ltd.
- Yun Tae Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solids vaporizer
- Patent number 12,312,685
- Issue date May 27, 2025
- Entegris, Inc.
- Benjamin Cardozo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
- Publication number 20250239444
- Publication date Jul 24, 2025
- ASM IP HOLDING B.V.
- YoungChol Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FILLING A GAP
- Publication number 20250232974
- Publication date Jul 17, 2025
- ASM IP HOLDING B.V.
- Sungdae Woo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON PRECURSOR COMPOUND IN ASYMMETRIC STRUCTURE, METHOD FOR PREP...
- Publication number 20250230176
- Publication date Jul 17, 2025
- Merck Patent GmbH
- BYEONG-IL YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF SELECTIVE ATOMIC LAYER DEPOSITION
- Publication number 20250230545
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVATOR, METHOD OF FORMING THIN FILM USING ACTIVATOR, SEMICONDUCT...
- Publication number 20250223697
- Publication date Jul 10, 2025
- Soulbrain Co., LTD
- Seung Hyun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR FILLING A GAP
- Publication number 20250226214
- Publication date Jul 10, 2025
- ASM IP HOLDING B.V.
- Ranjit Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUP 2 METAL CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSI...
- Publication number 20250223696
- Publication date Jul 10, 2025
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Daehyeon Kim
- C01 - INORGANIC CHEMISTRY
Information Patent Application
THIN FILM MODIFICATION COMPOSITION, METHOD OF FORMING THIN FILM USI...
- Publication number 20250218767
- Publication date Jul 3, 2025
- Soulbrain Co., LTD
- Seung Hyun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR FORMING A THRESHOLD VOLTAGE SHIFTI...
- Publication number 20250218783
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Giuseppe Alessio Verni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VANADIUM CONTAINING LAYERS AND METHODS AND SYSTEMS FOR DEPOSITING S...
- Publication number 20250215565
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Jocelyn Kofi Brobbey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL LIQUID, MANUFACTURING METHOD OF MODIFIED SUBSTRATE, AND MA...
- Publication number 20250215024
- Publication date Jul 3, 2025
- FUJIFILM CORPORATION
- Koichi Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20250215557
- Publication date Jul 3, 2025
- VERSUM MATERIALS US, LLC
- ROBERT G. RIDGEWAY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING INDIUM MOLYBDENUM OXIDE LAYERS AND ASSOCIATED IN...
- Publication number 20250215558
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Hameeda Jagalur Basheer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL PHOSPHIDE DEPOSITION VIA PHOSPHASILANE REACTANTS AND RELATED...
- Publication number 20250207254
- Publication date Jun 26, 2025
- Intel Corporation
- Scott Peter Semproni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT HAVING AT LEAST ONE FEATURE FORMED BY APPLYING AT LEAST T...
- Publication number 20250210365
- Publication date Jun 26, 2025
- Quantinuum LLC
- Adam Jay OLLANIK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM MODIFICATION COMPOSITION, METHOD OF FORMING THIN FILM USI...
- Publication number 20250207255
- Publication date Jun 26, 2025
- Soulbrain Co., LTD
- Seung Hyun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE FILM, PREPARATION METHOD THEREOF AND LIGHT-EMITTING DEVICE
- Publication number 20250212594
- Publication date Jun 26, 2025
- TCL TECHNOLOGY GROUP CORPORATION
- Xiongfeng LIN
- B82 - NANO-TECHNOLOGY
Information Patent Application
LOW-K DIELECTRIC PROTECTION DURING PLASMA DEPOSITION OF SILICON NIT...
- Publication number 20250197996
- Publication date Jun 19, 2025
- LAM RESEARCH CORPORATION
- Awnish Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF DEPOSITING SILICON-CONTAINING DIELECTRIC LAYERS FOR SEMI...
- Publication number 20250201548
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Zhijie Chua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING GAP FILLING FLUIDS AND RELATED SYSTEMS AND D...
- Publication number 20250201628
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING PELLICLE FOR FORMING METAL SILICIDE CAPPIN...
- Publication number 20250199396
- Publication date Jun 19, 2025
- DNF CO., LTD.
- Sangyong JEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOVEL ORGANOPLATINUM COMPOUND, METHOD FOR MANUFACTURING SAME, METHO...
- Publication number 20250197433
- Publication date Jun 19, 2025
- Korea Research Institute of Chemical Technology
- Chang Gyoun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALIDE-FREE CO-REACTANTS FOR MOLYBDENUM FILM DEPOSITION
- Publication number 20250188611
- Publication date Jun 12, 2025
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITION OF A THIN SULFIDE LAYER OF A TRANSITION METAL...
- Publication number 20250188644
- Publication date Jun 12, 2025
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Stéphane Cadot
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIDEWALL PASSIVATION USING ALDEHYDE OR ISOCYANATE CHEMISTRY FOR HIG...
- Publication number 20250188600
- Publication date Jun 12, 2025
- LAM RESEARCH CORPORATION
- Eric A. Hudson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPR...
- Publication number 20250183029
- Publication date Jun 5, 2025
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METAL AND PHOSPHOROUS CONTAINING FILMS AND METHODS AND SYSTEMS FOR...
- Publication number 20250183030
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM MODIFICATION COMPOSITION, METHOD OF FORMING THIN FILM USI...
- Publication number 20250179626
- Publication date Jun 5, 2025
- Soulbrain Co., LTD
- Chang Bong YEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF MOLYBDENUM
- Publication number 20250179635
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Shruti Vivek THOMBARE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE BOTTOM-UP FILL
- Publication number 20250183054
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Guannan Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterized by the use of precursors specially adapted for ALD

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and apparatus for processing a substrate

Group 4 metal element-containing compound, precursor composition in...

Transition metal deposition processes and deposition assembly

Precursors and processes for deposition of Si-containing films usin...

Methods of forming dielectric layers through deposition and anneal...

Synthesis and use of precursors for ALD of molybdenum or tungsten c...

Method and system for forming a silicon oxycarbide layer and struct...

Rare earth precursor, method of preparing the same, and method of f...

Group VI metal deposition process

Methods and systems for forming a layer comprising aluminum, titani...

Deposition of oxides and nitrides

Gap fill methods using catalyzed deposition

Hafnium aluminum oxide coatings deposited by atomic layer deposition

Method of forming chalcogenide-based thin film using atomic layer d...

Methods and systems for delivery of vanadium compounds

Deposition of films using molybdenum precursors

Ultrathin atomic layer deposition film accuracy thickness control

Vapor deposition of films comprising molybdenum

Silicon-based thin films from N-alkyl substituted perhydridocyclotr...

Methods and systems for topography-selective depositions

Scandium precursor for SC2O3 or SC2S3 atomic layer deposition

Method of producing copper-containing layer

Method for forming plasma coating

Silicon precursor compounds and method for forming silicon-containi...

Anti-reflective optical coatings and methods of forming the same

Molybdenum deposition

Molybdenum fill

Thin film deposition process

Ruthenium precursor composition, preparation method therefor, and f...

Solids vaporizer

Patents Applicationslast 30 patents

STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME

METHOD OF FILLING A GAP

SILICON PRECURSOR COMPOUND IN ASYMMETRIC STRUCTURE, METHOD FOR PREP...

METHODS OF SELECTIVE ATOMIC LAYER DEPOSITION

ACTIVATOR, METHOD OF FORMING THIN FILM USING ACTIVATOR, SEMICONDUCT...

METHODS AND APPARATUSES FOR FILLING A GAP

GROUP 2 METAL CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSI...

THIN FILM MODIFICATION COMPOSITION, METHOD OF FORMING THIN FILM USI...

METHOD, SYSTEM AND APPARATUS FOR FORMING A THRESHOLD VOLTAGE SHIFTI...

VANADIUM CONTAINING LAYERS AND METHODS AND SYSTEMS FOR DEPOSITING S...

CHEMICAL LIQUID, MANUFACTURING METHOD OF MODIFIED SUBSTRATE, AND MA...

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

METHODS OF FORMING INDIUM MOLYBDENUM OXIDE LAYERS AND ASSOCIATED IN...

METAL PHOSPHIDE DEPOSITION VIA PHOSPHASILANE REACTANTS AND RELATED...

COMPONENT HAVING AT LEAST ONE FEATURE FORMED BY APPLYING AT LEAST T...

THIN FILM MODIFICATION COMPOSITION, METHOD OF FORMING THIN FILM USI...

COMPOSITE FILM, PREPARATION METHOD THEREOF AND LIGHT-EMITTING DEVICE

LOW-K DIELECTRIC PROTECTION DURING PLASMA DEPOSITION OF SILICON NIT...

METHODS OF DEPOSITING SILICON-CONTAINING DIELECTRIC LAYERS FOR SEMI...

METHODS FOR DEPOSITING GAP FILLING FLUIDS AND RELATED SYSTEMS AND D...

METHOD FOR MANUFACTURING PELLICLE FOR FORMING METAL SILICIDE CAPPIN...

NOVEL ORGANOPLATINUM COMPOUND, METHOD FOR MANUFACTURING SAME, METHO...

HALIDE-FREE CO-REACTANTS FOR MOLYBDENUM FILM DEPOSITION

METHOD OF DEPOSITION OF A THIN SULFIDE LAYER OF A TRANSITION METAL...

SIDEWALL PASSIVATION USING ALDEHYDE OR ISOCYANATE CHEMISTRY FOR HIG...

ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPR...

METAL AND PHOSPHOROUS CONTAINING FILMS AND METHODS AND SYSTEMS FOR...

THIN FILM MODIFICATION COMPOSITION, METHOD OF FORMING THIN FILM USI...

DEPOSITION OF MOLYBDENUM

SELECTIVE BOTTOM-UP FILL