characterized by the use of precursors specially adapted for ALD

Industry

CPC
C23C16/45553

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45553characterized by the use of precursors specially adapted for ALD

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Deposition of organic films
- Patent number 12,205,820
- Issue date Jan 21, 2025
- ASM IP Holding B.V.
- Eva E. Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus with an injector
- Patent number 12,195,852
- Issue date Jan 14, 2025
- ASM IP Holding B.V.
- Kornelius Haanstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conditioning treatment for ALD productivity
- Patent number 12,195,845
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Christina L. Engler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of iodine-containing carbon films
- Patent number 12,188,123
- Issue date Jan 7, 2025
- American Air Liquide, Inc.
- Phong Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective molecular layer deposition of organic and hybrid organic-...
- Patent number 12,191,139
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Tapash Chakraborty
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Showerhead for process tool
- Patent number 12,180,589
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal organic compounds
- Patent number 12,180,234
- Issue date Dec 31, 2024
- Umicore AG & Co. KG
- Nicholas Rau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reducing line bending during metal fill process
- Patent number 12,173,399
- Issue date Dec 24, 2024
- Lam Research Corporation
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing epitaxial material, structure formed using the...
- Patent number 12,173,404
- Issue date Dec 24, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a transition metal containing film on a substrate...
- Patent number 12,173,402
- Issue date Dec 24, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Group 6 transition metal-containing compositions for vapor depositi...
- Patent number 12,173,403
- Issue date Dec 24, 2024
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Rocio Alejandra Arteaga Muller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation device
- Patent number 12,168,825
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Michitaka Aita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a conformal metal or metalloid silicon nitri...
- Patent number 12,163,224
- Issue date Dec 10, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chalcogen precursors for deposition of silicon nitride
- Patent number 12,142,477
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Chandan Kr Barik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming structures using a neutral beam
- Patent number 12,129,548
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for flowable gap-fill
- Patent number 12,129,546
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Shinya Yoshimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method
- Patent number 12,119,228
- Issue date Oct 15, 2024
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhancing gapfill performance of dram word line
- Patent number 12,114,488
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Yong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for metal oxide post-treatment
- Patent number 12,110,589
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Tatsuya E. Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pharmaceutical container with pH protective layer deposited by atom...
- Patent number 12,109,173
- Issue date Oct 8, 2024
- INNOVATIVE SCIENTIFIC PRODUCTS, INC.
- Robert Abrams
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for controlling precursors in chemical deposition processes
- Patent number 12,104,253
- Issue date Oct 1, 2024
- Varian Semiconductor Equipment Associates, Inc.
- Elaina Babayan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a metallic film on a substrate by cyclical depo...
- Patent number 12,106,965
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compound, thin-film forming raw material that contains said compoun...
- Patent number 12,104,245
- Issue date Oct 1, 2024
- Adeka Corporation
- Atsushi Sakurai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis of group 13 oxide electronic mate...
- Patent number 12,104,249
- Issue date Oct 1, 2024
- UChicago Argonne, LLC
- Alex B. Martinson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition processes
- Patent number 12,104,250
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming ruthenium thin film
- Patent number 12,091,748
- Issue date Sep 17, 2024
- Research Cooperation Foundation of Yeungnam University
- Soo-Hyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal complexes for gas-phase thin-film deposition
- Patent number 12,091,427
- Issue date Sep 17, 2024
- Umicore AG & Co. KG
- Joerg Sundermeyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, recording medium, substrate process...
- Patent number 12,084,760
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rhenium complexes and methods of use
- Patent number 12,084,464
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Thomas Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,084,757
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PARALLEL ATOMIC LAYER DEPOSITION OF TARGET ELEMENT INTERIORS
- Publication number 20250027195
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Yogesh Tomar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF NOBLE METAL ISLETS OR THIN FILMS FOR ITS USE FOR ELEC...
- Publication number 20250027197
- Publication date Jan 23, 2025
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Takashi ONO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN-FILM FORMING MATERIAL FOR USE IN ATOMIC LAYER DEPOSITION, THIN...
- Publication number 20250019820
- Publication date Jan 16, 2025
- ADEKA CORPORATION
- Ryota FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM QUALITY IMPROVER, METHOD OF FORMING THIN FILM USING FILM QUALI...
- Publication number 20250019827
- Publication date Jan 16, 2025
- Soulbrain Co., LTD
- Chang Bong YEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR FLOWABLE GAP-FILL
- Publication number 20250011927
- Publication date Jan 9, 2025
- ASM IP HOLDING B.V.
- Shinya Yoshimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYERED SILICON NITRIDE FILM
- Publication number 20250011924
- Publication date Jan 9, 2025
- VERSUM MATERIALS US, LLC
- SE-WON LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL, CARBON-DOPED SILICON NITRIDE FILMS AND METHODS THEREOF
- Publication number 20250014890
- Publication date Jan 9, 2025
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION METHODS FOR MAKING OMNIDIRECTIONAL STRUCTUR...
- Publication number 20250011928
- Publication date Jan 9, 2025
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Songtao Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PURITY MOLYBDENUM-CONTAINING PRECURSORS AND RELATED SYSTEMS AN...
- Publication number 20250003072
- Publication date Jan 2, 2025
- Entegris, Inc.
- Joseph E. Reynolds
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF RUTHENIUM FILM BY UTILIZING Ru(I) PRECURSORS
- Publication number 20250003058
- Publication date Jan 2, 2025
- Merck Patent GmbH
- Po-Chun LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN-FILM FORMING RAW MATERIAL, METHOD OF PRODUCING THIN-FILM, THIN...
- Publication number 20240425975
- Publication date Dec 26, 2024
- ADEKA CORPORATION
- Masako HATASE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD
- Publication number 20240429055
- Publication date Dec 26, 2024
- ASM IP HOLDING B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF RUTHENIUM-CONTAINING FILMS BY NON-AROMATIZABLE CYCLIC...
- Publication number 20240425974
- Publication date Dec 26, 2024
- L'Air Liquide, Société Anonyme pour I'Exploitation des Procédés Georges Claude
- Jacky Chun Ho YIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A LAYER BY ALD
- Publication number 20240425984
- Publication date Dec 26, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING SILICON FILMS BY ATOMIC LAYER DEPOSITION
- Publication number 20240425983
- Publication date Dec 26, 2024
- Micron Technology, Inc.
- Jean-Sebastien Materne Lehn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR PRECURSOR LEVEL MONITORING
- Publication number 20240425985
- Publication date Dec 26, 2024
- ASM IP HOLDING B.V.
- Antti Niskanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION PROCESSES
- Publication number 20240417852
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITION IN HIGH ASPECT RATIO (HAR) FEATURES
- Publication number 20240420965
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Shihsheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFORMAL SILICON OXIDE DEPOSITION USING AMINOSILANE AND CHLOROSILA...
- Publication number 20240410053
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LANTHANIDE AND LANTHANIDE-LIKE TRANSITION METAL COMPLEXES
- Publication number 20240400598
- Publication date Dec 5, 2024
- Christoph WETZEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Homoleptic Bismuth Precursors For Depositing Bismuth Oxide Containi...
- Publication number 20240392433
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- Sergei V. Ivanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FUNCTIONALIZED CYCLOSILAZANES AS PRECURSORS FOR HIGH GROWTH RATE SI...
- Publication number 20240395541
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON-FREE LAMINATED HAFNIUM OXIDE/ZIRCONIUM OXIDE FILMS FOR FERRO...
- Publication number 20240395895
- Publication date Nov 28, 2024
- Entegris, Inc.
- Jun-Fei Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSES FOR FORMING METAL OXIDE THIN FILMS ON ELECTRODE INTERPHAS...
- Publication number 20240396001
- Publication date Nov 28, 2024
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING CARBON-CONTAINING FILM, AND METHOD FOR FORMING H...
- Publication number 20240392432
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Miyako KANEKO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A RUTHENIUM-CONTAINING LAYER AND LAMINATE
- Publication number 20240384400
- Publication date Nov 21, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Rocio Alejandra ARTEAGA MULLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER
- Publication number 20240384401
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR PLASMA ENHANCED ATOMIC LAYER DEPOSITION WITH...
- Publication number 20240384410
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Hao LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240384412
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM DEPOSITION WITH IMPROVED CONTROL OF PRECURSOR
- Publication number 20240384417
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterized by the use of precursors specially adapted for ALD

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Deposition of organic films

Substrate processing apparatus with an injector

Conditioning treatment for ALD productivity

Deposition of iodine-containing carbon films

Selective molecular layer deposition of organic and hybrid organic-...

Showerhead for process tool

Metal organic compounds

Reducing line bending during metal fill process

Method of depositing epitaxial material, structure formed using the...

Method of forming a transition metal containing film on a substrate...

Group 6 transition metal-containing compositions for vapor depositi...

Film formation method and film formation device

Methods for depositing a conformal metal or metalloid silicon nitri...

Chalcogen precursors for deposition of silicon nitride

Method of forming structures using a neutral beam

Methods and apparatuses for flowable gap-fill

Deposition method

Enhancing gapfill performance of dram word line

Methods for metal oxide post-treatment

Pharmaceutical container with pH protective layer deposited by atom...

Techniques for controlling precursors in chemical deposition processes

Methods for forming a metallic film on a substrate by cyclical depo...

Compound, thin-film forming raw material that contains said compoun...

Sequential infiltration synthesis of group 13 oxide electronic mate...

Vapor deposition processes

Method for forming ruthenium thin film

Metal complexes for gas-phase thin-film deposition

Method of processing substrate, recording medium, substrate process...

Rhenium complexes and methods of use

Method of manufacturing semiconductor device, substrate processing...

Patents Applicationslast 30 patents

PARALLEL ATOMIC LAYER DEPOSITION OF TARGET ELEMENT INTERIORS

DEPOSITION OF NOBLE METAL ISLETS OR THIN FILMS FOR ITS USE FOR ELEC...

THIN-FILM FORMING MATERIAL FOR USE IN ATOMIC LAYER DEPOSITION, THIN...

FILM QUALITY IMPROVER, METHOD OF FORMING THIN FILM USING FILM QUALI...

METHODS AND APPARATUSES FOR FLOWABLE GAP-FILL

MULTILAYERED SILICON NITRIDE FILM

CONFORMAL, CARBON-DOPED SILICON NITRIDE FILMS AND METHODS THEREOF

ATOMIC LAYER DEPOSITION METHODS FOR MAKING OMNIDIRECTIONAL STRUCTUR...

HIGH PURITY MOLYBDENUM-CONTAINING PRECURSORS AND RELATED SYSTEMS AN...

SELECTIVE DEPOSITION OF RUTHENIUM FILM BY UTILIZING Ru(I) PRECURSORS

THIN-FILM FORMING RAW MATERIAL, METHOD OF PRODUCING THIN-FILM, THIN...

DEPOSITION METHOD

DEPOSITION OF RUTHENIUM-CONTAINING FILMS BY NON-AROMATIZABLE CYCLIC...

METHOD OF FORMING A LAYER BY ALD

METHODS FOR DEPOSITING SILICON FILMS BY ATOMIC LAYER DEPOSITION

METHODS AND SYSTEMS FOR PRECURSOR LEVEL MONITORING

VAPOR DEPOSITION PROCESSES

METHOD OF DEPOSITION IN HIGH ASPECT RATIO (HAR) FEATURES

CONFORMAL SILICON OXIDE DEPOSITION USING AMINOSILANE AND CHLOROSILA...

LANTHANIDE AND LANTHANIDE-LIKE TRANSITION METAL COMPLEXES

Homoleptic Bismuth Precursors For Depositing Bismuth Oxide Containi...

FUNCTIONALIZED CYCLOSILAZANES AS PRECURSORS FOR HIGH GROWTH RATE SI...

CARBON-FREE LAMINATED HAFNIUM OXIDE/ZIRCONIUM OXIDE FILMS FOR FERRO...

PROCESSES FOR FORMING METAL OXIDE THIN FILMS ON ELECTRODE INTERPHAS...

METHOD FOR FORMING CARBON-CONTAINING FILM, AND METHOD FOR FORMING H...

METHOD OF FORMING A RUTHENIUM-CONTAINING LAYER AND LAMINATE

MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER

SYSTEM AND METHOD FOR PLASMA ENHANCED ATOMIC LAYER DEPOSITION WITH...

FILM-FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS

THIN FILM DEPOSITION WITH IMPROVED CONTROL OF PRECURSOR