characterized by the use of precursors specially adapted for ALD

Industry

CPC
C23C16/45553

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45553characterized by the use of precursors specially adapted for ALD

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods of forming copper iodide layer and structures including cop...
- Patent number 12,234,548
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoaminosilane precursors and methods for depositing films compr...
- Patent number 12,230,496
- Issue date Feb 18, 2025
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and tungsten film
- Patent number 12,227,843
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Takuya Kawaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for stabilizing vanadium compounds
- Patent number 12,221,357
- Issue date Feb 11, 2025
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organotin precursor compounds
- Patent number 12,221,691
- Issue date Feb 11, 2025
- Entegris, Inc.
- David M. Ermert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for deposition of silicon-conta...
- Patent number 12,221,692
- Issue date Feb 11, 2025
- VERSUM MATERIALS US, LLC
- Robert G. Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device and pattern formatio...
- Patent number 12,222,643
- Issue date Feb 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Cheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum nitride film on a surface of a...
- Patent number 12,215,416
- Issue date Feb 4, 2025
- ASM IP Holding B.V.
- Eric Christopher Stevens
- G11 - INFORMATION STORAGE
Information Patent Grant
Method for etching features using a targeted deposition for selecti...
- Patent number 12,217,955
- Issue date Feb 4, 2025
- Lam Research Corporation
- Wenchi Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing gap filling fluid
- Patent number 12,211,742
- Issue date Jan 28, 2025
- ASM IP Holding B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition precursor compounds and process of use
- Patent number 12,209,105
- Issue date Jan 28, 2025
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of organic films
- Patent number 12,205,820
- Issue date Jan 21, 2025
- ASM IP Holding B.V.
- Eva E. Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus with an injector
- Patent number 12,195,852
- Issue date Jan 14, 2025
- ASM IP Holding B.V.
- Kornelius Haanstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conditioning treatment for ALD productivity
- Patent number 12,195,845
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Christina L. Engler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of iodine-containing carbon films
- Patent number 12,188,123
- Issue date Jan 7, 2025
- American Air Liquide, Inc.
- Phong Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective molecular layer deposition of organic and hybrid organic-...
- Patent number 12,191,139
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Tapash Chakraborty
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Metal organic compounds
- Patent number 12,180,234
- Issue date Dec 31, 2024
- Umicore AG & Co. KG
- Nicholas Rau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead for process tool
- Patent number 12,180,589
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reducing line bending during metal fill process
- Patent number 12,173,399
- Issue date Dec 24, 2024
- Lam Research Corporation
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing epitaxial material, structure formed using the...
- Patent number 12,173,404
- Issue date Dec 24, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a transition metal containing film on a substrate...
- Patent number 12,173,402
- Issue date Dec 24, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Group 6 transition metal-containing compositions for vapor depositi...
- Patent number 12,173,403
- Issue date Dec 24, 2024
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Rocio Alejandra Arteaga Muller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation device
- Patent number 12,168,825
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Michitaka Aita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a conformal metal or metalloid silicon nitri...
- Patent number 12,163,224
- Issue date Dec 10, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chalcogen precursors for deposition of silicon nitride
- Patent number 12,142,477
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Chandan Kr Barik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming structures using a neutral beam
- Patent number 12,129,548
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for flowable gap-fill
- Patent number 12,129,546
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Shinya Yoshimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method
- Patent number 12,119,228
- Issue date Oct 15, 2024
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhancing gapfill performance of dram word line
- Patent number 12,114,488
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Yong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for metal oxide post-treatment
- Patent number 12,110,589
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Tatsuya E. Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING DEVICE, AND METHOD FOR MANUFACTURING METAL OXI...
- Publication number 20250059645
- Publication date Feb 20, 2025
- Duck Ho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING GERMANIUM FILMS BY ATOMIC LAYER DEPOSITION
- Publication number 20250059646
- Publication date Feb 20, 2025
- Micron Technology, Inc.
- Jean-Sebastien Materne Lehn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIN-CONTAINING PRECURSORS FOR DEPOSITION OF TIN-CONTAINING THIN FIL...
- Publication number 20250059643
- Publication date Feb 20, 2025
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Masato HIRAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20250051915
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Yuta NAKANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Alkyl And Aryl Heteroleptic Bismuth Precursors For Bismuth Oxide Co...
- Publication number 20250051378
- Publication date Feb 13, 2025
- VERSUM MATERIALS US, LLC
- Sergei V. Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LARGE GRAIN TUNGSTEN GROWTH IN FEATURES
- Publication number 20250051908
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Kevin Qiwen CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20250051911
- Publication date Feb 13, 2025
- AIR WATER INC.
- Fumio KAWASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON PRECURSOR COMPOUND AND PREPARATION METHOD THEREFOR, AND SIL...
- Publication number 20250051914
- Publication date Feb 13, 2025
- Merck Patent GmbH
- Byeong-IL Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON NITRIDE
- Publication number 20250054747
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20250046605
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Wataru Adachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EUV DOSE REDUCING LAYERS, RELATED STRUCTURES, AND METHODS AND SYSTE...
- Publication number 20250046609
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Fatemeh Davodi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
- Publication number 20250043415
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Yohei MATSUYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TITANIUM NITRIDE GAPFILL PROCESSES FOR SEMICONDUCTOR DEVICES
- Publication number 20250046600
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Muthukumar Kaliappan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A MOLYBDENUM SILICIDE LAYER ON A SURFACE OF A SU...
- Publication number 20250038006
- Publication date Jan 30, 2025
- Didem Ernur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR STABILIZING VANADIUM COMPOUNDS
- Publication number 20250033990
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Charles Dezelah
- C01 - INORGANIC CHEMISTRY
Information Patent Application
LOW TEMPERATURE MOLYBDENUM DEPOSITION ASSISTED BY SILICON-CONTAININ...
- Publication number 20250038003
- Publication date Jan 30, 2025
- LAM RESEARCH CORPORATION
- David Joseph Mandia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR FORMING METAL OXIDE LAYERS
- Publication number 20250034701
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Bo Yin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARALLEL ATOMIC LAYER DEPOSITION OF TARGET ELEMENT INTERIORS
- Publication number 20250027195
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Yogesh Tomar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF NOBLE METAL ISLETS OR THIN FILMS FOR ITS USE FOR ELEC...
- Publication number 20250027197
- Publication date Jan 23, 2025
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Takashi ONO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN-FILM FORMING MATERIAL FOR USE IN ATOMIC LAYER DEPOSITION, THIN...
- Publication number 20250019820
- Publication date Jan 16, 2025
- ADEKA CORPORATION
- Ryota FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM QUALITY IMPROVER, METHOD OF FORMING THIN FILM USING FILM QUALI...
- Publication number 20250019827
- Publication date Jan 16, 2025
- Soulbrain Co., LTD
- Chang Bong YEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR FLOWABLE GAP-FILL
- Publication number 20250011927
- Publication date Jan 9, 2025
- ASM IP HOLDING B.V.
- Shinya Yoshimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYERED SILICON NITRIDE FILM
- Publication number 20250011924
- Publication date Jan 9, 2025
- VERSUM MATERIALS US, LLC
- SE-WON LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL, CARBON-DOPED SILICON NITRIDE FILMS AND METHODS THEREOF
- Publication number 20250014890
- Publication date Jan 9, 2025
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION METHODS FOR MAKING OMNIDIRECTIONAL STRUCTUR...
- Publication number 20250011928
- Publication date Jan 9, 2025
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Songtao Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PURITY MOLYBDENUM-CONTAINING PRECURSORS AND RELATED SYSTEMS AN...
- Publication number 20250003072
- Publication date Jan 2, 2025
- Entegris, Inc.
- Joseph E. Reynolds
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF RUTHENIUM FILM BY UTILIZING Ru(I) PRECURSORS
- Publication number 20250003058
- Publication date Jan 2, 2025
- Merck Patent GmbH
- Po-Chun LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN-FILM FORMING RAW MATERIAL, METHOD OF PRODUCING THIN-FILM, THIN...
- Publication number 20240425975
- Publication date Dec 26, 2024
- ADEKA CORPORATION
- Masako HATASE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD
- Publication number 20240429055
- Publication date Dec 26, 2024
- ASM IP HOLDING B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF RUTHENIUM-CONTAINING FILMS BY NON-AROMATIZABLE CYCLIC...
- Publication number 20240425974
- Publication date Dec 26, 2024
- L'Air Liquide, Société Anonyme pour I'Exploitation des Procédés Georges Claude
- Jacky Chun Ho YIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterized by the use of precursors specially adapted for ALD

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods of forming copper iodide layer and structures including cop...

Organoaminosilane precursors and methods for depositing films compr...

Film forming method and tungsten film

Methods and apparatus for stabilizing vanadium compounds

Organotin precursor compounds

Compositions and methods using same for deposition of silicon-conta...

Method of manufacturing a semiconductor device and pattern formatio...

Methods for depositing a molybdenum nitride film on a surface of a...

Method for etching features using a targeted deposition for selecti...

Methods for depositing gap filling fluid

Vapor deposition precursor compounds and process of use

Deposition of organic films

Substrate processing apparatus with an injector

Conditioning treatment for ALD productivity

Deposition of iodine-containing carbon films

Selective molecular layer deposition of organic and hybrid organic-...

Metal organic compounds

Showerhead for process tool

Reducing line bending during metal fill process

Method of depositing epitaxial material, structure formed using the...

Method of forming a transition metal containing film on a substrate...

Group 6 transition metal-containing compositions for vapor depositi...

Film formation method and film formation device

Methods for depositing a conformal metal or metalloid silicon nitri...

Chalcogen precursors for deposition of silicon nitride

Method of forming structures using a neutral beam

Methods and apparatuses for flowable gap-fill

Deposition method

Enhancing gapfill performance of dram word line

Methods for metal oxide post-treatment

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING DEVICE, AND METHOD FOR MANUFACTURING METAL OXI...

METHODS FOR DEPOSITING GERMANIUM FILMS BY ATOMIC LAYER DEPOSITION

TIN-CONTAINING PRECURSORS FOR DEPOSITION OF TIN-CONTAINING THIN FIL...

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

Alkyl And Aryl Heteroleptic Bismuth Precursors For Bismuth Oxide Co...

LARGE GRAIN TUNGSTEN GROWTH IN FEATURES

FILM FORMING METHOD

SILICON PRECURSOR COMPOUND AND PREPARATION METHOD THEREFOR, AND SIL...

CONFORMAL DEPOSITION OF SILICON NITRIDE

SUBSTRATE PROCESSING METHOD

EUV DOSE REDUCING LAYERS, RELATED STRUCTURES, AND METHODS AND SYSTE...

FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS

TITANIUM NITRIDE GAPFILL PROCESSES FOR SEMICONDUCTOR DEVICES

METHOD FOR FORMING A MOLYBDENUM SILICIDE LAYER ON A SURFACE OF A SU...

METHODS AND APPARATUS FOR STABILIZING VANADIUM COMPOUNDS

LOW TEMPERATURE MOLYBDENUM DEPOSITION ASSISTED BY SILICON-CONTAININ...

METHOD, SYSTEM AND APPARATUS FOR FORMING METAL OXIDE LAYERS

PARALLEL ATOMIC LAYER DEPOSITION OF TARGET ELEMENT INTERIORS

DEPOSITION OF NOBLE METAL ISLETS OR THIN FILMS FOR ITS USE FOR ELEC...

THIN-FILM FORMING MATERIAL FOR USE IN ATOMIC LAYER DEPOSITION, THIN...

FILM QUALITY IMPROVER, METHOD OF FORMING THIN FILM USING FILM QUALI...

METHODS AND APPARATUSES FOR FLOWABLE GAP-FILL

MULTILAYERED SILICON NITRIDE FILM

CONFORMAL, CARBON-DOPED SILICON NITRIDE FILMS AND METHODS THEREOF

ATOMIC LAYER DEPOSITION METHODS FOR MAKING OMNIDIRECTIONAL STRUCTUR...

HIGH PURITY MOLYBDENUM-CONTAINING PRECURSORS AND RELATED SYSTEMS AN...

SELECTIVE DEPOSITION OF RUTHENIUM FILM BY UTILIZING Ru(I) PRECURSORS

THIN-FILM FORMING RAW MATERIAL, METHOD OF PRODUCING THIN-FILM, THIN...

DEPOSITION METHOD

DEPOSITION OF RUTHENIUM-CONTAINING FILMS BY NON-AROMATIZABLE CYCLIC...