Claims
- 1. A process for depositing a metallic coating on a heated substrate by chemical vapor decomposition of an organometallic compound, said process comprising contacting an organometallic compound of the formula (I) ##STR3## where M is a Group IIIB metal or a mixture thereof and R is an alkyl or alkenyl radical containing from 2 to about 6 carbon atoms, with said heated substrate, said substrate being at a temperature above the decomposition temperature of said organometallic compound.
- 2. A process according to claim 1 in which M is lanthanum or yttrium.
- 3. A process according to claim 1 in which R contains from 2 to about 4 carbon atoms.
- 4. A process according to claim 1 in which R is an alkyl radical.
- 5. A process according to claim 1 in which R is isopropyl.
- 6. A process according to claim 1 in which said organometallic compound is supplied in a stream of carrier gas.
- 7. A process according to claim 6 in which said carrier gas is a non-oxidizing carrier gas and said substrate is in a non-oxidizing atmosphere.
- 8. A process according to claim 1 in which the temperature of said substrate is from about 150 to about 1000.degree. C.
- 9. A process in which said coating has a thickness not greater than about 100 microns.
- 10. A process according to claim 1 which further comprises contacting said substrate with an oxidizing agent, and where the metallic coating of said process comprises a metal compound.
- 11. A process according to claim 1 in which said metallic coating comprises at least two metals or metal compounds.
- 12. A process according to claim 1 in which said coating comprises an intermetallic compound.
- 13. A process according to claim 12 in which said intermetallic compound is lanthanum telluride.
- 14. A process according to claim 11 further comprising contacting said substrate with an oxidizing agent.
Government Interests
This invention was made with United States Government support under Grant #DE-FG05-86ER45266, awarded by the Department of Energy. The Government has certain rights in this invention.
US Referenced Citations (7)
Non-Patent Literature Citations (1)
Entry |
Devyathykh, G. G. et al, Zhurnal Neorganicheskol Khimii, vol. 25, pp. 2109-2112 (1980) English Translation). |