Number | Date | Country | Kind |
---|---|---|---|
81 17040 | Sep 1981 | FRX |
Number | Name | Date | Kind |
---|---|---|---|
3632494 | Herte et al. | Nov 1967 | |
3635811 | Lane | Jan 1972 | |
3912461 | Wakefield | Oct 1975 |
Entry |
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Diegle et al., J. Electro. Chem. Soc., Sep. 1980, pp. 2030-2033. |
Harding, J. Vac. Sci. Technol., 13, (1976), pp. 1070-1073. |
Brainard et al., J. Vac. Sci. Technol., 15, (1978), pp. 1800-1805. |