Chuck for a photoresist spin coater

Abstract

A chuck for a photoresist spin coater has a bracket and a disk. The bracket is electrically conductive. The disk is mounted on the base, holds a glass substrate and is electrically conductive. Therefore, The disk allows static electricity on the disk to discharge to protect the glass substrate from being damaged by the static electricity when the glass substrate removes from the chuck.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a chuck for a photoresist spin coater in accordance with the present invention on the base.

FIG. 2 is an enlarged perspective view of the photoresist spin coater with the chuck in FIG. 1;

FIG. 3 is a side view in partial section of the photoresist spin coater with the chuck in FIG. 2 on the base;

FIG. 4 is a side view in partial section of the photoresist spin coater with the chuck in FIG. 2 on the base and arrows indicate a pathway of electric conduction;

FIG. 5 is a perspective view of a conventional photoresist spin coater in accordance with the prior art.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

With reference to FIGS. 1 to 3, a chuck in accordance with the present invention is mounted with a photoresist spin coater. The photoresist spin coater is mounted on a base (80) grounded and has a motor, a shaft (10) and a vacuum pump. The motor and the vacuum pump are fixed on a base (80). The shaft (10) is static electrically conductive, is mounted on the base (80), is connected rotatably to and is driven by the motor and has a top end and a mounting slot (11) defined transversely in the shaft (10) close to the top end.

With reference to FIGS. 2 and 3, the chuck is mounted on the top end of the shaft (10) and comprises a bracket (20) and a disk (30).

The bracket (20) is made of static electrically conductive material such as metal to conduct electricity. The bracket (20) is detachably mounted on the top end of the shaft (10) and comprises a center, a bottom, a central hole (21) and a sleeve (22). The central hole (21) is defined through the center of the bracket (20) and communicates with the vacuum pump through a tube so that the vacuum pump may provide a suction effect in the central hole (21). The sleeve (22) protrudes down from the bottom of the bracket (20), is mounted around the top end of the shaft (10) and comprises a cavity (221), a positioning hole (223) and a bolt (225). The cavity (221) is defined axially in the sleeve and receives the top end of the shaft (10). The positioning hole (223) is defined radially in the sleeve (22), communicates with the cavity (221) and is threaded. The bolt (225) is mounted detachably through the positioning hole (223) and extends into the mounting slot (11) in the shaft (10) so that the shaft (10) and the base (20) can be fastened together.

The disk (30) is mounted on the base (20), may contact and hold a glass substrate, is made of static electrically conductive material such as carbon, graphite, metal and the like to conduct electricity. Preferably, a resistivity of the disk (30) is 10³ to 10⁵ ohms/sq. The disk (30) comprises a center, a top, a through hole (31), multiple radial gaps (32) and multiple annular gaps (33). The through hole (31) is defined through the center of the disk (30) and communicates with the central hole (21) in the bracket (20). The radial gaps (32) are defined in the top of the disk (30) and communicate with the through hole (31). The annular gaps (33) are defined in the top of the disk (30), communicate with the radial gaps (32) and are arranged concentrically. When the vacuum pump operates, the suction effect provided by the vacuum pump reaches in the radial and annular gaps (31, 32) to securely hold a glass substrate on the chuck.

With reference to FIGS. 2 and 4, the disk (30), the bracket (20), the shaft (10), the motor and the base (80) are formed as a static electricity discharging pathway. After the glass substrate is coated with the photoresist, the static electricity on the disk (30) passes through the static electricity discharging pathway to the ground and protects the glass substrate from being damaged by the static electricity when the glass substrate is removed from the chuck.

Therefore, the disk (30), the base (20), the chuck with the disk (30) allows the static electricity to discharge through the static electricity discharging pathway so the glass substrate on the disk is not damaged by the static electricity. Therefore, a production rate of the glass substrate is increased.

Even though numerous characteristics and advantages of the present invention have been set forth in the foregoing description, together with details of the structure and features of the invention, the disclosure is illustrative only. Changes may be made in the details, especially in matters of shape, size, and arrangement of parts within the principles of the invention to the full extent indicated by the broad general meaning of the terms in which the appended claims are expressed.

Claims

1. A chuck for a photoresist spin coater comprising a bracket made of static electrically conductive material; anda disk mounted on the bracket, made of static electrically conductive material.

2. The chuck for a photoresist spin coater as claimed in claim 1, wherein the disk is made of carbon.

3. The chuck for a photoresist spin coater as claimed in claim 1, wherein the disk is made of graphite.

4. The chuck for a photoresist spin coater as claimed in claim 1, wherein the disk is made of metal.

5. The chuck for a photoresist spin coater as claimed in claim 2, wherein a resistivity of the disk is 103 to 105 ohms/sq.

6. The chuck for a photoresist spin coater as claimed in claim 3, wherein a resistivity of the disk is 103 to 105 ohms/sq.

7. The chuck for a photoresist coater as claimed in claim 4, wherein a resistivity of the disk is 103 to 105 ohms/sq.

8. The chuck for a photoresist spin coater as claimed in claim 5, wherein the bracket has a bottom; anda sleeve protruding down from the bottom of the bracket, mounted around a rotating shaft and having a cavity defined axially in the sleeve;a positioning hole defined radially in the sleeve and communicating with the cavity; anda bolt mounted detachably through the positioning hole.

9. The chuck for a photoresist spin coater as claimed in claim 6, wherein the bracket has a bottom; anda sleeve protruding down from the bottom of the bracket and having a cavity defined axially in the sleeve;a positioning hole defined radially in the sleeve and communicating with the cavity; anda bolt mounted detachably through the positioning hole.

10. The chuck for a photoresist spin coater as claimed in claim 7, wherein the bracket has a bottom; anda sleeve protruding down from the bottom of the bracket and having a cavity defined axially in the sleeve;a positioning hole defined radially in the sleeve and communicating with the cavity; anda bolt mounted detachably through the positioning hole.

11. The chuck for a photoresist spin coater as claimed in claim 8, wherein: the bracket further comprises a center and a central hole defined through the center of the bracket and adapted for communicating with a vacuum pump through a tube; andthe disk further comprises a center and a through hole defined through the center of the disk and communicating with the central hole of the bracket.

12. The chuck for a photoresist spin coater as claimed in claim 9, wherein the bracket further comprises a center and a central hole defined through the center of the bracket and adapted for communicating with a vacuum pump through a tube; andthe disk further comprises a center and a through hole defined through the center of the disk and communicating with the central hole of the bracket.

13. The chuck for a photoresist spin coater as claimed in claim 9, wherein the bracket further comprises a center and a central hole defined through the center of the bracket and adapted for communicating with a vacuum pump through a tube; andthe disk further comprises a center and a through hole defined through the center of the disk and communicating with the central hole of the bracket.

14. The chuck for a photoresist spin coater as claimed in claim 11, wherein the disk further comprises a top, multiple radial gaps defined in the top of the disk and communicating with the through hole and multiple annular gaps defined in the top of the disk and communicating with the radial gaps.

15. The chuck for a photoresist spin coater as claimed in claim 12, wherein the disk further comprises a top, multiple radial gaps defined in the top of the disk and communicating with the through hole and multiple annular gaps defined in the top of the disk and communicating with the radial gaps.

16. The chuck for a photoresist spin coater as claimed in claim 13, wherein the disk further comprises a top, multiple radial gaps defined in the top of the disk and communicating with the through hole and multiple annular gaps defined in the top of the disk and communicating with the radial gaps.