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last 30 patents
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Semiconductor manufacturing apparatus and method thereof
Patent number
12,265,327
Issue date
Apr 1, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Ching-Hai Yang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Cleaning jig, coating apparatus, and cleaning method
Patent number
12,257,611
Issue date
Mar 25, 2025
Tokyo Electron Limited
Satoshi Shimmura
B08 - CLEANING
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Apparatus for manufacturing semiconductor device
Patent number
12,252,791
Issue date
Mar 18, 2025
Denso Corporation
Hiroaki Fujibayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Methods and systems for real-time quality control of a film in a sp...
Patent number
12,255,110
Issue date
Mar 18, 2025
Samsung Electronics Co., Ltd.
Gaurav Kumar
G06 - COMPUTING CALCULATING COUNTING
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Substrate processing monitoring apparatus based on imaging video da...
Patent number
12,244,972
Issue date
Mar 4, 2025
Tokyo Electron Limited
Yuichiro Kunugimoto
G06 - COMPUTING CALCULATING COUNTING
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Semiconductor developer tool and methods of operation
Patent number
12,235,582
Issue date
Feb 25, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Yung-Yao Lee
H01 - BASIC ELECTRIC ELEMENTS
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Method and apparatus for treating substrate
Patent number
12,235,581
Issue date
Feb 25, 2025
Semes Co., Ltd.
Min Jung Park
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Photoresist topcoat compositions and methods of processing photores...
Patent number
12,234,369
Issue date
Feb 25, 2025
DuPont Electronic Materials International, LLC
Irvinder Kaur
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Pattern formation methods
Patent number
12,228,859
Issue date
Feb 18, 2025
Rohm and Haas Electronic Materials LLC
Choong-Bong Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Apparatus for treating substrate
Patent number
12,228,861
Issue date
Feb 18, 2025
Semes Co., Ltd.
Ki Sang Eum
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Solution, solution storage body, actinic ray-sensitive or radiation...
Patent number
12,228,857
Issue date
Feb 18, 2025
FUJIFILM Corporation
Tetsuya Kamimura
H01 - BASIC ELECTRIC ELEMENTS
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Coating composition for forming resist underlayer film for EUV lith...
Patent number
12,228,858
Issue date
Feb 18, 2025
DuPont Specialty Materials Korea Ltd.
Jae Hwan Sim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Coating method and coating apparatus
Patent number
12,216,406
Issue date
Feb 4, 2025
Tokyo Electron Limited
Yusaku Hashimoto
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Semiconductor manufacturing system, method of manufacturing a semic...
Patent number
12,217,962
Issue date
Feb 4, 2025
Kioxia Corporation
Shingo Honda
H01 - BASIC ELECTRIC ELEMENTS
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Display device and manufacturing method thereof
Patent number
12,218,153
Issue date
Feb 4, 2025
Au Optronics Corporation
Wen-Ching Sung
H01 - BASIC ELECTRIC ELEMENTS
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Method and apparatus for multi-spray RRC process with dynamic control
Patent number
12,216,407
Issue date
Feb 4, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Hsuan Chuang
H01 - BASIC ELECTRIC ELEMENTS
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Material for forming organic film, method for forming organic film,...
Patent number
12,215,221
Issue date
Feb 4, 2025
Shin-Etsu Chemical Co., Ltd.
Daisuke Kori
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Metal-compound-removing solvent and method in lithography
Patent number
12,210,286
Issue date
Jan 28, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
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Dry development of resists
Patent number
12,211,691
Issue date
Jan 28, 2025
Lam Research Corporation
Boris Volosskiy
H01 - BASIC ELECTRIC ELEMENTS
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Metal oxide resist patterning with electrical field guided post-exp...
Patent number
12,204,246
Issue date
Jan 21, 2025
Applied Materials, Inc.
Huixiong Dai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Positive photosensitive resin composition, positive photosensitive...
Patent number
12,195,568
Issue date
Jan 14, 2025
Shin-Etsu Chemical Co., Ltd.
Masashi Iio
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Nanostamping method and nano-optical component
Patent number
12,197,126
Issue date
Jan 14, 2025
Osram Opto Semiconductors GmbH
Fabian Knorr
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Method and apparatus for improved wafer coating
Patent number
12,199,054
Issue date
Jan 14, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng-Feng Wu
H01 - BASIC ELECTRIC ELEMENTS
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Quantum dot light-emitting device, manufacturing method and display...
Patent number
12,193,254
Issue date
Jan 7, 2025
BOE Technology Group Co., Ltd.
Wenhai Mei
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Spin coater and semiconductor fabrication method using the same
Patent number
12,189,295
Issue date
Jan 7, 2025
Samsung Electronics Co., Ltd.
Myung-Soo Hwang
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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3D nanoprinter
Patent number
12,174,542
Issue date
Dec 24, 2024
Sivananthan Laboratories, Inc.
Juan Pablo Oviedo Robles
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Composition for forming silicon-containing resist underlayer film a...
Patent number
12,174,541
Issue date
Dec 24, 2024
Shin-Etsu Chemical Co., Ltd.
Tsutomu Ogihara
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Cyclic spin-on coating process for forming dielectric material
Patent number
12,170,199
Issue date
Dec 17, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Je-Ming Kuo
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Substrate processing apparatus and method
Patent number
12,169,361
Issue date
Dec 17, 2024
ASM IP Holding B.V.
Ivo Raaijmakers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resist underlayer film material, patterning process, and method for...
Patent number
12,147,160
Issue date
Nov 19, 2024
Shin-Etsu Chemical Co., Ltd.
Daisuke Kori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
WATER SOLUBLE PROTECTIVE COATINGS FOR ENGINEERED OPTICAL DEVICES
Publication number
20250093780
Publication date
Mar 20, 2025
Applied Materials, Inc.
Amit Kumar ROY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Composition For Forming Organic Film, Method For Forming Organic Fi...
Publication number
20250095989
Publication date
Mar 20, 2025
Shin-Etsu Chemical Co., Ltd.
Keisuke NIIDA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Patent Application
ORGANOTIN PHOTORESIST COMPOSITIONS HAVING FLUORIDE GENERATOR COMPOU...
Publication number
20250085627
Publication date
Mar 13, 2025
INPRIA CORPORATION
Brian J. Cardineau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
NANOFLUIDIC CELL FOR CHARACTERIZATION OF NANO-BUBBLES IN A SIMULATE...
Publication number
20250087443
Publication date
Mar 13, 2025
Saudi Arabian Oil Company
Dong Kyu Cha
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
Publication number
20250060671
Publication date
Feb 20, 2025
ASM IP HOLDING B.V.
Ivo Raaijmakers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
RESIST COMPOSITION AND RESIST PATTERN FORMATION METHOD
Publication number
20250051501
Publication date
Feb 13, 2025
Tokyo Ohka Kogyo Co., Ltd.
Minoru Adegawa
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
IMPRINT LITHOGRAPHY DEFECT MITIGATION METHOD AND MASKED IMPRINT LIT...
Publication number
20250053081
Publication date
Feb 13, 2025
LEIA INC.
Kevin Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
POST DEVELOPMENT TREATMENT FOR METAL-OXIDE PHOTORESISTS
Publication number
20250053086
Publication date
Feb 13, 2025
Applied Materials, Inc.
MADHUR SACHAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METAL OXIDE RESIST LAYERS INCLUDING BISMUTH AND PHOSPHORUS AND RELA...
Publication number
20250054759
Publication date
Feb 13, 2025
Intel Corporation
Charles Cameron Mokhtarzadeh
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Method for coating top anti-reflective coating
Publication number
20250044693
Publication date
Feb 6, 2025
United Semiconductor (Xiamen) Co., Ltd.
Dian Han Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD FOR USING COMPOSITION COMPRISING ORGANIC ACID COMPOUND, LITH...
Publication number
20250044695
Publication date
Feb 6, 2025
Merck Patent GmbH
Tomotsugu YANO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
FILM DEPOSITION METHOD, METHOD FOR MANUFACTURING DEVICE, AND FILM D...
Publication number
20250044699
Publication date
Feb 6, 2025
Riken
Harumi Hayakawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE AND SILICON-CONTAINING...
Publication number
20250044701
Publication date
Feb 6, 2025
JSR Corporation
Kazunori SAKAI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Patent Application
SUBSTRATE PROCESSING METHOD, COMPUTER RECORDING MEDIUM, SUBSTRATE P...
Publication number
20250044704
Publication date
Feb 6, 2025
TOKYO ELECTRON LIMITED
Yuichi ASAHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
LITHOGRAPHY COMPOSITIONS AND METHODS FOR FORMING RESIST PATTERNS AN...
Publication number
20250036023
Publication date
Jan 30, 2025
The Research Foundation for the State University of New York
Munsaf Ali
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PATTERNED LOW MELTING GLASS (LMG) PHOTONIC FILM SURFACES BY WET-ETC...
Publication number
20250019293
Publication date
Jan 16, 2025
Corning Incorporated
Leonard Charles Dabich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Wafer Bow Mitigation
Publication number
20250021006
Publication date
Jan 16, 2025
TOKYO ELECTRON LIMITED
Andrew Whittaker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
SPIN-ON CARBON HARD MASK COMPOSITION WITH HIGH PLANARIZATION PERFOR...
Publication number
20250013154
Publication date
Jan 9, 2025
YCCHEM CO., LTD.
Su Jin LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Composition For Forming Organic Film, Method For Forming Organic Fi...
Publication number
20250011623
Publication date
Jan 9, 2025
Shin-Etsu Chemical Co., Ltd.
Daisuke KORI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACT...
Publication number
20250004377
Publication date
Jan 2, 2025
FUJIFILM CORPORATION
Eiji FUKUZAKI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
IMPRINT METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240427234
Publication date
Dec 26, 2024
KIOXIA Corporation
Kazuya FUKUHARA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
LIGHT PATTERNABLE SURFACE MODIFICATION
Publication number
20240427240
Publication date
Dec 26, 2024
Brewer Science, Inc.
Reuben T. Chacko
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Patent Application
PHOTORESIST AND FORMATION METHOD THEREOF
Publication number
20240429051
Publication date
Dec 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hui-Chun LEE
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
APPARATUS FOR TREATING SUBSTRATE
Publication number
20240427250
Publication date
Dec 26, 2024
SEMES CO., LTD.
Jae Ho LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
APPARATUS AND METHODS FOR BEAM PROCESSING OF SUBSTRATES
Publication number
20240419080
Publication date
Dec 19, 2024
TOKYO ELECTRON LIMITED
Mirko Vukovic
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
PATTERNED DARK MIRROR COATINGS FOR MULTI-FUNCTIONAL OPTICS
Publication number
20240419076
Publication date
Dec 19, 2024
The Aerospace Corporation
Sean C. STUART
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
COATING PROCESSING APPARATUS AND METHOD FOR FORMING COATING FILM
Publication number
20240419077
Publication date
Dec 19, 2024
KIOXIA Corporation
Tomoya AKAZAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240412976
Publication date
Dec 12, 2024
TOKYO ELECTRON LIMITED
Susumu HAYAKAWA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
Publication number
20240391706
Publication date
Nov 28, 2024
TOKYO ELECTRON LIMITED
Hitoshi HASHIMA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR DEVICE AND METHODS OF MANUFACTURE
Publication number
20240393685
Publication date
Nov 28, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsing-Chieh Lee
H01 - BASIC ELECTRIC ELEMENTS