Coating on a rotating support

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G03F7/162

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

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G03F7/162Coating on a rotating support

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Patents Grantslast 30 patents

Information Patent Grant
Adhesion layer for multi-layer photoresist
- Patent number 12,292,684
- Issue date May 6, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Yu Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,292,685
- Issue date May 6, 2025
- SCREEN Holdings Co., Ltd.
- Jun Komori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and/or system for coating a substrate
- Patent number 12,283,499
- Issue date Apr 22, 2025
- Service Support Specialties, Inc
- Gary Hillman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Organotin oxide hydroxide patterning compositions, precursors, and...
- Patent number 12,276,913
- Issue date Apr 15, 2025
- Inpria Corporation
- Stephen T. Meyers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Developing method and apparatus
- Patent number 12,276,914
- Issue date Apr 15, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Helei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and method thereof
- Patent number 12,265,327
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ching-Hai Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning jig, coating apparatus, and cleaning method
- Patent number 12,257,611
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Satoshi Shimmura
- B08 - CLEANING
Information Patent Grant
Apparatus for manufacturing semiconductor device
- Patent number 12,252,791
- Issue date Mar 18, 2025
- Denso Corporation
- Hiroaki Fujibayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for real-time quality control of a film in a sp...
- Patent number 12,255,110
- Issue date Mar 18, 2025
- Samsung Electronics Co., Ltd.
- Gaurav Kumar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing monitoring apparatus based on imaging video da...
- Patent number 12,244,972
- Issue date Mar 4, 2025
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor developer tool and methods of operation
- Patent number 12,235,582
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Yao Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for treating substrate
- Patent number 12,235,581
- Issue date Feb 25, 2025
- Semes Co., Ltd.
- Min Jung Park
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Photoresist topcoat compositions and methods of processing photores...
- Patent number 12,234,369
- Issue date Feb 25, 2025
- DuPont Electronic Materials International, LLC
- Irvinder Kaur
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Pattern formation methods
- Patent number 12,228,859
- Issue date Feb 18, 2025
- Rohm and Haas Electronic Materials LLC
- Choong-Bong Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for treating substrate
- Patent number 12,228,861
- Issue date Feb 18, 2025
- Semes Co., Ltd.
- Ki Sang Eum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solution, solution storage body, actinic ray-sensitive or radiation...
- Patent number 12,228,857
- Issue date Feb 18, 2025
- FUJIFILM Corporation
- Tetsuya Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating composition for forming resist underlayer film for EUV lith...
- Patent number 12,228,858
- Issue date Feb 18, 2025
- DuPont Specialty Materials Korea Ltd.
- Jae Hwan Sim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating method and coating apparatus
- Patent number 12,216,406
- Issue date Feb 4, 2025
- Tokyo Electron Limited
- Yusaku Hashimoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Semiconductor manufacturing system, method of manufacturing a semic...
- Patent number 12,217,962
- Issue date Feb 4, 2025
- Kioxia Corporation
- Shingo Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device and manufacturing method thereof
- Patent number 12,218,153
- Issue date Feb 4, 2025
- Au Optronics Corporation
- Wen-Ching Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for multi-spray RRC process with dynamic control
- Patent number 12,216,407
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Hsuan Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Material for forming organic film, method for forming organic film,...
- Patent number 12,215,221
- Issue date Feb 4, 2025
- Shin-Etsu Chemical Co., Ltd.
- Daisuke Kori
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Metal-compound-removing solvent and method in lithography
- Patent number 12,210,286
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry development of resists
- Patent number 12,211,691
- Issue date Jan 28, 2025
- Lam Research Corporation
- Boris Volosskiy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal oxide resist patterning with electrical field guided post-exp...
- Patent number 12,204,246
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Huixiong Dai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Positive photosensitive resin composition, positive photosensitive...
- Patent number 12,195,568
- Issue date Jan 14, 2025
- Shin-Etsu Chemical Co., Ltd.
- Masashi Iio
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Nanostamping method and nano-optical component
- Patent number 12,197,126
- Issue date Jan 14, 2025
- Osram Opto Semiconductors GmbH
- Fabian Knorr
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method and apparatus for improved wafer coating
- Patent number 12,199,054
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Feng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantum dot light-emitting device, manufacturing method and display...
- Patent number 12,193,254
- Issue date Jan 7, 2025
- BOE Technology Group Co., Ltd.
- Wenhai Mei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spin coater and semiconductor fabrication method using the same
- Patent number 12,189,295
- Issue date Jan 7, 2025
- Samsung Electronics Co., Ltd.
- Myung-Soo Hwang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
Polymer, Positive And Negative Photosensitive Resin Compositions, P...
- Publication number 20250147420
- Publication date May 8, 2025
- Shin-Etsu Chemical Co., Ltd.
- Hiroyuki URANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING PATTERNS, SEMICONDUCTOR MEMORY DEVICE, AND METHOD...
- Publication number 20250140558
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- Yeongsup SOHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST UNDERLAYER COMPOSITION AND METHOD OF FORMING PATTERNS USING...
- Publication number 20250130493
- Publication date Apr 24, 2025
- Samsung SDI Co., Ltd.
- Eunsu LEE
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS, D...
- Publication number 20250123568
- Publication date Apr 17, 2025
- Samsung SDI Co., Ltd.
- Seung HAN
- C07 - ORGANIC CHEMISTRY
Information Patent Application
LIQUID PROCESSING APPARATUS, AND MONITORING METHOD
- Publication number 20250112066
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- Shinichi MIZUSHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN-ON ADHESION PROMOTER COMPOSITION AND METHOD FOR HIGH NUMERICAL...
- Publication number 20250110409
- Publication date Apr 3, 2025
- International Business Machines Corporation
- Dario Goldfarb
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRY DEVELOPMENT OF RESISTS
- Publication number 20250112045
- Publication date Apr 3, 2025
- LAM RESEARCH CORPORATION
- Boris Volosskiy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WATER SOLUBLE PROTECTIVE COATINGS FOR ENGINEERED OPTICAL DEVICES
- Publication number 20250093780
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Amit Kumar ROY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Composition For Forming Organic Film, Method For Forming Organic Fi...
- Publication number 20250095989
- Publication date Mar 20, 2025
- Shin-Etsu Chemical Co., Ltd.
- Keisuke NIIDA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ORGANOTIN PHOTORESIST COMPOSITIONS HAVING FLUORIDE GENERATOR COMPOU...
- Publication number 20250085627
- Publication date Mar 13, 2025
- INPRIA CORPORATION
- Brian J. Cardineau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NANOFLUIDIC CELL FOR CHARACTERIZATION OF NANO-BUBBLES IN A SIMULATE...
- Publication number 20250087443
- Publication date Mar 13, 2025
- Saudi Arabian Oil Company
- Dong Kyu Cha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20250060671
- Publication date Feb 20, 2025
- ASM IP HOLDING B.V.
- Ivo Raaijmakers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND RESIST PATTERN FORMATION METHOD
- Publication number 20250051501
- Publication date Feb 13, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Minoru Adegawa
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
IMPRINT LITHOGRAPHY DEFECT MITIGATION METHOD AND MASKED IMPRINT LIT...
- Publication number 20250053081
- Publication date Feb 13, 2025
- LEIA INC.
- Kevin Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POST DEVELOPMENT TREATMENT FOR METAL-OXIDE PHOTORESISTS
- Publication number 20250053086
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- MADHUR SACHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METAL OXIDE RESIST LAYERS INCLUDING BISMUTH AND PHOSPHORUS AND RELA...
- Publication number 20250054759
- Publication date Feb 13, 2025
- Intel Corporation
- Charles Cameron Mokhtarzadeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for coating top anti-reflective coating
- Publication number 20250044693
- Publication date Feb 6, 2025
- United Semiconductor (Xiamen) Co., Ltd.
- Dian Han Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR USING COMPOSITION COMPRISING ORGANIC ACID COMPOUND, LITH...
- Publication number 20250044695
- Publication date Feb 6, 2025
- Merck Patent GmbH
- Tomotsugu YANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM DEPOSITION METHOD, METHOD FOR MANUFACTURING DEVICE, AND FILM D...
- Publication number 20250044699
- Publication date Feb 6, 2025
- Riken
- Harumi Hayakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE AND SILICON-CONTAINING...
- Publication number 20250044701
- Publication date Feb 6, 2025
- JSR Corporation
- Kazunori SAKAI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPUTER RECORDING MEDIUM, SUBSTRATE P...
- Publication number 20250044704
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Yuichi ASAHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY COMPOSITIONS AND METHODS FOR FORMING RESIST PATTERNS AN...
- Publication number 20250036023
- Publication date Jan 30, 2025
- The Research Foundation for the State University of New York
- Munsaf Ali
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNED LOW MELTING GLASS (LMG) PHOTONIC FILM SURFACES BY WET-ETC...
- Publication number 20250019293
- Publication date Jan 16, 2025
- Corning Incorporated
- Leonard Charles Dabich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Wafer Bow Mitigation
- Publication number 20250021006
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Andrew Whittaker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPIN-ON CARBON HARD MASK COMPOSITION WITH HIGH PLANARIZATION PERFOR...
- Publication number 20250013154
- Publication date Jan 9, 2025
- YCCHEM CO., LTD.
- Su Jin LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Composition For Forming Organic Film, Method For Forming Organic Fi...
- Publication number 20250011623
- Publication date Jan 9, 2025
- Shin-Etsu Chemical Co., Ltd.
- Daisuke KORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACT...
- Publication number 20250004377
- Publication date Jan 2, 2025
- FUJIFILM CORPORATION
- Eiji FUKUZAKI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
IMPRINT METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240427234
- Publication date Dec 26, 2024
- KIOXIA Corporation
- Kazuya FUKUHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT PATTERNABLE SURFACE MODIFICATION
- Publication number 20240427240
- Publication date Dec 26, 2024
- Brewer Science, Inc.
- Reuben T. Chacko
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
PHOTORESIST AND FORMATION METHOD THEREOF
- Publication number 20240429051
- Publication date Dec 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui-Chun LEE
- H01 - BASIC ELECTRIC ELEMENTS

Coating on a rotating support

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Adhesion layer for multi-layer photoresist

Substrate processing apparatus

Method and/or system for coating a substrate

Organotin oxide hydroxide patterning compositions, precursors, and...

Developing method and apparatus

Semiconductor manufacturing apparatus and method thereof

Cleaning jig, coating apparatus, and cleaning method

Apparatus for manufacturing semiconductor device

Methods and systems for real-time quality control of a film in a sp...

Substrate processing monitoring apparatus based on imaging video da...

Semiconductor developer tool and methods of operation

Method and apparatus for treating substrate

Photoresist topcoat compositions and methods of processing photores...

Pattern formation methods

Apparatus for treating substrate

Solution, solution storage body, actinic ray-sensitive or radiation...

Coating composition for forming resist underlayer film for EUV lith...

Coating method and coating apparatus

Semiconductor manufacturing system, method of manufacturing a semic...

Display device and manufacturing method thereof

Method and apparatus for multi-spray RRC process with dynamic control

Material for forming organic film, method for forming organic film,...

Metal-compound-removing solvent and method in lithography

Dry development of resists

Metal oxide resist patterning with electrical field guided post-exp...

Positive photosensitive resin composition, positive photosensitive...

Nanostamping method and nano-optical component

Method and apparatus for improved wafer coating

Quantum dot light-emitting device, manufacturing method and display...

Spin coater and semiconductor fabrication method using the same

Patents Applicationslast 30 patents

Polymer, Positive And Negative Photosensitive Resin Compositions, P...

METHOD OF FORMING PATTERNS, SEMICONDUCTOR MEMORY DEVICE, AND METHOD...

RESIST UNDERLAYER COMPOSITION AND METHOD OF FORMING PATTERNS USING...

COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS, D...

LIQUID PROCESSING APPARATUS, AND MONITORING METHOD

SPIN-ON ADHESION PROMOTER COMPOSITION AND METHOD FOR HIGH NUMERICAL...

DRY DEVELOPMENT OF RESISTS

WATER SOLUBLE PROTECTIVE COATINGS FOR ENGINEERED OPTICAL DEVICES

Composition For Forming Organic Film, Method For Forming Organic Fi...

ORGANOTIN PHOTORESIST COMPOSITIONS HAVING FLUORIDE GENERATOR COMPOU...

NANOFLUIDIC CELL FOR CHARACTERIZATION OF NANO-BUBBLES IN A SIMULATE...

SUBSTRATE PROCESSING APPARATUS AND METHOD

RESIST COMPOSITION AND RESIST PATTERN FORMATION METHOD

IMPRINT LITHOGRAPHY DEFECT MITIGATION METHOD AND MASKED IMPRINT LIT...

POST DEVELOPMENT TREATMENT FOR METAL-OXIDE PHOTORESISTS

METAL OXIDE RESIST LAYERS INCLUDING BISMUTH AND PHOSPHORUS AND RELA...

Method for coating top anti-reflective coating

METHOD FOR USING COMPOSITION COMPRISING ORGANIC ACID COMPOUND, LITH...

FILM DEPOSITION METHOD, METHOD FOR MANUFACTURING DEVICE, AND FILM D...

METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE AND SILICON-CONTAINING...

SUBSTRATE PROCESSING METHOD, COMPUTER RECORDING MEDIUM, SUBSTRATE P...

LITHOGRAPHY COMPOSITIONS AND METHODS FOR FORMING RESIST PATTERNS AN...

PATTERNED LOW MELTING GLASS (LMG) PHOTONIC FILM SURFACES BY WET-ETC...

Wafer Bow Mitigation

SPIN-ON CARBON HARD MASK COMPOSITION WITH HIGH PLANARIZATION PERFOR...

Composition For Forming Organic Film, Method For Forming Organic Fi...

ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACT...

IMPRINT METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

LIGHT PATTERNABLE SURFACE MODIFICATION

PHOTORESIST AND FORMATION METHOD THEREOF