Number | Date | Country | Kind |
---|---|---|---|
63-332237 | Dec 1988 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4527254 | Ryan et al. | Jun 1985 | |
4839865 | Sato et al. | Jun 1989 |
Number | Date | Country |
---|---|---|
62-192998 | Aug 1987 | JPX |
62-232155 | Oct 1987 | JPX |
62-252598 | Nov 1987 | JPX |
Entry |
---|
Y. Ohji et al, "Reliability of Nano-Meter Thick Multi-Layer Dielectric Films of Poly-Crystalline Silicon", Symposium of International Reliability Physics, 1987, IEEE, pp. 55-59. |