Number | Name | Date | Kind |
---|---|---|---|
2992519 | Pearson | Jul 1961 | |
3050910 | Lichtenfeld | Aug 1962 | |
3111791 | Harris et al. | Nov 1963 | |
3304662 | Boettcher | Feb 1967 | |
3374582 | Boettcher | Mar 1968 | |
3518798 | Boettcher | Jul 1970 | |
3570188 | Ebner | Mar 1971 | |
4502252 | Iwabuchi | Mar 1985 | |
4593496 | Klievoneit et al. | Jun 1986 | |
4667445 | Kimura | May 1987 |
Entry |
---|
"General Products Information", Speedfam Corp., (Jul., 1989), pp. 4-6. |