SPEEDFAM CORPORATION

Organization

DES PLAINES, IL, US

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
In-situ polishing pad flatness control
- Patent number 5,868,605
- Issue date Feb 9, 1999
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Backing pad
- Patent number 5,791,975
- Issue date Aug 11, 1998
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Dual column abrading machine
- Patent number 5,782,678
- Issue date Jul 21, 1998
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus with improved product unloading
- Patent number 5,762,543
- Issue date Jun 9, 1998
- Speedfam Corporation
- Karl Kasprzyk
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing device with improved handling of fluid polishing media
- Patent number 5,695,392
- Issue date Dec 9, 1997
- Speedfam Corporation
- Inki Kim
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing control method
- Patent number 5,685,766
- Issue date Nov 11, 1997
- Speedfam Corporation
- Wayne Mattingly
- B24 - GRINDING POLISHING
Information Patent Grant
Dual column abrading machine
- Patent number 5,595,529
- Issue date Jan 21, 1997
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad conditioning
- Patent number 5,569,062
- Issue date Oct 29, 1996
- Speedfam Corporation
- Chris Karlsrud
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,498,196
- Issue date Mar 12, 1996
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,498,199
- Issue date Mar 12, 1996
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Device for conditioning polishing pads
- Patent number 5,486,131
- Issue date Jan 23, 1996
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Low abraision material comprising a fibrous matrix impregnated with...
- Patent number 5,436,045
- Issue date Jul 25, 1995
- Speedfam Corporation
- Clinton Fruitman
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,329,732
- Issue date Jul 19, 1994
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Automated free abrasive machine for one side piece part machining
- Patent number 5,224,304
- Issue date Jul 6, 1993
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Circumferential pattern finishing machine
- Patent number 5,187,901
- Issue date Feb 23, 1993
- Speedfam Corporation
- Chris E. Karlsrud
- B24 - GRINDING POLISHING
Information Patent Grant
Multilevel grinding apparatus
- Patent number 5,134,807
- Issue date Aug 4, 1992
- Speedfam Corporation
- James V. Keefe
- B24 - GRINDING POLISHING
Information Patent Grant
Circumferential pattern finishing method
- Patent number 5,123,218
- Issue date Jun 23, 1992
- Speedfam Corporation
- Chris E. Karlsrud
- B24 - GRINDING POLISHING
Information Patent Grant
Multilevel grinding apparatus and method
- Patent number 4,821,459
- Issue date Apr 18, 1989
- Speedfam Corporation
- James V. Keefe
- B24 - GRINDING POLISHING
Information Patent Grant
Measuring bar for free abrasive machines
- Patent number 4,693,012
- Issue date Sep 15, 1987
- Speedfam Corporation
- Joseph V. Cesna
- G01 - MEASURING TESTING
Information Patent Grant
Control valve assembly for abrasive slurry
- Patent number 4,593,716
- Issue date Jun 10, 1986
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Liquid waxless fixturing of microsize wafers
- Patent number 4,519,168
- Issue date May 28, 1985
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Bearing mount for lapping machine pressure plate
- Patent number 4,270,314
- Issue date Jun 2, 1981
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Abrasive slurry regulator assembly
- Patent number 4,047,639
- Issue date Sep 13, 1977
- Speedfam Corporation
- David M. McNamara
- B24 - GRINDING POLISHING
Information Patent Grant
Abrasive slurry regulator assembly
- Patent number 4,047,640
- Issue date Sep 13, 1977
- Speedfam Corporation
- David M. McNamara
- B24 - GRINDING POLISHING
Information Patent Grant
Abrasive slurry regulator assembly
- Patent number 3,991,918
- Issue date Nov 16, 1976
- Speedfam Corporation
- David M. McNamara
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Trademarklast 30 trademarks

Information Trademark
73346514
- Serial number 73346514
- Registration number 1218127
- Filing date Jan 21, 1982
- Speedfam Corporation
- 7 - Machines and machine tools
Information Trademark
73059592 - TFG
- Serial number 73059592
- Registration number 1057392
- Filing date Aug 4, 1975
- SPEEDFAM CORPORATION
- 7 - Machines and machine tools
Information Trademark
72327515 - FAM
- Serial number 72327515
- Registration number 893662
- Filing date May 16, 1969
- SPEEDFAM CORPORATION
- 7 - Machines and machine tools
Information Trademark
72327420 - FAM
- Serial number 72327420
- Registration number 893239
- Filing date May 15, 1969
- SPEEDFAM CORPORATION
- 7 - Machines and machine tools
Information Trademark
72326261 - SPEEDFAM
- Serial number 72326261
- Registration number 909536
- Filing date May 2, 1969
- SPEEDFAM CORPORATION
- 7 - Machines and machine tools

SPEEDFAM CORPORATION

Organization

Patents Grantslast 30 patents

In-situ polishing pad flatness control

Backing pad

Dual column abrading machine

Polishing apparatus with improved product unloading

Polishing device with improved handling of fluid polishing media

Polishing control method

Dual column abrading machine

Polishing pad conditioning

Wafer polishing method and apparatus

Wafer polishing method and apparatus

Device for conditioning polishing pads

Low abraision material comprising a fibrous matrix impregnated with...

Wafer polishing method and apparatus

Automated free abrasive machine for one side piece part machining

Circumferential pattern finishing machine

Multilevel grinding apparatus

Circumferential pattern finishing method

Multilevel grinding apparatus and method

Measuring bar for free abrasive machines

Control valve assembly for abrasive slurry

Liquid waxless fixturing of microsize wafers

Bearing mount for lapping machine pressure plate

Abrasive slurry regulator assembly

Abrasive slurry regulator assembly

Abrasive slurry regulator assembly

Patents Applicationslast 30 patents

Trademarklast 30 trademarks

73346514

73059592 - TFG

72327515 - FAM

72327420 - FAM

72326261 - SPEEDFAM