Claims
- 1. A process for cleaning substrates comprising:placing the substrates to be cleaned in a vessel wherein the vessel is not pressurized; adding at least one organic solvent to the vessel; cleaning the substrates for a time sufficient to clean the substrates with the organic solvent in the absence of liquid carbon dioxide; removing a portion of the organic solvent from the vessel; adding at least one pressurized fluid solvent to the vessel; removing the pressurized fluid solvent from the vessel; and removing the substrates from the vessel; wherein, when the pressurized fluid solvent is liquid carbon dioxide, the liquid carbon dioxide is at a subcritical condition.
- 2. The process of claim 1 wherein the organic solvent comprises a cyclic terpene.
- 3. The process of claim 2 wherein the cyclic terpene:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.800; has a dispersion Hansen solubility parameter of between 13.0 (MPa)1/2 and 17.5 (MPa)1/2; has a polar Hansen solubility parameter of between 0.5 (MPa)1/2 and 9.0 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 0.0 (MPa)1/2 and 10.5 (MPa)1/2.
- 4. The process of claim 3 wherein the cyclic terpene further:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 5. The process of claim 4 wherein the cyclic terpene is selected from a group including α-terpene isomers; pine oil; α-pinene isomers; d-limonene; and mixtures thereof.
- 6. The process of claim 1 wherein the organic solvent comprises a halocarbon.
- 7. The process of claim 6 wherein the halocarbon:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 1.100; has a dispersion Hansen solubility parameter of between 10.0 (MPa)1/2 and 17.0 (MPa)1/2; has a polar Hansen solubility parameter of between 0.0 (MPa)1/2 and 7.0 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 0.0 (MPa)1/2 and 5.0 (MPa)1/2.
- 8. The process of claim 7 wherein the halocarbon further:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 9. The process of claim 8 wherein the halocarbon is selected from a group including chlorinated hydrocarbons; fluorinated hydrocarbons; brominated hydrocarbons; and mixtures thereof.
- 10. The process of claim 1 wherein the organic solvent comprises a glycol ether.
- 11. The process of claim 10 wherein the glycol ether:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.800; has a dispersion Hansen solubility parameter of between 13.0 (MPa)1/2 and 19.5 (MPa)1/2; has a polar Hansen solubility parameter of between 3.0 (MPa)1/2 and 7.5 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 8.0 (MPa)1/2 and 17.0 (MPa)1/2.
- 12. The process of claim 11 wherein the glycol ether further:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 13. The process of claim 12 wherein the glycol ether is selected from a group including monoethylene glycol ether; diethylene glycol ether; triethylene glycol ether; monopropylene glycol ether; dipropylene glycol ether; tripropylene glycol ether; and mixtures thereof.
- 14. The process of claim 1 wherein the organic solvent comprises a polyol.
- 15. The process of claim 14 wherein the polyol:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.920; has a dispersion Hansen solubility parameter of between 14.0 (MPa)1/2 and 18.2 (MPa)1/2; has a poiar Hansen solubility parameter of between 4.5 (MPa)1/2 and 20.5 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 15.0 (MPa)1/2 and 30.0 (MPa)1/2.
- 16. The process of claim 15 wherein the polyol further:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 17. The process of claim 16 wherein the polyol contains two or more hydroxyl radicals.
- 18. The process of claim 1 wherein the organic solvent comprises an ether.
- 19. The process of claim 18 wherein the ether:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.800; has a dispersion Hansen solubility parameter of between 14.5 (MPa)1/2 and 20.0 (MPa)1/2; has a polar Hansen solubility parameter of between 1.5 (MPa)1/2 and 6.5 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 5.0 (MPa)1/2 and 10.0 (MPa)1/2.
- 20. The process of claim 19 wherein the ether further:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 21. The process of claim 20 wherein the ether contains no free hydroxyl radicals.
- 22. The process of claim 1 wherein the organic solvent comprises an ester of glycol ethers.
- 23. The process of claim 22 wherein the ester of glycol ethers:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.800; has a dispersion Hansen solubility parameter of between 15.0 (MPa)1/2 and 20.0 (MPa)1/2; has a polar Hansen solubility parameter of between 3.0 (MPa)1/2 and 10.0 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 8.0 (MPa)1/2 and 16.0 (MPa)1/2.
- 24. The process of claim 23 wherein the ester of glycol ethers further:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 25. The process of claim 1 wherein the organic solvent comprises an ester of monobasic carboxylic acids.
- 26. The process of claim 25 wherein the ester of monobasic carboxylic acids:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.800; has a dispersion Hansen solubility parameter of between 13.0 (MPa)1/2 and 17.0 (MPa)1/2; has a polar Hansen solubility parameter of between 2.0 (MPa)1/2 and 7.5 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 1.5 (MPa)1/2 and 6.5 (MPa)1/2.
- 27. The process of claim 26 wherein the ester of monobasic carboxylic acids further:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 28. The process of claim 1 wherein the organic solvent comprises a fatty alcohol.
- 29. The process of claim 28 wherein the fatty alcohol:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.800; has a dispersion Hansen solubility parameter of between 13.3 (MPa)1/2 and 18.4 (MPa)1/2; has a polar Hansen solubility parameter of between 3.1 (MPa)1/2 and 18.8 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 8.4 (MPa)1/2 and 22.3 (MPa)1/2.
- 30. The process of claim 29 wherein the fatty alcohol further:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 31. The process of claim 30 wherein, in the fatty alcohol, the carbon chain adjacent to the hydroxyl group contains at least five carbon atoms.
- 32. The process of claim 1 wherein the organic solvent comprises a short chain alcohol.
- 33. The process of claim 32 wherein the short chain alcohol:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.800; has a dispersion Hansen solubility parameter of between 13.5 (MPa)1/2 and 18.0 (MPa)1/2; has a polar Hansen solubility parameter of between 3.0 (MPa)1/2 and 9.0 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 9.0 (MPa)1/2 and 16.5 (MPa)1/2.
- 34. The process of claim 33 wherein the short chain alcohol further:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 35. The process of claim 34 wherein, in the short chain alcohol, the carbon chain adjacent to the hydroxyl group contains no more than four carbon atoms.
- 36. The process of claim 1 wherein the organic solvent comprises a siloxane.
- 37. The process of claim 36 wherein the siloxane:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.900; has a dispersion Hansen solubility parameter of between 14.0 (MPa)1/2 and 18.0 (MPa)1/2; has a polar Hansen solubility parameter of between 0.0 (MPa)1/2 and 4.5 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 0.0 (MPa)1/2 and 4.5 (MPa)1/2.
- 38. The process of claim 37 wherein the siloxane:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 39. The process of claim 1 wherein the organic solvent comprises a hydrofluoroether.
- 40. The process of claim 39 wherein the hydrofluoroether:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 1.500 has a dispersion Hansen solubility parameter of between 12.0 (MPa)1/2 and 18.0 (MPa)1/2; has a polar Hansen solubility parameter of between 4.0 (MPa)1/2 and 10.0 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 1.5 (MPa)1/2 and 9.0 (MPa)1/2.
- 41. The process of claim 40 wherein the hydrofluoroether:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 42. The process of claim 1 wherein the organic solvent comprises an aliphatic hydrocarbon.
- 43. The process of claim 42 wherein the aliphatic hydrocarbon:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.700; has a dispersion Hansen solubility parameter of between 14.0 (MPa)1/2 and 17.0 (MPa)1/2; has a polar Hansen solubility parameter of between 0.0 (MPa)1/2 and 2.0 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 0.0 (MPa)1/2 and 2.0 (MPa)1/2.
- 44. The process of claim 43 wherein the aliphatic hydrocarbon:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 45. The process of claim 1 wherein the organic solvent comprises an ester of dibasic carboxylic acids.
- 46. The process of claim 45 wherein the ester of dibasic carboxylic acids:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.900; has a dispersion Hansen solubility parameter of between 13.5 (MPa)1/2 and 18.0 (MPa)1/2; has a polar Hansen solubility parameter of between 4.0 (MPa)1/2 and 6.5 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 4.0 (MPa)1/2 and 11.0 (MPa)1/2.
- 47. The process of claim 46 wherein the ester of dibasic carboxylic acids:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 48. The process of claim 1 wherein the organic solvent comprises a ketone.
- 49. The process of claim 48 wherein the ketone:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.800; has a dispersion Hansen solubility parameter of between 13.0 (MPa)1/2 and 19.0 (MPa)1/2; has a polar Hansen solubility parameter of between 3.0 (MPa)1/2 and 8.0 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 3.0 (MPa)1/2 and 11.0 (MPa)1/2.
- 50. The process of claim 49 wherein the ketone:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 51. The process of claim 1 wherein the organic solvent comprises an aprotic solvent that contains no dissociable hydrogens.
- 52. The process of claim 51 wherein the aprotic solvent:is soluble in carbon dioxide between 600 and 1050 pounds per square inch and between 5 and 30 degrees Celsius; has a specific gravity of greater than approximately 0.900; has a dispersion Hansen solubility parameter of between 15.0 (MPa)1/2 and 21.0 (MPa)1/2; has a polar Hansen solubility parameter of between 6.0 (MPa)1/2 and 17.0 (MPa)1/2; and has a hydrogen bonding Hansen solubility parameter of between 4.0 (MPa)1/2 and 13.0 (MPa)1/2.
- 53. The process of claim 52 wherein the aprotic solvent:has an evaporation rate of lower than 50 (based on n-butyl acetate=100); and has a flash point greater than 100 degrees Fahrenheit.
- 54. The process of claim 1 wherein the pressurized fluid solvent is densified carbon dioxide.
RELATED APPLICATION
This application is a continuation-in-part of U.S. patent application Ser. No. 09/419,345, filed Oct. 15, 1999, which issued into U.S. Pat. No. 6,355,072 on March 12, 2002, the disclosure of which is incorporated by reference herein in its entirety.
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Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
09/419345 |
Oct 1999 |
US |
Child |
09/837849 |
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US |