Claims
- 1. A process for cleaning substrates comprising:placing the substrates to be cleaned in a vessel; adding organic solvent to the vessel; cleaning the substrates with an organic solvent in the absence of a pressurized fluid solvent; removing a portion of the organic solvent from the vessel; adding pressurized fluid solvent to the vessel; removing the pressurized fluid solvent from the vessel; and removing the substrates from the vessel.
- 2. The process of claim 1 wherein the organic solvent is of the structural formula:CaXjHkOz wherein: a=5n and 1≦n≦3; 0≦z≦4; 0≦j, k≦(10n+2); and 8≦(j+k)≦(10n+2); each X is independently F, Cl, Br or I.
- 3. The process of claim 1 wherein the organic solvent is of the structural formula:CnXjHk wherein: 1≦n≦22; 0≦j, k≦(2n+2); and (2n−4)≦(j+k)≦(2n+2); each X is independently F, Cl, Br or I.
- 4. The process of claim 1 wherein the organic solvent is of the structural formula: wherein: Rii=CkHsXt or benzyl, phenyl, partially or fully fluorinated benzyl or phenyl; Riv=CjHqXr, or benzyl, phenyl, partially or fully fluorinated benzyl or phenyl; 0≦j, k≦18; and 0≦(j+k)≦18; 0≦q, r≦(2j+1); and 1≦(q+r)≦(2j+1); 0≦s, t≦(2k+1); and 1≦(s+t)≦(2k+1); If j=0, then r=0; If k=0, then t=0; R1-4 and R9-12 are independently CmHnXp; where 0≦m≦2; 1≦(n+p)≦5; and (n+p)=(2m+1); R5-8 and R13-16 are independently CaHbXd, wherein a is 0 or 1; 1≦(b+d)≦3; and (b+d)=(2a+1); and each X is independently F, Cl, Br or I.
- 5. The process of claim 1 wherein the organic solvent is of the structural formula: wherein: 0≦x, y, z≦1; and 1≦(x+y+z)≦3; Rii=CkHsXt or benzyl, phenyl, partially or fully fluorinated benzyl or phenyl; Riv=CjHqXr, or benzyl, phenyl, partially or fully fluorinated benzyl or phenyl; j or k may equal 0; If j=0, then [14−3(x+y+z)]≦k≦[37−3(x+y+z)]; If k=0, then [14−3(x+y+z)]≦j≦[37−3(x+y+z)]If neither j nor k=0, then [14−3(x+y+z)]≦a+k)≦[37−3(x+y+z)]; 1≦(q+r)≦(2j+1); 1≦(s+t)≦(2k+1); R1-3 and R7-9 are independently CmHnXp, wherein 0≦m≦2; 1≦(n+p)≦5; and (n+p)=(2m+1); R4-6 and R10-12 are independently CaHbXd, wherein a is 0 or 1; 1≦(b+d)≦3; and (b+d)=(2a+1); and each X is independently F, Cl, Br or I.
- 6. The process of claim 1 wherein the organic solvent is of the structural formula:CnHjXk(OH)r wherein: each X is independently F, Cl, Br or I; 1≦n≦22; 0≦r≦4; 0≦j, k≦(2n+2−r); and 4≦(j+k)≦(2n+2−r).
- 7. The process of claim 1 wherein the organic solvent is of the structural formula:CnHjXkOb wherein: each X is independently F, Cl, Br or I; 2≦n≦32; 0≦j, k≦(2n+2); 6≦(j+k)≦(2n+2); and 1≦b≦6.
- 8. The process of claim 1 wherein the organic solvent is of the structural formula: wherein: 0≦w, x, y, z≦1; 1≦(w+x+y+z)≦4; Rii=CkHaXb, or benzyl, phenyl, partially or fully fluorinated benzyl or phenyl; Riii=CjHuXv, or benzyl, phenyl, partially or fully fluorinated benzyl or phenyl; 0≦(j+k)≦[34−3(w+x+y+z)]; and 0≦u, v≦(2j+1); and (2j−7)≦(u+v)≦(2j+1); and 0≦a, b≦(2k+1); and (2k−7)≦(a+b)≦(2k+1); R1-4 and R9-12 are independently CmHnXp, wherein 0≦m≦2; 1≦(n+p)≦5; and (n+p)=(2m+1); R5-8 and R13-16 are independently CqHsXt, wherein q is 0 or 1; 1≦(s+t)≦3; and (s+t)=(2q+1); and each X is independently F, Cl, Br or I.
- 9. The process of claim 1 wherein the organic solvent is of the structural formula: wherein: 0≦w, x, y, z≦1; and 1≦(w+x+y+z)≦4; Rii=CkHaXb, benzyl, phenyl, partially or fully fluorinated benzyl or phenyl; Riv=ester; Rv=CjHuXv, benzyl, phenyl, partially or fully fluorinated benzyl or phenyl; 0≦+k)≦[34−3(w+x+y+z)]; 0≦u, v≦(2j+1); (2j−7)≦(u+v)≦(2j+1); 0≦a, b≦(2k+1); (2k−7)≦(a+b)≦(2k+1); and R1-4 and R9-12 are independently CmHnXp, wherein 0≦m≦2; 1≦(n+p)≦5; and (n+p)=(2m+1); R5-8 and R13-16 are independently CqHsXt, wherein q is 0 or 1; 1≦(s+t)≦3; and (s+t)=(2q+1); and each X is independently F, Cl, Br or I.
- 10. The process of claim 1 wherein the organic solvent is of the structural formula:Cn(CO2)mHaXb wherein: each X is independently F, Cl, Br or I; 2≦n≦38; 1≦m≦3; 0≦a, b≦(2n+2); and (2n−2)≦(a+b)≦(2n+2).
- 11. The process of claim 1 wherein the organic solvent is of the structural formula:Cn(CO3)HaXb wherein: each X is independently F, Cl, Br or I; 2≦n≦18; 0≦a, b≦(2n+2); and (2n−4)≦(a+b)≦(2n+2).
- 12. The process of claim 1 wherein the organic solvent is of the structural formula: wherein: R1=CjHaXb 1≦j≦6 0≦a, b≦(2j+1); and (2j−7)≦(a+b)≦(2j+1); R2=CkHdXe 1≦k≦6; 0≦d, e≦(2k+1); and (d+e)=(2k+1); R3=CmHfXg 1≦m≦6; 0≦f, g≦(2m+1); and (f+g)=(2m+1); and each X is independently F, Cl, Br or I.
- 13. The process of claim 1 wherein the organic solvent is of the structural formula:SOeCnHjXk wherein: each X is independently F, Cl, Br or I; 1≦e≦2; 2≦n≦8; 0≦j, k≦(2n+2); and 2n≦(j+k)≦(2n+2).
- 14. The process of claim 1 wherein the organic solvent is of the structural formula:CnHyNaObXz wherein: 1≦n≦10; 1≦a, b≦2; and a=b; 0≦y, z≦(2n+1); and (2n−1)≦(y+z)≦(2n+1). Each X is independently F, Cl, Br, or I.
- 15. The process of claim 1 wherein the organic solvent is of the structural formula: wherein: 0≦n≦500 each R equals CaXyHz independently; 1≦a≦6; and 0≦y, z≦(2a+1); and (y+z)=(2a+1); each X is independently F, Cl, Br or I.
- 16. The process of claim 1 wherein the organic solvent is of the structural formula: wherein: 2≦n≦4; each R equals CaHyXz independently; each X is independently F, Cl, Br or I; 1≦a≦6 0≦y, z≦2a+1; and (y+z)=(2a+1).
- 17. The process of claim 1 wherein the pressurized fluid solvent is densified carbon dioxide.
Parent Case Info
This application is a continuation-in-part of Ser. No. 09/419,345 filed Oct. 15, 1999 now U.S. Pat. No. 6,355,072.
US Referenced Citations (46)
Foreign Referenced Citations (5)
| Number |
Date |
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Apr 2001 |
EP |
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Sep 1999 |
WO |
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| Entry |
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Continuation in Parts (1)
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Number |
Date |
Country |
| Parent |
09/419345 |
Oct 1999 |
US |
| Child |
09/843103 |
|
US |
Patent Grant
6558432
