This application is a continuation-in-part application of each of the following U.S. patent applications: Ser. Nos. 08/265,598 filed on Jun. 24, 1994; 08/209,175 filed on Mar. 10, 1994; and 08/143,513 and 08/143,514, now U.S. Pat. No. 5,448,605, filed on Oct. 29, 1993.
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0450440 | Oct 1991 | EPX |
0514089 | Nov 1992 | EPX |
0526160 | Feb 1993 | EPX |
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0651073A1 | May 1995 | EPX |
0651397A1 | May 1995 | EPX |
0671485A1 | Sep 1995 | EPX |
9218665 | Oct 1992 | WOX |
Entry |
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Patent Abstracts of Japan, vol. 013 No. 505 (P-959), 14 Nov. 1989. Abstract. |
Database WPI, Section Ch, Week 8519, Derwent Publications Ltd., London, GB, 27 Mar. 1985. Abstract. |
S. P. Kowalczyk et al. "Characterization of palladium acetylacetonate. . ." Chemical Perspectives of Microelectronic Materials III Symposium, Chemical Perspectives of Microelectronic Materials III, Boston, MA, USA, 30 Nov.-3 Dec. 1992, Pittsburgh, Pa, USA, Mater. Res. Soc. USA, pp. 353-358. |
3rd Symposium on Chemical Perspectives of Microelectronics Material, Boston, USA, Nov. 30-Dec. 3, 1992, Mat. Res. Soc. Symp. Proc. vol. 282, pp. 353-358, Kowalczyk et al., "Characterization of Palladium Acetylacetonate as a CVD Precursor for Pd Metallization". |
Derwent Publications Ltd., London, GB; AN 84-059353 & JP-A-59 016 983 (Katayama Kagaku Kogyo Kenkyush), Abstract. |
Number | Date | Country | |
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Parent | 265598 | Jun 1994 |