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IBM Technical Disclosure Bulletin, vol. 16, No. 4, Sep. 1973, "Mask to Wafer Alignment System", R. Feder et al., p. 1307. |
IBM Technical Disclosure Bulletin, vol. 16, No. 5, Oct. 1973, "Coupler for Optical Data", L. Cooper, pp. 1470-1471. |
IBM Technical Disclosure Bulletin, vol. 22, No. 6, Nov. 1979, "Optical Focusing Technique", H. G. Nauth et al., pp. 2515-2516. |