Combination read/write thin film magnetic head and its manufacturing method

Abstract

A method for manufacturing a combination read/write thin film magnetic head comprising the steps of: forming a nonmagnetic material layer on a lower-core layer and forming an upper-core layer having a width smaller than that of the lower-core layer on the nonmagnetic material layer; leaving the section of said nonmagnetic material layer sandwiched between the lower-core layer and the upper-core layer as a gap layer and removing the nonmagnetic material layer not covered by the upper-core layer, said step for removing said nonmagnetic material being performed by an anisotropic plasma etching process using a CF4 based gas; trimming both ends of the facing surfaces, to be in contact with said gap layer, of the lower-core layer so as to equalize the width of the facing surface with the width of the upper-core layer, and forming a prominence above the lower-core layer facing the upper-core layer through the gap layer; and forming grades on both upper surfaces of the lower-core layer extending from the base ends of the prominence in the direction away from the upper-core layer.

Description

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to combination read/write thin film magnetic heads used in floating-type magnetic heads and the like. In particular, the present invention relates to a combination read/write thin film magnetic head and a method for making the same, in which the track width of a magnetic gap of an inductive thin film magnetic head is highly precisely formed in order to reduce occurrence of write fringing.

2. Description of the Related Art

FIG. 14 is a longitudinal sectional-view of a conventional combination read/write thin film magnetic head, and FIG. 15 is a section facing a recording medium of the magnetic head shown in FIG. 14 and a fragmentary front view along arrow XV in FIG. 14 . The magnetic head shown in FIGS. 14 and 15 is an inductive magnetic head which writes signals on a recording medium such as a hard disk. The inductive magnetic head is superposed with a reading head which uses the magnetoresistance effect at the trailing edge of the slider of a floating-type magnetic head which faces a recording medium such as a hard disk.

Identification number 11 in FIG. 14 represents a lower-core layer composed of a high magnetic permeability material such as a Fe-Ni alloy (permalloy). In a combination read/write thin film magnetic head in which an inductive head shown in FIG. 14 is continuously superposed with a reading head which uses the magnetoresistance effect, the lower-core layer 11 acts as an upper-shielding layer of the reading head.

A gap layer 12 composed of a nonmagnetic material such as Al 2 O 3 (aluminum oxide) is provided on the lower-core layer 11 . An insulating layer 4 composed of an organic material, such as a resist material, is formed on the gap layer 12 .

A coil layer 5 composed of an electrically conductive material having a low electric resistance, such as Cu, is spirally formed on the insulating layer 4 . Herein, the coil layer 5 is formed so as to surround the periphery of the base end 7 b of the upper-core layer 7 , and a part of the coil layer 5 is shown in FIG. 14 .

An insulating layer 6 composed of an organic resinous material is formed on the coil layer 5 . An upper-core layer 7 composed of a magnetic material such as permalloy is formed by plating on the insulating layer 6 . The front end 7 a , facing the recording medium, of the upper-core layer 7 is jointed to the lower-core layer 11 through the gap layer 12 . The base end 7 b of the upper-core layer 7 is magnetically connected to the lower-core layer 11 through the holes formed in the gap layer 12 and the insulating layer 4 .

In the inductive writing head, a recording current circulating in the coil layer 5 induces a recording magnetic field in the lower-core layer 11 and the upper-core layer 7 , and magnetic signals are recorded on a recording medium such as a hard disk by means of a leakage magnetic field from the magnetic gap between the lower-core layer 11 and the front end 7 a of the upper-core layer 7 .

In the magnetic gap for the inductive writing head, the gap length G 1 is determined by the distance between the lower-core layer 11 and the front end 7 a of the upper-core layer 7 which are jointed through the gap layer 12 , i.e., the thickness of the gap layer 12 , and the gap depth Gd is determined by the depth at the front end 7 a of the upper-core layer 7 . Further, the track width Tw is determined by a width of the front end 7 a of the upper-core layer 7 , as shown in FIG. 15 .

As shown in FIG. 15 , the width T 3 of the lower-core layer 11 is sufficiently larger than the width of the front end 7 a of the upper-core layer 7 , because the lower-core layer 11 has magnetic shield effects to a magnetoresistive element 13 which is formed below the inductive head. That is, in a reading head which uses the magnetoresistance effect as shown in FIG. 15 , the magnetoresistive element 13 is provided on a lower-shielding layer 14 through the lower-gap layer 15 a and the lower-core layer 11 is formed on the magnetoresistive element 13 through the upper-gap layer. The lower-core layer 11 also acts as the upper-shielding layer to the magnetoresistive element 13 . The width T 3 of the lower-core layer 11 therefore is sufficiently larger than the width of the magnetoresistive element 13 in order to achieve the function as the upper-shielding layer.

As shown in FIG. 15 , a width T 3 of the lower-core layer 11 larger than the width Tw of the front end 7 a of the upper-core layer 7 induces a recording magnetic field in the lower-core layer 11 and the upper-core layer 7 , and a leakage magnetic field formed between the front end 7 a and the lower-core layer 11 leaks out of the track width Tw. A leakage magnetic field is also formed beside both sides of the track width Tw due to a large width of the lower-core layer 11 .

As a result, the magnetic signals formed on the recording surface of a recording medium such as a hard disk has write fringing or writing blot of magnetic signals which is formed out of the given width Tw of the recording track. The write fringing inhibits high precision detection of the track position in the written recording medium and results in tracking servo errors. In particular, the write fringing significantly affects high density recording with a narrow track pitch.

FIG. 16A is a front view from the recording medium side of an improved head which can suppress the write fringing. In FIG. 16A , after a gap layer 12 is formed on the lower-core layer 11 and a front end 7 a of an upper-core layer 7 is formed on the gap layer 12 , the lower-core layer 11 and the gap layer 12 are removed by ion milling or the like to form grades 11 a and 12 a over the lower-core layer 11 and the gap layer 12 at both edges of the front end 7 a of the upper-core layer 7 . Both of the grades 11 a and 12 a have an angle θ 5 .

Because the grades 12 a are simultaneously formed over both ends of the gap layer 12 by the ion-milling process for forming the lower-core layer 11 and the gap layer 12 , the width T 6 of the face 11 b of the lower-core layer 11 facing the front end 7 a is larger than the width Tw of the front end 7 a . FIG. 16B represents a recording pattern of magnetic data recorded with this head. Since the width T 6 of the face 11 b is larger than the width Tw, the writing magnetic field leaks out of the track width Tw at the right and left ends to form write fringing.

The head shown in FIG. 16A can reduce write fringing compared to that shown in FIG. 15. A finer track pitch for high density recording will cause some detecting errors due to the write fringing shown in FIG. 16B , and thus the improvement shown in the drawing will be insufficient.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide a combination read/write thin film magnetic head which improves or significantly reduces write fringing, has a simple head configuration, and is capable of ready production.

It is another object of the present invention to provide a method for making the above-mentioned combination read/write thin film magnetic head.

A combination read/write thin film magnetic head in accordance with the present invention comprises:

a lower-shielding layer comprising a magnetic material, a nonmagnetic lower-gap layer, a magnetoresistive element and a nonmagnetic upper-gap layer, these layers being superposed in this order from the bottom; and

a lower-core layer comprising a magnetic material, an upper-core layer comprising a magnetic material facing the lower-core layer through a nonmagnetic gap layer, and a coil layer inducing a recording magnetic field in the lower-core layer and upper-core layer, these layers being provided on the upper-gap layer and the lower-core layer also acting as an upper-shielding layer;

wherein the width of the gap layer is the same as the width Tw of the upper-core layer; the lower-core layer is provided with a prominence, the width T 1 of the prominence at a section in contact with the gap layer being the same as the width Tw, the grades extending from the base ends of the prominence being formed on the upper surface of the lower-core layer so as to leave from the upper-core layer; and the gap layer comprises at least one nonmagnetic material selected from the group consisting of SiO 2 , Ta 2 O 5 , Si 3 N 4 , TiO and WO 3 .

The prominence may be integrally formed with the lower-core layer, or the lower-core layer may comprise a first layer and a second layer thereon, and the second layer may correspond to the prominence.

Both side faces of the prominence may slope so that the width of the prominence gradually increases from the section in contact with the gap layer toward the base ends.

The angle between both side faces of the prominence and the gap-facing surface of the prominence is preferably in a range of 60 degrees to 120 degrees.

The height of the prominence is preferably not less than the thickness of the gap layer on the prominence and not greater than three times the thickness of the gap layer.

The angle between the upper-slanted surface of the lower-core layer and the gap-facing surface is preferably in a range of 2 degrees to 10 degrees.

Both side faces of the prominence slope so that width of the prominence gradually increases from the section in contact with the gap layer toward the base ends.

In accordance with another aspect of the present invention, a method for manufacturing a combination read/write thin film magnetic head comprising a magnetic material, a nonmagnetic lower-gap layer, a magnetoresistive element and a nonmagnetic upper-gap layer, these layers being superposed in this order from the bottom, a lower-core layer comprising a magnetic material, an upper-core layer comprising a magnetic material facing the lower-core layer through a nonmagnetic gap layer, and a coil layer inducing a recording magnetic field in the lower-core layer and upper-core layer, these layers being provided on the upper-gap layer and the lower-core layer also acting as an upper-shielding layer;

the method comprises:

a step for forming a nonmagnetic material layer on the lower-core layer and forming the upper-core layer having a width smaller than that of the lower-core layer on the nonmagnetic material layer;

a step for leaving the section of the nonmagnetic material layer sandwiched between the lower-core layer and the upper-core layer as a gap layer and removing both ends of the nonmagnetic material layer;

a step for trimming both ends of the facing surface, to be in contact with the gap layer, of the lower-core layer so as to equalize the width T 1 of the facing surface with the width Tw of the upper-core layer, and forming a prominence above the lower-core layer facing the upper-core layer through the gap layer; and

a step for forming grades on both upper surfaces of the lower-core layer extending from the base ends of the prominence in the direction away from the upper-core layer.

In accordance with a third aspect of the present invention, a method for manufacturing a combination read/write thin film magnetic head comprising a magnetic material, a nonmagnetic lower-gap layer, a magnetoresistive element and a nonmagnetic upper-gap layer, these layers being superposed in this order from the bottom, a lower-core layer comprising a magnetic material, an upper-core layer comprising a magnetic material facing the lower-core layer through a nonmagnetic gap layer, and a coil layer inducing a recording magnetic field in the lower-core layer and upper-core layer, these layers being provided on the upper-gap layer and the lower-core layer also acting as an upper-shielding layer;

the method comprises:

a step for forming a prominence comprising a magnetic material having a small width on the lower-core layer comprising a magnetic material;

a step for forming a nonmagnetic material layer on the lower-core layer and the prominence;

a step for forming the upper-core layer of a nonmagnetic material layer having a width slightly smaller than that of the prominence through the nonmagnetic material layer;

a step for leaving the section of the nonmagnetic material layer sandwiched between the prominence and the upper-core layer as a gap layer and removing both ends of the nonmagnetic material layer;

a step for sloping both side faces of the prominence in the direction away from the upper-core layer so as to equalize the width T 1 of the gap-facing surface of the prominence in contact with the gap layer with the width Tw of the upper-core layer; and

a step for forming grades on both upper surfaces of the lower-core layer extending from the base ends of the prominence.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a fragmentary isometric view illustrating a structure of a magnetic gap forming section for writing in a combination read/write thin film magnetic head in accordance with a first embodiment of the present invention;

FIG. 2 is a fragmentary isometric view illustrating a structure of a magnetic gap forming section for writing in a combination read/write thin film magnetic head in accordance with a second embodiment of the present invention;

FIG. 3 is a cross-sectional view taken along sectional line III—III in the perspective view of the combination read/write thin film magnetic head shown in FIG. 2 ;

FIGS. 4A to 4 D are fragmentary front views illustrating manufacturing steps of a combination read/write thin film magnetic head in accordance with a first method of the present invention;

FIGS. 5A to 5 D and 6 A to 6 B are fragmentary front views illustrating manufacturing steps of a combination read/write thin film magnetic head in accordance with a second method of the present invention;

FIG. 7 is an enlarged front view of a third embodiment of a magnetic head in accordance with the present invention;

FIG. 8 is a graph illustrating write fringing lengths, determined by a first method, of various combination read/write thin film magnetic heads having different lower-core layers and prominence;

FIG. 9 is an schematic graph for illustrating a second method for determining write fringing;

FIG. 10 is a graph illustrating write fringing lengths, determined by a second method, of various combination read/write thin film magnetic heads having different lower-core layers and prominence;

FIG. 11 is a graph illustrating a correlation between the write fringing length, determined by a second method, and the height H of the prominence of the combination read/write thin film magnetic head shown in FIG. 1 having a tilting angle θ2 of 2 degrees of the slanted surface of the lower-core layer;

FIG. 12 is a graph illustrating a correlation between the write fringing length, determined by a second method, and the tilting angle θ2 of the slanted surface of the lower-core layer in combination read/write thin film magnetic heads provided with a prominence having a height H of 0.4 μm;

FIG. 13 is a graph illustrating the write fringing lengths, determined by a second method, of the combination read/write thin film magnetic heads shown in FIG. 7 and having different tilting angles θ2 of the slanted surface of the lower-core layer;

FIG. 14 is a longitudinal sectional-view of a conventional combination read/write thin film magnetic head;

FIG. 15 is an enlarged fragmentary front view along the arrow XV in FIG. 14 ; and

FIG. 16A and 16B are fragmentary front views of a core layer structure of an conventional head having improved write fringing.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention will now be described with reference to the drawings.

FIG. 1 is a fragmentary isometric view illustrating a structure of a magnetic gap forming section for writing in a combination read/write thin film magnetic head in accordance with a first embodiment of the present invention, and FIG. 2 is a fragmentary isometric view illustrating a structure of a magnetic gap forming section for writing in a combination read/write thin film magnetic head in accordance with a second embodiment of the present invention. The combination read/write thin film magnetic heads shown in FIGS. 1 and 2 are inductive type heads for writing which are overlaid on a reading head which uses the magnetoresistance effect, respectively.

Identification number 1 in FIGS. 1 and 2 represents a lower-core layer formed of a soft magnetic material having a high magnetic permeability, such as an Fe-Ni alloy (permalloy). The combination read/write thin film magnetic heads shown in FIGS. 1 and 2 have the same configuration except for the shapes of the lower-core layers 1 .

As in FIG. 15 , a magnetoresistive element 13 and a reading head, which is provided with a lower-shielding layer 14 and uses the magnetoresistance effect, are provided below the lower-core layer 1 ( 11 in FIG. 15 ) in these embodiments, and the lower-core layer 1 is also used as an upper-shielding layer for the magnetoresistive element 13 . The width T 3 of the bottom surface 1 e of the lower-core layer 1 must be significantly larger than the magnetoresistive element 13 itself in order to satisfactorily achieve the function of the upper-shielding layer. The magnetoresistive element 13 is, for example, a laminate of a soft magnetic layer (or soft adjacent layer: SAL), a nonmagnetic material layer (or a SHUNT layer), and a magnetoresistive layer (or MR layer), and a hard bias layer for generating a longitudinal bias magnetic field, a main lead layer for leading a sensing current and the like are provided beside both sides of the magnetoresistive element 13 .

A shape of the lower-core layer 1 of the combination read/write thin film magnetic head will now be described with reference to FIG. 1 . The lower-core layer 1 has an integrally formed prominence 1 a . The prominence 1 a has vertical side faces 1 c and a flat gap-facing surface (upper surface) 1 d . The prominence 1 a has a width T 1 which is almost the same as the width Tw of the front end 7 a of an upper-core layer 7 . Slanted surfaces 1 b are formed on the upper surfaces of the lower-core layer 1 extending from both sides of the base end of the prominence.

The bottom face 1 e of the lower-core layer 1 has a width T 3 , which is significantly larger than the width T 1 of the prominence.

A lower-core layer 1 shown in FIG. 2 is also provided with a prominence. In the second embodiment, the lower-core layer 1 forms a first layer, the prominence 2 forms a second layer, and these two layers are superposed. The prominence 2 is also formed of a soft magnetic material as in the lower-core layer 1 . The prominence 2 in FIG. 2 has a trapezoidal front view. Both side faces 2 a of the prominence 2 therefore slope, and the gap-facing surface (upper surface) 2 b is flat. The gap-facing surface 2 b has a width T 1 which is almost the same as the width Tw of the front end 7 a of an upper-core layer 7 .

The prominence 2 forms a flat boundary 2 c with the lower-core layer (first layer) 1 , and the boundary 2 c has a width T 2 larger than the width T 1 of the gap-facing surface 2 b of the prominence 2 .

The lower-core layer (first layer) 1 also forms a flat boundary If having a width T 2 with the prominence 2 , and has slanted surfaces 1 b at both sides of the boundary 1 f . The bottom surface 1 e of the lower-core layer 1 has a width T 3 , as described above, which is significantly larger than the width T 2 of the boundary 1 f or 2 c.

Both of the combination read/write thin layer magnetic heads shown in FIGS. 1 and 2 can reduce occurrence of write fringing. The rectangular parallelepiped prominence 1 a as shown in FIG. 1 can more effectively reduce write fringing compared to the trapezoidal prominence 2 shown in FIG. 2 . In the trapezoidal prominence 2 , it is preferable that a tilting angle θ1 between the tilting side face 2 a and the gap-facing surface 2 b be near 90 degrees, and practically be in a range of 60 degrees to 120 degrees in view of satisfactory suppression of write fringing.

It is preferable that the height H of the prominence 1 a or 2 shown in FIGS. 1 and 2 be not less than the thickness of a gap layer 3 a and not greater than three times the thickness of the gap layer.

If the height H of the prominence 1 a or 2 is smaller than the thickness of the gap layer 3 a , leakage magnetic fields will readily be generated between the lower-core layers 1 extending to both sides of the base end of the prominence 1 a or 2 and the front end 7 a , resulting in noticeable write fringing.

Although the write fringing can be suppressed at a height H larger than three times the thickness of the gap layer 3 a , the film thickness of the lower-core layer 1 from the bottom surface 1 e to the slanted surface 1 b is substantially reduced and thus the function of the lower-core layer 1 as the upper-shielding layer against the magnetoresistive element 13 is reduced (refer to FIG. 15 ).

It is preferable that the tilting angle θ2 between the slant surface 1 b of the lower-core layer 1 and the gap-facing surface 2 b (or the boundary 1 f ) be in a range of 2 degrees to 10 degrees. If the tilting angle θ2 is lower then 2 degrees, a leakage magnetic field will readily occur between the lower-core layer 1 extending from the base end of the prominence 1 a (the lower-core layer having the slanted surface 1 b ) and the upper-core layer 7 , and thus the write fringing cannot be effectively reduced. On the other hand, 1 f the tilting angle is larger than 10 degrees, the film thickness of the lower-core layer 1 is reduced particularly at both ends or the width T 3 of the bottom surface 1 e of the lower-core layer 1 is reduced. The function of the lower-core layer 1 as the upper-shielding layer against the magnetoresistive element 13 therefore is reduced (refer to FIG. 15 ).

FIG. 3 is a cross-sectional view taken along sectional line III—III in the perspective view of the combination read/write thin film magnetic head shown in FIG. 2 . FIG. 3 is also a cross-sectional view of the combination read/write thin film magnetic head shown in FIG. 1 , in which identification number 1 a is used for the prominence instead of 2 (hereinafter “prominence” is referred to as “prominence 2 (or 1 a )”). The depth Gd of the prominence 2 (or 1 a ) shown in FIG. 3 is referred to as a gap depth.

A nonmagnetic material layer 3 is formed on the gap-facing surface 1 d of the prominence 2 (or 1 a ), on the lower-core layer 1 other than the slanted surfaces 1 b in the insulating layer 6 , on both side faces of the lower-core layer 1 in the insulating layer 6 , and over the region other than the lower-core layer 1 . In a production process described below, the nonmagnetic material layer 3 is left on the gap-facing surface 1 d of the prominence 2 (or 1 a ) as a gap layer 3 a and removed from both sides of the gap-facing surface 1 d.

The nonmagnetic material layer 3 has a monolayer or multilayer structure formed of S i O 2 , Ta 2 O 5 , Si 3 N 4 , TiO, Ti 2 O 3 , Ti 3 O 5 , Tio 2 and WO 3 . These nonmagnetic materials can be chemically removed by a plasma etching process using a CF 4 based gas, as described later in detail. When a conventional nonmagnetic material, e.g. aluminum oxide (Al 2 O 3 ), is used, a chlorine-based gas must be used in an etching process for removing the nonmagnetic material. Such a chlorine-based gas is, however, highly corrosive to the magnetic materials of the upper- and lower-core layers. In contrast, the combination of the above-specified nonmagnetic material and a CF 4 based gas in accordance with the present invention does not cause corrosion of the magnetic materials due to selective etching of the nonmagnetic material.

An insulating material 4 composed of an organic resinous material, e.g. a resist material, is formed on the nonmagnetic material layer 3 . Further, a coil layer 5 composed of a highly conductive material, e.g. copper, is formed on the insulating layer 4 . The coil layer 5 is spirally formed so as to surround the base end 7 b of the upper-core layer 7 . The coil layer 5 is covered with an insulating layer 6 composed of an organic resinous material.

The upper-core layer 7 is formed on the insulating layer 6 by a plating process. The upper-core layer 7 is composed of a magnetic material, e.g. permalloy, and the front end 7 a is connected to the gap-facing surface 1 d of the prominence 2 (or 1 a ) through the gap layer 3 a to form a magnetic gap having a gap length G 1 .

The front end 7 a of the upper-core layer 7 has a width Tw as shown in FIGS. 1 and 2 . The width Tw is fully or substantially the same (Tw=T 1 ) as the width T 1 of the gap-facing surface 1 d (or 2 b ) of the prominence 1 a (or 2 ). The width Tw (=T 1 ) determines the track width of the magnetic gap. The base end 7 b of the upper-core layer 7 is magnetically connected to the lower-core layer 1 as shown in FIG. 3 .

The upper-core layer 7 is covered with a protective film composed of a nonmagnetic material such as alumina not shown in the drawings.

In such an inductive head, a recording current flowing in the coil layer 5 induces a recording magnetic field in the lower-core layer 1 and the upper-core layer 7 , the section corresponding to the gap length G 1 records magnetic signals on a recording medium such as a hard disk by means of a leakage magnetic field between the prominence 1 a (or 2 ) and the front end 7 a of the upper-core layer 7 . Since the width T 1 of the gap-facing surface 1 d (or 2 d ) of the prominence 1 a (or 2 ) is fully or substantially the same as the width Tw of the front end 7 a of the upper-core layer 7 in this inductive head, a region in which a recording magnetic field leaks out of the track width Tw can be narrowed and thus write fringing can be reduced.

When the prominence 1 a is rectangular as shown in FIG. 1 , the leakage magnetic field between the prominence 1 a and the front end 7 a of the upper-core layer 7 is securely controlled within the track width Tw and thus write fringing can be more effectively reduced.

Write fringing can also be effectively reduced compared to conventional heads even when the prominence 2 has tilting side faces 2 a as shown in FIG. 2 and when the tilting angle θ1 of the tilting side faces 2 a is in a range of 60 degrees to 120 degrees.

When the height H of the prominence 1 a (or 2 ) is in a range of one to three times of the thickness of the gap layer 3 a and the tilting angle θ2 of slanted surfaces 1 b is in a range of 2 degrees to 10 degrees, write fringing is more effectively reduced without deteriorating the function of the lower-core layer 1 as the upper-shielding layer.

As described above, the magnetic head in accordance with the present invention can more effectively reduce write fringing. As a result, a shorter interval between tracks essential for high density recording is achieved on a recording material.

A production procedure for forming the lower-core layer 1 and the prominence 1 a shown in FIG. 1 will now be described with reference to FIGS. 4A to 4 D.

As shown in FIG. 4A , a rectangular lower-core layer 1 composed of a soft magnetic material and having a width T 3 is formed. A nonmagnetic material layer 3 having a monolayer, multilayer or composite structure composed of S i O 2 , Ta 2 O 5 , Si 3 N 4 , TiO, Ti 2 O 3 , Ti 3 O 5 , TiO 2 and WO 3 is formed on the lower-core layer 1 . These nonmagnetic materials can be readily removed by a chemical etching process using CF 4 or CF 4 /O 2 plasma described below.

The front end 7 a , having a thickness Tw, of the upper-core layer 7 is formed on the nonmagnetic material layer 3 as follows. A resist pattern is formed on the nonmagnetic material layer 3 excluding the region in which the front end 7 a is formed. A soft magnetic material is plated on the region in which the resist pattern is not formed, and then the resist pattern is removed.

In FIG. 4B , the nonmagnetic material layer 3 between the front end 7 a of the upper-core layer 7 and the lower-core layer 1 is left as a gap layer 3 a and the nonmagnetic material layer 3 (shown by a broken line) at both ends is chemically removed by a plasma etching process. The nonmagnetic material layer 3 is formed of a nonmagnetic material such as SiO 2 which reacts with CF 4 or CF 4 /O 2 mixed gas plasma in the-plasma etching process. Since the plasma etching process chemically removes only the nonmagnetic material, soft magnetic materials which form the lower-core layer 1 and the upper-core layer 7 are not damaged by the plasma etching process.

The plasma etching in accordance with the present invention is anisotropic plasma etching as shown in FIG. 4 B in which the etching is performed along the arrow R (vertical) direction. The gap layer 3 a disposed between the front end 7 a and the lower-core layer 1 is not removed over a range corresponding to the width Tw by the plasma etching process.

In FIG. 4C , a prominence 1 a is formed on the lower-core layer 1 by a first ion milling process using neutrally ionized gaseous argon (Ar). The lower-core layer 1 is irradiated with argon ions along the arrows S and T. It is preferable that radiation angle θ3 of argon ions be in a range of 0 to 30 degrees. The lower-core layer 1 therefore is irradiated along the substantially vertical direction with argon ions in the first ion milling process.

Both side sections of the lower-core layer 1 and the gap layer 3 a are horizontally trimmed by means of physical effects of radiated ions along the arrows S and T such that the trimmed sections have a rectangular shape. The vertical bump is formed on the lower-core layer 1 , and a rectangular prominence 1 a having the width T 1 which is the same as the width Tw of the front end 7 a is formed under the gap layer 3 a.

It is preferable that the ion milling process conditions, such as time, be adjusted such that the height H of the prominence 1 a is one to three times of the thickness of the gap layer 3 a.

Tilting surfaces 7 c are simultaneously formed on the front end 7 a of the upper-core layer 7 by the ion milling process. The magnetic material of the lower-core layer 1 in the broken line is adhered to the front end 7 a of the upper-core layer 7 , and both side faces of the gap layer 3 a and prominence 1 a to form magnetic material layers 8 during the ion milling process.

In FIG. 4D , slanted surfaces 1 b are formed on the lower-core layer 1 by a second ion milling process using neutrally ionized gaseous argon (Ar) as in the first ion milling process. The lower-core layer 1 is irradiated with argon ions along the arrows U and V. It is preferable that radiation angle θ4 of argon ions be in a range of 40 degrees to 80 degrees. The lower-core layer 1 therefore is obliquely irradiated with the argon ions in the second ion milling process unlike the first ion milling process.

The upper surfaces of the lower-core layer 1 , which are present at both sides of the prominence 1 a , are obliquely trimmed by means of physical effects of argon ions along the arrows U and V to form the slanted surfaces 1 b . It is preferable that the ion milling process conditions, such as time, be adjusted such that the tilting angle θ2 of the slanted surfaces 1 b is in a range of 2 degrees to 10 degrees.

The second ion milling process also trims the front end 7 a of the upper-core layer 7 , the gap layer 3 a and the magnetic material layers 8 adhered to both sides of the prominence 1 a . The removal of the magnetic material layer 8 prevents magnetic short-circuiting between the front end 7 a and the prominence 1 a.

The production process described above with reference to FIGS. 4A to 4 D is summarized as follows. A nonmagnetic material layer 3 is removed by an anisotropic etching process shown in FIG. 4B from a conventional state shown in FIG. 4A (refer to FIG. 8 ). Both rectangular sections of the lower-core layer 1 are trimmed by a first ion milling process along the almost the vertical direction to form a rectangular prominence 1 a having a width T 1 , which is substantially the same as the width Tw of the front end 7 a , under the gap layer 3 a as shown in FIG. 4 C. The slanted surfaces 1 b are formed by the second ion milling process along the oblique directions in FIG. 4 D and the magnetic material layers 8 can be simultaneously removed from the gap layer 3 a in the step shown in FIG. 4 C.

A production procedure for forming the lower-core layer 1 and the prominence 2 of the combination read/write thin film magnetic head shown in FIG. 2 will now be described with reference to FIGS. 5A to 5 D, 6 A and 6 B.

A lower-core layer (first layer) 1 having a rectangular front view and a width T 3 is formed by plating a soft magnetic material having a high magnetic permeability such as permalloy as shown in FIG. 5A. A resist material is applied onto the lower-core layer 1 , exposed and developed such that the resist material is removed over the section having a width T 4 . A soft magnetic material, which is also used in the lower-core layer 1 , is deposited on the section having the width T 4 by a plating or sputtering process to form a rectangular prominence (second layer) 2 having a width T 4 . The resist material which is left at both sides of the prominence 2 is removed. It is preferable that the height H of the prominence 2 be 1 to 3 times of the thickness of a nonmagnetic material layer 3 described in the following step.

The nonmagnetic material layer 3 is formed over the lower-core layer 1 and the prominence 2 (including regions other than the lower-core layer 1 ) as shown in FIG. 5 B. The nonmagnetic material layer is formed by a nonmagnetic material which can be chemically removed by a CF 4 or CF 4 /O 2 plasma etching process. Examples of such nonmagnetic materials include monolayer, multilayer and composite materials composed of SiO 2 , Ta 2 O 5 , Si 3 N 4 , TiO, Ti 2 O 3 , Ti 3 O 5 , TiO 2 , and WO 3 .

In FIG. 5C , an upper-core layer 7 having a width Tw is formed on the nonmagnetic material layer 3 such that the front end 7 a of the upper-core layer 7 is jointed to the nonmagnetic material layer 3 as follows. A resist pattern is formed on the upper-core layer 7 excluding the region having the width Tw by a plating process or the like, a soft magnetic material is deposited on the region on which a resist pattern is formed, and the resist material is removed. The formed front end 7 a of,the upper-core layer 7 therefore has a width Tw.

In FIG. 5C , the width Tw of the upper-core layer 7 is slightly smaller than the width T 4 of the rectangular prominence 2 . The width difference Tw−T 4 is determined so that the front end 7 a is surely disposed within the width T 4 of the prominence 2 in consideration of tolerances of a position forming the prominence 2 , the width T 4 , a position forming the front end 7 of the upper-core layer 7 and width Tw.

In FIG. 5D , the nonmagnetic material layer 3 disposed between the front end 7 a of the upper-core layer 7 and the prominence 2 is left as a gap layer 3 a , whereas the nonmagnetic material layer 3 (as shown in broken lines) at both sides is removed by a plasma etching process. Both upper corner sections 2 ′ of the prominence 2 thereby are exposed at both sides of the gap layer 3 a.

The nonmagnetic material layer 3 is formed of a monolayer, multilayer or composite material of SiO 2 , Ta 2 O 5 , Si 3 N 4 , TiO, Ti 2 O 3 , Ti 3 O 5 , TiO 2 , and WO 3 . These materials react with CF 4 or CF 4 /O 2 mixed gas plasma in the plasma etching process and surely remove the nonmagnetic material layer 3 other than the gap layer 3 a.

The plasma etching in accordance with the present invention is anisotropic plasma etching as shown in FIG. 5D in which the etching is performed along the arrow R (vertical) direction. The gap layer 3 a disposed between the front end 7 a and the prominence 2 is not removed over a range corresponding to the width Tw (=T 1 ) by the plasma etching process. Since the plasma etching process chemically removes the nonmagnetic material, soft magnetic materials which form the lower-core layer 1 and the prominence 2 are not damaged by the plasma etching process.

In FIG. 6A , the upper corner sections 2 ′ are trimmed by a first ion milling process using neutrally ionized gaseous argon (Ar). The lower-core layer 1 is irradiated with argon ions along the arrows S and T. It is preferable that radiation angle θ3 of argon ions be in a range of 0 to 30 degrees. The upper surface of the lower-core layer 1 therefore is irradiated along the substantially vertical direction with the argon ions in the first ion milling process.

Both corner sections 2 ′ of the prominence 2 and the upper surface of the lower-core layer 1 other than the section under the prominence 2 are trimmed by means of physical effects of radiated ions along the arrows S and T. As a result, the width T 1 of the gap-facing surface 2 b of the prominence 2 is the same as the width Tw of the front end 7 a of the upper-core layer 7 a , and tilting side faces 2 a are formed on the both sides of the gap-facing surface 2 b so that the prominence 2 forms a trapezoidal cross-section.

The time period for the first ion milling process is considerably shorter than that in FIG. 4C , because the corner sections 2 ′ of the prominence 2 are very rapidly trimmed. Both sides of the facing surface 1 f of the lower-core layer 1 therefore are slightly trimmed. Also the upper corners of the front end 7 a of the upper-core layer 7 are trimmed to form slanted surfaces 7 c . The trimmed magnetic material represented by the broken lines is slightly deposited on both sides of the gap layer 3 a and front layer 7 a to form magnetic films 8 .

In FIG. 6B , the prominence 2 is trimmed into a more rectangular shape by a second ion milling process, and slanted surfaces 1 b are formed on the lower-core layer 1 .

The second ion milling process uses neutrally ionized gaseous argon (Ar) as in the first ion milling process. The lower-core layer 1 is irradiated with argon ions along the arrows U and V. It is preferable that radiation angle θ4 of argon ions be in a range of 40 degrees to 80 degrees. The lower-core layer 1 therefore is obliquely irradiated with the argon ions in the second ion milling process unlike the first ion milling process.

The slanted surfaces 2 a of the prominence 2 are obliquely trimmed by means of physical effects of argon ions along the arrows U and V to change the prominence 2 into a more rectangular shape. The width of the boundary 2 c between the prominence 2 and the lower-core layer 1 therefore is reduced from T 4 to T 2 . The prominence 2 can be trimmed into a rectangular shape by adjusting the ion milling conditions, such as time, as in FIG. 1 .

Slanted surfaces 1 b are also formed on the both sides of the facing surface 1 f , facing the prominence 2 , of the lower-core layer 1 during the ion milling process. It is preferable that the ion milling process conditions, such as time, be adjusted such that the tilting angle θ2 of the slanted surfaces 1 b is in a range of 2 degrees to 10 degrees.

The second ion milling process also trims the magnetic films 8 formed on the both sides of the gap layer 3 a and front end 7 a of the upper-core layer 7 . The removal of the magnetic material layer 8 prevents magnetic short-circuiting between the front end 7 a and the prominence 2 .

In the process shown in FIGS. 5 and 6 , the prominence 2 having a width T 4 slightly larger than the width Tw of the front end 7 a is formed on the lower-core layer 1 , followed by anisotropic plasma etching, first and second ion milling processes.

The width T 1 of the gap-facing surface 2 b therefore can be equalized to the width Tw of the front end 7 a of the upper-core layer 7 . Particularly, the second ion milling process shown in FIG. 6B can reduce the width of the boundary 2 c between the prominence 2 and the lower-core layer 1 from T 4 to T 2 and trim the prominence 2 into a more rectangular shape. The slanted surfaces 1 b are also formed on the lower-core layer 1 and the magnetic films 8 adhered to the both sides of the gap layer 3 a etc., are removed in the ion milling process.

FIG. 7 is a front view of a third embodiment of a magnetic head in accordance with the present invention, in which no prominence is provided on the lower-core layer 1 composed of a magnetic material, such as permalloy.

The nonmagnetic material layer 3 (represented with broken lines in FIG. 7 ) formed on the lower-core layer 1 as shown in FIG. 4A is chemically removed at the both sides of the front end 7 a by an anisotropic plasma etching process as in FIG. 4B or FIG. 5D whereas the gap layer 3 a between the lower-core layer 1 and the front end 7 a is left.

Both sides other than the facing surface 1 d of the lower-core layer 1 are trimmed to form slanted surfaces 1 b having a tilting angle θ2 by a second ion milling process along the arrows S and T as in FIG. 4D or FIG. 6 B.

In this case, the nonmagnetic material layer 3 is formed of a material which can be chemically removed by a plasma etching process and does not damage the magnetic material of the lower-core layer 1 during the plasma etching process, e.g. SiO 2 .

In FIG. 7 , the nonmagnetic material layer 3 is removed, and then slanted surfaces 1 b are formed on the lower-core layer 1 without forming a prominence by the second ion milling process under the condition of an ion radiation angle of 40 degrees to 80 degrees.

This process can also equalize the width T 1 of the facing surface 1 d of the lower-core layer 1 with the width Tw of the front end 7 a , and thus can more effectively prevent write fringing compared to conventional magnetic heads.

In the combination read/write thin film magnetic head shown in FIG. 7 , since the distance between the front end 7 a of the upper-core layer 7 and the lower-core layer 1 (having slanted surfaces 1 b ) is significantly short at the both sides of the front end 7 a , a leakage magnetic field is relatively easily formed on both sides of the track width Tw. The combination read/write thin film magnetic film shown in FIG. 7 does not show so satisfactory reduction of write fringing compared to those shown in FIGS. 1 and 2 .

More effective reduction of write fringing in combination read/write thin film magnetic film shown in FIG. 7 can be achieved by increasing the tilting angle θ2 of the slanted surfaces 1 b of the lower-core layer 1 , so long as the function of the lower-core layer as the upper-shielding layer does not decrease.

EXAMPLE

Write fringing was evaluated using some combination read/write thin film magnetic heads having different shapes of lower-core layers 1 and prominence 1 a (or 2 ) and different sizes.

The following combination read/write thin film magnetic heads were evaluated.

(1) A conventional combination read/write thin film magnetic head A shown in FIG. 15 .

(2) A conventional combination read/write thin film magnetic head B shown in FIG. 16 , in which the tilting angle θ5 of the slanted surfaces 11 a and 12 a formed on the lower-core layer 11 and the gap layer 12 is 3 degrees.

(3) Combination read/write thin film magnetic heads C 1 and C 2 in accordance with the third embodiment of the present invention shown in FIG. 7 , in which the tilting angles of the slanted surfaces 1 b formed on the lower-core layer 1 are 2 degrees and 4 degrees, respectively.

(4) Combination read/write thin film magnetic heads D 1 , D 2 and D 3 in accordance with the second embodiment of the present invention shown in FIG. 2 , in which the height H of the prominence 2 formed on the lower-core layer 1 is 0.5 μm for all the heads, the tilting angles θ1 of the slanted surfaces 2 a formed on the prominence 2 are 30 degrees for D 1 , 45 degrees for D 2 and D 3 , and the tilting angles θ2 of the slanted surfaces 1 b formed on the lower-core layer 1 are 2 degrees for D 1 and D 2 and 5 degrees for D 3 .

(5) Combination read/write thin film magnetic heads E 1 , E 2 and E 3 in accordance with the first embodiment of the present invention shown in FIG. 1 , in which the heights H of the prominence 1 a formed on the lower-core layer 1 are 0.2 μm for E 1 , 0.4 μm for E 2 and E 3 and, and the tilting angles θ2 of the slanted surfaces 1 b formed on the lower-core layer 1 are 2 degrees for E 1 and E 2 and 5 degrees for E 3 .

All the combination read/write thin film magnetic heads had the same thickness of the gap layer of 0.3 μm.

Signals were recorded with each of the combination read/write thin film magnetic heads the on a recording magnetic medium and the width To of the signals was determined with a magnetic force microscope (MFM).

The width Tw of the front end of the upper-core layer of each combination read/write thin film magnetic head was determined with a scanning electron microscope.

The write fringing length of each head was calculated from the difference between the width To of the recorded signals and the width Tw of the front. FIG. 8 is a graph illustrating write fringing lengths of the combination read/write thin film magnetic heads.

FIG. 8 shows that combination read/write thin film magnetic heads D 1 to D 3 and E 1 to E 3 each having a prominence on the lower-core layer 1 have smaller write fringing lengths than other combination read/write thin film magnetic heads. Among combination read/write thin film magnetic heads D 1 to D 3 , as the tilting angle θ1 of the slanted surface 2 a formed on the prominence 2 increases from 30 degrees to 45 degrees, the write fringing length decreases. Combination read/write thin film magnetic heads E 2 and E 3 each having a tilting angle θ1 of approximately 90 degrees have smaller write fringing lengths compared to combination read/write thin film magnetic heads D 1 to D 3 .

These results demonstrate that the prominence formed on the lower-core layer can effectively suppress write fringing and a rectangular prominence is preferred to more effectively suppress write fringing.

Among combination read/write thin film magnetic heads C 1 and C 2 , as the tilting angle θ2 of the slanted surface 1 b formed on the lower-core layer 1 increases from 2 degrees to 4 degrees, the write fringing length decreases. The same trend is noticeable in comparison of magnetic head D 2 with magnetic head D 3 , and magnetic head E 2 with magnetic head E 3 . In the present invention, the dependence of the tilting angle θ2 of the lower-core layer 1 on write fringing was also studied as described later.

Among combination read/write thin film magnetic heads E 1 to E 3 , magnetic heads E 2 and E 3 have satisfactorily small write fringing lengths, whereas magnetic heads E 1 has a significantly large write fringing length. Such a large write fringing length is supposed that combination read/write thin film magnetic head El has a shape very similar to that of combination read/write thin film magnetic head D (shown in FIG. 7 ) because the height H of the prominence 1 a formed on the lower-core layer 1 is small. The dependence of the height H of the prominence 1 a on write fringing was also studied as described later.

Write fringing was evaluated by another method using the same combination read/write thin film magnetic heads.

The experimental procedure will now be described with reference to an image graph shown in FIG. 9. A signal X was recorded on a reference write track in a recording medium, a signal Y was recorded on a position far away from the reference write track, and then a signal Z was recorded on a position at a distance of approximately 1.5 to 1.6 times the track width Tw(optical) which was optically determined from the center of the signal Y.

One of the combination read/write thin film magnetic heads (A to E 3 ) was disposed in the middle of the two signals X and Y to erase the edge portions X 1 and Y 1 of the signals X and Y. The signals X, Y 2 (=Y−Y 1 ), and Z 2 (=Z−Z 1 ) were regenerated with a reading head (composed of a magnetoresistive element) of the combination read/write thin film magnetic head. The regenerated waveforms X 3 , Y 3 and Z 3 shown in FIG. 9 were obtained.

The crossing points Y 4 and Z 4 in which the line X 4 corresponding to a half the height of the regenerated waveform X 3 crosses the regenerated waveforms Y 3 and Z 3 , respectively, were determined as shown in FIG. 9 and the width T 5 between the crossing points Y 4 and Z 4 was measured. The width T 5 is referred to as a DC erase band width, and the difference between the DC erase band width T 5 and the track width Tw(optical) corresponds to the write fringing length in the experiments. The results are shown in FIG. 10 .

Although the write-fringing lengths shown in FIG. 10 are larger than those shown in FIG. 8 , and the order of the write-fringing lengths of the combination read/write thin film magnetic heads is quite the same in FIGS. 10 and 8 . Combination read/write thin film magnetic heads D 1 to E 3 each having a prominence have low write fringing lengths compared to combination read/write thin film magnetic heads A to C 2 each not having a prominence.

FIG. 11 is a graph illustrating a correlation between the write fringing length and the height H of the prominence 1 a of the combination read/write thin film magnetic head E shown in FIG. 1 having a tilting angle θ2 of 2 degrees of the slanted surface 1 b of the lower-core layer 1 . The thickness of the gap layer 3 a was 0.3 μm. The write fringing lengths were determined by the method as in FIG. 9 .

FIG. 11 demonstrates that, at a height H of the prominence 1 a less than 0.6 μm the write fringing length decreases with the increased height, whereas at a height H more than 0.6 μm the write fringing length is substantially constant.

Such a decrease in the write fringing length due to an increased height H of the prominence 1 a is explained as follows: The distance between the front end 7 a of the upper-core layer 7 and the lower-core layer 1 extending to both sides of the base end of the prominence 1 a (the lower-core layer having slanted surfaces 1 b ) increases, and a leakage magnetic field can be more readily generated between the prominence 1 a and the front end 7 a of the upper-core layer 7 .

The thickness of the gap layer 3 a was 0.3 μm in the experiments. The write fringing length can be further decreased by increasing the height H of the prominence 1 a to approximately 0.3 μm as shown in FIG. 11 . Since the write fringing length cannot be further reduced at a height H of the prominence 1 a larger than 0.3 μm, the height H of the prominence in the present invention is set to be 1 to 3 times the thickness of the gap layer 3 a.

FIG. 12 is a graph illustrating a correlation between the write fringing length and the tilting angle θ2 of the slanted surface 1 b of the lower-core layer 1 in the combination read/write thin film magnetic heads E provided with a prominence 1 a having a height H of 0.4 μm. The thickness of the gap layer was 0.3 μm. The write fringing length was evaluated by a method as in FIG. 9 .

FIG. 12 demonstrates that the write fringing length decreases with an increased tilting angle θ2 of the slanted surface 1 b of the lower-core layer. Such a decrease in the write fringing length is explained as follows: The distance between the front end 7 a of the upper-core layer 7 and the lower-core layer 1 extending to both sides of the base end of the prominence 1 a (the lower-core layer having slanted surfaces 1 b ) increases, and a leakage magnetic field can be more readily generated between the prominence 1 a and the front end 7 a of the upper-core layer 7 . An excessively large tilting angle θ2, however, causes a decreased thickness from the bottom surface 1 e of the lower-core layer 1 to the slanted surface 1 b or a decreased width T 3 of the bottom surface 1 e , and thus the function of the lower-core layer 1 as the upper-shielding layer deteriorates. The tilting angle θ2 of the slanted surface 1 b in the present invention therefore is set to be in a range of 2 degrees to 10 degrees.

FIG. 13 is a graph illustrating the write fringing lengths of combination read/write thin film magnetic heads C shown in FIG. 7 and having different tilting angles θ2 of the slanted surface 1 b of the lower-core layer 1 . The thickness of the gap layer 3 a was 0.3 μm, and the write fringing length was measured by a method as in FIG. 9 .

FIG. 13 demonstrates that the write fringing length decreases with an increased tilting angle θ2 of the slanted surface 1 b . The slanted surfaces 1 b formed on both sides of the lower-core layer 1 therefore is effective in suppression of write fringing. FIGS. 12 and 13 demonstrate that the tilting angle θ2 in the magnetic head C must be noticeably large in order to achieve the effective suppression of write fringing which was observed in the magnetic head E, because the magnetic head C is not provided with a prominence.

As shown in FIGS. 1 and 2 , it is preferable that a prominence 1 a (or 2 ) be formed on the lower-core layer 1 in view of suppression of write fringing, and it is more preferable that the prominence 1 a be rectangular as shown in FIG. 1 .

Also it is preferable in view of suppression of write fringing without deterioration of the function of the lower-core layer 1 as the upper-shielding layer that the height H of the prominence 1 a be 1 to 3 times of the thickness of the gap layer, and the tilting angle θ2 of the slanted surfaces 1 b of the lower-core layer 1 formed on both sides of the prominence 1 a be in a range of approximately 2 degrees to 10 degrees.

As described above, a prominence is formed on the lower-core layer, the width T 1 of the prominence at the gap-facing surface is substantially the same as the thickness Tw of the upper-core layer, and slanted surfaces extending from the base end of the prominence to the both sides are formed on the lower-core layer. Write fringing thereby can be effectively suppressed.

A rectangular prominence can further suppress write fringing since a leakage magnetic field generated between the upper-core layer and the prominence can be controlled within the track width Tw.

When the height H of the prominence is 1 to 3 times of the thickness of the gap layer and the tilting angle of the slanted surfaces on the lower-core layer is in a range of 2 degrees to 10 degrees, write fringing is more effectively suppressed without deterioration of the function of the lower-core layer as the upper-shielding layer.

In the first manufacturing method in accordance with the present invention in which the lower-core layer and the prominence is integrally formed, after removing the nonmagnetic material layer a rectangular prominence can be formed on the lower-core layer by a first ion milling process along the vertical direction, and the width T 1 of the prominence can be equalized with the width Tw of the upper-core layer with high accuracy. Further, slanted surfaces can be formed on the upper surfaces of the lower-core layer extending from the base end of the prominence to both sides by a second milling process along the oblique direction.

In the second manufacturing method in accordance with the present invention in which a prominence is previously deposited on the lower-core layer, after removing the nonmagnetic material layer the width T 1 of the prominence can be equalized with the width Tw of the upper-core layer with high accuracy by forming slanted surfaces on the prominence by the first milling process. Further, a substantially rectangular prominence can be formed and the slanted surfaces can be formed on the upper surfaces of the lower-core layer extending from the base end of the prominence to both sides by the second milling process.

Since the gap layer is composed of a nonmagnetic material, e.g. SiO 2 , which can be removed by a plasma etching process, only the nonmagnetic material layer can be removed without deterioration of magnetic material layers such as the lower-core layer by the plasma etching process.

Claims

1. A method for manufacturing a combination read/write thin film magnetic head comprising a magnetic material, a nonmagnetic lower-gap layer, a magnetoresistive element and a nonmagnetic upper-gap layer, these layers being superposed in this order from the bottom, a lower-core layer comprising a magnetic material, an upper-core layer comprising a magnetic material facing said lower-core layer through a nonmagnetic gap layer, and a coil layer inducing a recording magnetic field in said lower-core layer and upper-core layer, these layers being provided on said upper-gap layer and said lower-core layer also acting as an upper-shielding layer;the method comprising: a step for forming a prominence comprising a magnetic material having a width on said lower-core layer comprising a magnetic material; a step for forming a nonmagnetic material layer on said lower-core layer and said prominence, said nonmagnetic material layer having a mono-layer, multi-layer, or composite structure comprising at least one material selected from the group consisting of SiO2, Ta2O5, Si3N4, TiO, Ti2O3, Ti3O5, TiO2 and WO3; a step for forming said upper-core layer of a magnetic material layer having a width slightly smaller than that of said prominence through said nonmagnetic material layer; a step for leaving the section of said nonmagnetic material layer sandwiched between said prominence and said upper-core layer as a gap layer and removing said nonmagnetic material layer not covered by the upper-core layer, said step for removing said nonmagnetic material being performed by an anisotropic plasma etching process which does not damage the magnetic material at the lower-core layer side and acts only in the vertical direction of said nonmagnetic material layer, said etching process using a CF4 based gas; a step for sloping both side faces of said prominence in the direction away from said upper-core layer so as to equalize the width of the gap-facing surface of said prominence in contact with said gap layer with the width of the upper-core layer; and a step for forming grades on both upper surfaces of the lower-core layer extending from the base ends of the prominence.

2. A method for manufacturing a combination read/write thin film magnetic head comprising a magnetic material in accordance with claim 1, wherein said step for trimming both sides of said prominence is performed by a first ion milling process having an ion irradiation angle of 0 to 30 degrees relative to the direction perpendicular to the facing surface.

3. A method for manufacturing a combination read/write thin film magnetic head comprising a magnetic material in accordance with claim 2, wherein said step for forming said slanted surface on the lower-core layer is performed by a second ion milling process having an ion irradiation angle of 40 degrees to 80 degrees relative to the direction perpendicular to the facing surface.

4. A method for manufacturing a combination read/write thin film magnetic head comprising a magnetic material in accordance with claim 1, wherein the height of the prominence is one time to three times the thickness of said gap layer formed on the prominence.

5. A method for manufacturing a combination read/write thin film magnetic head comprising a magnetic material in accordance with claim 1, wherein the lower-core layer has sloping upper faces, the angle defined by the sloping upper faces and the facing surface being in a range of 20° to 10°.

6. A method for manufacturing a combination read/write thin film magnetic head comprising a magnetic material in accordance with claim 1, wherein an angle defined by both side faces of the prominence and a surface, facing the gap, of the prominence is in a range of 60° to 120°.

7. A method for manufacturing a combination read/write thin film magnetic head comprising a magnetic material in accordance with claim 1, wherein the nonmagnetic material layer is composed of a material which is more readily etched by the etching process using the CF4 based gas than the magnetic materials of the upper-core layer and the lower layers.

8. A method for manufacturing a combination read/write thin film magnetic head comprising a magnetic material in accordance with claim 1, wherein the lower-core layer and the prominence are composed of the same material.