Claims
- 1. A polishing composition comprising an aqueous medium comprising alkali metal ions, abrasive grains, a carboxylic acid, an oxidizing agent, and an anti-gelling agent.
- 2. The polishing composition as claimed in claim 1, wherein said alkali metal ions are contained in an amount of 0.001 to 5% by mass.
- 3. The polishing composition as claimed in claim 1 or 2, wherein said alkali metal ions are supplied by an alkali metal hydroxide.
- 4. The polishing composition as claimed in claim 1 or 2, wherein said alkali metal ions comprise at least one ion selected from the group consisting of lithium, sodium, potassium, rubidium, and cesium ions.
- 5. The polishing composition as claimed in claim 1 or 2, wherein said alkali metal ions are potassium ions.
- 6. The polishing composition as claimed in claim 1 or 2, wherein said abrasive grains comprise at least one material selected from the group consisting of alumina, titania, silica, and zirconia.
- 7. The polishing composition as claimed in claim 1 or 2, wherein said abrasive grains have a secondary particle with a mean particle diameter of 0.03 to 0.5 μm.
- 8. The polishing composition as claimed in claim 1 or 2, wherein said abrasive grains are in the form of colloidal particles.
- 9. The polishing composition as claimed in claim 1 or 2, wherein said carboxylic acid is an organic carboxylic acid comprising at least one COOH group or COO— group in a molecule thereof.
- 10. The polishing composition as claimed in claim 1 or 2, wherein said carboxylic acid comprises at least one acid selected from the group consisting of gluconic acid, lactic acid, tartaric acid, glycolic acid, glyceric acid, malic acid, citric acid, formic acid, acetic acid, propionic acid, acrylic acid, oxalic acid, malonic acid, succinic acid, adipic acid, maleic acid, itaconic acid, glycine, lysine, aspartic acid, and glutamic acid.
- 11. The polishing composition as claimed in claim 1 or 2, wherein said oxidizing agent comprises at least one material selected from the group consisting of a peroxide, a persulfate, a nitrate, an oxyacid salt, and an iron salt.
- 12. The polishing composition as claimed in claim 1 or 2, wherein said oxidizing agent comprises a hydrogen peroxide.
- 13. The polishing composition as claimed in claim 1 or 2, wherein said anti-gelling agent comprises at least one material selected from the group consisting of a phosphonic acid compound, phenanthroline, and aluminum acetylacetonate.
- 14. The polishing composition as claimed in claim 1 or 2, wherein said anti-gelling agent comprises at least one material selected from the group consisting of phosphoric acid, 1-hydroxyethane-1,1-diphosphonic acid, aminotrimethylenephosphonic acid, phenanthroline, and aluminum acetylacetonate.
- 15. The polishing composition as claimed in claim 1 or 2, wherein said composition has a pH value in a range of about 1 to about 5.
- 16. The polishing composition as claimed in claim 1 or 2, wherein said composition comprises 3 to 30% by weight of abrasive grains, 0.1 to 8% by weight of a carboxylic acid, 0.2 to 5% by weight of an oxidizing agent, and 2% or less by weight of an anti-gelling agent.
- 17. The polishing composition as claimed in claim 1 or 2, wherein said polishing a magnetic disk substrate.
- 18. A method for preparing a polishing composition comprising the step of adding alkali metal hydroxide to an aqueous medium comprising abrasive grains, a carboxylic acid, and an anti-gelling agent to adjust a pH value of said aqueous medium to a range of about 1 to about 5.
Priority Claims (1)
Number |
Date |
Country |
Kind |
P2000-115592 |
Apr 2000 |
JP |
|
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application is an application filed under 35 U.S.C. §111(a) claiming benefit pursuant to 35 U.S.C. §119(e)(1) of the filing date of Provisional Application 60/240,977 filed Oct. 18, 2000 pursuant to 35 U.S.C. §111(b).
Provisional Applications (1)
|
Number |
Date |
Country |
|
60240977 |
Oct 2000 |
US |