The present invention relates generally to laminating a photopolymerizable dry film, sometimes called photoresist, onto a substrate. More particularly, the wet lamination processes and compositions of the present invention are directed to improved wet lamination fluid compositions and methods, resulting in improved photoresist performance.
When dry film photoresist is applied to a substrate:
Broadly speaking, wet lamination processes (for applying photoresist dry film to copper laminate) are known. See for example, U.S. Pat. No. 4,976,817 to Correa et al. However, with each new generation of circuit board design, circuit patterns tend to become smaller and therefore less tolerant to air entrapment and unwanted surface residuals. A need therefore exists for a wet lamination system for dry film photoresist with improved performance, particularly with respect to unwanted air entrapment and unwanted surface residue.
The present invention is directed to a lamination system useful in the manufacture of circuitized substrates. The lamination system comprises a dry film photoresist and a laminate substrate comprising a metal (e.g., copper or stainless steel) or non-metal surface. The lamination processes of the present invention further comprise a lamination fluid comprising water and a surface energy modification agent.
In one embodiment of the present invention, a dry film photoresist is applied to the copper surface of a copper laminate, using a conventional or non-conventional wet lamination process. During the wet lamination process, a wet lamination fluid is applied between the photoresist dry film and the substrate surface. The wet lamination fluid is intended to fill any irregularities of the surfaces of the two layers being laminated together, thereby inhibiting air entrapment between the two layers. Thereafter, the wet lamination fluid can be volatilized away or otherwise removed.
The wet lamination fluids of the present invention are water based and are up to 50, 60, 70, 80, 90, 95, 96, 97, 98, 99, 99.5 or 99.9 weight percent water. In one embodiment, prior to incorporation into the lamination fluid, the water component: 1. is sufficiently free of unwanted to ionic species to have an electrical resistivity of at least 100, 101, 102, 103, 104, 105, 106, 107, 108 or 109 Ohms; and 2. contains dissolved oxygen in an amount less than 15, 14, 12, 11, 10, 9, 8, 7, 6, 5, 4, 3, 2, 1, or 0.1 parts per million.
In accordance with the present invention, the wet lamination fluids of the present invention comprise at least one surface energy modification agent. In one embodiment, the surface energy modification agent is one or more of the following:
In one embodiment, the surfactant agent is present in amounts in a range between (and optionally including) 0.0001, 0.001, 0.005, 0.01, 0.02, 0.05, 0.08, 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1.0, 2.0, 3.0 and 4.0 moles/liter. In general, the amount of surfactant that may be used should be sufficient to achieve effective surface wetting of the photoresist dry film, and this will typically vary depending on the particular surfactant selected and the nature of the surface of the dry film photoresist. However, too much surfactant may result in undesirable foaming and/or flocculation during the lamination process. In one embodiment, an anti-foaming agent is included to ensure that no unwanted foaming occurs during lamination.
In one embodiment, the pH of the fluid is also generally controlled, for instance, by the addition of a basic compound such as sodium hydroxide or potassium hydroxide in the desired amount of achieve the optimized pH. In one embodiment, it is desirable to maintain the pH of the lamination fluid of this invention within a range between (and optionally including) any two of the following: 1.0, 2.0, 3.0, 4.0, 5.0, 6.0, 7.0, 8.0, 9.0, 10.0, 11.0, and 12.0. The pH of the lamination fluid of this invention may be adjusted using any known acid, base, or amine, particularly an acid or base that contains no metal ions, such as ammonium hydroxide and amines, or nitric, phosphoric, sulfuric, or organic acids to avoid introducing undesirable metal components into the process.
In one embodiment, the surface energy modification agent is present in an amount in a range between 0.0001 and 3.0 moles/liter, and the pH of the fluid is between 3 and 11.
In one embodiment the lamination fluid of the present invention includes a complexing agent. Useful complexing agents include, but are not limited to, acids such as citric, lactic, malonic, tartaric, succinic, acetic, oxalic, and other acids, as well as amino acid and amino sulfuric acids, phosphoric acids, phosphonic acids, and their salts. The complexing agent can be present in an amount between (and optionally including) any two of the following: 0.1, 0.2, 0.5, 0.7, 1.0, 2.0, 3.0, 4.0, 5.0, 6.0, 7.0, 8.0, 9.0, and 10.
In another embodiment, the lamination fluid comprises an organic amino compound. Useful organic amino compounds include alkylamines, alcohol amines, amino acids, urea, derivatives of urea, and mixtures thereof. Preferred organic amino compounds are long chain alkylamines and alcoholamines. The term “long chain alkylamines” refers to alkylamines having from 7 to 12 or more carbon atoms including, for example, nonylamine and dodecylamine. Examples of useful alcoholamines include, but are not limited to monoethanolamine, and triethanolamine. Examples of useful derivatives of urea include, but are not limited to biurea. A preferred organic amino compound is the long chain alklyamine, dodecylamine. A preferred alcoholamine is triethanolamine.
The organic amino compound can be present in an amount between (and optionally including) any two of the following: 0.1, 0.2, 0.5, 0.7, 1.0, 2.0, 3.0, 4.0, 5.0, 6.0, 7.0, 8.0, 9.0, and 10 weight percent.
In one embodiment, the lamination fluid of the present invention includes a film forming agent. Useful film forming agents are nitrogen containing cyclic compounds such as:
The concentration of the film forming agent may vary over a relatively wide range, such as, in an amount between (and optionally including) any two of the following: 0.01, 0.02, 0.05, 0.07, 0.1, 0.2., 0.3., 0.4, 0.5, 0.6, 0.8, 0.9, 1.0, 2.0 and 3.0 weight percent.
In one embodiment, the film forming agent is benzotriazole (“BTA”). However, benzotriazole and substituted benzotriazoles tend to have very low solubilities in water, and to provide a sufficient concentration of a benzotriazole in aqueous solution, it is generally necessary to neutralize the benzotriazole with at least a molar equivalent of an oxidizing agent. (One mole of a non-acid oxidizing agent equivalent to one mole of benzotriazole.) Useful oxidizing agents for use in the lamination fluids of the present invention include oxidizing agents comprising one or more inorganic or organic per-compounds. A per-compound as defined by Hawley's Condensed Chemical Dictionary is a compound containing at least one peroxy group (—O—O—) or a compound containing an element in its highest oxidation state. Examples of compounds containing at least one peroxy group include, but are not limited to, hydrogen peroxide and its adducts such as urea hydrogen peroxide and percarbonates, organic peroxides such as benzyl peroxide, peracetic acid, and di-t-butyl peroxide, monopersulfates (SO5=), dipersulfates (S2 O8=), and sodium peroxide.
Examples of compounds containing an element in its highest oxidation state include, but are not limited, to periodic acid, periodate salts, perbromic acid, perbromate salts, perchloric acid, perchloric salts, perboric acid, and perborate salts and permanganates. Examples of non-per compounds that meet the electrochemical potential requirements include but are not limited to bromates, chlorates, chromates, iodates, iodic acid, and cerium (IV) compounds such as ammonium cerium nitrate.
Preferred oxidizing agents are peracetic acid, urea-hydrogen peroxide, hydrogen peroxide, monopersulfuric acid, dipersulfuric acid, salts thereof, and mixtures thereof including mixtures of urea and hydrogen peroxide.
The oxidizing agent may be present in an amount between (and optionally including) any two of the following: 0.3, 0.5, 0.8, 1.0, 2.0, 3.0, 4.0, 5.0, 6.0, 7.0, 8.0, 9.0, 10, 12, 14, 15, 16, 17, 18, 19, 20, 25 and 30 weight percent.
In addition to water, the wet lamination fluids of the present invention can comprise a co-solvent, such as:
The non-aqueous co-solvent can be present in an amount between (and optionally including) any two of the following: 0.1, .0.5, 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 12, 15 or 20 weight percent. The presence of the non-aqueous cosolvent facilitates wetting of the photoresist dry film surface.
Lab tests were conducted and results were obtained as follows.
The following isolated line resolution chart was obtained.
The above discussion of the present invention is intended to be merely illustrative and therefore non-limiting. Any limitations to the present invention are intended to be provided solely by the following claims.
Number | Date | Country | |
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60966299 | Aug 2007 | US |