CONTROL APPARATUS, SYSTEM, LITHOGRAPHY APPARATUS, ARTICLE MANUFACTURING METHOD, CONTROL METHOD, AND NON-TRANSITORY STORAGE MEDIUM

Abstract

There is provided a control apparatus for controlling a controlled apparatus connected via a network, including a generation unit configured to generate instruction data for controlling the controlled apparatus, a communication unit configured to transmit/receive, in every predetermined cycle, via the network, a data frame including one of the instruction data generated by the generation unit and response data from the controlled apparatus, and a processing unit configured to acquire, in a case where the response data indicates an abnormality of a unit controlled by the controlled apparatus, abnormality data that is divided and included in a plurality of data frames received by the communication unit and indicates information concerning the abnormality of the unit, and output the abnormality data.

Description

Claims

1. A control apparatus for controlling a controlled apparatus connected via a network, comprising: a generation unit configured to generate instruction data for controlling the controlled apparatus;a communication unit configured to transmit/receive, in every predetermined cycle, via the network, a data frame including one of the instruction data generated by the generation unit and response data from the controlled apparatus; anda processing unit configured to acquire, in a case where the response data indicates an abnormality of a unit controlled by the controlled apparatus, abnormality data that is divided and included in a plurality of data frames received by the communication unit and indicates information concerning the abnormality of the unit, and output the abnormality data.

2. The control apparatus according to claim 1, wherein the processing unit acquires the abnormality data included in the data frame together with the response data.

3. The control apparatus according to claim 1, wherein the processing unit acquires the abnormality data assigned to a free space of the data frame.

4. The control apparatus according to claim 1, wherein the processing unit transmits a request command to the controlled apparatus via the communication unit, and acquires the abnormality data via the communication unit.

5. The control apparatus according to claim 1, further comprising: a determination unit configured to determine whether the response data received by the communication unit indicates the abnormality of the unit,wherein in a case where the determination unit determines that the response data received by the communication unit indicates the abnormality of the unit, the processing unit acquires the abnormality data by communicating with the controlled apparatus via the communication unit, and outputs the abnormality data.

6. The control apparatus according to claim 1, wherein a priority level of communication with the controlled apparatus, which is executed to acquire the abnormality data, is lower than a priority level of communication with the controlled apparatus, which is executed to transmit/receive one of the instruction data and the response data.

7. The control apparatus according to claim 1, wherein PDO communication using a process data object is used for communication with the controlled apparatus, which is executed to transmit/receive one of the instruction data and the response data, andSDO communication using a service data object is used for communication with the controlled apparatus, which is executed to acquire the abnormality data.

8. The control apparatus according to claim 1, wherein the abnormality data includes data indicating information concerning a state of the unit.

9. The control apparatus according to claim 1, wherein the controlled apparatus writes the response data in the data frame on the fly.

10. The control apparatus according to claim 1, wherein the network is EtherCAT®.

11. A system comprising a controlled apparatus connected to a network and a control apparatus configured to control the controlled apparatus, wherein the control apparatus includes a generation unit configured to generate instruction data for controlling the controlled apparatus,a communication unit configured to transmit/receive, in every predetermined cycle, via the network, a data frame including one of the instruction data generated by the generation unit and response data from the controlled apparatus, anda processing unit configured to acquire, in a case where the response data indicates an abnormality of a unit controlled by the controlled apparatus, abnormality data that is divided and included in a plurality of data frames received by the communication unit and indicates information concerning the abnormality of the unit, and output the abnormality data.

12. A lithography apparatus for forming a pattern on a substrate, comprising: a system defined in claim 11,wherein a controlled apparatus included in the system controls a unit configured to execute at least part of processing of forming the pattern on the substrate.

13. An article manufacturing method comprising: forming a pattern on a substrate by using a lithography apparatus defined in claim 12;processing the substrate on which the pattern is formed in the forming; andmanufacturing an article from the processed substrate.

14. A control method of controlling, by a control apparatus, a controlled apparatus connected to a network, comprising: a first step of generating instruction data for controlling the controlled apparatus;a second step of transmitting/receiving, in every predetermined cycle, via the network, a data frame including one of the instruction data generated in the first step and response data from the controlled apparatus; anda third step of acquiring, in a case where the response data indicates an abnormality of a unit controlled by the controlled apparatus, abnormality data that is divided and included in a plurality of data frames received in the second step and indicates information concerning the abnormality of the unit, and output the abnormality data.

15. A non-transitory storage medium storing a program for causing a computer as a control apparatus to execute each step of a control method defined in claim 14.