Controlling abnormal operating mode

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G03F7/70533

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

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G03F7/70533Controlling abnormal operating mode

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for reducing hydrogen permeation from lithogr...
- Patent number 12,025,922
- Issue date Jul 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi-Hung Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Energy correction module for an optical source apparatus
- Patent number 11,947,268
- Issue date Apr 2, 2024
- Cymer, LLC
- Yingbo Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
- Patent number 11,924,955
- Issue date Mar 5, 2024
- Gigaphoton Inc.
- Yoshiyuki Honda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 11,854,846
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Processing apparatus, management apparatus, lithography apparatus,...
- Patent number 11,829,075
- Issue date Nov 28, 2023
- Canon Kabushiki Kaisha
- Satoru Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Training method for machine learning assisted optical proximity err...
- Patent number 11,815,820
- Issue date Nov 14, 2023
- ASML Netherlands B.V.
- Jaiin Moon
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Light source, EUV lithography system, and method for performing cir...
- Patent number 11,703,769
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for reducing hydrogen permeation from lithogr...
- Patent number 11,561,482
- Issue date Jan 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi-Hung Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for reducing hydrogen permeation from lithogr...
- Patent number 11,537,054
- Issue date Dec 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi-Hung Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 11,537,053
- Issue date Dec 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chiao-Hua Cheng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV lithography system and method for decreasing debris in EUV lith...
- Patent number 11,531,278
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for operating a machine for microlithography
- Patent number 11,480,883
- Issue date Oct 25, 2022
- Carl Zeiss SMT GmbH
- Michael Kamp-Froese
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 11,380,566
- Issue date Jul 5, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light source, EUV lithography system, and method for generating EUV...
- Patent number 11,333,983
- Issue date May 17, 2022
- TAIWAN SEMICONDUCTOR MANFACTURING COMPANY, LTD.
- Chi Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for monitoring reflectivity of the collector f...
- Patent number 11,204,556
- Issue date Dec 21, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Chih Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of matching records, method of scheduling maintenance and ap...
- Patent number 11,204,901
- Issue date Dec 21, 2021
- ASML Netherlands B.V.
- David Evert Song Kook Sigtermans
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for controlling a manufacturing process and associated appar...
- Patent number 11,187,994
- Issue date Nov 30, 2021
- ASML Netherlands B.V.
- Mohammad Reza Kamali
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 11,187,993
- Issue date Nov 30, 2021
- Canon Kabushiki Kaisha
- Yutaka Matsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of performance testing working parameters of a fluid handlin...
- Patent number 11,143,969
- Issue date Oct 12, 2021
- ASML Netherlands B.V.
- Giovanni Luca Gattobigio
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
- Patent number 11,092,896
- Issue date Aug 17, 2021
- Gigaphoton Inc.
- Yuta Takashima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dynamic cooling control for thermal stabilization for lithography s...
- Patent number 11,009,801
- Issue date May 18, 2021
- Applied Materials, Inc.
- Benjamin M. Johnston
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
- Patent number 10,955,751
- Issue date Mar 23, 2021
- Gigaphoton Inc.
- Yuta Takashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source apparatus and method for decreasing debris in radi...
- Patent number 10,955,762
- Issue date Mar 23, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning apparatus, imprint apparatus, lithography apparatus, and c...
- Patent number 10,915,032
- Issue date Feb 9, 2021
- Canon Kabushiki Kaisha
- Shingo Ishida
- B08 - CLEANING
Information Patent Grant
Extreme ultraviolet (EUV) lithography patterning methods utilizing...
- Patent number 10,901,317
- Issue date Jan 26, 2021
- International Business Machines Corporation
- Benjamin D. Briggs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cell control system
- Patent number 10,897,051
- Issue date Jan 19, 2021
- FANUC CORPORATION
- Manabu Saitou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 10,879,093
- Issue date Dec 29, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Metrology robustness based on through-wavelength similarity
- Patent number 10,871,716
- Issue date Dec 22, 2020
- ASML Netherlands B.V.
- Miguel Garcia Granda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process window tracker
- Patent number 10,866,523
- Issue date Dec 15, 2020
- ASML Netherlands B.V.
- Wim Tjibbo Tel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light source, EUV lithography system, and method for generating EUV...
- Patent number 10,824,083
- Issue date Nov 3, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EUV LIGHT SOURCE CONTAMINATION MONITORING SYSTEM
- Publication number 20240345491
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng Hung TSAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS
- Publication number 20240310740
- Publication date Sep 19, 2024
- TOKYO ELECTRON LIMITED
- Kenichirou MATSUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGR...
- Publication number 20240310743
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Hung LIAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS, METHODS, AND DEVICES FOR THERMAL CONDITIONING OF RETICLES...
- Publication number 20240295832
- Publication date Sep 5, 2024
- ASML NETHERLANDS B.V.
- Jean-Philippe Xavier VAN DAMME
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240201602
- Publication date Jun 20, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MAINTENANCE OF MODULES FOR LIGHT SOURCES USED IN SEMICONDUCTOR PHOT...
- Publication number 20240152063
- Publication date May 9, 2024
- CYMER, LLC
- Russell Allen Burdt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINATION METHOD, DETERMINATION APPARATUS, INFORMATION PROCESSI...
- Publication number 20240118626
- Publication date Apr 11, 2024
- Canon Kabushiki Kaisha
- SHUJI SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR CLEANING OPTICAL ELEMENTS IN EUV OPTICAL SYSTEMS
- Publication number 20230418167
- Publication date Dec 28, 2023
- Yun Xie
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR FORMING PHOTORESIST PATTERN AND METHOD FOR FORMING PATTE...
- Publication number 20230386841
- Publication date Nov 30, 2023
- Samsung Electronics Co., Ltd.
- Gyeyoung Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PERFORMING LITHOGRAPHY PROCESS, LIGHT SOURCE, AND EUV LI...
- Publication number 20230324813
- Publication date Oct 12, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONTROL APPARATUS, SYSTEM, LITHOGRAPHY APPARATUS, ARTICLE MANUFACTU...
- Publication number 20230296988
- Publication date Sep 21, 2023
- Canon Kabushiki Kaisha
- YASUHIRO WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20230292426
- Publication date Sep 14, 2023
- Gigaphoton Inc.
- Yoshiyuki HONDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230236495
- Publication date Jul 27, 2023
- KIOXIA Corporation
- Yoshio MIZUTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPO...
- Publication number 20230176487
- Publication date Jun 8, 2023
- ASML NETHERLANDS B.V.
- Rogier Sebastiaan GILIJAMSE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGR...
- Publication number 20230161272
- Publication date May 25, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Hung LIAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENERGY CORRECTION MODULE FOR AN OPTICAL SOURCE APPARATUS
- Publication number 20230019832
- Publication date Jan 19, 2023
- CYMER, LLC
- Yingbo Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS, MANAGEMENT APPARATUS, LITHOGRAPHY APPARATUS,...
- Publication number 20230012400
- Publication date Jan 12, 2023
- Canon Kabushiki Kaisha
- Satoru Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGR...
- Publication number 20220404721
- Publication date Dec 22, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Hung LIAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...
- Publication number 20220328331
- Publication date Oct 13, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- FU-HSIEN LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR PERFORMING CIR...
- Publication number 20220276574
- Publication date Sep 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
- Publication number 20220244649
- Publication date Aug 4, 2022
- ASML NETHERLANDS B.V.
- Pieter Gerardus Jacobus SMORENBERG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TRAINING METHOD FOR MACHINE LEARNING ASSISTED OPTICAL PROXIMITY ERR...
- Publication number 20220155695
- Publication date May 19, 2022
- Jaiin MOON
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPAR...
- Publication number 20210311400
- Publication date Oct 7, 2021
- ASML NETHERLANDS B,V.
- Mohammad Reza KAMALI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV LITHOGRAPHY SYSTEM AND METHOD FOR DECREASING DEBRIS IN EUV LITH...
- Publication number 20210223708
- Publication date Jul 22, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...
- Publication number 20210118709
- Publication date Apr 22, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- FU-HSIEN LI
- B66 - HOISTING LIFTING HAULING
Information Patent Application
LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR GENERATING EUV...
- Publication number 20210055664
- Publication date Feb 25, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20210033981
- Publication date Feb 4, 2021
- Gigaphoton Inc.
- Yuta TAKASHIMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DYNAMIC COOLING CONTROL FOR THERMAL STABILIZATION FOR LITHOGRAPHY S...
- Publication number 20210011390
- Publication date Jan 14, 2021
- Applied Materials, Inc.
- Benjamin M. JOHNSTON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR MONITORING REFLECTIVITY OF THE COLLECTOR F...
- Publication number 20200379357
- Publication date Dec 3, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chih HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RADIATION SOURCE APPARATUS AND METHOD FOR DECREASING DEBRIS IN RADI...
- Publication number 20200348607
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Controlling abnormal operating mode

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and apparatus for reducing hydrogen permeation from lithogr...

Energy correction module for an optical source apparatus

Extreme ultraviolet light generation apparatus and electronic devic...

System for a semiconductor fabrication facility and method for oper...

Processing apparatus, management apparatus, lithography apparatus,...

Training method for machine learning assisted optical proximity err...

Light source, EUV lithography system, and method for performing cir...

Methods and apparatus for reducing hydrogen permeation from lithogr...

Methods and apparatus for reducing hydrogen permeation from lithogr...

Semiconductor processing tool and methods of operation

EUV lithography system and method for decreasing debris in EUV lith...

Method for operating a machine for microlithography

System for a semiconductor fabrication facility and method for oper...

Light source, EUV lithography system, and method for generating EUV...

Apparatus and method for monitoring reflectivity of the collector f...

Method of matching records, method of scheduling maintenance and ap...

Method for controlling a manufacturing process and associated appar...

Exposure apparatus and method of manufacturing article

Method of performance testing working parameters of a fluid handlin...

Extreme ultraviolet light generation apparatus and electronic devic...

Dynamic cooling control for thermal stabilization for lithography s...

Extreme ultraviolet light generation apparatus and electronic devic...

Radiation source apparatus and method for decreasing debris in radi...

Cleaning apparatus, imprint apparatus, lithography apparatus, and c...

Extreme ultraviolet (EUV) lithography patterning methods utilizing...

Cell control system

System for a semiconductor fabrication facility and method for oper...

Metrology robustness based on through-wavelength similarity

Process window tracker

Light source, EUV lithography system, and method for generating EUV...

Patents Applicationslast 30 patents

EUV LIGHT SOURCE CONTAMINATION MONITORING SYSTEM

SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS

METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGR...

SYSTEMS, METHODS, AND DEVICES FOR THERMAL CONDITIONING OF RETICLES...

SUBSTRATE PROCESSING APPARATUS

MAINTENANCE OF MODULES FOR LIGHT SOURCES USED IN SEMICONDUCTOR PHOT...

DETERMINATION METHOD, DETERMINATION APPARATUS, INFORMATION PROCESSI...

METHOD AND SYSTEM FOR CLEANING OPTICAL ELEMENTS IN EUV OPTICAL SYSTEMS

METHOD FOR FORMING PHOTORESIST PATTERN AND METHOD FOR FORMING PATTE...

METHOD FOR PERFORMING LITHOGRAPHY PROCESS, LIGHT SOURCE, AND EUV LI...

CONTROL APPARATUS, SYSTEM, LITHOGRAPHY APPARATUS, ARTICLE MANUFACTU...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPO...

METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGR...

ENERGY CORRECTION MODULE FOR AN OPTICAL SOURCE APPARATUS

PROCESSING APPARATUS, MANAGEMENT APPARATUS, LITHOGRAPHY APPARATUS,...

METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGR...

SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...

LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR PERFORMING CIR...

SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS

TRAINING METHOD FOR MACHINE LEARNING ASSISTED OPTICAL PROXIMITY ERR...

METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPAR...

EUV LITHOGRAPHY SYSTEM AND METHOD FOR DECREASING DEBRIS IN EUV LITH...

SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...

LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR GENERATING EUV...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

DYNAMIC COOLING CONTROL FOR THERMAL STABILIZATION FOR LITHOGRAPHY S...

APPARATUS AND METHOD FOR MONITORING REFLECTIVITY OF THE COLLECTOR F...

RADIATION SOURCE APPARATUS AND METHOD FOR DECREASING DEBRIS IN RADI...