Claims
- 1. A copolymer from three or more monomers and having a number average molecular weight of 500 to 500,000 consisting of 1 to 50% by mol units of --SO.sub.2 -- units and 50 to 99% by mol units of
- (1) at least one first member selected from the group consisting of chlorostyrene, acetoxystyrene, hydroxystyrene and trialkylsilylstyrene, and
- (2) at least one other member selected from the hereinafter defined groups (a), (b) and (c),
- group (a) consisting of styrene or chlorostyrene or acetoxystyrene, or hydroxystyrene or trialkylsilylstyrene,
- group (b) consisting of 1-butene or 2-methyl-butene or 2-methyl-pentene,
- group (c) consisting of trimethylvinylsilane and trimethylallylsilane
- wherein said other member is other than said first member.
- 2. A copolymer having a number average molecular weight of 500 to 500,000 consisting of 1 to 50% by mol units of --SO.sub.2 -- units and 50 to 99% by mol units of at least two members selected from the group consisting of chlorostyrene, acetoxystyrene, hydroxystyrene and trialkylsilylstyrene.
- 3. A copolymer according to claim 2 wherein said trial kylsilylstyrene has the formula ##STR18## wherein R.sub.1, R.sub.2 and R.sub.3 are each methyl.
- 4. A copolymer according to claim 3 wherein the trimethylsilyl group is bonded to the nucleus of said styrene at the o-, m- or p-position.
- 5. A copolymer according to claim 1, having repeating units represented by the structural formula ##STR19## wherein p represents a sequence length of 1 to 5 and n represents an integer of 10 to 25,000.
- 6. A positive type resist material comprising as an active ingredient, a nucleus-substituted trialkylsilylstyrene-sulfone linear copolymer composed of 30 to 50 % by mol units of ##STR20## units and 50 to 70% by mol units of ##STR21## wherein R.sub.1, R.sub.2 and R.sub.3 each represent a lower alkyl group, and having a number average molecular weight of 500 to 500,000.
- 7. A positive type resist material comprising as an active ingredient, a copolymer of four or more monomers comprising 30 to 50% by mol units of ##STR22## units and 50 to 70% by mol units of at least two vinyl compounds and having a number average molecular weight of 25,000 to 500,000, said at least two vinyl compounds being composed of (1) at least one aromatic ring-containing vinyl compound and (2) at least one aliphatic olefin hydrocarbon as indispensable structural units and (3) a Si-containing vinyl compound as structural units.
- 8. A positive type resist material according to claim 7 wherein said at least one aromatic ring-containing vinyl compound (1) is at least one member selected from the group consisting of styrene, chlorostyrene, acetoxystyrene, hydroxystyrene and trialkylsilylstyrene; said at least one aliphatic olefin hydrocarbon (2) is at least one member selected from the group consisting of 1-butene, 2-methyl-1-butene and 2-methyl-1- pentene; and said Si-containing vinyl compound (3) is at least one member selected from the group consisting of trimethylvinylsilane and trimethylallylsilane.
Parent Case Info
This is a continuation of application Ser. No. 059,927 filed June 9, 1987 abandoned and the benefits of 35 USC 120 are claimed relative to it.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
3890287 |
Moore et al. |
Jun 1975 |
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Continuations (1)
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Number |
Date |
Country |
Parent |
59927 |
Jun 1987 |
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