| Number | Date | Country | Kind |
|---|---|---|---|
| 3-055375 | Mar 1991 | JPX |
| Number | Name | Date | Kind |
|---|---|---|---|
| 4638179 | Mattes et al. | Jan 1987 | |
| 4950914 | Kurihara et al. | Aug 1990 | |
| 5095750 | Suzuki et al. | Mar 1992 | |
| 5103667 | Allen et al. | Apr 1992 |
| Number | Date | Country |
|---|---|---|
| 3001780C2 | Sep 1984 | DEX |
| 1-253657 | Oct 1989 | JPX |
| 1-269641 | Oct 1989 | JPX |
| 2-95952 | Jun 1990 | JPX |
| WO8912830 | Dec 1989 | WOX |
| Entry |
|---|
| Micro Sysem Technologies 90, H. Reichl, 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components, Berlin, Sep. 1990, pp. 131-136. |