Claims
- 1. A method for creating a conductive reduced layer on an insulating layer over a surface of a semiconductor substrate with a fluid bath comprising:
- adding an electrolyte to the fluid bath;
- submerging the semiconductor substrate in the fluid bath with electrolyte;
- applying a negative voltage with respect to the surface of the semiconductor substrate and the fluid bath with electrolyte to create an electric field across the insulating layer, whereby at least a portion of the insulating layer is converted to a conductive reduced species.
- 2. A method as in claim 1 wherein the applied negative voltage comprises a voltage between 0.01 volts and 1.0 volts for each nanometer of thickness of the conductive reduced species desired.
Parent Case Info
This is a division of application Ser. No. 745,036, filed June 13, 1985, U.S. Pat. No. 4,596,627 which is a division of application Ser. No. 470,673, filed 2/28/83, U.S. Pat. No. 4,454,004.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
2980594 |
Pankove |
Apr 1961 |
|
Divisions (2)
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Number |
Date |
Country |
Parent |
745036 |
Jun 1985 |
|
Parent |
470673 |
Feb 1983 |
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