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H01L21/31111

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/31111by chemical means

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microelectronic devices with through-substrate interconnects and as...
- Patent number 12,368,096
- Issue date Jul 22, 2025
- Kyle K. Kirby
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon etchant composition, pattern formation method and manufactu...
- Patent number 12,359,125
- Issue date Jul 15, 2025
- Dongwoo Fine-Chem Co., Ltd.
- Jin-Kyu Roh
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 12,362,280
- Issue date Jul 15, 2025
- Renesas Electronics Corporation
- Takeshi Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Need for Si3N4 selective removal by wet chemistry
- Patent number 12,362,193
- Issue date Jul 15, 2025
- SHANGHAI INSTITUTE OF IC MATERIALS
- Weimin Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching etch layer
- Patent number 12,362,203
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Manish Kumar Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device structures
- Patent number 12,362,229
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsin-Che Chiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for improving profile of interconnect structure
- Patent number 12,362,227
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Neng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Schottky barrier diode with reduced leakage current and method of f...
- Patent number 12,363,925
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Meng-Han Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field effect transistor with negative capacitance dielectric struct...
- Patent number 12,363,978
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chansyun David Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical solution-resistant protective film forming composition con...
- Patent number 12,344,758
- Issue date Jul 1, 2025
- NISSAN CHEMICAL CORPORATION
- Takafumi Endo
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Semiconductor device and method of forming patterns for a semicondu...
- Patent number 12,341,095
- Issue date Jun 24, 2025
- SK hynix Inc.
- Dae Sung Eom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for preparing a surface for direct-bonding
- Patent number 12,341,018
- Issue date Jun 24, 2025
- ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
- Jeremy Alfred Theil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 12,342,601
- Issue date Jun 24, 2025
- Samsung Electronics Co., Ltd.
- Nam Gyu Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuitry comprising a memory array comprising strings o...
- Patent number 12,342,542
- Issue date Jun 24, 2025
- Micron Technology, Inc.
- Daniel Billingsley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated flowable low-k gap-fill and plasma treatment
- Patent number 12,334,337
- Issue date Jun 17, 2025
- Applied Materials, Inc.
- Myungsun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition and process for selectively etching a layer comprising...
- Patent number 12,331,239
- Issue date Jun 17, 2025
- BASF SE
- Joannes Theodorus Valentinus Hoogboom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for selective etch stop capping and selective...
- Patent number 12,334,394
- Issue date Jun 17, 2025
- Applied Materials, Inc.
- Suketu Parikh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,327,768
- Issue date Jun 10, 2025
- Tokyo Electron Limited
- Hayato Tanoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing liquid supply apparatus and method of removing solids fr...
- Patent number 12,322,610
- Issue date Jun 3, 2025
- Semes Co., Ltd.
- Mu Hyeon Lee
- B08 - CLEANING
Information Patent Grant
Method of forming high density, high shorting margin, and low capac...
- Patent number 12,322,699
- Issue date Jun 3, 2025
- Tahoe Research, LTD.
- Christopher J. Jezewski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching to reduce line wiggling
- Patent number 12,322,651
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuan-Wei Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical thin-film transistor and application as bit-line connector...
- Patent number 12,324,159
- Issue date Jun 3, 2025
- SUNRISE MEMORY CORPORATION
- Tianhong Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FinFET device and method of forming same
- Patent number 12,315,759
- Issue date May 27, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Bo-Cyuan Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device and a semiconductor...
- Patent number 12,315,864
- Issue date May 27, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Chi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 12,315,734
- Issue date May 27, 2025
- NANYA TECHNOLOGY CORPORATION
- Li-Han Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 12,308,246
- Issue date May 20, 2025
- SWAYSURE TECHNOLOGY CO., LTD.
- Mao-Hua Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 12,310,002
- Issue date May 20, 2025
- NANYA TECHNOLOGY CORPORATION
- Jhen-Yu Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D semiconductor device and array layout with isolated conductive p...
- Patent number 12,310,023
- Issue date May 20, 2025
- Macronix International Co., Ltd.
- Hang-Ting Lue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal gate with silicon sidewall spacers
- Patent number 12,310,052
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Han Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition window enlargement
- Patent number 12,300,496
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Meng-Han Chou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MEMORY DEVICE
- Publication number 20250240972
- Publication date Jul 24, 2025
- KIOXIA Corporation
- Hidenobu NAGASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMORY ARRAYS AND METHODS USED IN FORMING A MEMORY ARRAY
- Publication number 20250239520
- Publication date Jul 24, 2025
- Lodestar Licensing Group LLC
- Harsh Narendrakumar Jain
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING SYSTEM
- Publication number 20250239454
- Publication date Jul 24, 2025
- SCREEN Holdings Co., Ltd.
- Hiroaki ISHII
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRATED ASSEMBLIES AND METHODS OF FORMING INTEGRATED ASSEMBLIES
- Publication number 20250240962
- Publication date Jul 24, 2025
- Lodestar Licensing Group LLC
- Ramey M. Abdelrahaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL THIN-FILM TRANSISTOR AND APPLICATION AS BIT-LINE CONNECTOR...
- Publication number 20250240970
- Publication date Jul 24, 2025
- Sunrise Memory Corporation
- Tianhong Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW WARPAGE HIGH DENSITY TRENCH CAPACITOR
- Publication number 20250240981
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Jyun-Ying LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOLATION STRUCTURES AND METHODS OF FORMING THE SAME
- Publication number 20250241005
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- Chung-Huai CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED ASSEMBLIES AND METHODS OF FORMING INTEGRATED ASSEMBLIES
- Publication number 20250234551
- Publication date Jul 17, 2025
- Lodestar Licensing Group LLC
- Jordan D. Greenlee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE CONTACT STRUCTURE OVER ACTIVE GATE AND METHOD TO FABRICATE SAME
- Publication number 20250233020
- Publication date Jul 17, 2025
- Intel Corporation
- Abhijit Jayant PETHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE ETCHING SOLUTION FOR 3D NAND STRUCTURE SHEET
- Publication number 20250230357
- Publication date Jul 17, 2025
- HUBEI SINOPHORUS ELECTRONIC MATERIALS CO., LTD.
- Shaoping LI
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE AND SEMICONDUC...
- Publication number 20250220909
- Publication date Jul 3, 2025
- KIOXIA Corporation
- Hirotaka TSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING SEMICONDUCTOR PAC...
- Publication number 20250218916
- Publication date Jul 3, 2025
- Samsung Electronics Co., Ltd.
- Seungwan Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250218764
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING COMPOSITION, ETCHING METHOD USING SAME, AND METHOD FOR MANU...
- Publication number 20250215318
- Publication date Jul 3, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Po Ting CHOU
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
- Publication number 20250207245
- Publication date Jun 26, 2025
- Tokyo Electron Limited
- Tomohiro NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH HELMET STRUCTURE BETWEEN TWO SEMICONDUCTO...
- Publication number 20250212505
- Publication date Jun 26, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Cheng CHING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL MEMORY DEVICES
- Publication number 20250212405
- Publication date Jun 26, 2025
- Samsung Electronics Co., Ltd.
- Kohji KANAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20250210366
- Publication date Jun 26, 2025
- KIOXIA Corporation
- Hakuba KITAGAWA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHODS OF FORMING A BILAYER HARDMASK AND ASSOCIATED DEPOSITION MET...
- Publication number 20250201557
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Devika Choudhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTIVE-FILM FORMING COMPOSITION
- Publication number 20250197558
- Publication date Jun 19, 2025
- NISSAN CHEMICAL CORPORATION
- Satoshi KAMIBAYASHI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHODS FOR WET ATOMIC LAYER ETCHING OF TRANSITION METAL OXIDE DIEL...
- Publication number 20250201572
- Publication date Jun 19, 2025
- TOKYO ELECTRON LIMITED
- Kate Abel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATH SYSTEMS AND METHODS THEREOF
- Publication number 20250196175
- Publication date Jun 19, 2025
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- B08 - CLEANING
Information Patent Application
INNER SPACER STRUCTURES FOR GATE-ALL-AROUND FIELD EFFECT TRANSISTORS
- Publication number 20250203992
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Mrunal Abhijith KHADERBAD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENLARGING CONTACT AREA AND PROCESS WINDOW FOR A CONTACT VIA
- Publication number 20250201626
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Zhen YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHODS OF MANUFACTURE
- Publication number 20250194227
- Publication date Jun 12, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Ting Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME
- Publication number 20250191994
- Publication date Jun 12, 2025
- Macronix International Co., Ltd.
- Yun-Yuan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metal-Insulator-Metal Structure
- Publication number 20250192026
- Publication date Jun 12, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuan-Yang Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING ELECTRODE WITH MULTI-DIELECTRIC LAYERS
- Publication number 20250191922
- Publication date Jun 12, 2025
- MIKRO MESA TECHNOLOGY CO., LTD.
- Li-Yi CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON NITRIDE ETCHING LIQUID COMPOSITION
- Publication number 20250179360
- Publication date Jun 5, 2025
- KANTO KAGAKU KABUSHlKI KAISHA
- Takuo Owada
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
CHEMICAL SOLUTION, ETCHING METHOD, AND METHOD FOR MANUFACTURING SEM...
- Publication number 20250183049
- Publication date Jun 5, 2025
- KIOXIA Corporation
- Hakuba KITAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by chemical means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microelectronic devices with through-substrate interconnects and as...

Silicon etchant composition, pattern formation method and manufactu...

Semiconductor device and method of manufacturing the same

Need for Si3N4 selective removal by wet chemistry

Method for etching etch layer

Semiconductor device structures

Method for improving profile of interconnect structure

Schottky barrier diode with reduced leakage current and method of f...

Field effect transistor with negative capacitance dielectric struct...

Chemical solution-resistant protective film forming composition con...

Semiconductor device and method of forming patterns for a semicondu...

Method for preparing a surface for direct-bonding

Semiconductor device

Integrated circuitry comprising a memory array comprising strings o...

Integrated flowable low-k gap-fill and plasma treatment

Composition and process for selectively etching a layer comprising...

Methods and apparatus for selective etch stop capping and selective...

Substrate processing system and substrate processing method

Processing liquid supply apparatus and method of removing solids fr...

Method of forming high density, high shorting margin, and low capac...

Etching to reduce line wiggling

Vertical thin-film transistor and application as bit-line connector...

FinFET device and method of forming same

Method of manufacturing a semiconductor device and a semiconductor...

Method for manufacturing semiconductor device

Method for manufacturing semiconductor device

Semiconductor device

3D semiconductor device and array layout with isolated conductive p...

Metal gate with silicon sidewall spacers

Deposition window enlargement

Patents Applicationslast 30 patents

SEMICONDUCTOR MEMORY DEVICE

MEMORY ARRAYS AND METHODS USED IN FORMING A MEMORY ARRAY

SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING SYSTEM

INTEGRATED ASSEMBLIES AND METHODS OF FORMING INTEGRATED ASSEMBLIES

VERTICAL THIN-FILM TRANSISTOR AND APPLICATION AS BIT-LINE CONNECTOR...

LOW WARPAGE HIGH DENSITY TRENCH CAPACITOR

ISOLATION STRUCTURES AND METHODS OF FORMING THE SAME

INTEGRATED ASSEMBLIES AND METHODS OF FORMING INTEGRATED ASSEMBLIES

GATE CONTACT STRUCTURE OVER ACTIVE GATE AND METHOD TO FABRICATE SAME

SELECTIVE ETCHING SOLUTION FOR 3D NAND STRUCTURE SHEET

METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE AND SEMICONDUC...

SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING SEMICONDUCTOR PAC...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

ETCHING COMPOSITION, ETCHING METHOD USING SAME, AND METHOD FOR MANU...

FILM FORMATION METHOD AND FILM FORMATION DEVICE

SEMICONDUCTOR DEVICE WITH HELMET STRUCTURE BETWEEN TWO SEMICONDUCTO...

VERTICAL MEMORY DEVICES

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

METHODS OF FORMING A BILAYER HARDMASK AND ASSOCIATED DEPOSITION MET...

PROTECTIVE-FILM FORMING COMPOSITION

METHODS FOR WET ATOMIC LAYER ETCHING OF TRANSITION METAL OXIDE DIEL...

BATH SYSTEMS AND METHODS THEREOF

INNER SPACER STRUCTURES FOR GATE-ALL-AROUND FIELD EFFECT TRANSISTORS

ENLARGING CONTACT AREA AND PROCESS WINDOW FOR A CONTACT VIA

SEMICONDUCTOR DEVICE AND METHODS OF MANUFACTURE

SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME

Metal-Insulator-Metal Structure

METHOD OF FORMING ELECTRODE WITH MULTI-DIELECTRIC LAYERS

SILICON NITRIDE ETCHING LIQUID COMPOSITION

CHEMICAL SOLUTION, ETCHING METHOD, AND METHOD FOR MANUFACTURING SEM...