Various types of electrical current sensors are known in the art. Magnetic field current sensors include one or more magnetic field sensing elements positioned near a conductor to sense a magnetic field generated by an electrical current flowing through the conductor. In some arrangements, a magnetic field current sensor can generate an output signal having a magnitude proportional to the magnetic field induced by the current through the conductor. In other arrangements, a magnetic field sensor can generate an output signal having a magnitude proportional to the difference in magnetic fields induced by two currents following through two different conductors.
Current sensors are used in many applications including automotive, industrial, and other safety-critical applications. The overall safety of systems and devices that utilize current sensors can depend on the accuracy and reliability of the current sensors.
In many current sensing applications, such as measuring battery leakage, the current to be measured may be in the range of hundreds of milliampere to below five amperes. With conventional current sensor assemblies, it can be challenging to measure such a “low” current accurately due to the relatively weak magnetic field induced by the current flowing through a conductor, resistance/inductance constraints, and/or cost constraints.
Described herein are embodiments of current sensors and current sensor assemblies that can be used to accurately measure low currents while being cost-effective. Disclosed embodiments include conductive coil or loop structures that can be formed upon printed circuit boards (PCBs) that are assembled with differential magnetic field sensors, or that can be formed as part of the differential magnetic field sensors themselves. In addition to low current sensing applications, certain embodiments may be suitable for use in differential current sensing applications, such as detecting current leak.
According to an aspect of the disclosure, a current sensor assembly may include: a coil structure having a first coil and a second coil connected in series, the coil structure configured to generate a differential magnetic field responsive to an electrical current passing through the first and second coils; a first magnetic field sensing element disposed proximate to the first coil and operable to generate a first signal responsive to the differential magnetic field passing through the first magnetic field sensing element in a first direction; a second magnetic field sensing element disposed proximate to the second coil and operable to generate a second signal responsive to the differential magnetic field passing through the second magnetic field sensing element in a second direction; and a circuit operable to subtract the first and second signals to generate a differential signal proportional to the electrical current.
In some embodiments, the coil structure can be formed upon a printed circuit board (PCB) and the first and second magnetic field sensing elements can be disposed over the PCB.
In some embodiments, the first coil and the second coil can be formed upon a first layer of the PCB and the first coil and the second coil may be connected by a conductive path formed upon a second layer of the PCB. In some embodiments, the PCB may include a first via to connect the first coil to the conductive path and a second via to connect the second coil to the conductive path. In some embodiments, the coil structure can further have a third coil and a fourth coil configured to contribute to the differential magnetic field responsive to the electrical current passing through the third and fourth coils.
In some embodiments, the third and fourth coils may be formed upon the second layer of the PCB and connected to the first and second coils, respectively, by vias of the PCB. In some embodiments, the coil structure can include a plurality of coils including at least the first and second coils, and at least two coils from the plurality of coils may be formed on different layers of the PCB and interconnected by vias. In some embodiments, the first magnetic field sensing element, the second magnetic field sensing element, and the circuit may be provided within an integrated circuit (IC) package disposed over the PCB.
In some embodiments, the first and second magnetic field sensing elements can include planar Hall elements. In some embodiments, the first and second magnetic field sensing elements can include vertical Hall elements. In some embodiments, the current sensor may further include: a third magnetic field sensing element disposed proximate to the first coil and operable to generate a third signal responsive to the differential magnetic field passing through the third magnetic field sensing element; and a fourth magnetic field sensing element disposed proximate to the second coil and operable to generate a fourth signal responsive to the differential magnetic field passing through the fourth magnetic field sensing element, and the circuit can be further operable generate the differential signal using the third and fourth signals. In some embodiments, the third and fourth magnetic field sensing elements can include vertical Hall elements.
In some embodiments, the current sensor assembly may further include one or more magnetic flux concentrators operable to influence the differential magnetic field to pass through the first magnetic field sensing element in the first direction and to influence the differential magnetic field to pass through the second magnetic field sensing element in the second direction. In some embodiments, the one or more magnetic flux concentrators may include a first magnetic flux concentrators disposed proximate to the first magnetic field sensing element and a second magnetic flux concentrators disposed proximate to the second magnetic field sensing element. In some embodiments, the one or more magnetic flux concentrators may include a single magnetic flux concentrator disposed proximate to both the first and second magnetic field sensing elements.
In some embodiments, the circuit may be provided with a die, and the first magnetic field sensing element, the second magnetic field sensing element, and the die may be overmolded onto a PCB onto which the coil structure is formed. In some embodiments, the circuit may be provided with a die, and the first magnetic field sensing element, the second magnetic field sensing element, the die, and the coil structure may be formed within an integrated circuit (IC) package.
According to another aspect of the disclosure, a current sensor assembly can include: a first coil structure configured to generate a first magnetic field responsive to a first electrical current passing through the first coil structure; a second coil structure configured to generate a second magnetic field responsive to a first electrical current passing through the second coil structure; a first magnetic field sensing element disposed proximate to the first coil structure and operable to generate a first signal responsive to the first magnetic field passing through the first magnetic field sensing element in a direction; a second magnetic field sensing element disposed proximate to the second coil structure and operable to generate a second signal responsive to the second magnetic field passing through the second magnetic field sensing element in the same direction; and a circuit operable to subtract the first and second signals to generate a differential signal proportional to a difference between the first and second electrical currents.
According to another aspect of the disclosure, a current sensor assembly may include: a plurality of magnetic field sensing elements disposed on a substrate; a conductive path formed onto the substrate and arranged to loop around ones of the plurality of magnetic field sensing elements to generate a magnetic field about the magnetic field sensing elements responsive to an electrical current passing through the conductive path, wherein at least magnetic field passes through at least one of the magnetic field sensing elements in a first direction and at least another one of the magnetic field sensing elements in a second direction; and one or more differential circuits operable to subtract signals generated by the plurality of magnetic field sensing elements and to generate one or more differential signals proportional to the electrical current.
In some embodiments, a first pair of the plurality of magnetic field sensing elements can be connected to a first one of the one or more differential circuits and a second pair of the plurality of magnetic field sensing elements can be connected to a second one of the one or more differential circuits. In some embodiments, a first two or more of the plurality of magnetic field sensing elements can be connected together, a second two or more of the plurality of magnetic field sensing elements can be connected together, and the first two or more and the second two or more of the plurality of magnetic field sensing elements can be connected to a same one of the one or more differential circuits.
It should be appreciated that individual elements of different embodiments described herein may be combined to form other embodiments not specifically set forth above. Various elements, which are described in the context of a single embodiment, may also be provided separately or in any suitable sub-combination. It should also be appreciated that other embodiments not specifically described herein are also within the scope of the following claims.
The manner of making and using the disclosed subject matter may be appreciated by reference to the detailed description in connection with the drawings, in which like reference numerals identify like elements.
The drawings are not necessarily to scale, or inclusive of all elements of a system, emphasis instead generally being placed upon illustrating the concepts, structures, and techniques sought to be protected herein.
Referring to
The number of windings in the first and second coils 106a, 106b, along with the dimensions and shapes of the windings, may be selected according to the requirements of a particular application in which the current sensor assembly 100 is to be used. In general, increasing the number of coil windings will result in increased magnetic coupling factor (or “gain”), while also resulting in increased impedance through the conductive path. The term “magnetic coupling factor” refers to the strength of a magnetic field generated by a current flowing through a conductive coil or loop structure divided by the magnitude of the current. In some examples, magnetic coupling factor may be expressed in units of Gauss (G)/Ampere (A). Thus, for example, if an application involves the sensing of particularly low currents (e.g., in the range of hundreds of milliampere), then the number of coil windings may be increased to increase the magnetic coupling factor. As another example, if an application requires low impedance, then the number of coils may be decreased. The structures and techniques sought to be protected herein are not limited to the coil shapes and dimensions illustrated in
The outer terminals 110, 116 may constitute a port that can be connected to external circuitry (e.g., a current source) that carries an electrical current to be measured. For example, coil structure 102 may be connected to an external circuitry such that a current “I” flows into the outer terminal 110 of the first coil, counter-clockwise through the first coil 106a, through the return path 108, clockwise through the second coil 106b, and out of the outer terminal 116 of the second coil 106b. In this way, the coil structure 102 generates a differential magnetic field responsive to an electrical current flowing between the outer terminals 110, 116. That is, current flowing through the first coil 106a generates (or “induces”) a first magnetic field, B+, having a first direction, whereas the current flowing through the second coil 106b generates a second magnetic field, B−, having a second, opposite direction. In the example of
The magnetic field sensing elements 104a, 104b may be configured to generate signals responsive to the differential magnetic field. In more detail, first magnetic field sensing element 104a may be configured to generate a first signal responsive to the first magnetic field, B+, passing therethrough in a first direction and second magnetic field sensing element 104b may be configured to generate a second signal responsive to the second magnetic field, B−, passing therethrough in the second, opposite direction.
As used herein, the term “magnetic field sensing element” is used to describe a variety of electronic elements that can sense a magnetic field. A magnetic field sensing element can be, but is not limited to, a Hall effect element, a magnetoresistance element, or a magneto-transistor. As is known, there are different types of Hall effect elements, for example, a planar Hall element, a vertical Hall element, and a Circular Vertical Hall (CVH) element. As is also known, there are different types of magnetoresistance elements, for example, a semiconductor magnetoresistance element such as Indium Antimonide (InSb), a giant magnetoresistance (GMR) element, for example, a spin valve, an anisotropic magnetoresistance element (AMR), a tunneling magnetoresistance (TMR) element, and a magnetic tunnel junction (MTJ). A magnetic field sensing element may be a single element or, alternatively, may include two or more magnetic field sensing elements arranged in various configurations, e.g., a half bridge or full (Wheatstone) bridge. Depending on the device type and other application requirements, the magnetic field sensing element may be a device made of a type IV semiconductor material such as Silicon (Si) or Germanium (Ge), or a type III-V semiconductor material like Gallium-Arsenide (GaAs) or an Indium compound, e.g., Indium-Antimonide (InSb).
As is known, some of the above-described magnetic field sensing elements tend to have an axis of maximum sensitivity parallel to a substrate that supports the magnetic field sensing element, and others of the above-described magnetic field sensing elements tend to have an axis of maximum sensitivity perpendicular to a substrate that supports the magnetic field sensing element. In particular, planar Hall elements tend to have axes of sensitivity perpendicular to a substrate, while metal based or metallic magnetoresistance elements (e.g., GMR, TMR, AMR) and vertical Hall elements tend to have axes of sensitivity parallel to a substrate.
Certain embodiments disclosed herein may be shown as having planar Hall elements. However, other types of magnetic field sensing elements may be used in some cases. For example, planar Hall elements may be replaced with and/or used in combination with vertical Hall elements or magnetoresistance elements, which can be disposed upon substrates in a manner such that they are responsive to the relevant magnetic fields.
Referring again to
Magnetic field sensing elements 104a, 104b may be provided as part of a current sensor that includes an electronic circuit (not shown), all disposed upon a common substrate (also not shown), such as a substrate comprising a semiconductor material. The circuit may be operable to receive the first signal generated by the first magnetic field sensing element 104a and the second signal generated by the second magnetic field sensing element 104b, and to generate a differential signal proportional to the electrical current flowing through the coil structure 102 (e.g., by subtracting the first and second signals). The current sensor circuit may be configured to perform other signal processing, such as current spinning, filtering, an amplification.
As used herein, the term “current sensor” can refer to one or more magnetic field sensing elements and electronic circuitry configured to process signals generated thereby. The term “current sensor assembly” can refer to a current sensor combined with a conductive coil or loop structure for carrying a current to be sensed by the current sensor.
In some embodiments, coil structure 102 may be formed upon or within a printed circuit board (PCB), and magnetic field sensing elements 104a, 104b and the sensor circuitry may be formed on a die and packaged within an integrated circuit (IC) package or chip (referred to herein as the “current sensor package”). The current sensor package may be disposed over the PCB to form the current sensor assembly 100. For example, the current sensor package may be surface mounted over the PCB using adhesive or mechanical fasteners. This and other means of packaging disclosed current sensor assemblies are discussed further below.
The magnetic field sensing elements 104a and 104b of
In the example of
The conductive layers 144, 146 can have a thickness D1 and may be spaced apart (e.g., vertically spaced) by a distance D2. The first conductive layer 144 may be spaced apart from a surface (e.g., a top surface) 148 of the PCB 140 by a distance D3. Magnetic field sensing elements 104a, 104b may be spaced apart from the surface 148 of the PCB 140 by a distance D4. As one example, D1 may be about 75 μm, D2 may be about 200 μm, D3 may be about 150 μm, and D4 may be about 750 μm. These dimensions are merely illustrative and other dimensions may be used.
The illustrative current sensor assembly 100, having a printed planar, winded coil structure on a PCB with the multiple surface mounted magnetic field sensing elements, can provide a higher magnetic coupling factor and signal-to-noise-ratio (SNR) compared to existing current sensor assemblies/designs. The low current to be measured flows through the coils to generates a relatively strong differential magnetic field that is applied to the magnetic field sensing elements. As such, current sensor assembly 100 provides a contactless, non-intrusive current sensing solution allowing for more accurate sensing of low currents (current flowing through the coil structure) while also being versatile and cost-effective by using simple coils structure directly printed on PCB. The structures and techniques disclosed herein can be used with various types of differential field sensors and magnetic sensor technologies (e.g., Hall, GMR, TMR, etc.).
In some embodiments, the first differential signal 204a, 204b and the second differential signal 214a, 214b can be opposite signals, e.g., signals with opposite voltages. For example, if current sensor 200 is used within the assembly 100 of
In some embodiments, magnetic field sensing elements 204, 214 may be planar Hall elements. A planar Hall element can be a four terminal device having a square shape, from a top view. A voltage and ground can be applied to a pair of diagonally opposing terminals, respectively, and a differential voltage can be generated across the other pair of diagonally opposing terminals. In some applications, in order to reduce a DC offset voltage (voltage indicative of a magnetic field when no magnetic field is present), the pair of terminals selected for coupling to the voltage and ground, and the pair of terminals selected for the differential signal from the Hall element changes from time to time, generally at a high rate of change. There are four such coupling assemblies for a planar Hall element. When operating, the coupling assemblies can be referred to as current spinning.
Accordingly, the illustrative electronic circuit 201 can include a first current spinning circuit 206 coupled to receive the first differential signal 204a, 204b, which can come from first selected pairs of terminals of the first magnetic field sensing element 204. Not shown, the first current spinning circuit 206 can also control to which second pairs of terminals of the first magnetic field sensing element 204 the voltage 202 and ground are coupled in synchronous relationship with the first pairs of terminals. The first current spinning circuit 206 can generate a first spinning signal 206a. With the current spinning assembly, the first spinning signal can have two or more spectral parts, for which a desired baseband part can be indicative of a magnetic field sensed by the first magnetic field sensing 204 and a second higher frequency part can be indicative of the DC offset voltage. The spinning signal 206a can be coupled to a low pass filter 208 operable to generate a first filtered signal 208a that can include only the desired baseband part.
Elements 216 and 218 can operate in the same way as elements 206, 208, and can result in a second filtered signal 218a. In some embodiments, current spinning is not used and the current spinning circuits 206, 216 can be omitted. In some embodiments, low pass filters 208, 218, can be omitted.
A differencing circuit 210 can be coupled to the first and second filtered signals 208a, 218a, respectively, and can be operable to generate a difference signal 210a. An amplifier 212 can be coupled to the difference signal 210a and can be operable to generate an amplified difference signal 212a.
In embodiments where magnetic fields pass through the first and second magnetic field sensing elements, 208, 210 in opposite direction, and therefore generate opposite signals, differencing circuit 210 operates to combine the first and second filtered signals 208a, 218a constructively. In embodiments where different/independent magnetic fields magnetic fields pass through the first and second magnetic field sensing elements, 208, 210 (i.e., fields generated from two different or independent currents), differencing circuit 210 operates to calculate the difference between the first and second filtered signals 208a, 218a. That is, differencing circuit 210 can output a signal that is responsive to the difference between the two independent currents.
Turning to
The number of windings in the coils 306a, 306b, 330a, 330b, along with the dimensions and shapes of the windings, may be varied according to the requirements of a particular application. The illustrative coil structure 302 may be provided within various current sensor assemblies disclosed herein. For example, referring to the current sensor assembly 100 of
The illustrative coil structure 502 can include a first coil 506a electrically connected to a first return path 508a, and a second coil 506b electrically connected to a second return path 508b. The first and second coils 506a, 506a may be electrically separated or isolated from each other. The coils 506a, 506b and return paths 508a, 508b may be formed from any electrically conductive material, such as copper or another metal. As shown, first coil 506a may wind/loop one or more times in a counter-clockwise direction starting from a first input terminal 510a and ending at a first inner terminal 512a. One end of the first return path 508a may be connected to the first inner terminal 512a and the opposite end of the first return path 508a may correspond to a first output terminal 514a. Second coil 506b may wind/loop one or more times, also in a counter-clockwise direction, starting from a second input terminal 510b and ending at a second inner terminal 512b. One end of the second return path 508b may be connected to the second inner terminal 512b and the opposite end of the second return path 508b may correspond to a second output terminal 514b.
The number of windings in the first and second coils 506a, 506b, along with the dimensions and shapes of the windings, may be selected according to the requirements of a particular application in which the current sensor assembly 500 is to be used.
The first input terminal 510a and first output terminal 514a may constitute a first port that can be connected to external circuitry (e.g., a first current source) that carries the first current, I1. The first current, I1, can flow into the first input terminal 510a, counter-clockwise through the first coil 506a, through the first return path 508a, and out of the first output terminal 514a. Likewise, second input terminal 510b and second output terminal 514b may constitute a second port that can be connected to external circuitry (e.g., a second current source) that carries the second current, I2. The second current, I2, can flow into the second input terminal 510b, counter-clockwise through the second coil 506b, through the second return path 508b, and out of the second output terminal 514b. The currents flowing through the first and second coils 506a, 506b can generate respective first and second magnetic fields BL, BR both having the same direction (e.g., out from the page of
Magnetic field sensing elements 504a, 504b may be configured to generate signals responsive to magnetic fields BL, BR respectively. Magnetic field sensing elements 504a, 504b may have axes of sensitivity perpendicular to the page of
Magnetic field sensing elements 504a, 504b may be provided as part of a current sensor that includes an electronic circuit (not shown), all disposed upon a common substrate (also not shown). The circuit may be operable to receive the first signal generated by the first magnetic field sensing element 504a and the second signal generated by the second magnetic field sensing element 504b, and to generate an output signal proportional to a difference between the first current, I1, and the second current, I2. That is, current sensor assembly 500 can perform differential current sensing, where the differential field sensed BL−BR is proportional to the difference I1−I2. The current sensor circuit may be configured to perform other signal processing, such as current spinning, filtering, an amplification.
In some embodiments, coil structure 502 may be formed upon or within a PCB. In more detail, first and second coils 506a, 506b may be formed on a first conductive layer of the PCB and first and second return paths 508a, 508b may be formed on a second conductive layer of the PCB. First return path 508a may be connected to the inner terminal 512a of the first coil 506a by a first via and second return path 508b may be connected to the inner terminal 512b of the second coil 506b by a second via. The vias are not visible in the top view of
The illustrative current sensor assembly 500 may be used in a variety of differential current sensing applications. As one example, current sensor assembly 500 may be used to detect for a current leak in a system having a battery. First coil 506a can be connected within the system such that I1 corresponds to the current flowing out of the battery, and second coil 506b can be connected such that I2 corresponds to the current flowing back to the battery. An imbalance between I1 and I2 may indicate a current leak in the system, a potentially dangerous condition. The output of the current sensor assembly—which is proportional or otherwise responsive to I1-I2—can be compared to a threshold value, T, to determine if a current leak exists.
Turning to
Turning to
In some embodiments, the third and fourth magnetic field sensing elements 820a, 820b may be vertical Hall elements. As shown, vertical Hall elements 820a, 820b may be positioned off-center of the coil structures 106a, 106b where the generated field has significant components parallel to the substrate (in contrast to the center of the coils where the generated field is dominantly perpendicular to the substrate). Using magnetic field sensing elements to sense in multiple different orientations can provide redundancy and additional versatility. In other embodiments, GMR, TMR, or AMR elements may be used.
The third and fourth magnetic field sensing elements 820a, 820b may be connected to the same circuit as first and second magnetic field sensing elements 104a, 104b, or they may be connected to a separate circuit. As an example, the circuitry illustrated in
An illustrative current sensor assembly 900 includes a coil structure 902 formed within a substrate 942 and a current sensor 924 having an IC 920 and one or more magnetic field sensing elements 904. The IC 920 and magnetic field sensing elements 904 may be provided as a “bare die,” meaning a die that is not packaged. Box 924 can represents an optional physical structure (i.e., package) protecting the bare die. Substrate 942 can support coil connections 910, 916 for connecting to input and output terminals of the coil structure 902, and IC connections 928 for connecting to the IC 920 via one or more leads 930 within the current sensor 924. The current sensor 924 can be overmolded onto the substrate 942 using, for example, an injection molding process. The resulting overmolded structure or module is illustrated by dashed line 926. Of note, the coil connections 910, 916 and the IC connections 928 are left exposed by the overmolding process.
Coil structure 902 may be the same as or similar to various other coil structures disclosed herein, such as coil structure 102 of
In some embodiments, the coil structure 902 may be formed to the front side or back side of the bare die providing IC 920. For example, micro winded coils can be printed on to the front or back side of the bare die.
An illustrative coil sensor assembly 1000 includes a current sensor package 1030 having the IC 920, one or more magnetic field sensing elements 904, a passivation and isolation layer 1032, and a conductive coil or loop structure 1034. The current sensor package 1030 also has IC connections 928 and coil (or conductive loop) connections 910, 916. The conductive coil or loop structure 1034 can be integrated in the current sensor package 1030 at a lead frame level or below it to provide an integrated low current sensor device.
As shown in the example of
Each of the pairs of magnetic field sensing elements may be connected to a differential current sensor circuit (e.g., a circuit similar to that of
With the layout of
in which HA1, HB3, HA2, HB2, HA3, and HB1 correspond to the coupling factors of magnetic field sensing elements 1104a, 1104b, 1104c, 1104d, 1104e, and 1104f, respectively. This equation can be adapted for other numbers of magnetic field sensing elements by changing the terms in the numerators and the constant in the denominators.
Embodiments of the integrated current sensor assembly illustrated in
While electronic circuits shown in figures herein may be shown in the form of analog blocks or digital blocks, it will be understood that the analog blocks can be replaced by digital blocks that perform the same or similar functions and the digital blocks can be replaced by analog blocks that perform the same or similar functions. Analog-to-digital or digital-to-analog conversions may not be explicitly shown in the figures but should be understood.
Various embodiments of the concepts systems and techniques are described herein with reference to the related drawings. Alternative embodiments can be devised without departing from the scope of the described concepts. It is noted that various connections and positional relationships (e.g., over, below, adjacent, etc.) are set forth between elements in the following description and in the drawings. These connections and/or positional relationships, unless specified otherwise, can be direct or indirect, and the present invention is not intended to be limiting in this respect. Accordingly, a coupling of entities can refer to either a direct or an indirect coupling, and a positional relationship between entities can be a direct or indirect positional relationship. As an example of an indirect positional relationship, references in the present description to element or structure A over element or structure B include situations in which one or more intermediate elements or structures (e.g., element C) is between elements A and B regardless of whether the characteristics and functionalities of elements A and/or B are substantially changed by the intermediate element(s).
Furthermore, it should be appreciated that relative, directional or reference terms (e.g. such as “above,” “below,” “left,” “right,” “top,” “bottom,” “vertical,” “horizontal,” “front,” “back,” “rearward,” “forward,” etc.) and derivatives thereof are used only to promote clarity in the description of the figures. Such terms are not intended as, and should not be construed as, limiting. Such terms may simply be used to facilitate discussion of the drawings and may be used, where applicable, to promote clarity of description when dealing with relative relationships, particularly with respect to the illustrated embodiments. Such terms are not, however, intended to imply absolute relationships, positions, and/or orientations. For example, with respect to an object or structure, an “upper” or “top” surface can become a “lower” or “bottom” surface simply by turning the object over. Nevertheless, it is still the same surface and the object remains the same. Also, as used herein, “and/or” means “and” or “or,” as well as “and” and “or.” Moreover, all patent and non-patent literature cited herein is hereby incorporated by references in their entirety.
The terms “disposed over,” “overlying,” “atop,” “on top,” “positioned on” or “positioned atop” mean that a first element, such as a first structure, is present on a second element, such as a second structure, where intervening elements or structures (such as an interface structure) may or may not be present between the first element and the second element. The term “direct contact” means that a first element, such as a first structure, and a second element, such as a second structure, are connected without any intermediary elements or structures between the interface of the two elements. The term “connection” can include an indirect connection and a direct connection.
In the foregoing detailed description, various features are grouped together in one or more individual embodiments for the purpose of streamlining the disclosure. This method of disclosure is not to be interpreted as reflecting an intention that each claim requires more features than are expressly recited therein. Rather, inventive aspects may lie in less than all features of each disclosed embodiment.
References in the disclosure to “one embodiment,” “an embodiment,” “some embodiments,” or variants of such phrases indicate that the embodiment(s) described can include a particular feature, structure, or characteristic, but every embodiment can include the particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same embodiment(s). Further, when a particular feature, structure, or characteristic is described in connection knowledge of one skilled in the art to affect such feature, structure, or characteristic in connection with other embodiments whether or not explicitly described.
The disclosed subject matter is not limited in its application to the details of construction and to the assemblies of the components set forth in the following description or illustrated in the drawings. The disclosed subject matter is capable of other embodiments and of being practiced and carried out in various ways. As such, those skilled in the art will appreciate that the conception, upon which this disclosure is based, may readily be utilized as a basis for the designing of other structures, methods, and systems for carrying out the several purposes of the disclosed subject matter. Therefore, the claims should be regarded as including such equivalent constructions insofar as they do not depart from the spirit and scope of the disclosed subject matter.
Although the disclosed subject matter has been described and illustrated in the foregoing exemplary embodiments, it is understood that the present disclosure has been made only by way of example, and that numerous changes in the details of implementation of the disclosed subject matter may be made without departing from the spirit and scope of the disclosed subject matter.
All publications and references cited herein are expressly incorporated herein by reference in their entirety.
Number | Name | Date | Kind |
---|---|---|---|
4236832 | Komatsu et al. | Dec 1980 | A |
4283643 | Levin | Aug 1981 | A |
4343026 | Griffith et al. | Aug 1982 | A |
4385273 | Lienhard et al. | May 1983 | A |
4438347 | Gehring | Mar 1984 | A |
4525668 | Lienhard et al. | Jun 1985 | A |
4596950 | Lienhard et al. | Jun 1986 | A |
4691259 | Imakoshi et al. | Sep 1987 | A |
4712064 | Eckardt et al. | Dec 1987 | A |
4752733 | Petr et al. | Jun 1988 | A |
4758943 | Aström et al. | Jul 1988 | A |
4760285 | Nelson | Jul 1988 | A |
4772929 | Manchester | Sep 1988 | A |
4823075 | Alley | Apr 1989 | A |
4833406 | Foster | May 1989 | A |
4847584 | Pant | Jul 1989 | A |
4922606 | Alexander et al. | May 1990 | A |
4926116 | Talisa | May 1990 | A |
4937521 | Yoshino et al. | Jun 1990 | A |
4939448 | Gudel | Jul 1990 | A |
4939449 | Cattaneo et al. | Jul 1990 | A |
4939459 | Akachi et al. | Jul 1990 | A |
4970411 | Halg et al. | Nov 1990 | A |
5041780 | Rippel | Aug 1991 | A |
5049809 | Wakatsuki et al. | Sep 1991 | A |
5218279 | Takahashi et al. | Jun 1993 | A |
5227721 | Kataoka et al. | Jul 1993 | A |
5247202 | Popovic et al. | Sep 1993 | A |
5247278 | Pant et al. | Sep 1993 | A |
5329416 | Ushiyama et al. | Jul 1994 | A |
5343143 | Voisine et al. | Aug 1994 | A |
5351027 | Kawamata et al. | Sep 1994 | A |
5412255 | Wallrafen | May 1995 | A |
5424558 | Borden et al. | Jun 1995 | A |
5442283 | Vig et al. | Aug 1995 | A |
5469058 | Dunnam | Nov 1995 | A |
5500590 | Pant | Mar 1996 | A |
5521501 | Dettmann et al. | May 1996 | A |
5561368 | Dovek et al. | Oct 1996 | A |
5570034 | Needham et al. | Oct 1996 | A |
5583725 | Coffey et al. | Dec 1996 | A |
5621319 | Bilotti et al. | Apr 1997 | A |
5621377 | Dettmann et al. | Apr 1997 | A |
5640090 | Furuya et al. | Jun 1997 | A |
5686838 | Van den Berg | Nov 1997 | A |
5686879 | Schuhl et al. | Nov 1997 | A |
5719494 | Dettmann et al. | Feb 1998 | A |
5831426 | Black, Jr. et al. | Nov 1998 | A |
5844140 | Seale | Dec 1998 | A |
5877705 | Sampey | Mar 1999 | A |
5883567 | Mullins, Jr. | Mar 1999 | A |
5896030 | Hasken | Apr 1999 | A |
5945825 | Clemens | Aug 1999 | A |
5952825 | Wan | Sep 1999 | A |
6002553 | Stearns et al. | Dec 1999 | A |
6011770 | Tan | Jan 2000 | A |
6031273 | Torok et al. | Feb 2000 | A |
6094330 | Criniti et al. | Jul 2000 | A |
6100686 | Van Delden et al. | Aug 2000 | A |
6175296 | Tokunaga et al. | Jan 2001 | B1 |
6184679 | Popovic et al. | Feb 2001 | B1 |
6300617 | Daughton et al. | Oct 2001 | B1 |
6315875 | Sasaki | Nov 2001 | B1 |
6329818 | Tokunaga et al. | Dec 2001 | B1 |
6331773 | Engel | Dec 2001 | B1 |
6351506 | Lewicki | Feb 2002 | B1 |
6356068 | Steiner et al. | Mar 2002 | B1 |
6392478 | Mulder et al. | May 2002 | B1 |
6392852 | Sasaki | May 2002 | B1 |
6404191 | Daughton et al. | Jun 2002 | B2 |
6424018 | Ohtsuka | Jul 2002 | B1 |
6426620 | Taguchi et al. | Jul 2002 | B1 |
6429640 | Daughton et al. | Aug 2002 | B1 |
6433981 | Fletcher et al. | Aug 2002 | B1 |
6436748 | Forbes et al. | Aug 2002 | B1 |
6437558 | Li et al. | Aug 2002 | B2 |
6459255 | Tamai et al. | Oct 2002 | B1 |
6462531 | Ohtsuka | Oct 2002 | B1 |
6462541 | Wang et al. | Oct 2002 | B1 |
6501678 | Lenssen et al. | Dec 2002 | B1 |
6545457 | Goto et al. | Apr 2003 | B2 |
6583629 | Stokes et al. | Jun 2003 | B1 |
6591481 | Shimazawa et al. | Jul 2003 | B2 |
6657826 | Shimazawa et al. | Dec 2003 | B2 |
6683448 | Ohtsuka | Jan 2004 | B1 |
6721140 | Inoue et al. | Apr 2004 | B2 |
6769166 | Blanchard | Aug 2004 | B1 |
6781358 | Goto et al. | Aug 2004 | B2 |
6781359 | Stauth et al. | Aug 2004 | B2 |
6791313 | Ohtsuka | Sep 2004 | B2 |
6812687 | Ohtuska | Nov 2004 | B1 |
6815944 | Vig et al. | Nov 2004 | B2 |
6841989 | Goto et al. | Jan 2005 | B2 |
6853178 | Hayat-Dawoodi | Feb 2005 | B2 |
6896407 | Nomiyama et al. | Feb 2005 | B2 |
6917321 | Haurie et al. | Jul 2005 | B1 |
6970333 | Boeve | Nov 2005 | B2 |
6989665 | Goto | Jan 2006 | B2 |
7026808 | Vig et al. | Apr 2006 | B2 |
7038448 | Schott et al. | May 2006 | B2 |
7075287 | Mangtani et al. | Jul 2006 | B1 |
7166807 | Gagnon et al. | Jan 2007 | B2 |
7190784 | Li | Mar 2007 | B2 |
7259545 | Stauth et al. | Aug 2007 | B2 |
7292095 | Burt et al. | Nov 2007 | B2 |
7319319 | Jones et al. | Jan 2008 | B2 |
7323870 | Tatschl et al. | Jan 2008 | B2 |
7325175 | Momtaz | Jan 2008 | B2 |
7336064 | Ludwig et al. | Feb 2008 | B2 |
7345470 | Suzuki | Mar 2008 | B2 |
7425821 | Monreal et al. | Sep 2008 | B2 |
7474093 | Ausserlechner | Jan 2009 | B2 |
7476953 | Taylor et al. | Jan 2009 | B2 |
7495624 | Daalmans | Feb 2009 | B2 |
7518354 | Stauth et al. | Apr 2009 | B2 |
7605647 | Romero et al. | Oct 2009 | B1 |
7635993 | Boeve | Dec 2009 | B2 |
7694200 | Forrest et al. | Apr 2010 | B2 |
7701208 | Nishikawa | Apr 2010 | B2 |
7729675 | Krone | Jun 2010 | B2 |
7746056 | Stauth et al. | Jun 2010 | B2 |
7764118 | Kusuda et al. | Jul 2010 | B2 |
7769110 | Momtaz | Aug 2010 | B2 |
7800389 | Friedrich et al. | Sep 2010 | B2 |
7923996 | Doogue et al. | Apr 2011 | B2 |
7936144 | Vig et al. | May 2011 | B2 |
7961823 | Kolze et al. | Jun 2011 | B2 |
7990209 | Romero | Aug 2011 | B2 |
8030918 | Doogue et al. | Oct 2011 | B2 |
8128549 | Testani et al. | Mar 2012 | B2 |
8134358 | Charlier et al. | Mar 2012 | B2 |
8203329 | Hohe et al. | Jun 2012 | B2 |
8818749 | Friedrich et al. | Aug 2014 | B2 |
8907669 | Petrie | Dec 2014 | B2 |
9081041 | Friedrich et al. | Jul 2015 | B2 |
10725100 | Milano et al. | Jul 2020 | B2 |
10761120 | Feucht et al. | Sep 2020 | B2 |
10884031 | Vuillermet et al. | Jan 2021 | B2 |
11099217 | Vuillermet et al. | Aug 2021 | B2 |
11366141 | Daubert et al. | Jun 2022 | B1 |
20020084923 | Li | Jul 2002 | A1 |
20020093332 | Schroeder et al. | Jul 2002 | A1 |
20020180433 | Van Zon et al. | Dec 2002 | A1 |
20030038675 | Gailus et al. | Feb 2003 | A1 |
20030102909 | Motz | Jun 2003 | A1 |
20030151406 | Wan et al. | Aug 2003 | A1 |
20040023064 | Ehresmann et al. | Feb 2004 | A1 |
20040155644 | Stauth et al. | Aug 2004 | A1 |
20040184196 | Jayasekara | Sep 2004 | A1 |
20050045359 | Doogue et al. | Mar 2005 | A1 |
20050073295 | Hastings | Apr 2005 | A1 |
20050246114 | Rannow et al. | Nov 2005 | A1 |
20060033487 | Nagano et al. | Feb 2006 | A1 |
20060077598 | Taylor et al. | Apr 2006 | A1 |
20060175674 | Taylor et al. | Aug 2006 | A1 |
20060202692 | Tatschl et al. | Sep 2006 | A1 |
20060255797 | Taylor et al. | Nov 2006 | A1 |
20070110199 | Momtaz et al. | May 2007 | A1 |
20070170533 | Doogue et al. | Jul 2007 | A1 |
20070247141 | Pastre et al. | Oct 2007 | A1 |
20070247146 | Stauth et al. | Oct 2007 | A1 |
20070285089 | Ibuki et al. | Dec 2007 | A1 |
20080094055 | Monreal et al. | Apr 2008 | A1 |
20080137784 | Krone | Jun 2008 | A1 |
20080238410 | Charlier et al. | Oct 2008 | A1 |
20090001964 | Strzalkowski et al. | Jan 2009 | A1 |
20090001972 | Fernandez et al. | Jan 2009 | A1 |
20090085706 | Baarman et al. | Apr 2009 | A1 |
20090315543 | Guo et al. | Dec 2009 | A1 |
20100211347 | Friedrich et al. | Aug 2010 | A1 |
20100301836 | Kern | Dec 2010 | A1 |
20110018533 | Cesaretti et al. | Jan 2011 | A1 |
20110048102 | Fernandez et al. | Mar 2011 | A1 |
20110298448 | Foletto et al. | Dec 2011 | A1 |
20120081110 | Racz | Apr 2012 | A1 |
20120274314 | Cesaretti et al. | Nov 2012 | A1 |
20130093412 | Anelli et al. | Apr 2013 | A1 |
20130214774 | Cesaretti et al. | Aug 2013 | A1 |
20130265041 | Friedrich | Oct 2013 | A1 |
20220381805 | Zhao | Dec 2022 | A1 |
Number | Date | Country |
---|---|---|
683469 | Mar 1994 | CN |
1501093 | Jun 2004 | CN |
200986484 | Dec 2007 | CN |
42 12 737 | Jul 1993 | DE |
195 39 458 | Apr 1997 | DE |
196 06 826 | Aug 1997 | DE |
196 50 078 | Jun 1998 | DE |
10017374 | Dec 2000 | DE |
10159607 | Sep 2002 | DE |
10128150 | Jan 2003 | DE |
10155423 | May 2003 | DE |
10202287 | Aug 2003 | DE |
10222395 | Dec 2003 | DE |
103 14 602 | Oct 2004 | DE |
102004003369 | Aug 2005 | DE |
102004009267 | Sep 2005 | DE |
102004038847 | Sep 2005 | DE |
102004040079 | Dec 2005 | DE |
102005037905 | Mar 2006 | DE |
102004053551 | May 2006 | DE |
10 2005 047 413 | Sep 2006 | DE |
102006008257 | Oct 2006 | DE |
102006021774 | Jan 2007 | DE |
102005038655 | Mar 2007 | DE |
102005040539 | Mar 2007 | DE |
102005052688 | May 2007 | DE |
102006007770 | Aug 2007 | DE |
102006028698 | Dec 2007 | DE |
10 2006 037 226 | Feb 2008 | DE |
102006046736 | Apr 2008 | DE |
102006046739 | Aug 2008 | DE |
10 2007 041 230 | Apr 2009 | DE |
0 289 141 | Nov 1988 | EP |
0 289 414 | Nov 1988 | EP |
0 338 122 | Oct 1989 | EP |
0 357 013 | Mar 1990 | EP |
0 357 013 | Mar 1990 | EP |
0 539 081 | Apr 1993 | EP |
0 710 850 | May 1996 | EP |
0 710 850 | May 1996 | EP |
1 225 453 | Jul 2002 | EP |
1 443 332 | Aug 2004 | EP |
1 637 898 | Mar 2006 | EP |
1 679 524 | Jul 2006 | EP |
1 691 204 | Aug 2006 | EP |
1 850 143 | Oct 2007 | EP |
1 865 331 | Dec 2007 | EP |
2 276 727 | Oct 1994 | GB |
S 57187671 | Nov 1982 | JP |
SHO 61-48777 | Mar 1986 | JP |
63263782 | Oct 1988 | JP |
H 02-238372 | Sep 1990 | JP |
03-248611 | Nov 1991 | JP |
H 05-10979 | Jan 1993 | JP |
9-166612 | Jun 1997 | JP |
2002-082136 | Mar 2002 | JP |
2004-177228 | Jun 2004 | JP |
2004356338 | Dec 2004 | JP |
2006-123012 | May 2006 | JP |
2008-513762 | May 2008 | JP |
2011-052036 | Mar 2011 | JP |
2011185914 | Sep 2011 | JP |
2015135267 | Jul 2015 | JP |
WO 9602849 | Feb 1996 | WO |
WO 03019216 | Mar 2003 | WO |
WO 03107018 | Dec 2003 | WO |
WO 2004072672 | Aug 2004 | WO |
WO 2004109725 | Dec 2004 | WO |
WO 2006044031 | Apr 2006 | WO |
WO 2006056829 | Jun 2006 | WO |
WO 2006083479 | Aug 2006 | WO |
WO 2006136577 | Dec 2006 | WO |
WO 2007087121 | Aug 2007 | WO |
WO 2007087121 | Aug 2007 | WO |
WO 2007138508 | Dec 2007 | WO |
WO 2007147760 | Dec 2007 | WO |
WO 2008048379 | Apr 2008 | WO |
WO 2009108422 | Sep 2009 | WO |
WO 2009108422 | Sep 2009 | WO |
WO 2010096367 | Aug 2010 | WO |
WO 2011011479 | Jan 2011 | WO |
Entry |
---|
English machine translation of JP-2015135267-A (Year: 2015). |
English machine translation of JP-2011185914-A (Year: 2011). |
“Utilization of GMR Materials. Analog Bridge Output Devices;”; NVE Corporation on website: www.nve.com/technical/explinations//Bridge.html., 3 pages. |
Ausserlechner et al.; “Compensation of the Piezo-Hall Effect in Integrated Hall Sensors on (100)-Si;” IEEE Sensors Journal, vol. 7, No. 11; Nov. 2007; ISBN: 1530-437X; 8 pages. |
Ausserlechner et al.; “Drift of Magnetic Sensitivity of Small Hall Sensors Due to Moisture Absorbed by the IC-Package;” Proceedings of IEEE Sensors, 2004; vol. 1; Oct. 24, 2004; ISBN:0-7803-8692-2; 4 pages. |
Ausserlechner; “Limits of Offset Cancellation by the Principle of Spinning Current Hall Probe;” Proceedings of IEEE Sensors; Oct. 2004; 4 pages. |
Ausserlechner; “The piezo-Hall effect in n-silicon for arbitrary crystal orientation;” Proceedings of IEEE Sensors; vol. 3; Oct. 24, 2004; ISBN: 0-7803-8692-2; 4 pages. |
Bahreyni, et al.; “A Resonant Micromachined Magnetic Field Sensor;” IEEE Sensors Journal; vol. 7, No. 9, Sep. 2007; 9 pages. |
Barrettino, et al.; “CMOS-Based Monolithic Controllers for Smart Sensors Comprising Micromembranes and Microcantilevers;” IEEE Transactions on Circuits and Systems-I Regular Papers vol. 54, No. 1; Jan. 2007; 12 pages. |
Baschirotto et al.; “Development and Analysis of PCB Vector 2-D Magnetic Field Sensor System for Electronic Compass;” IEEE Sensors Journal vol. 6, No. 2; Apr. 2006; 7 pages. |
Bilotti et al.; “Monolithic Magnetic Hall Sensor Using Dynamic Quadrature Offset Cancellation;” IEEE Journal of Solid-State Circuits; vol. 32, Issue 6; Jun. 1997; 8 pages. |
Blagojevic et al.; “FD SOI Hall Sensor Electronics Interfaces for Energy Measurement;” Microelectronics Journal 37; Sep. 2006; 8 pages. |
Cesaretti et al.; “Effect of Stress Due to Plastic Package Moisture Absorption in Hall Sensors;” IEEE Transactions on Magnetics, vol. 45, No. 16; Oct. 2009; 4 pages. |
Data Sheet; “High-Speed Digital Isolators, AduM1100AR/AduM1100BR;” as published by Analog Devices, Inc.; 2001, 12 pages. |
Demierre, et al.; “Reference Magnetic Actuator for Self-Calibration of a Very Small Hall Sensor Array;” Sensors and Actuators A97-98; Apr. 2002; 8 pages. |
Frick, et al.; “CMOS Microsystem for AC Current Measurement with Galvanic Isolation;” IEEE Sensors Journal; vol. 3, No. 6; Dec. 2003; 9 pages. |
Halg; “Piezo-Hall Coefficients of n-Type Silicon;” Journal of Applied Physics; vol. 64, No. 1; Jul. 1, 1988; 7 pages. |
Hirota et al.; “Giant Magneto-Resistance Devices;” Springer Series in Surface Sciences, 40; ISBN-10: 3540418199; ISBN-13: 978354041819I pp. 10-17, 9 pages. |
Hosticka; “CMOS Sensor Systems;” Sensors and Actuators A66; Apr. 1998; 7 pages. |
Kanda et al.; “The Piezo-Hall Effect in n-Silicon;” 22nd International Conference on the Physics of Semiconductors; vol. 1, Jan. 1995; 4 pages. |
Kayal et al.; “Automatic Calibration of Hall Sensor Microsystems;” Microelectronics Journal 37; Sep. 2006; 7 pages. |
Kammerer et al.: “A Hall effect sensors network insensitive to mechanical stress;” Proceedings of IEEE Sensors; vol. 3, Oct. 2004; 4 pages. |
Mangnani et al.; “Mechanical Stress Measurement Electronics Based on Piezo-Resistive and Piezo-Hall Effects;” 9th International Conference on Electronics, Circuits and Systems 2002; vol. 1; SBN: 0-7803-7596-3; Dec. 2002; 4 pages. |
Manic et al.; “Short and Long-Term Stability Problems of Hall Plates in Plastic Packages;” IEEE 38th Annual International Reliability Physics Symposium; Apr. 2000;6 pages. |
Manic; “Drift in Silicon Integrated Sensors and Circuits Due to the Thermo-Mechanical Stresses;” Lausanne, École Polytechnique Fédérale De Lausanne 2000; Part 1, 74 pages. |
Manic; “Drift in Silicon Integrated Sensors and Circuits Due to the Thermo-Mechanical Stresses;” Lausanne, École Polytechnique Fédérale De Lausanne 2000; Part 2, 102 pages. |
Motz et al.; “An Integrated Magnetic Sensor with Two Continuous-Time ΔΣ-Converters and Stress Compensation Capability;” IEEE International Solid-State Circuits Conference; Digest of Technical Papers; Feb. 6, 2006; ISBN: 1-4244-0079-1; 7 pages. |
Motz, et al.; “A Chopped Hall Sensor with Small Jitter and Programmable “True Power-On” Function;” IEEE Journal of Solid-State Circuits; vol. 40, No. 7; Jul. 2005; 8 pages. |
Motz, et al.; “An Integrated Hall Sensor Platform Design for Position, Angle and Current Sensing;” IEEE Sensors 2006; Exco, Daegu, Korea / Oct. 22-25, 2006; 4 pages. |
Munter; “A Low-offset Spinning-current Hall Plate;” Sensors and Actuators A21-A23; 1990; 4 pages. |
Munter; “Electronic Circuitry for a Smart Spinning-current Hall Plate with Low Offset;” Sensors and Actuators A; Jun. 1991 ;.5 pages. |
Partin et al.; “Temperature Stable Hall Effect Sensors;” IEEE Sensors Journal, vol. 6, No. 1; Feb. 2006; pp. 106-110. |
Partin, et al.; “Temperature Stable Hall Effect Sensors;” IEEE Sensors Journal, vol. 6, No. 1, Feb. 2006; 5 pages. |
Pastre, et al.; “A Hall Sensor Analog Front End for Current Measurement with Continuous Gain Calibration;” IEEE Sensors Journal; vol. 7, No. 5; May 2007; 8 pages. |
Pastre, et al.; “A Hall Sensor-Based Current Measurement Microsystem With Continuous Gain Calibration;” Research in Microelectronics and Electronics, IEEE vol. 2; Jul. 25; 2005; ISBN: 0-7803-9345-7; 4 pages. |
Pernia et al.; “Characteristics and Design of a Current Sensor Using Multilayer Co/Ni Structures;” IEEE, 1998, 6 pages. |
Popovic; “Sensor Microsystems;” Proc. 20th International Conference on Microelectronics (MWIL 95); vol. 2, NIS, Serbia, Sep. 12-14, 1995; 7 pages. |
Randhawa; “Monolithic Integrated Hall Devices in Silicon Circuits;” Microelectronics Journal; vol. 12, No. 6; Sep. 14-17, 1981; 6 pages. |
Ruther et al.; “Integrated CMOS-Based Sensor Array for Mechanical Stress Mapping;” 5th IEEE Conference on Sensors, Oct. 2007; 4 pages. |
Ruther et al.; “Theromagnetic Residual Offset in Integrated Hall Plates;” IEEE Sensors Journal; vol. 3, No. 6; Dec. 2003; 7 pages. |
Sargent; “Switched-capacitor IC controls feedback loop;” EDN; Design Ideas; Feb. 17, 2000; 2 pages. |
Schneider, et al.; “Temperature Calibration of CMOS Magnetic Vector Probe for Contactless Angle Measurement System;” IEDM; Dec. 1996; 4 Pages. |
Schott et al.; “Linearizing Integrated Hall Devices;” 1997 International Conference on Solid-State Sensors and Actuators, Jun. 16-19, 1997; 4 Pages. |
Schott, et al.; “CMOS Single-Chip Electronic Compass with Microcontroller;” IEEE Journal of Solid-State Circuits; vol. 42, No. 12; Dec. 2007; 11 pages. |
Simon et al.; “Autocalibration of Silicon Hall Devices;” 8th International Conference on Solid-State Sensors and Actuators; vol. 2; Jun. 25, 1995; 4 pages. |
Steiner et al; Offset Reduction in Hall Devices by Continuous Spinning Current Method; Sensors and Actuators A66; 1998; 6 pages. |
Steiner: “Double-Hall Sensor with Self-Compensated Offset;” Electron Devices Meeting; IDSM '97 Technical Digest; Dec. 7-10, 1997; 4 pages. |
Stellrecht et al.; Characterization of Hygroscopic Swelling Behavior of Mold Compounds and Plastic Packages; IEEE Transactions on Components and Packaging Technologies; vol. 27, No. 3; Sep. 2004; 8 pages. |
Takenaga et al.; “High-Temperture Operations of Rotation Angle Sensors with Spin-Valve-Type Magnetic Tunnel Junctions;” IEEE Transactions on Magnetics; vol. 41, No. 10; Oct. 2005; 3 pages. |
Taylor, et al.; “A Spin-Valve Based SOIC8 Current Sensor;” Allegro Microsystems, Inc. internal document; Aug. 17, 2006; 4 pages. |
Tian et al.; “Multiple Sensors on Pulsed Eddy-Current Detection for 3-D Subsurface Crack Assessment;” IEEE Sensors Journal, vol. 5, No. 1; Feb. 2005; 7 pages. |
Trontelj et al; “CMOS Integrated Magnetic Field Source Used as a Reference in Magnetic Field Sensors on Common Substrate;” WEP 1-6; IMTC; May 1994; 3 pages. |
Wu, et al.; “A Chopper Current-Feedback Instrumentation Amplifier with a 1mHz 1/f Noise Corner and an AC-Coupled Ripple-Reduction Loop;” IEEE International Solid-State Circuits Conference; Feb. 10, 2009; 3 pages. |
Zou et al.; “Three-Dimensional Die Surface Stress Measurements in Delaminated and Non-Delaminated Plastic Packages;” 48th Electronic Components and Technology Conference; May 25, 1998; 12 pages. |
PCT Search Report and Written Opinion of the ISA for PCT/US2006/000363 dated Nov. 5, 2006, 14 pages. |
PCT International Preliminary Report on Patentability for PCT/US2006/000636 dated Aug. 16, 2007, 10 pages. |
Office Action/Restriction Requirement dated May 15, 2008 for U.S. Appl. No. 11/335,944; 5 sheets. |
Response/Amendment to Restriction Requirement dated May 15, 2008 and filed on May 30, 2008 for U.S. Appl. No. 11/335,944; 1 sheet. |
Office Action dated Apr. 6, 2009 for U.S. Appl. No. 11/335,944; 18 sheets. |
Response/Amendment to Office Action dated Apr. 6, 2009 and filed on Jul. 6, 2009 for U.S. Appl. No. 11/335,944; 17 sheets. |
Office Action dated Nov. 16, 2009 for U.S. Appl. No. 11/335,944; 16 sheets. |
Response/Amendment to Office Action dated Nov. 16, 2009 and filed on Dec. 23, 2009 for U.S. Appl. No. 11/335,944; 19 sheets. |
Notice of Allowance dated Jan. 28, 2010 for U.S. Appl. No. 11/335,944; 6 sheets. |
Request for Continued Examination dated Feb. 23, 2010 for U.S. Appl. No. 11/335,944; 1 sheet. |
Notice of Allowance dated Mar. 23, 2010 for U.S. Appl. No. 11/335,944; 6 sheets. |
Amendment Under 37 C.F.R. §1.312 filed on May 20, 2010 Notice of Allowance dated Jan. 28, 2010 for U.S. Appl. No. 11/335,944; 7 sheets. |
PCT Notification Concerning Transmittal of International Preliminary Report on Patentability for PCT/US2007/000093; 9 pages. |
PCT Search Report and Written Opinion of ISA for PCT/US2007/000093 dated Feb. 5, 2008, 13 pages. |
EP Official Communication dated Dec. 5, 2008 for EP Pat. App. No. 07 716 253.5; 3 sheets. |
EP Response to Official Communication dated Dec. 5, 2008 and filed on Jun. 8, 2009 EP Pat. App. No. 07 716 253.5; 14 sheets. |
U.S. Appl. No. 12/792,245, filed Jun. 2, 2010; 91 sheets. |
PCT Search Report and Written Opinion of the ISA for PCT/US2009/044614 dated May 20, 2009, 14 pages. |
U.S. Pat. No. 7,923,996; issued on Apr. 12, 2011. |
Notice of Allowance; dated Feb. 11, 2011; for U.S. Appl. No. 12/037,393; 8 pages. |
PCT Search Report and Written Opinion of the ISA for PCT/US2009/031776 dated Oct. 23, 2009; 16 pages. |
PCT International Preliminary Report on Patentability and Written Opinion mailed Sep. 10, 2010 for PCT/US2009/031776; 10 pages. |
Letter from Yuasa & Hara; dated May 27, 2013; for JP Pat. App. No. 2010-547666; 2 pages. |
Japanese Notice of Reasons for Rejection (English translation); dated Apr. 4, 2013; for JP Pat. App. No. 2010-547666; 4 pages. |
Letter from Yuasa and Hara; dated Oct. 8, 2013; for Japanese Pat. App. No. 2010-547666; 2 pages. |
Argument and Amendment (in Japanese); dated Jul. 3, 2013; for Japanese Pat. App. No. 2010-547666; 11 pages. |
Claims for Argument and Amendment (in English); dated Jul. 3, 2013; for Japanese Pat. App. No. 2010-547666; 5 pages. |
Japanese Notice of Reasons for Rejection (English translation) dated Nov. 26, 2013; for JP Pat. App. No. 2010-547666; 2 pages. |
Letter from NTD Patent & Trademark Agency Limited; dated Oct. 10, 2012; for Chinese Pat. App. No. 200980106535.4; 13 pages. |
Chinese Office Action; dated Aug. 29, 2012; with English Translation for Chinese Pat. App. No. 200980106535.4; 8 pages. |
Letter to NTD Patent and Trademark Agency Ltd.; dated Dec. 11, 2012; with instructions to file Response to Official Action; for Chinese Pat. App. No. 200980106535.4; 3 pages. |
Letter from NTD Patent and Trademark Agency Ltd.; dated Jan. 19, 2013; enclosing Response to Official Action; for Chinese Pat. App. No. 200980106535.4; 13 pages. |
Translated Chinese Office Action dated Apr. 15, 2013; for CN Pat. App. No. 200980106565.4; 9 pages. |
Letter to NTD Patent and Trademark Agency; dated Jun. 19, 2013; for Chinese Pat. App. No. 200980106535.4; 11 pages. |
Letter from NTD Patent and Trademark Agency; dated Jul. 11, 2013; for Chinese Pat. App. No. 200980106535.4; 1 page. |
Chinese Response to Office Action; Jun. 27, 2013; for Chinese Pat. App. No. 200980106535.4; 21 pages. |
Chinese Office Action dated Nov. 7, 2013 (w/English translation); for Chinese Pat. App. No. 200980106535.4; 9 pages. |
Letter to NTD Patent and Trademark Agency, Ltd. dated Dec. 16, 2013; for Chinese Pat. App. No. 200980106535.4; 10 pages. |
Letter from NTD Patent and Trademark Agency, Ltd. dated Jan. 7, 2014; for Chinese Pat. App. No. 200980106535.4; 1 page. |
Response to Office Action; for Chinese Pat. App. No. 200980106535.4; 11 pages. |
U.S. Pat. No. 8,030,918; issued on Oct. 4, 2011. |
Office Action; dated Feb. 2, 2011; for U.S. Appl. No. 12/959,672; 13 pages. |
Response filed May 24, 2011 to Office Action dated Feb. 2, 2011; for U.S. Appl. No. 12/959,672; 8 pages. |
Office Action dated Jul. 6, 2012; for U.S. Appl. No. 12/706,318, filed Feb. 16, 2010; 29 pages. |
U.S. Notice of Allowance; dated Dec. 10, 2012; for U.S. Appl. No. 12/706,318; 9 pages. |
U.S. Appl. No. 12/706,318, filed Feb. 16, 2010. |
PCT Search Report and Written Opinion of the ISA for PCT/US2010/024256 dated Aug. 11, 2010; 14 pages. |
PCT International Preliminary Report on Patentability and Written Opinion of the ISA for PCT Pat. App. No. PCT/US2010/024256; dated Sep. 1, 2011; 9 pages. |
German Office Action; dated Sep. 23, 2013; for German Pat. App. No. 11 2010 000 848.5; 12 pages. |
Letter to Kuhnen & Wacker dated Jan. 20, 2014, with enclosures; for DE Pat. App. No. 112010000848.5; 4 pages. |
Office Action dated Jun. 12, 2013; for U.S. Appl. No. 13/743,451; 24 pages. |
Response filed Oct. 8, 2013; to Office Action dated Jun. 12, 2013; for U.S. Appl. No. 13/743,451; 12 pages. |
Notice of Allowance dated Dec. 24, 2013; for U.S. Appl. No. 13/743,451; 24 pages. |
Preliminary Amendment; dated Mar. 7, 2012; for U.S. Appl. No. 12/840,324; 7 pages. |
Office Action; dated Sep. 11, 2012; U.S. Appl. No. 12/840,324; 17 pages. |
Response filed Dec. 10, 2012; to Office Action; dated Sep. 11, 2012; U.S. Appl. No. 12/840,324; 15 pages. |
Office Action; dated Feb. 12, 2013; for U.S. Appl. No. 12/840,324; 19 pages. |
Response filed May 12, 2013; to Office Action; dated Feb. 12, 2013; for U.S. Appl. No. 12/840,324; 12 pages. |
Notice of Allowance; dated May 24, 2013; for U.S. Appl. No. 12/840,324; 12 pages. |
Corrected Notice of Allowability; dated Jul. 17, 2013; for U.S. Appl. No. 12/840,324; 7 pages. |
Corrected Notice of Allowability; dated Aug. 9, 2013; for U.S. Appl. No. 12/840,324; 6 pages. |
PCT Search Report and Written Opinion of the ISA for PCT/US2010/042694 dated Sep. 27, 2010; 16 pages. |
PCT International Preliminary Report on Patentability and Written Opinion of the ISA; dated Feb. 2, 2012; for PCT Pat. App. No. PCT/US2010/042694; 11 pages. |
EP Official Communication; dated Feb. 23, 2012; for EP. Pat. App. No. 10739429.8; 2 pages. |
European Response to Written Opinion; dated Sep. 4, 2012; for European Pat. App. No. 10739429.8; 21 pages. |
European Notice of Allowance; dated Jan. 4, 2013; for European Pat. App. No. 10 739 429.8; 5 pages. |
European Decision to Grant a European Patent; dated Sep. 5, 2013; for European Pat. App. No. 10739429.8; 2 pages. |
Letter from Yuasa and Hara; dated Aug. 6, 2013; for Japanese Pat. App. No. 2012-521746; 6 pages. |
Japanese Amendment; dated Jun. 12, 2013; for Japanese Pat. App. No. 2012-521746; 5 pages. |
Notice of Allowance dated Nov. 14, 2013 for U.S. Appl. No. 13/969,702; 12 pages. |
European Search Report; dated Jul. 4, 2013; for EP Pat. App. No. 13169661.9; 11 pages. |
Office Action dated Jun. 11, 2013; for U.S. Appl. No. 13/095,371; 31 pages. |
Notice of Allowance dated Oct. 28, 2013; for U.S. Appl. No. 13/095,971; 19 pages. |
PCT Search Report and Written Opinion of the ISA for PCT Pat. App. No. PCT/US2012/032315; dated Jun. 22, 2012; 18 pages. |
PCT International Preliminary Report on Patentability and Written Opinion of the ISA dated Nov. 7, 2013; for PCT Pat. App. No. PCT/US2012/032315; 13 pages. |
PCT Search Report and Written Opinion; dated May 27, 2013; for PCT Pat. App. No. PCT/US2013/021143; 13 pages. |
U.S. Appl. No. 17/160,573, filed Jan. 28, 2021, Steven Daubert, et al. |
U.S. Appl. No. 17/363,700, filed Jun. 30, 2021, Yannick Vuillermet, et al. |
Number | Date | Country | |
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20230333147 A1 | Oct 2023 | US |