Claims
- 1. A method of checking static field uniformity of an optical system illuminated by an illumination system comprising the steps of:
- (a) acquiring an image of a calibration and test target with the optical system wherein the image further comprises a plurality of image pixels;
- (b) determining the static field uniformity of the optical system from the image of the calibration and test target, wherein the static field uniformity is a function of spatial response of sensors in the optical system;
- (c) storing a plurality of mean intensity values, where a mean intensity value is stored for each one of the plurality of image pixels;
- (d) tabulating the plurality of mean intensity values in a histogram format to form a mean value distribution;
- (e) determining a maximum value, a minimum value and a distribution mean value for the mean value distribution;
- (f) determining a coefficient of variation for the mean value distribution; and
- (g) comparing the maximum value, minimum value, and distribution coefficient of variation against a set of predetermined specifications.
- 2. The method of claim 1 further comprising the steps of:
- (a) determining a coefficient of variation;
- (b) determining a full field maximum percent variation; and
- (c) determining a partial field maximum percent variation.
- 3. A method of checking static field uniformity of an optical system illuminated by an illumination system comprising the steps of:
- (a) acquiring an image of a calibration and test target with the optical system;
- (b) determining the static field uniformity of the optical system from the image of the calibration and test target, wherein the static field uniformity is a function of spatial response of sensors in the optical system;
- (c) determining a coefficient of variation;
- (d) determining a full field maximum percent variation; and
- (e) determining a partial field maximum percent variation.
- 4. The method of claim 3, wherein the image further comprises a plurality of image pixel values, the method further comprising the steps of:
- (a) storing a plurality of mean intensity values, where a mean intensity value is stored for each one of the plurality of image pixels;
- (b) tabulating the plurality of mean intensity values in a histogram format to form a mean value distribution;
- (c) determining a maximum value, a minimum value and a distribution mean value for the mean value distribution;
- (d) determining a coefficient of variation for the mean value distribution; and
- (e) comparing the maximum value, minimum value, and distribution coefficient of variation against a set of predetermined specifications.
- 5. A method of checking global illumination variation of an optical system illuminated by an illumination system comprising the steps of:
- (a) acquiring an image of a calibration and test target with the optical system wherein the image further comprises a plurality of image pixels; and
- (b) determining the global illumination variation over the plurality of pixels from the image.
- 6. The method of claim 5 wherein the image is of a field of view of the calibration and test target.
- 7. The method of claim 5 wherein the plurality of pixels are located in a field of view.
- 8. The method of claim 5 further comprising the steps of:
- (a) storing a plurality of mean intensity values, where a mean intensity value is stored for each one of the plurality of image pixels;
- (b) tabulating the plurality of mean intensity values in a histogram format to form a mean value distribution;
- (c) determining a maximum value, a minimum value and a distribution mean value for the mean value distribution;
- (d) determining a coefficient of variation for the mean value distribution; and
- (e) comparing the maximum value, minimum value, and distribution coefficient of variation against a set of predetermined specifications.
- 9. The method of claim 5 further comprising the steps of:
- (a) determining a coefficient of variation;
- (b) determining a full field maximum percent variation; and
- (c) determining a partial field maximum percent variation.
Parent Case Info
This application is a division of application Ser. No. 08/303,179, filed Sep. 8, 1994, now U.S. Pat. No. 5,715,326.
US Referenced Citations (23)
Divisions (1)
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Number |
Date |
Country |
Parent |
303179 |
Sep 1994 |
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