Number | Name | Date | Kind |
---|---|---|---|
5585673 | Joshi et al. | Dec 1996 | |
5821168 | Jain | Oct 1998 | |
5840625 | Feldner | Nov 1998 | |
5882399 | Ngan et al. | Mar 1999 | |
5920790 | Wetzel et al. | Jul 1999 | |
5929526 | Srinivasan et al. | Jul 1999 | |
6001736 | Kondo et al. | Dec 1999 | |
6043153 | Nogami et al. | Mar 2000 |
Entry |
---|
Stanley Wolf Ph.D. in Silicon Processing for the VLSI Era, vol. 2: Process Integration, Lattice Press, 1990.* |
Article entitled, “Polycrystalline Thin Films—Structure, Texture, Properties and Applications III”, Author: Besser et al. |
Article entitled, “Advanced Metallization and Interconnect Systems for ULSI Applications in 1996”, Author: Havemann et al. |