Claims
- 1. A spatial light modulator, comprising:
a substrate transmissive to visible light;
a micromirror support structure on said substrate; and a micromirror deflectably coupled to said substrate via said support; wherein said support structure comprises a stopping mechanism constructed for resisting deflection of said micromirror beyond a particular angle; and wherein the stopping mechanism comprises a saw-tooth projection.
- 2. A micro-electromechanical device as recited in claim 1 wherein said support structure comprises a first end and a second end that are attached to said substrate.
- 3. A micro-electromechanical device as recited in claim 2 wherein said stopping mechanism of the support structure comprises a first deflection stopper positioned near said first end and a second deflection stopper positioned near said second end.
- 4. A micro-electromechanical device as recited in claim 1 wherein said micromirror comprises a substantially rigid reflective plate.
- 5. A micro-electromechanical device as recited in claim 4 further comprising a surface or protrusion on said reflective plate for abutting against the stopping mechanism.
- 6. A micro-electromechanical device as recited in claim 1 further comprising a semiconductor substrate positioned across and spaced apart from said first surface of said substrate, said semiconductor substrate comprising electronic circuitry adapted for causing said micromirror to deflect by means of electrostatic force.
- 7. A micro-electromechanical device as recited in claim 6 wherein said semiconductor substrate comprises an additional stopping mechanism for abutting against the micromirror at a particular angle of deflection of the micromirror.
- 8. A micro-electromechanical device as recited in claim 7 wherein said support structure is composed of a laminate including a conductive layer.
- 9. A micro-electromechanical device as recited in claim 1, wherein said stopping mechanism is disposed on a side of the reflective element opposite to that of the substrate.
- 10. A micro-electromechanical device as recited in claim 1, wherein the support structure comprises a hinge and posts, the posts formed of a layer or laminate that has a total thickness greater than a total thickness of a layer or laminate that forms the hinge.
- 11. A micro-electromechanical device as recited in claim 10, wherein the stopping mechanism comprises a laminate structure of layers of varying hardness, wherein a layer having a hardness greater than another layer in the laminate is disposed so as to abut against the micromirror element upon deflection.
- 12. A micro-electromechanical device as recited in claim 10, wherein the stopping mechanism comprises a plurality of projections or protrusions formed in different layers and at different distances from the micromirror.
- 13. A micro-electromechanical device as recited in claim 12, wherein the stopping mechanism is an “F” shaped mechanism in cross section.
- 14. A spatial light modulator comprising:
a first substrate having a first surface; a deflectable element deflectably coupled to the first surface of the first substrate; a second substrate positioned across from and spaced apart from said first surface of said first substrate, said second substrate comprising electronic circuitry adapted for causing said deflectable element to deflect; and a plurality of a) a first stopping mechanism held on the first substrate for stopping movement of the deflectable element at a particular angle of deflection, b) a second stopping mechanism comprising a surface or protrusion from the deflectable element that abuts against the first substrate at a particular angle of deflection, and c) a surface or protrusion on the second substrate for stopping deflection of the deflectable element at a particular angle of deflection.
- 15. The spatial light modulator of claim 14, wherein the plurality of stopping mechanisms are constructed to stop movement of the deflectable element at different angles of deflection of the deflectable element.
- 16. The spatial light modulator of claim 14, wherein the spatial light modulator comprises the first, second and third stopping mechanisms.
- 17. The spatial light modulator of claim 14, wherein the first stopping mechanism comprises a portion or extension of the deflectable element which abuts against the first substrate during deflection of the deflectable element.
- 18. The spatial light modulator of claim 17, wherein the second stopping mechanism comprises support structure connected to the first substrate which is disposed on a side of the deflectable element opposite to the side on which the first substrate is disposed, the deflectable element adapted to abut against the support structure when the deflectable element is deflected.
- 19. The spatial light modulator of claim 14, further comprising a hinge that extends along a side of the deflectable element opposite to the first substrate.
- 20. The spatial light modulator of claim 19, wherein the second stopping mechanism comprises a portion of the hinge, the hinge portion constructed so as to abut against the deflectable element when the deflectable element is deflected.
- 21. The spatial light modulator of claim 14, wherein a gap is disposed between the first substrate and the deflectable element, and a second gap is disposed between the deflectable element and the second stopping mechanisms.
- 22. The spatial light modulator of claim 19, wherein the hinge comprises a flexible portion, the flexible portion being hidden from view by the deflectable element when viewed via the first substrate.
- 23. The spatial light modulator of claim 14, wherein the plurality of stopping mechanisms is the second and third stopping mechanisms.
- 24. The spatial light modulator of claim 14, wherein the deflectable element is held on a bottom surface of the first substrate, and wherein the deflectable element has first and second portions such that during deflection of the deflectable element, the second portion moves towards the bottom surface as the first portion moves away from the bottom surface.
- 25. The spatial light modulator of claim 19, wherein the hinge extends across the deflectable element between the second substrate and the deflectable element and connects to the deflectable element towards a center part of the deflectable element.
- 26. The spatial light modulator of claim 14, wherein one of the primary and second stopping mechanisms comprises a post or wall connected at one end to the first substrate and having a second end with a protrusion which is adapted to abut against the deflectable element when the deflectable element pivots up to a predetermined angle.
- 27. The spatial light modulator of claim 14, wherein the second stopping mechanism is constructed to avoid abutment against the deflectable element unless the primary stopping mechanism fails.
- 28. The spatial light modulator of claim 14, further comprising a hinge which is disposed on a side of the deflectable element opposite to that of the first substrate, the hinge having an end portion which comprises at least part of one of the primary and second stopping mechanisms.
- 29. The spatial light modulator of claim 19, wherein a gap is disposed between the hinge and the deflectable element, and said gap being disposed between one of the primary and second stopping mechanisms and the deflectable element.
- 30. The spatial light modulator of claim 19, wherein the hinge is connected to the first substrate via the second stopping mechanism.
- 31. The spatial light modulator of claim 14, wherein the deflectable element is part of an array of deflectable elements held on the first substrate.
- 32. The spatial light modulator of claim 14, wherein the plurality of stopping mechanisms is the first and third stopping mechanisms.
- 33. The spatial light modulator of claim 14, wherein there are at least 1024×768 micromirrors in the spatial light modulator.
- 34. The spatial light modulator of claim 14, wherein the first substrate is an optically transmissive substrate.
- 35. The spatial light modulator of claim 14, the plurality of stopping mechanisms is the first and second stopping mechanisms.
- 36. The spatial light modulator of claim 14, wherein the first substrate is an optically transmissive substrate and the deflectable element is a reflective mirror element positioned to reflect light incoming through the optically transmissive substrate.
- 37. A spatial light modulator, comprising:
a first substrate; a deflectable element having a landing pad and that is held on the first substrate via a hinge and stop assembly, the hinge connected to the deflectable element so as to allow the deflectable element to pivot around an axis, and the stop positioned to arrest the pivoting of the deflectable element by abutting against the landing pad on the deflectable element.
- 38. The spatial light modulator of claim 37, further comprising a second substrate positioned on a side of the deflectable element opposite to that of the first substrate.
- 39. The spatial light modulator of claim 37, wherein the landing pad is formed of a material that has a higher hardness than the material of the rest of the deflectable element.
- 40. The spatial light modulator of claim 38, wherein the first substrate is an optically transmissive substrate, the deflectable element is a reflective element, and the second substrate comprises addressing circuitry.
- 41. The spatial light modulator of claim 37, wherein the hinge and stop assembly comprises a post connecting to the first substrate, the deflectable element constructed to abut against a portion of the hinge and/or post when deflected.
- 42. The spatial light modulator of claim 39, wherein the landing pad is formed of a transition metal from columns 4B, 5B or 6B of the periodic table, or alloys or compounds thereof.
- 43. The spatial light modulator of claim 37, wherein the deflectable element is held on a bottom surface of the first substrate, and wherein the deflectable element has first and second portions such that during deflection of the deflectable element, the second portion moves towards the bottom surface as the first portion moves away from the bottom surface.
- 44. The spatial light modulator of claim 43, wherein part of said first portion abuts against an area of the hinge and stop assembly.
- 45. The spatial light modulator of claim 44, wherein part of said second portion abuts against an area of the first substrate.
- 46. The spatial light modulator of claim 42, wherein the landing pad comprises titanium nitride, titanium oxide, titanium oxynitride, titanium carbide, tungsten, tungsten carbide, silicon nitride, silicon oxynitride, silicon carbide or silicon oxide.
- 47. The spatial light modulator of claim 46, wherein the landing pad comprises a metal alloy of two or more of titanium, tungsten, aluminum and copper.
- 48. A spatial light modulator comprising:
a first substrate that is transmissive to visible light; a deflectable element pivotably held on the first substrate via a hinge; a stopping mechanism constructed such that when the deflectable element pivots, a portion of the deflectable element abuts against the stopping mechanism so as to stop the movement of the deflectable element; wherein at least one of the deflectable element, hinge and stopping mechanism is formed of a laminate of three or more layers.
- 49. The spatial light modulator of claim 48, wherein an interior layer of the laminate is a ceramic layer with metal, metal alloy or metal compound layers being disposed within the laminate on opposite sides of the ceramic interior layer.
- 50. The spatial light modulator of claim 48, wherein the first substrate is glass, quartz or sapphire.
- 51. The spatial light modulator of claim 48, wherein the deflectable element is formed as the laminate of three or more layers.
- 52. The spatial light modulator of claim 48, wherein the deflectable element comprises first and second portions such that when the deflectable element pivots, the second portion moves towards the first substrate as the first portion moves away from the first substrate.
- 53. The spatial light modulator of claim 48, wherein an interior layer of the laminate is a metal, metal alloy or metal compound layer with layers on opposite sides of the interior layer comprising an insulating ceramic compound.
- 54. The spatial light modulator of claim 53, wherein the second portion is constructed so as to be capable of abutting against the first substrate.
- 55. The spatial light modulator of claim 48, wherein the hinge is formed as the laminate of three or more layers.
- 56. The spatial light modulator of claim 48, wherein the hinge connects to the post or wall that comprises the stopping mechanism.
- 57. The spatial light modulator of claim 55, wherein the stopping mechanism is formed as the laminate of three or more layers.
- 58. The spatial light modulator of claim 48, further comprising a second substrate made of a semiconductor with addressing circuitry and an electrode for electrostatically attracting the deflectable element.
- 59. A spatial light modulator comprising in cross section:
an optically transmissive substrate; a first gap disposed below the optically transmissive substrate; a pivotable mirror disposed below the first gap via a hinge; a second gap disposed below the mirror; and a deflection stopper disposed below the second gap; wherein the deflection stopper has a total thickness and rigidity greater than a total thickness and rigidity of the hinge.
- 60. The spatial light modulator of claim 59, further comprising a connector that connects the pivotable mirror with the optically transmissive substrate.
- 61. The spatial light modulator of claim 60, wherein said connector comprises said deflection stopper.
- 62. The spatial light modulator of claim 59, wherein at least one of said deflection stopper and hinge is formed of a laminate structure.
- 63. The spatial light modulator of claim 59, wherein the deflection stopper is part of a hinge and post assembly for pivotably holding the mirror to the optically transmissive substrate.
- 64. The spatial light modulator of claim 59, further comprising a hinge and post assembly spaced apart from the deflection stopper with the hinge disposed below the second gap.
- 65. The spatial light modulator of claim 59, further comprising a third gap below the deflection stopper and a second deflection stopper disposed below the third gap.
- 66. The spatial light modulator of claim 59, further comprising a fourth gap below the second deflection stopper and a second substrate comprises addressing circuitry and an electrode for electrostatically causing the mirror to pivot being disposed below the fourth gap.
- 67. The spatial light modulator of claim 59, wherein the deflection stopper comprises a protrusion that extends below the second gap and a wall or post which connects to the optically transmissive substrate.
- 68. A micromirror device fabrication process comprising:
(a) depositing a first spacer layer on an optically transmissive substrate; (b) depositing a reflective layer or laminate on said first spacer layer; (c) pattern-etching said reflective layer or laminate to define a reflective element; (d) depositing a second spacer layer on said first spacer layer and said reflective element; (e) etching a portion of said second spacer layer down towards said reflective element; (f) etching through a portion of both said first spacer layer and said second spacer layer down towards the optically transmissive substrate; (g) depositing a hinge layer or laminate and patterning the same to form a hinge and depositing a support structure layer or laminate and patterning the same to form a support structure; (h) removing the first and second spacer layers so that the reflective element is pivotably held on the optically transmissive substrate via the hinge and support structure; and (i) wherein the hinge layer or laminate and the support structure layer or laminate are deposited as different steps within the method and of different materials and or material thicknesses.
- 69. A micromirror device fabrication process as recited in claim 68, wherein part of the support structure is formed to connect the hinge to the optically transmissive substrate.
- 70. A micromirror device fabrication process as recited in claim 69, wherein another part of the support structure is formed to connect the hinge to the reflective element.
- 71. A micromirror device fabrication process as recited in claim 68, further comprising steps of:
forming addressing circuitry and electrodes on a semiconductor substrate; and aligning and joining said optically transmissive substrate and said semiconductor substrate.
- 72. A micromirror device fabrication process as recited in claim 70, wherein the hinge is formed to extend between said part and said another part of the support structure.
- 73. A micromirror device fabrication process as recited in claim 68, wherein said support structure defines posts for holding the reflective element on the optically transmissive substrate, and a rigid beam extending between the posts.
- 74. A micromirror device fabrication process as recited in claim 73, wherein the hinge extends parallel to support structure beam.
- 75. A micromirror device fabrication process as recited in claim 74, wherein both the support structure beam and the hinge provide electrical connectivity between adjacent reflective elements.
- 76. A micromirror device fabrication process as recited in claim 68, wherein the support structure and/or hinge are laminates of two or more layers.
- 77. A micromirror device fabrication process as recited in claim 76, wherein the support structure and/or hinge are laminates of three or more layers.
- 78. A micromirror device fabrication process as recited in claim 68 where said support structure and/or hinge are laminates comprising a layer of titanium, an alloy of titanium, or a titanium compound.
- 79. A micromirror device fabrication process as recited in claim 78, wherein the support structure is a laminate comprising three or more layers, and wherein an interior layer is formed of an insulating material.
- 80. A micromirror device fabrication process as recited in claim 79, wherein the support structure laminate further comprises one or more layers comprising a transition metal selected from columns 4B, 5B or 6B or the periodic table, or said transition metal in the form of a metal alloy or metal compound.
RELATED CASES
[0001] This application is a continuation-in-part of U.S. patent application Ser. No. 09/637,479 to Huibers et al. filed Aug. 11, 2000, the subject matter of which is also incorporated herein by reference. This application is also related to U.S. Pat. Nos. 5,835,256 to Huibers, 6,046,840 to Huibers, 6,290,864 to Patel et al. and 6,388,661 to Richards, the subject matter of each being incorporated herein by reference.
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
09637479 |
Aug 2000 |
US |
Child |
10155744 |
May 2002 |
US |