the reflecting element being moved or deformed by electrostatic means

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G02B26/0841

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GPHYSICS G02Optics G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light

Current Industry

G02B26/0841the reflecting element being moved or deformed by electrostatic means

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Active acoustic ripple cancellation for MEMS mirrors
- Patent number 12,223,941
- Issue date Feb 11, 2025
- Google LLC
- Sangtak Park
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Grant
Method for preparing a MEMS micro mirror with electrodes on both sides
- Patent number 12,209,014
- Issue date Jan 28, 2025
- Anhui China Science MW Electronic Technology Co., Ltd.
- Wei Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic comb drive-based silicon-based MEMS optical switch an...
- Patent number 12,196,948
- Issue date Jan 14, 2025
- Zhejiang University
- Daoxin Dai
- G02 - OPTICS
Information Patent Grant
Optical device production method
- Patent number 12,189,114
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device and method for manufacturing same
- Patent number 12,180,063
- Issue date Dec 31, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reflective two-dimensional spatial light modulators
- Patent number 12,181,657
- Issue date Dec 31, 2024
- Silicon Light Machines Corporation
- Alexander Payne
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High contrast grating for highly reflective mems surface for LiDAR
- Patent number 12,174,316
- Issue date Dec 24, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Yue Lu
- G01 - MEASURING TESTING
Information Patent Grant
Compact line scan MEMS time of flight system with actuated lens
- Patent number 12,164,103
- Issue date Dec 10, 2024
- STMicroelectronics (Research &Develoment) Limited
- Christopher Townsend
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Disturbance rejection for laser beam scanning display
- Patent number 12,158,575
- Issue date Dec 3, 2024
- Microsoft Technology Licensing, LLC
- Wenjun Liao
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Mirror unit and optical module
- Patent number 12,152,878
- Issue date Nov 26, 2024
- Hamamatsu Photonics K.K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure, micromechanical system and method of pro...
- Patent number 12,151,935
- Issue date Nov 26, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vision-control system for near-eye display
- Patent number 12,140,762
- Issue date Nov 12, 2024
- Microsoft Technology Licensing, LLC
- Gabriele D'Amone
- G02 - OPTICS
Information Patent Grant
Thermal control of MEMS mirrors to limit resonant frequency shift
- Patent number 12,140,752
- Issue date Nov 12, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fringing-field, parallel plate actuator
- Patent number 12,140,751
- Issue date Nov 12, 2024
- Texas Instruments Incorporated
- Adam Joseph Fruehling
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Optical device having fixed and movable comb electrodes
- Patent number 12,136,893
- Issue date Nov 5, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Systems and apparatus for micromirror designs with electrode contact
- Patent number 12,130,425
- Issue date Oct 29, 2024
- Texas Instruments Incorporated
- William Craig McDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Controlling one or more electrostatic comb structures of a micro-el...
- Patent number 12,116,267
- Issue date Oct 15, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Detector with deflecting elements for coherent imaging
- Patent number 12,117,622
- Issue date Oct 15, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Laurent Frey
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for encoding multi-level pulse amplitude modulate...
- Patent number 12,113,577
- Issue date Oct 8, 2024
- Cisco Technology, Inc.
- Daniel Kucharski
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method of manufacturing an integrated component with improved spati...
- Patent number 12,113,140
- Issue date Oct 8, 2024
- STMicroelectronics S.r.l.
- Luca Seghizzi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS display device with a vertical hinge
- Patent number 12,077,427
- Issue date Sep 3, 2024
- IGNITE, Inc.
- Fusao Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical scanning device and method for manufacturing same
- Patent number 12,078,797
- Issue date Sep 3, 2024
- Mitsubishi Electric Corporation
- Yoshitaka Kajiyama
- G02 - OPTICS
Information Patent Grant
Capacitive angle sensing of electrostatic MEMS mirrors
- Patent number 12,072,485
- Issue date Aug 27, 2024
- Google LLC
- Sangtak Park
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method of providing the same
- Patent number 12,071,338
- Issue date Aug 27, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS mirror for OCT probe and method of manufacturing such MEMS mirror
- Patent number 12,066,620
- Issue date Aug 20, 2024
- Scinvivo B.V.
- Hendrikus Wilhelmus Leonardus Antonius Maria Van Lierop
- G01 - MEASURING TESTING
Information Patent Grant
Aperiodic mirror array for suppressed side lobe intensity
- Patent number 12,061,288
- Issue date Aug 13, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Yue Lu
- G02 - OPTICS
Information Patent Grant
Method for controlling a drive apparatus of a micro-oscillation mir...
- Patent number 12,055,705
- Issue date Aug 6, 2024
- Valeo Schalter und Sensoren GmbH
- Jochen Schenk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS comprising a movable structural element, and MEMS array
- Patent number 12,054,384
- Issue date Aug 6, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically driven comb structure of MEMS, micro-mirror using...
- Patent number 12,054,387
- Issue date Aug 6, 2024
- Tao Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Power optimized driving signal switching scheme for oscillating MEM...
- Patent number 12,044,841
- Issue date Jul 23, 2024
- Infineon Technologies AG
- Norbert Druml
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
MIRROR UNIT AND OPTICAL MODULE
- Publication number 20250044074
- Publication date Feb 6, 2025
- HAMAMATSU PHOTONICS K. K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FRINGING-FIELD, PARALLEL PLATE ACTUATOR
- Publication number 20250035919
- Publication date Jan 30, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Adam Joseph FRUEHLING
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Immersive Optical Projection System
- Publication number 20250013140
- Publication date Jan 9, 2025
- Passenger Inc.
- Ronald S. Maynard
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR ENCODING MULTI-LEVEL PULSE AMPLITUDE MODULATE...
- Publication number 20240430012
- Publication date Dec 26, 2024
- Cisco Technology, Inc.
- Daniel KUCHARSKI
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
MEMS Based Spatial Light Modulators and Applications
- Publication number 20240369824
- Publication date Nov 7, 2024
- SILICON LIGHT MACHINES CORPORATION
- Stephen Hamann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR DEVICE
- Publication number 20240319492
- Publication date Sep 26, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYNCHRONIZATION OF MICROELECTROMECHANICAL SYSTEM (MEMS) MIRRORS
- Publication number 20240302647
- Publication date Sep 12, 2024
- INFINEON TECHNOLOGIES AG
- Norbert DRUML
- G01 - MEASURING TESTING
Information Patent Application
MEMS DEVICE WITH ELLIPTICAL MIRROR
- Publication number 20240295742
- Publication date Sep 5, 2024
- Google LLC
- Daniel Adema
- G02 - OPTICS
Information Patent Application
SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY
- Publication number 20240295728
- Publication date Sep 5, 2024
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...
- Publication number 20240270568
- Publication date Aug 15, 2024
- XI'AN CHISHINE OPTOELECTRONICS TECHNOLOGY CO., LTD
- Tao YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VISION-CONTROL SYSTEM FOR NEAR-EYE DISPLAY
- Publication number 20240241379
- Publication date Jul 18, 2024
- Microsoft Technology Licensing, LLC
- Gabriele D'AMONE
- G02 - OPTICS
Information Patent Application
MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPEN...
- Publication number 20240231078
- Publication date Jul 11, 2024
- TEXAS INSTRUMENTS INCORPORATED
- William McDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20240192483
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...
- Publication number 20240158223
- Publication date May 16, 2024
- Government of the United States, as represented by the Secretary of the Air F...
- John PK Walton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MIRROR UNIT AND OPTICAL MODULE
- Publication number 20240110779
- Publication date Apr 4, 2024
- HAMAMATSU PHOTONICS K. K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS
- Publication number 20240111148
- Publication date Apr 4, 2024
- Preciseley Microtechnology Corp.
- Tiansheng ZHOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Operating an Optical Component, and Optical Component
- Publication number 20240085799
- Publication date Mar 14, 2024
- ROBERT BOSCH GmbH
- Ralf Noltemeyer
- G02 - OPTICS
Information Patent Application
MEMS-BASED MODULATION AND BEAM CONTROL SYSTEMS AND METHODS
- Publication number 20240053602
- Publication date Feb 15, 2024
- Teledyne Micralyne Inc.
- Glen Fitzpatrick
- G01 - MEASURING TESTING
Information Patent Application
MOVABLE DEVICE, PROJECTION APPARATUS, HEAD-UP DISPLAY, LASER HEADLA...
- Publication number 20240027746
- Publication date Jan 25, 2024
- RICOH COMPANY, LTD.
- Mizuki Shinkawa
- G02 - OPTICS
Information Patent Application
ELECTROSTATIC MEMS MICROMIRROR
- Publication number 20240019687
- Publication date Jan 18, 2024
- Huawei Technologies Co., Ltd
- Xiaoshi Dong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEFLECTION DEVICE WITH A MIRROR FOR USE IN SCANNER TECHNICAL FIELD
- Publication number 20230359022
- Publication date Nov 9, 2023
- Huawei Technologies Co., Ltd
- Frank Senger
- G02 - OPTICS
Information Patent Application
MIRROR DEVICE
- Publication number 20230324673
- Publication date Oct 12, 2023
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM-LEVEL SYNCHRONIZATION OF MICROELECTROMECHANICAL SYSTEM (MEMS...
- Publication number 20230314790
- Publication date Oct 5, 2023
- INFINEON TECHNOLOGIES AG
- Norbert DRUML
- G02 - OPTICS
Information Patent Application
SCANNER LASER OPTICS FOR LIDAR
- Publication number 20230314791
- Publication date Oct 5, 2023
- STMicroelectronics International N.V.
- Nenad NESTOROVIC
- G02 - OPTICS
Information Patent Application
ACTIVE ACOUSTIC RIPPLE CANCELLATION FOR MEMS MIRRORS
- Publication number 20230296879
- Publication date Sep 21, 2023
- Google LLC
- Sangtak Park
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Application
DISTURBANCE REJECTION FOR LASER BEAM SCANNING DISPLAY
- Publication number 20230288694
- Publication date Sep 14, 2023
- Microsoft Technology Licensing, LLC
- Wenjun Liao
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
OPTICAL DEVICE
- Publication number 20230221106
- Publication date Jul 13, 2023
- HAMAMATSU PHOTONICS K. K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-MIRROR DEVICE, LIDAR DEVICE AND VEHICLE COMPRISING A LIDAR DEVICE
- Publication number 20230221544
- Publication date Jul 13, 2023
- VLC Holding B.V.
- Hendrikus Wilhelmus Leonardus Antonius Maria VAN LIEROP
- G02 - OPTICS
Information Patent Application
MEMS CHIP, MANUFACTURING METHOD THEREOF, MEMS DEVICE, AND ELECTRONI...
- Publication number 20230174370
- Publication date Jun 8, 2023
- Huawei Technologies Co., Ltd
- Fengpei SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SPATIAL FILTERING FOR SCANNING LIDAR WITH MICRO SHUTTER ARRAY
- Publication number 20230176199
- Publication date Jun 8, 2023
- Beijing Voyager Technology Co., Ltd.
- Yue Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

the reflecting element being moved or deformed by electrostatic means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Active acoustic ripple cancellation for MEMS mirrors

Method for preparing a MEMS micro mirror with electrodes on both sides

Electrostatic comb drive-based silicon-based MEMS optical switch an...

Optical device production method

Optical device and method for manufacturing same

Reflective two-dimensional spatial light modulators

High contrast grating for highly reflective mems surface for LiDAR

Compact line scan MEMS time of flight system with actuated lens

Disturbance rejection for laser beam scanning display

Mirror unit and optical module

Micromechanical structure, micromechanical system and method of pro...

Vision-control system for near-eye display

Thermal control of MEMS mirrors to limit resonant frequency shift

Fringing-field, parallel plate actuator

Optical device having fixed and movable comb electrodes

Systems and apparatus for micromirror designs with electrode contact

Controlling one or more electrostatic comb structures of a micro-el...

Detector with deflecting elements for coherent imaging

Method and system for encoding multi-level pulse amplitude modulate...

Method of manufacturing an integrated component with improved spati...

MEMS display device with a vertical hinge

Optical scanning device and method for manufacturing same

Capacitive angle sensing of electrostatic MEMS mirrors

Micromechanical structure and method of providing the same

MEMS mirror for OCT probe and method of manufacturing such MEMS mirror

Aperiodic mirror array for suppressed side lobe intensity

Method for controlling a drive apparatus of a micro-oscillation mir...

MEMS comprising a movable structural element, and MEMS array

Electrostatically driven comb structure of MEMS, micro-mirror using...

Power optimized driving signal switching scheme for oscillating MEM...

Patents Applicationslast 30 patents

MIRROR UNIT AND OPTICAL MODULE

FRINGING-FIELD, PARALLEL PLATE ACTUATOR

Immersive Optical Projection System

METHOD AND SYSTEM FOR ENCODING MULTI-LEVEL PULSE AMPLITUDE MODULATE...

MEMS Based Spatial Light Modulators and Applications

MIRROR DEVICE

SYNCHRONIZATION OF MICROELECTROMECHANICAL SYSTEM (MEMS) MIRRORS

MEMS DEVICE WITH ELLIPTICAL MIRROR

SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY

ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...

VISION-CONTROL SYSTEM FOR NEAR-EYE DISPLAY

MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPEN...

OPTICAL DEVICE PRODUCTION METHOD

Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...

MIRROR UNIT AND OPTICAL MODULE

MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS

Method for Operating an Optical Component, and Optical Component

MEMS-BASED MODULATION AND BEAM CONTROL SYSTEMS AND METHODS

MOVABLE DEVICE, PROJECTION APPARATUS, HEAD-UP DISPLAY, LASER HEADLA...

ELECTROSTATIC MEMS MICROMIRROR

DEFLECTION DEVICE WITH A MIRROR FOR USE IN SCANNER TECHNICAL FIELD

MIRROR DEVICE

SYSTEM-LEVEL SYNCHRONIZATION OF MICROELECTROMECHANICAL SYSTEM (MEMS...

SCANNER LASER OPTICS FOR LIDAR

ACTIVE ACOUSTIC RIPPLE CANCELLATION FOR MEMS MIRRORS

DISTURBANCE REJECTION FOR LASER BEAM SCANNING DISPLAY

OPTICAL DEVICE

MEMS-MIRROR DEVICE, LIDAR DEVICE AND VEHICLE COMPRISING A LIDAR DEVICE

MEMS CHIP, MANUFACTURING METHOD THEREOF, MEMS DEVICE, AND ELECTRONI...

SPATIAL FILTERING FOR SCANNING LIDAR WITH MICRO SHUTTER ARRAY