The instant application is related to U.S. patent application Ser. No. 09/437,586 now U.S. Pat. No. 6,172,797, filed on Nov. 9, 1999, entitled “A Double Substrate Reflective Spatial Light Modulator with Self-Limiting Micro-Mechanical Elements,” by Huibers , and is related to U.S. patent application Ser. No. 09/160,361 filed on Sep. 24, 1998, now U.S. Pat. No. 6,046,840 of the same title, the subject matter of each being incorporated herein by reference. This application is also related to provisional application 60/178,903, filed Jan. 28, 2000, entitled “Structure and Process for Spatial Light Modulator: Designs Using Two Sacrificial Layers,” by Huibers, the subject matter of which is also incorporated herein by reference.
Number | Name | Date | Kind |
---|---|---|---|
3553364 | Lee | Jan 1971 | A |
3600798 | Lee | Aug 1971 | A |
3746911 | Nathanson et al. | Jul 1973 | A |
4229732 | Hartstein et al. | Oct 1980 | A |
4317611 | Petersen | Mar 1982 | A |
4383255 | Grandjean et al. | May 1983 | A |
4492435 | Banton et al. | Jan 1985 | A |
4566935 | Hornbeck | Jan 1986 | A |
4571603 | Hornbeck et al. | Feb 1986 | A |
4596992 | Hornbeck | Jun 1986 | A |
4662746 | Hornbeck | May 1987 | A |
4710732 | Hornbeck | Dec 1987 | A |
4954789 | Sampsell | Sep 1990 | A |
5078479 | Vuilleumier | Jan 1992 | A |
5216537 | Hornbeck | Jun 1993 | A |
5311360 | Bloom et al. | May 1994 | A |
5392151 | Nelson | Feb 1995 | A |
5535047 | Hornbeck | Jul 1996 | A |
5552925 | Worley | Sep 1996 | A |
5579149 | Moret et al. | Nov 1996 | A |
5615029 | Moddel et al. | Mar 1997 | A |
5768009 | Little | Jun 1998 | A |
5784190 | Worley | Jul 1998 | A |
5793519 | Furlani et al. | Aug 1998 | A |
5808780 | McDonald | Sep 1998 | A |
5835256 | Huibers | Nov 1998 | A |
6025951 | Swart et al. | Feb 2000 | A |
6038056 | Florence | Mar 2000 | A |
6046840 | Huibers | Apr 2000 | A |
6072617 | Henck | Jun 2000 | A |
6075512 | Patel et al. | Jun 2000 | A |
6099132 | Kaeriyama | Aug 2000 | A |
6147790 | Meier et al. | Nov 2000 | A |
Entry |
---|
Jaecklin, “Line-Addressable Torsional Micromirrors for Light Modulator Arrays”, Sensor and Actuators A, 41-42, Elsevier Science, pp. 324-329, 1994. |
Gerhard-Multhaupt et al., “Light-Valve Projection Displays—An Introduction”, Displays, vol. 16, No. 1, 1995, Elsevier Science B.V., pp. 5-7. |
Gerhard-Multhaupt, “Light-Valve Technologies for High-Definition Television Projection Displays”, Displays, 1991, vol. 12, No. 3/4, pp. 115-128. |
Peterson, K.E., “Micromechanical Light Modulator Array Fabricated on Silicon”, Applied Physics Letters, American Institute of Physics, vol. 31 No. 8, Oct. 15, 1977, pp. 521-523. |
Cadman et al., “New Micromechanical Display Using Metallic Thin Films”, IEEE Electron Device Letters, Jan. 1983, vol. EDL-4 No. 1, pp. 3-4. |
Thomas et al., “The Mirror Matrix Tube: A Novel Light Valve for Projection Displays”, IEEE Transactions on Electron Devices, vol. Ed-22 No. 9, Sep. 1975, pp. 765-775. |
Hornbeck, “Digital Light Processing (TM) for High-Brightness, High Resolution Applications”, Texas Instruments, Inc., date unknown, pp. 1-14. |
Yoder, “The Digital Display Technology of the Future”, Texas Instruments, Inc., date unknown, pp. 1-11. |
Peterson, “Silicon Torsional Scanning Mirror”, IBM J. Res. Develop., vol. 24 No. 5, Sep. 1980 pp. 631-637. |
Number | Date | Country | |
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60/178903 | Jan 2000 | US |